JPS5084171A - - Google Patents

Info

Publication number: JPS5084171A
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP49121287A

Other languages

Other versions

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-11-22

Filing date

1974-10-21

Publication date

1975-07-07

1974-10-21 Application filed filed Critical

1975-07-07 Publication of JPS5084171A publication Critical patent/JPS5084171A/ja

1978-10-12 Publication of JPS5337803B2 publication Critical patent/JPS5337803B2/ja

Status Expired legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Engine Equipment That Uses Special Cycles (AREA)

JP12128774A 1973-11-22 1974-10-21 Expired JPS5337803B2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2358300A DE2358300C3 (de)	1973-11-22	1973-11-22	Vorrichtung zum senkrechten Halten eines Halbleiterkristallstabes beim tiegelfreien Zonenschmelzen

Publications (2)

Publication Number	Publication Date
JPS5084171A true JPS5084171A (de)	1975-07-07
JPS5337803B2 JPS5337803B2 (de)	1978-10-12

Family

ID=5898815

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12128774A Expired JPS5337803B2 (de)	1973-11-22	1974-10-21

Country Status (7)

Country	Link
US (2)	US3923468A (de)
JP (1)	JPS5337803B2 (de)
BE (1)	BE816506A (de)
CA (1)	CA1053545A (de)
DE (1)	DE2358300C3 (de)
IT (1)	IT1025571B (de)
PL (1)	PL95739B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4045278A (en) *	1973-11-22	1977-08-30	Siemens Aktiengesellschaft	Method and apparatus for floating melt zone of semiconductor crystal rods
DE2455173C3 (de) *	1974-11-21	1979-01-18	Siemens Ag, 1000 Berlin Und 8000 Muenchen	Vorrichtung zum senkrechten Haltern des den Keimkristall enthaltenden Stabendes beim tiegelfreien Zonenschmelzen
DE2529366A1 (de) *	1975-07-01	1977-01-20	Wacker Chemitronic	Vorrichtung zum stuetzen eines kristallinen stabes
DE2652199C3 (de) *	1976-11-16	1982-05-19	Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen	Vorrichtung zum Abstützen des Kristallstabes beim tiegelfreien Zonenziehen
JP3376877B2 (ja) *	1997-09-02	2003-02-10	信越半導体株式会社	種結晶保持具
DE112017004008B4 (de)	2016-08-10	2021-08-26	Sumco Corporation	Einkristall-Herstellungsverfahren und Vorrichtung
CN112429282B (zh) *	2020-11-10	2022-04-12	常州嘉业智能装备科技有限公司	一种用于多次灌装的漏斗

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2989378A (en) *	1956-10-16	1961-06-20	Int Standard Electric Corp	Producing silicon of high purity
GB848382A (en) *	1957-11-28	1960-09-14	Siemens Ag	Improvements in or relating to the production of mono-crystalline bodies
NL126240C (de) *	1958-02-19
BE581195A (de) *	1958-07-30
US3134700A (en) *	1959-04-22	1964-05-26	Siemens Ag	Dislocation removal by a last pass starting at a location displaced from the original seed into the grown crystal
US3179593A (en) *	1960-09-28	1965-04-20	Siemens Ag	Method for producing monocrystalline semiconductor material
DE1303150B (de) *	1961-01-13	1971-05-13	Philips Nv
US3159408A (en) *	1961-10-05	1964-12-01	Grace W R & Co	Chuck
BE626374A (de) *	1961-12-22
DE1519901A1 (de) *	1966-09-23	1970-02-12	Siemens Ag	Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
DE1619993A1 (de) *	1967-03-03	1971-07-01	Siemens Ag	Verfahren zum Zuechten eines stabfoermigen Einkristalls aus Halbleitermaterial durch tiegelfreies Zonenschmelzen
US3494742A (en) *	1968-12-23	1970-02-10	Western Electric Co	Apparatus for float zone melting fusible material
DE2059360A1 (de) *	1970-12-02	1972-06-08	Siemens Ag	Verfahren zum Herstellen homogener Staeben aus Halbleitermaterial

1973
- 1973-11-22 DE DE2358300A patent/DE2358300C3/de not_active Expired
1974
- 1974-06-18 BE BE145571A patent/BE816506A/xx unknown
- 1974-10-21 JP JP12128774A patent/JPS5337803B2/ja not_active Expired
- 1974-11-11 IT IT29278/74A patent/IT1025571B/it active
- 1974-11-18 PL PL1974175723A patent/PL95739B1/zh unknown
- 1974-11-20 US US525641A patent/US3923468A/en not_active Expired - Lifetime
- 1974-11-21 CA CA214,337A patent/CA1053545A/en not_active Expired
1977
- 1977-03-17 US US05/778,587 patent/USRE30863E/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
CA1053545A (en)	1979-05-01
PL95739B1 (pl)	1977-11-30
DE2358300A1 (de)	1975-06-05
JPS5337803B2 (de)	1978-10-12
DE2358300C3 (de)	1978-07-20
BE816506A (fr)	1974-10-16
USRE30863E (en)	1982-02-09
DE2358300B2 (de)	1977-12-01
US3923468A (en)	1975-12-02
IT1025571B (it)	1978-08-30

Publication	Publication Date	Title
AR201758A1 (de)	1975-04-15
AU476761B2 (de)	1976-09-30
AU465372B2 (de)	1975-09-25
AR201235Q (de)	1975-02-21
AR201231Q (de)	1975-02-21
AU474593B2 (de)	1976-07-29
AU474511B2 (de)	1976-07-22
AU474838B2 (de)	1976-08-05
AU471343B2 (de)	1976-04-15
AU465453B2 (de)	1975-09-25
AU465434B2 (de)	1975-09-25
AU450229B2 (de)	1974-07-04
AU476714B2 (de)	1976-09-30
JPS5337803B2 (de)	1978-10-12
AR201229Q (de)	1975-02-21
AU472848B2 (de)	1976-06-03
AU466283B2 (de)	1975-10-23
AU476696B2 (de)	1976-09-30
AR199451A1 (de)	1974-08-30
AU471461B2 (de)	1976-04-29
AR210729A1 (de)	1977-09-15
AR193950A1 (de)	1973-05-31
AR200256A1 (de)	1974-10-31
AR201432A1 (de)	1975-03-14
AU447540B2 (de)	1974-03-25