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JPS4981949A - - Google Patents

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Publication number
JPS4981949A
JPS4981949A JP47125020A JP12502072A JPS4981949A JP S4981949 A JPS4981949 A JP S4981949A JP 47125020 A JP47125020 A JP 47125020A JP 12502072 A JP12502072 A JP 12502072A JP S4981949 A JPS4981949 A JP S4981949A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47125020A
Other languages
Japanese (ja)
Other versions
JPS5534359B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12502072A priority Critical patent/JPS5534359B2/ja
Publication of JPS4981949A publication Critical patent/JPS4981949A/ja
Publication of JPS5534359B2 publication Critical patent/JPS5534359B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP12502072A 1972-12-12 1972-12-12 Expired JPS5534359B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12502072A JPS5534359B2 (en) 1972-12-12 1972-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12502072A JPS5534359B2 (en) 1972-12-12 1972-12-12

Publications (2)

Publication Number Publication Date
JPS4981949A true JPS4981949A (en) 1974-08-07
JPS5534359B2 JPS5534359B2 (en) 1980-09-05

Family

ID=14899858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12502072A Expired JPS5534359B2 (en) 1972-12-12 1972-12-12

Country Status (1)

Country Link
JP (1) JPS5534359B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358408A (en) * 1976-11-08 1978-05-26 Nippon Kokan Kk <Nkk> Water treating method of heat exchanger for exhaust gas treatment
JPS5495176U (en) * 1977-12-19 1979-07-05
JPS5873391U (en) * 1981-11-13 1983-05-18 横河電機株式会社 Impulse pipe cleaning device
JPS58194396U (en) * 1982-06-18 1983-12-24 岩井機械工業株式会社 Damage inspection device for heat transfer plates in plate heat exchangers
JPS63281992A (en) * 1987-05-14 1988-11-18 株式会社 インダック Method and device for washing beer sediment
JPH05215491A (en) * 1992-02-05 1993-08-24 Kubota Corp Heat exchanger for water heat source
JP2013228402A (en) * 2013-06-24 2013-11-07 Toshiba Corp Decontamination device of facility in nuclear power plant

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6697055B2 (en) * 2018-11-30 2020-05-20 株式会社Screenホールディングス Substrate processing apparatus and pipe cleaning method for substrate processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215822A (en) * 1975-07-29 1977-02-05 Ishihara Sangyo Kaisha Ltd Herbicide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215822A (en) * 1975-07-29 1977-02-05 Ishihara Sangyo Kaisha Ltd Herbicide

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358408A (en) * 1976-11-08 1978-05-26 Nippon Kokan Kk <Nkk> Water treating method of heat exchanger for exhaust gas treatment
JPS5495176U (en) * 1977-12-19 1979-07-05
JPS5873391U (en) * 1981-11-13 1983-05-18 横河電機株式会社 Impulse pipe cleaning device
JPS58194396U (en) * 1982-06-18 1983-12-24 岩井機械工業株式会社 Damage inspection device for heat transfer plates in plate heat exchangers
JPS63281992A (en) * 1987-05-14 1988-11-18 株式会社 インダック Method and device for washing beer sediment
JPH05215491A (en) * 1992-02-05 1993-08-24 Kubota Corp Heat exchanger for water heat source
JP2013228402A (en) * 2013-06-24 2013-11-07 Toshiba Corp Decontamination device of facility in nuclear power plant

Also Published As

Publication number Publication date
JPS5534359B2 (en) 1980-09-05

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