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JPS5154770A - KISOSEICHOHO - Google Patents

KISOSEICHOHO

Info

Publication number
JPS5154770A
JPS5154770A JP12859374A JP12859374A JPS5154770A JP S5154770 A JPS5154770 A JP S5154770A JP 12859374 A JP12859374 A JP 12859374A JP 12859374 A JP12859374 A JP 12859374A JP S5154770 A JPS5154770 A JP S5154770A
Authority
JP
Japan
Prior art keywords
kisoseichoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12859374A
Other languages
Japanese (ja)
Inventor
Hiroo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12859374A priority Critical patent/JPS5154770A/en
Publication of JPS5154770A publication Critical patent/JPS5154770A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12859374A 1974-11-08 1974-11-08 KISOSEICHOHO Pending JPS5154770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12859374A JPS5154770A (en) 1974-11-08 1974-11-08 KISOSEICHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12859374A JPS5154770A (en) 1974-11-08 1974-11-08 KISOSEICHOHO

Publications (1)

Publication Number Publication Date
JPS5154770A true JPS5154770A (en) 1976-05-14

Family

ID=14988585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12859374A Pending JPS5154770A (en) 1974-11-08 1974-11-08 KISOSEICHOHO

Country Status (1)

Country Link
JP (1) JPS5154770A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791526A (en) * 1980-11-28 1982-06-07 Fujitsu Ltd Heating method for substrate surface in vacuum container
JPS57202739A (en) * 1981-06-05 1982-12-11 Mitsubishi Electric Corp Manufacture of semiconductor device
US4371587A (en) * 1979-12-17 1983-02-01 Hughes Aircraft Company Low temperature process for depositing oxide layers by photochemical vapor deposition
JPS59216630A (en) * 1983-05-24 1984-12-06 Semiconductor Energy Lab Co Ltd Optical cvd apparatus
US4623426A (en) * 1982-06-22 1986-11-18 Hughes Aircraft Company Low temperature process for depositing epitaxial layers

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371587A (en) * 1979-12-17 1983-02-01 Hughes Aircraft Company Low temperature process for depositing oxide layers by photochemical vapor deposition
JPS5791526A (en) * 1980-11-28 1982-06-07 Fujitsu Ltd Heating method for substrate surface in vacuum container
JPS57202739A (en) * 1981-06-05 1982-12-11 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS6326540B2 (en) * 1981-06-05 1988-05-30 Mitsubishi Electric Corp
US4623426A (en) * 1982-06-22 1986-11-18 Hughes Aircraft Company Low temperature process for depositing epitaxial layers
JPS59216630A (en) * 1983-05-24 1984-12-06 Semiconductor Energy Lab Co Ltd Optical cvd apparatus

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