JPS5057580A - - Google Patents
Info
- Publication number
- JPS5057580A JPS5057580A JP48106276A JP10627673A JPS5057580A JP S5057580 A JPS5057580 A JP S5057580A JP 48106276 A JP48106276 A JP 48106276A JP 10627673 A JP10627673 A JP 10627673A JP S5057580 A JPS5057580 A JP S5057580A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48106276A JPS5057580A (en) | 1973-09-20 | 1973-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48106276A JPS5057580A (en) | 1973-09-20 | 1973-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5057580A true JPS5057580A (en) | 1975-05-20 |
Family
ID=14429542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48106276A Pending JPS5057580A (en) | 1973-09-20 | 1973-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5057580A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3617125A (en) * | 1969-04-24 | 1971-11-02 | Ncr Co | Automatic generation of microscopic patterns in multiplicity at final size |
| JPS514869A (en) * | 1974-06-28 | 1976-01-16 | Hitachi Ltd | GAADENKURIINAA |
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1973
- 1973-09-20 JP JP48106276A patent/JPS5057580A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3617125A (en) * | 1969-04-24 | 1971-11-02 | Ncr Co | Automatic generation of microscopic patterns in multiplicity at final size |
| JPS514869A (en) * | 1974-06-28 | 1976-01-16 | Hitachi Ltd | GAADENKURIINAA |