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JPS5153485A - mis gatadenkaikokahandotaisochino seizoho - Google Patents

mis gatadenkaikokahandotaisochino seizoho

Info

Publication number
JPS5153485A
JPS5153485A JP12718774A JP12718774A JPS5153485A JP S5153485 A JPS5153485 A JP S5153485A JP 12718774 A JP12718774 A JP 12718774A JP 12718774 A JP12718774 A JP 12718774A JP S5153485 A JPS5153485 A JP S5153485A
Authority
JP
Japan
Prior art keywords
gatadenkaikokahandotaisochino
seizoho
mis
mis gatadenkaikokahandotaisochino
gatadenkaikokahandotaisochino seizoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12718774A
Other languages
Japanese (ja)
Inventor
Yoshimichi Hirobe
Yasunobu Kosa
Koji Kawagoe
Masahiro Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12718774A priority Critical patent/JPS5153485A/en
Publication of JPS5153485A publication Critical patent/JPS5153485A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
JP12718774A 1974-11-06 1974-11-06 mis gatadenkaikokahandotaisochino seizoho Pending JPS5153485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12718774A JPS5153485A (en) 1974-11-06 1974-11-06 mis gatadenkaikokahandotaisochino seizoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12718774A JPS5153485A (en) 1974-11-06 1974-11-06 mis gatadenkaikokahandotaisochino seizoho

Publications (1)

Publication Number Publication Date
JPS5153485A true JPS5153485A (en) 1976-05-11

Family

ID=14953822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12718774A Pending JPS5153485A (en) 1974-11-06 1974-11-06 mis gatadenkaikokahandotaisochino seizoho

Country Status (1)

Country Link
JP (1) JPS5153485A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148983A (en) * 1977-06-01 1978-12-26 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5651870A (en) * 1979-10-05 1981-05-09 Oki Electric Ind Co Ltd Manufacture of complementary type mos semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887783A (en) * 1972-02-18 1973-11-17
JPS499594A (en) * 1972-03-30 1974-01-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887783A (en) * 1972-02-18 1973-11-17
JPS499594A (en) * 1972-03-30 1974-01-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148983A (en) * 1977-06-01 1978-12-26 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5651870A (en) * 1979-10-05 1981-05-09 Oki Electric Ind Co Ltd Manufacture of complementary type mos semiconductor device

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