JPS51126078A - Manufacturing method of semi-conductor equpment - Google Patents
Manufacturing method of semi-conductor equpmentInfo
- Publication number
- JPS51126078A JPS51126078A JP4969975A JP4969975A JPS51126078A JP S51126078 A JPS51126078 A JP S51126078A JP 4969975 A JP4969975 A JP 4969975A JP 4969975 A JP4969975 A JP 4969975A JP S51126078 A JPS51126078 A JP S51126078A
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- semi
- equpment
- manufacturing
- protects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain a semi-conductor that protects the step cutting of the isolation film and the breaking of the wires and also making the bad head smaller.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969975A JPS51126078A (en) | 1975-04-25 | 1975-04-25 | Manufacturing method of semi-conductor equpment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969975A JPS51126078A (en) | 1975-04-25 | 1975-04-25 | Manufacturing method of semi-conductor equpment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51126078A true JPS51126078A (en) | 1976-11-02 |
Family
ID=12838418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4969975A Pending JPS51126078A (en) | 1975-04-25 | 1975-04-25 | Manufacturing method of semi-conductor equpment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51126078A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5470783A (en) * | 1977-11-16 | 1979-06-06 | Mitsubishi Electric Corp | Forming method for separate oxide film of semiconductor device |
JPS61244032A (en) * | 1985-04-22 | 1986-10-30 | Sony Corp | Manufacture of semiconductor device |
-
1975
- 1975-04-25 JP JP4969975A patent/JPS51126078A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5470783A (en) * | 1977-11-16 | 1979-06-06 | Mitsubishi Electric Corp | Forming method for separate oxide film of semiconductor device |
JPS61244032A (en) * | 1985-04-22 | 1986-10-30 | Sony Corp | Manufacture of semiconductor device |
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