JPS5146906B2 - - Google Patents
Info
- Publication number
- JPS5146906B2 JPS5146906B2 JP8087971A JP8087971A JPS5146906B2 JP S5146906 B2 JPS5146906 B2 JP S5146906B2 JP 8087971 A JP8087971 A JP 8087971A JP 8087971 A JP8087971 A JP 8087971A JP S5146906 B2 JPS5146906 B2 JP S5146906B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8087971A JPS5146906B2 (de) | 1971-10-15 | 1971-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8087971A JPS5146906B2 (de) | 1971-10-15 | 1971-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4845868A JPS4845868A (de) | 1973-06-30 |
| JPS5146906B2 true JPS5146906B2 (de) | 1976-12-11 |
Family
ID=13730611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8087971A Expired JPS5146906B2 (de) | 1971-10-15 | 1971-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146906B2 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3849136A (en) * | 1973-07-31 | 1974-11-19 | Ibm | Masking of deposited thin films by use of a masking layer photoresist composite |
| JPS5186972A (ja) * | 1975-01-29 | 1976-07-30 | Mitsubishi Electric Corp | Handotaisochinoseizohoho |
| JPS5669835A (en) * | 1979-11-09 | 1981-06-11 | Japan Electronic Ind Dev Assoc<Jeida> | Method for forming thin film pattern |
| JPS5687326A (en) * | 1979-12-17 | 1981-07-15 | Sony Corp | Method of forming wiring |
| JPS58170035A (ja) * | 1982-03-31 | 1983-10-06 | Fujitsu Ltd | 半導体装置の製造方法 |
-
1971
- 1971-10-15 JP JP8087971A patent/JPS5146906B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4845868A (de) | 1973-06-30 |