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JPS51112182A - Method and apparatus for generating plasma acted by magnetism to form thin film on surface of solid substrate - Google Patents

Method and apparatus for generating plasma acted by magnetism to form thin film on surface of solid substrate

Info

Publication number
JPS51112182A
JPS51112182A JP2270076A JP2270076A JPS51112182A JP S51112182 A JPS51112182 A JP S51112182A JP 2270076 A JP2270076 A JP 2270076A JP 2270076 A JP2270076 A JP 2270076A JP S51112182 A JPS51112182 A JP S51112182A
Authority
JP
Japan
Prior art keywords
magnetism
thin film
solid substrate
generating plasma
form thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2270076A
Other languages
English (en)
Inventor
Barudosu Radeisurafu
Ronsaru Goyuko
Musuiru Indoritsuku
Zaseku Furanchiseku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ceske Vysoke Uceni Tech
SESUKE BISOKE USENI TEKUNIKE BI PURAZE
Original Assignee
Ceske Vysoke Uceni Tech
SESUKE BISOKE USENI TEKUNIKE BI PURAZE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceske Vysoke Uceni Tech, SESUKE BISOKE USENI TEKUNIKE BI PURAZE filed Critical Ceske Vysoke Uceni Tech
Publication of JPS51112182A publication Critical patent/JPS51112182A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP2270076A 1975-03-04 1976-03-04 Method and apparatus for generating plasma acted by magnetism to form thin film on surface of solid substrate Pending JPS51112182A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS143675A CS176690B1 (ja) 1975-03-04 1975-03-04

Publications (1)

Publication Number Publication Date
JPS51112182A true JPS51112182A (en) 1976-10-04

Family

ID=5348709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2270076A Pending JPS51112182A (en) 1975-03-04 1976-03-04 Method and apparatus for generating plasma acted by magnetism to form thin film on surface of solid substrate

Country Status (4)

Country Link
JP (1) JPS51112182A (ja)
CS (1) CS176690B1 (ja)
DE (1) DE2606937A1 (ja)
NL (1) NL7602116A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2587729B1 (fr) * 1985-09-24 1988-12-23 Centre Nat Rech Scient Procede et dispositif de traitement chimique, notamment de traitement thermochimique et de depot chimique dans un plasma homogene de grand volume
CH671407A5 (ja) * 1986-06-13 1989-08-31 Balzers Hochvakuum
JP2805009B2 (ja) * 1988-05-11 1998-09-30 株式会社日立製作所 プラズマ発生装置及びプラズマ元素分析装置
JP2546405B2 (ja) * 1990-03-12 1996-10-23 富士電機株式会社 プラズマ処理装置ならびにその運転方法

Also Published As

Publication number Publication date
NL7602116A (nl) 1976-09-07
CS176690B1 (ja) 1977-06-30
DE2606937A1 (de) 1976-09-23

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