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JPS51140578A - Autohandler - Google Patents

Autohandler

Info

Publication number
JPS51140578A
JPS51140578A JP6431275A JP6431275A JPS51140578A JP S51140578 A JPS51140578 A JP S51140578A JP 6431275 A JP6431275 A JP 6431275A JP 6431275 A JP6431275 A JP 6431275A JP S51140578 A JPS51140578 A JP S51140578A
Authority
JP
Japan
Prior art keywords
autohandler
measurement
many places
providing many
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6431275A
Other languages
Japanese (ja)
Inventor
Takeo Sato
Osamu Ito
Osamu Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6431275A priority Critical patent/JPS51140578A/en
Publication of JPS51140578A publication Critical patent/JPS51140578A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE: Ro provide an autohandler capable of providing many places for measurement.
COPYRIGHT: (C)1976,JPO&Japio
JP6431275A 1975-05-30 1975-05-30 Autohandler Pending JPS51140578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6431275A JPS51140578A (en) 1975-05-30 1975-05-30 Autohandler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6431275A JPS51140578A (en) 1975-05-30 1975-05-30 Autohandler

Publications (1)

Publication Number Publication Date
JPS51140578A true JPS51140578A (en) 1976-12-03

Family

ID=13254583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6431275A Pending JPS51140578A (en) 1975-05-30 1975-05-30 Autohandler

Country Status (1)

Country Link
JP (1) JPS51140578A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS588145U (en) * 1981-07-08 1983-01-19 富士通株式会社 Vacuum chuck for high temperature testing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS588145U (en) * 1981-07-08 1983-01-19 富士通株式会社 Vacuum chuck for high temperature testing

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