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JPS51124680A - A method of rf supttering - Google Patents

A method of rf supttering

Info

Publication number
JPS51124680A
JPS51124680A JP4907775A JP4907775A JPS51124680A JP S51124680 A JPS51124680 A JP S51124680A JP 4907775 A JP4907775 A JP 4907775A JP 4907775 A JP4907775 A JP 4907775A JP S51124680 A JPS51124680 A JP S51124680A
Authority
JP
Japan
Prior art keywords
supttering
vacuum
film
thin
sputtering method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4907775A
Other languages
Japanese (ja)
Inventor
Susumu Shibata
Tsutomu Nomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4907775A priority Critical patent/JPS51124680A/en
Publication of JPS51124680A publication Critical patent/JPS51124680A/en
Pending legal-status Critical Current

Links

Landscapes

  • Insulating Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

PURPOSE: An RF sputtering method whereby a good thin insulation film can be directly obtained without vacuum metallizing other material such as Ta on a vacuum metallized thin Au film.
COPYRIGHT: (C)1976,JPO&Japio
JP4907775A 1975-04-24 1975-04-24 A method of rf supttering Pending JPS51124680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4907775A JPS51124680A (en) 1975-04-24 1975-04-24 A method of rf supttering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4907775A JPS51124680A (en) 1975-04-24 1975-04-24 A method of rf supttering

Publications (1)

Publication Number Publication Date
JPS51124680A true JPS51124680A (en) 1976-10-30

Family

ID=12821012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4907775A Pending JPS51124680A (en) 1975-04-24 1975-04-24 A method of rf supttering

Country Status (1)

Country Link
JP (1) JPS51124680A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02118061A (en) * 1988-10-27 1990-05-02 Fujikura Ltd Method for manufacturing oxide superconductor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498345A (en) * 1972-05-13 1974-01-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498345A (en) * 1972-05-13 1974-01-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02118061A (en) * 1988-10-27 1990-05-02 Fujikura Ltd Method for manufacturing oxide superconductor
JPH0788568B2 (en) * 1988-10-27 1995-09-27 株式会社フジクラ Method for manufacturing oxide superconductor

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