JPS5027882B1 - - Google Patents
Info
- Publication number
- JPS5027882B1 JPS5027882B1 JP45092862A JP9286270A JPS5027882B1 JP S5027882 B1 JPS5027882 B1 JP S5027882B1 JP 45092862 A JP45092862 A JP 45092862A JP 9286270 A JP9286270 A JP 9286270A JP S5027882 B1 JPS5027882 B1 JP S5027882B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86980669A | 1969-10-27 | 1969-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5027882B1 true JPS5027882B1 (ja) | 1975-09-11 |
Family
ID=25354303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45092862A Pending JPS5027882B1 (ja) | 1969-10-27 | 1970-10-23 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3584966A (ja) |
| JP (1) | JPS5027882B1 (ja) |
| BE (1) | BE757353A (ja) |
| CA (1) | CA922675A (ja) |
| CH (1) | CH527368A (ja) |
| DE (1) | DE2046745A1 (ja) |
| FR (1) | FR2065418A5 (ja) |
| GB (1) | GB1321472A (ja) |
| NL (1) | NL7014717A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3722164C2 (de) * | 1987-07-04 | 1995-04-20 | Balzers Pfeiffer Gmbh | Turbomolekularpumpe |
| US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US852030A (en) * | 1906-09-08 | 1907-04-30 | William A Nussbaumer | Elastic-fluid turbine. |
| US1793179A (en) * | 1927-06-17 | 1931-02-17 | Lanterman Frank | Elastic-fluid turbine |
| US2918208A (en) * | 1956-02-02 | 1959-12-22 | Becker Willi | Molecular pump |
| FR1251606A (fr) * | 1960-03-15 | 1961-01-20 | Arthur Pfeiffer G M B H | Palier pour pompe moléculaire |
| FR81075E (fr) * | 1962-01-23 | 1963-07-26 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
| FR1338250A (fr) * | 1962-11-08 | 1963-09-20 | Akad Wissenschaften Ddr | Pompe moléculaire |
| US3332610A (en) * | 1965-09-08 | 1967-07-25 | Welch Scient Company | Shaft seal with cooling means |
-
0
- BE BE757353D patent/BE757353A/xx not_active IP Right Cessation
-
1969
- 1969-10-27 US US869806A patent/US3584966A/en not_active Expired - Lifetime
-
1970
- 1970-09-22 DE DE19702046745 patent/DE2046745A1/de active Pending
- 1970-10-05 CA CA094789A patent/CA922675A/en not_active Expired
- 1970-10-06 CH CH1486970A patent/CH527368A/de not_active IP Right Cessation
- 1970-10-07 NL NL7014717A patent/NL7014717A/xx unknown
- 1970-10-08 GB GB4785970A patent/GB1321472A/en not_active Expired
- 1970-10-13 FR FR7036985A patent/FR2065418A5/fr not_active Expired
- 1970-10-23 JP JP45092862A patent/JPS5027882B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| BE757353A (fr) | 1971-03-16 |
| NL7014717A (ja) | 1971-04-29 |
| FR2065418A5 (ja) | 1971-07-23 |
| DE2046745A1 (de) | 1971-05-06 |
| CH527368A (de) | 1972-08-31 |
| US3584966A (en) | 1971-06-15 |
| GB1321472A (en) | 1973-06-27 |
| CA922675A (en) | 1973-03-13 |