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JPS51132885A - Pasticle ray analyzing unit - Google Patents

Pasticle ray analyzing unit

Info

Publication number
JPS51132885A
JPS51132885A JP50007130A JP713075A JPS51132885A JP S51132885 A JPS51132885 A JP S51132885A JP 50007130 A JP50007130 A JP 50007130A JP 713075 A JP713075 A JP 713075A JP S51132885 A JPS51132885 A JP S51132885A
Authority
JP
Japan
Prior art keywords
pasticle
analyzing unit
ray analyzing
ray
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50007130A
Other languages
Japanese (ja)
Other versions
JPS5610741B2 (en
Inventor
Mitsuhiko Yamada
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50007130A priority Critical patent/JPS51132885A/en
Publication of JPS51132885A publication Critical patent/JPS51132885A/en
Publication of JPS5610741B2 publication Critical patent/JPS5610741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain a shallow depth of focus by making the angle estimated to be an electron beam iris opening.
JP50007130A 1975-01-17 1975-01-17 Pasticle ray analyzing unit Granted JPS51132885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50007130A JPS51132885A (en) 1975-01-17 1975-01-17 Pasticle ray analyzing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50007130A JPS51132885A (en) 1975-01-17 1975-01-17 Pasticle ray analyzing unit

Publications (2)

Publication Number Publication Date
JPS51132885A true JPS51132885A (en) 1976-11-18
JPS5610741B2 JPS5610741B2 (en) 1981-03-10

Family

ID=11657485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50007130A Granted JPS51132885A (en) 1975-01-17 1975-01-17 Pasticle ray analyzing unit

Country Status (1)

Country Link
JP (1) JPS51132885A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
JPH01105444A (en) * 1987-10-16 1989-04-21 Jeol Ltd X-ray analyzing electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
JPH0324015B2 (en) * 1979-03-14 1991-04-02 Hitachi Ltd
JPH01105444A (en) * 1987-10-16 1989-04-21 Jeol Ltd X-ray analyzing electron microscope

Also Published As

Publication number Publication date
JPS5610741B2 (en) 1981-03-10

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