JPS5121472A - - Google Patents
Info
- Publication number
- JPS5121472A JPS5121472A JP49093295A JP9329574A JPS5121472A JP S5121472 A JPS5121472 A JP S5121472A JP 49093295 A JP49093295 A JP 49093295A JP 9329574 A JP9329574 A JP 9329574A JP S5121472 A JPS5121472 A JP S5121472A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49093295A JPS5121472A (en) | 1974-08-16 | 1974-08-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49093295A JPS5121472A (en) | 1974-08-16 | 1974-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5121472A true JPS5121472A (en) | 1976-02-20 |
Family
ID=14078371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49093295A Pending JPS5121472A (en) | 1974-08-16 | 1974-08-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5121472A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184519A (en) * | 1983-04-05 | 1984-10-19 | Agency Of Ind Science & Technol | Method for generating ionized cluster beam and device therefor |
| JPS6191918A (en) * | 1984-10-11 | 1986-05-10 | Futaba Corp | Manufacturing device of compound thin film |
| JPS62132313A (en) * | 1984-10-24 | 1987-06-15 | コンパニイ・ジエネラル・デレクトリシテ | Molecular jet generator |
-
1974
- 1974-08-16 JP JP49093295A patent/JPS5121472A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184519A (en) * | 1983-04-05 | 1984-10-19 | Agency Of Ind Science & Technol | Method for generating ionized cluster beam and device therefor |
| JPH0343771B2 (en) * | 1983-04-05 | 1991-07-03 | Kogyo Gijutsuin | |
| JPS6191918A (en) * | 1984-10-11 | 1986-05-10 | Futaba Corp | Manufacturing device of compound thin film |
| JPS62132313A (en) * | 1984-10-24 | 1987-06-15 | コンパニイ・ジエネラル・デレクトリシテ | Molecular jet generator |