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JPS51118366A - Scanning type electric microscope - Google Patents

Scanning type electric microscope

Info

Publication number
JPS51118366A
JPS51118366A JP50043189A JP4318975A JPS51118366A JP S51118366 A JPS51118366 A JP S51118366A JP 50043189 A JP50043189 A JP 50043189A JP 4318975 A JP4318975 A JP 4318975A JP S51118366 A JPS51118366 A JP S51118366A
Authority
JP
Japan
Prior art keywords
type electric
scanning type
electric microscope
microscope
crt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50043189A
Other languages
Japanese (ja)
Inventor
Hideo Todokoro
Susumu Ozasa
Tsutomu Komoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50043189A priority Critical patent/JPS51118366A/en
Publication of JPS51118366A publication Critical patent/JPS51118366A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Scanning type electric microscope which is available for three dimentional observation displaying high quality cubic image on CRT.
COPYRIGHT: (C)1976,JPO&Japio
JP50043189A 1975-04-11 1975-04-11 Scanning type electric microscope Pending JPS51118366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50043189A JPS51118366A (en) 1975-04-11 1975-04-11 Scanning type electric microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50043189A JPS51118366A (en) 1975-04-11 1975-04-11 Scanning type electric microscope

Publications (1)

Publication Number Publication Date
JPS51118366A true JPS51118366A (en) 1976-10-18

Family

ID=12656960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50043189A Pending JPS51118366A (en) 1975-04-11 1975-04-11 Scanning type electric microscope

Country Status (1)

Country Link
JP (1) JPS51118366A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121456A (en) * 1977-03-31 1978-10-23 Hitachi Ltd Scanning type electromicroscope having a plural number of mirror cylinders
JPS57126057A (en) * 1981-01-30 1982-08-05 Akashi Seisakusho Co Ltd Cross-mirror-tube-and scanning-type electronic microscope, and device similar to it
JPS62252055A (en) * 1986-04-25 1987-11-02 Hamamatsu Photonics Kk Stereoscopic electron microscope
JPH0451441A (en) * 1990-06-20 1992-02-19 Hitachi Ltd Pattern inspection method and device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103566A (en) * 1973-02-02 1974-10-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103566A (en) * 1973-02-02 1974-10-01

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121456A (en) * 1977-03-31 1978-10-23 Hitachi Ltd Scanning type electromicroscope having a plural number of mirror cylinders
JPS57126057A (en) * 1981-01-30 1982-08-05 Akashi Seisakusho Co Ltd Cross-mirror-tube-and scanning-type electronic microscope, and device similar to it
JPS62252055A (en) * 1986-04-25 1987-11-02 Hamamatsu Photonics Kk Stereoscopic electron microscope
JPH0451441A (en) * 1990-06-20 1992-02-19 Hitachi Ltd Pattern inspection method and device

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