JPS51142271A - Diffusion-furnace pipe for forming a semiconductor oxide film - Google Patents
Diffusion-furnace pipe for forming a semiconductor oxide filmInfo
- Publication number
- JPS51142271A JPS51142271A JP6415875A JP6415875A JPS51142271A JP S51142271 A JPS51142271 A JP S51142271A JP 6415875 A JP6415875 A JP 6415875A JP 6415875 A JP6415875 A JP 6415875A JP S51142271 A JPS51142271 A JP S51142271A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- forming
- diffusion
- furnace pipe
- semiconductor oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a homogeneous oxide film by forming an oxide film by the use of a furnace pipe wherein a silicon-carbide layear or a metallic-silicon layer is formed on the outer suface of base material of graphite.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6415875A JPS51142271A (en) | 1975-05-30 | 1975-05-30 | Diffusion-furnace pipe for forming a semiconductor oxide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6415875A JPS51142271A (en) | 1975-05-30 | 1975-05-30 | Diffusion-furnace pipe for forming a semiconductor oxide film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51142271A true JPS51142271A (en) | 1976-12-07 |
| JPS5411228B2 JPS5411228B2 (en) | 1979-05-12 |
Family
ID=13249972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6415875A Granted JPS51142271A (en) | 1975-05-30 | 1975-05-30 | Diffusion-furnace pipe for forming a semiconductor oxide film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51142271A (en) |
-
1975
- 1975-05-30 JP JP6415875A patent/JPS51142271A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5411228B2 (en) | 1979-05-12 |
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