JPS5122449B2 - - Google Patents
Info
- Publication number
- JPS5122449B2 JPS5122449B2 JP6742071A JP6742071A JPS5122449B2 JP S5122449 B2 JPS5122449 B2 JP S5122449B2 JP 6742071 A JP6742071 A JP 6742071A JP 6742071 A JP6742071 A JP 6742071A JP S5122449 B2 JPS5122449 B2 JP S5122449B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6742071A JPS5122449B2 (en) | 1971-09-03 | 1971-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6742071A JPS5122449B2 (en) | 1971-09-03 | 1971-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4834039A JPS4834039A (en) | 1973-05-15 |
| JPS5122449B2 true JPS5122449B2 (en) | 1976-07-09 |
Family
ID=13344380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6742071A Expired JPS5122449B2 (en) | 1971-09-03 | 1971-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5122449B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008098228A (en) * | 2006-10-06 | 2008-04-24 | Matsushita Electric Ind Co Ltd | Manufacturing method of semiconductor chip |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50100979A (en) * | 1973-12-30 | 1975-08-11 | ||
| JPS50105379A (en) * | 1974-01-28 | 1975-08-20 | ||
| JPS5121784A (en) * | 1974-08-17 | 1976-02-21 | Fujitsu Ltd | Handotaisochino seizohoho |
| JPS5134672A (en) * | 1974-09-18 | 1976-03-24 | Matsushita Electric Ind Co Ltd | FUOTOETSU CHINGUHOHO |
| JPS51107773A (en) * | 1975-03-19 | 1976-09-24 | Hitachi Ltd | HANDOTA ISHORIHO |
| JPS5228267A (en) * | 1975-08-28 | 1977-03-03 | Nippon Telegr & Teleph Corp <Ntt> | Minute processing |
| JPS53121468A (en) * | 1977-03-31 | 1978-10-23 | Hitachi Ltd | Manufacture for semiconductor device |
| JPS53147468A (en) * | 1977-05-27 | 1978-12-22 | Nec Home Electronics Ltd | Production of semiconductor device |
| JPS5427369A (en) * | 1977-08-01 | 1979-03-01 | Hitachi Ltd | Pattern formation method |
| JPS5587435A (en) * | 1978-12-25 | 1980-07-02 | Fujitsu Ltd | Method of producing semiconductor device |
| JPS5622428A (en) * | 1979-08-01 | 1981-03-03 | Toray Ind Inc | Polyimide pattern forming method |
| JPS5633827A (en) * | 1979-08-29 | 1981-04-04 | Seiko Epson Corp | Photo etching method including surface treatment of substrate |
| US4308337A (en) * | 1980-03-10 | 1981-12-29 | Rca Corporation | Uniform light exposure of positive photoresist for replicating spiral groove in plastic substrate |
| JPS5635422A (en) * | 1980-07-31 | 1981-04-08 | Nippon Telegr & Teleph Corp <Ntt> | Method of etching |
| JPS57207208A (en) * | 1981-06-17 | 1982-12-18 | Hitachi Ltd | Production of color filter |
| JPS60104901A (en) * | 1984-10-11 | 1985-06-10 | Dainippon Printing Co Ltd | Manufacture of color separation filter element |
| JPS62139333A (en) * | 1985-12-13 | 1987-06-23 | Nec Corp | Manufacture of infrared ray detecting element |
| US6479411B1 (en) * | 2000-03-21 | 2002-11-12 | Angela T. Hui | Method for forming high quality multiple thickness oxide using high temperature descum |
| JP4706086B2 (en) * | 2005-03-14 | 2011-06-22 | 富士フイルム株式会社 | Cleaning method for cover glass with spacer |
-
1971
- 1971-09-03 JP JP6742071A patent/JPS5122449B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008098228A (en) * | 2006-10-06 | 2008-04-24 | Matsushita Electric Ind Co Ltd | Manufacturing method of semiconductor chip |
| US7767551B2 (en) | 2006-10-06 | 2010-08-03 | Panasonic Corporation | Method for fabricating semiconductor chip |
| JP4544231B2 (en) * | 2006-10-06 | 2010-09-15 | パナソニック株式会社 | Manufacturing method of semiconductor chip |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4834039A (en) | 1973-05-15 |