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JPS51118391A - Manufacturing process for semiconducter unit - Google Patents

Manufacturing process for semiconducter unit

Info

Publication number
JPS51118391A
JPS51118391A JP4396975A JP4396975A JPS51118391A JP S51118391 A JPS51118391 A JP S51118391A JP 4396975 A JP4396975 A JP 4396975A JP 4396975 A JP4396975 A JP 4396975A JP S51118391 A JPS51118391 A JP S51118391A
Authority
JP
Japan
Prior art keywords
manufacturing process
semiconducter
unit
density
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4396975A
Other languages
Japanese (ja)
Other versions
JPS5828735B2 (en
Inventor
Hiroshi Kuroda
Eisuke Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50043969A priority Critical patent/JPS5828735B2/en
Publication of JPS51118391A publication Critical patent/JPS51118391A/en
Publication of JPS5828735B2 publication Critical patent/JPS5828735B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To improve manufacturing process when integrated circuit has more density and micro pattern with step.
COPYRIGHT: (C)1976,JPO&Japio
JP50043969A 1975-04-10 1975-04-10 hand tai souchi no seizou houhou Expired JPS5828735B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50043969A JPS5828735B2 (en) 1975-04-10 1975-04-10 hand tai souchi no seizou houhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50043969A JPS5828735B2 (en) 1975-04-10 1975-04-10 hand tai souchi no seizou houhou

Publications (2)

Publication Number Publication Date
JPS51118391A true JPS51118391A (en) 1976-10-18
JPS5828735B2 JPS5828735B2 (en) 1983-06-17

Family

ID=12678524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50043969A Expired JPS5828735B2 (en) 1975-04-10 1975-04-10 hand tai souchi no seizou houhou

Country Status (1)

Country Link
JP (1) JPS5828735B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166958A (en) * 1979-06-15 1980-12-26 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5977008U (en) * 1982-11-16 1984-05-24 株式会社ニコン Survey instrument display device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62169724U (en) * 1986-04-15 1987-10-28
JPS63116119U (en) * 1987-01-16 1988-07-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166958A (en) * 1979-06-15 1980-12-26 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5977008U (en) * 1982-11-16 1984-05-24 株式会社ニコン Survey instrument display device

Also Published As

Publication number Publication date
JPS5828735B2 (en) 1983-06-17

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