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JPS5142097A - Bifunmatsujoshirikano seizohoho - Google Patents

Bifunmatsujoshirikano seizohoho

Info

Publication number
JPS5142097A
JPS5142097A JP11642274A JP11642274A JPS5142097A JP S5142097 A JPS5142097 A JP S5142097A JP 11642274 A JP11642274 A JP 11642274A JP 11642274 A JP11642274 A JP 11642274A JP S5142097 A JPS5142097 A JP S5142097A
Authority
JP
Japan
Prior art keywords
bifunmatsujoshirikano
seizohoho
bifunmatsujoshirikano seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11642274A
Other languages
English (en)
Inventor
Minoru Takamizawa
Haruo Okamoto
Mitsuo Umemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP11642274A priority Critical patent/JPS5142097A/ja
Publication of JPS5142097A publication Critical patent/JPS5142097A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP11642274A 1974-10-09 1974-10-09 Bifunmatsujoshirikano seizohoho Pending JPS5142097A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11642274A JPS5142097A (ja) 1974-10-09 1974-10-09 Bifunmatsujoshirikano seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11642274A JPS5142097A (ja) 1974-10-09 1974-10-09 Bifunmatsujoshirikano seizohoho

Publications (1)

Publication Number Publication Date
JPS5142097A true JPS5142097A (ja) 1976-04-09

Family

ID=14686681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11642274A Pending JPS5142097A (ja) 1974-10-09 1974-10-09 Bifunmatsujoshirikano seizohoho

Country Status (1)

Country Link
JP (1) JPS5142097A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028566A (en) * 1987-04-10 1991-07-02 Air Products And Chemicals, Inc. Method of forming silicon dioxide glass films
US5904952A (en) * 1987-07-15 1999-05-18 The Boc Group, Inc. Method of plasma enhanced silicon oxide deposition

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117838A (en) * 1957-08-02 1964-01-14 Int Standard Electric Corp Manufacture of silica

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117838A (en) * 1957-08-02 1964-01-14 Int Standard Electric Corp Manufacture of silica

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028566A (en) * 1987-04-10 1991-07-02 Air Products And Chemicals, Inc. Method of forming silicon dioxide glass films
US5904952A (en) * 1987-07-15 1999-05-18 The Boc Group, Inc. Method of plasma enhanced silicon oxide deposition

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