JPS508554A - - Google Patents
Info
- Publication number
- JPS508554A JPS508554A JP5599273A JP5599273A JPS508554A JP S508554 A JPS508554 A JP S508554A JP 5599273 A JP5599273 A JP 5599273A JP 5599273 A JP5599273 A JP 5599273A JP S508554 A JPS508554 A JP S508554A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5599273A JPS508554A (de) | 1973-05-19 | 1973-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5599273A JPS508554A (de) | 1973-05-19 | 1973-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS508554A true JPS508554A (de) | 1975-01-29 |
Family
ID=13014565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5599273A Pending JPS508554A (de) | 1973-05-19 | 1973-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS508554A (de) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52153468A (en) * | 1976-06-15 | 1977-12-20 | Fujitsu Ltd | Thickness measuring method of substrates |
| JPS58127699A (ja) * | 1982-01-22 | 1983-07-29 | ダグラス・ピ−・マハン | マイクロ波式処理機構 |
| JPS5985908A (ja) * | 1982-06-18 | 1984-05-18 | サ−マ−ウエイブ・インコ−ポレ−テツド | 熱波検出システムを用いた薄いフイルムの厚さ測定法及び深度プロフイル法 |
| JPS61209340A (ja) * | 1985-03-14 | 1986-09-17 | Chino Works Ltd | 光学的測定装置 |
| JPH05196426A (ja) * | 1991-01-30 | 1993-08-06 | Kuwabara Yasunaga | 積屑体を構成する層の厚みの分布を測定する方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827044A (de) * | 1971-08-16 | 1973-04-10 |
-
1973
- 1973-05-19 JP JP5599273A patent/JPS508554A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827044A (de) * | 1971-08-16 | 1973-04-10 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52153468A (en) * | 1976-06-15 | 1977-12-20 | Fujitsu Ltd | Thickness measuring method of substrates |
| JPS58127699A (ja) * | 1982-01-22 | 1983-07-29 | ダグラス・ピ−・マハン | マイクロ波式処理機構 |
| JPS5985908A (ja) * | 1982-06-18 | 1984-05-18 | サ−マ−ウエイブ・インコ−ポレ−テツド | 熱波検出システムを用いた薄いフイルムの厚さ測定法及び深度プロフイル法 |
| JPH0358443B2 (de) * | 1982-06-18 | 1991-09-05 | Saama Ueibu Inc | |
| JPS61209340A (ja) * | 1985-03-14 | 1986-09-17 | Chino Works Ltd | 光学的測定装置 |
| JPH05196426A (ja) * | 1991-01-30 | 1993-08-06 | Kuwabara Yasunaga | 積屑体を構成する層の厚みの分布を測定する方法 |