JPS4979172A - - Google Patents

Info

Publication number: JPS4979172A
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP11671573A

Other languages

Other versions

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1972-10-31

Filing date

1973-10-17

Publication date

1974-07-31

1973-10-17 Application filed filed Critical

1974-07-31 Publication of JPS4979172A publication Critical patent/JPS4979172A/ja

1976-10-05 Publication of JPS5135830B2 publication Critical patent/JPS5135830B2/ja

Status Expired legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Mechanical Engineering (AREA)
Crystallography & Structural Chemistry (AREA)
Inorganic Chemistry (AREA)
Silicon Compounds (AREA)
Chemical Vapour Deposition (AREA)
Crystals, And After-Treatments Of Crystals (AREA)

JP11671573A 1972-10-31 1973-10-17 Expired JPS5135830B2 (es)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19722253410 DE2253410C3 (de)	1972-10-31	1972-10-31	Verfahren zur Herstellung von Rohren für Diffusionsprozesse in der Halbleitertechnik

Publications (2)

Publication Number	Publication Date
JPS4979172A true JPS4979172A (es)	1974-07-31
JPS5135830B2 JPS5135830B2 (es)	1976-10-05

Family

ID=5860539

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP11671573A Expired JPS5135830B2 (es)	1972-10-31	1973-10-17

Country Status (8)

Country	Link
JP (1)	JPS5135830B2 (es)
BE (1)	BE796998A (es)
DE (1)	DE2253410C3 (es)
FR (1)	FR2204457A1 (es)
GB (1)	GB1396683A (es)
IT (1)	IT998997B (es)
NL (1)	NL7314959A (es)
SU (1)	SU593646A3 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5185374A (es) *	1974-12-06	1976-07-26	Norton Co

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2516708A1 (fr) *	1981-11-13	1983-05-20	Comp Generale Electricite	Procede de fabrication de silicium polycristallin pour photopiles solaires
FR2529189B1 (fr) *	1982-06-25	1985-08-09	Comp Generale Electricite	Procede de fabrication d'une bande de silicium polycristallin pour photophiles
US4804633A (en) *	1988-02-18	1989-02-14	Northern Telecom Limited	Silicon-on-insulator substrates annealed in polysilicon tube
RU2534388C2 (ru) *	2013-01-09	2014-11-27	Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту)	Способ очистки карбид-кремниевой трубы

1972
- 1972-10-31 DE DE19722253410 patent/DE2253410C3/de not_active Expired
1973
- 1973-03-19 BE BE128974A patent/BE796998A/xx unknown
- 1973-06-28 GB GB3090273A patent/GB1396683A/en not_active Expired
- 1973-10-17 JP JP11671573A patent/JPS5135830B2/ja not_active Expired
- 1973-10-22 FR FR7337548A patent/FR2204457A1/fr not_active Withdrawn
- 1973-10-26 IT IT3062073A patent/IT998997B/it active
- 1973-10-30 SU SU731873560D patent/SU593646A3/ru active
- 1973-10-31 NL NL7314959A patent/NL7314959A/xx unknown

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5185374A (es) *	1974-12-06	1976-07-26	Norton Co
JPS5410825B2 (es) *	1974-12-06	1979-05-10

Also Published As

Publication number	Publication date
DE2253410A1 (de)	1974-05-02
JPS5135830B2 (es)	1976-10-05
FR2204457A1 (es)	1974-05-24
SU593646A3 (ru)	1978-02-15
DE2253410B2 (de)	1978-08-31
IT998997B (it)	1976-02-20
NL7314959A (es)	1974-05-02
DE2253410C3 (de)	1979-05-03
BE796998A (fr)	1973-07-16
GB1396683A (en)	1975-06-04

Publication	Publication Date	Title
JPS4879652A (es)	1973-10-25
JPS4974048A (es)	1974-07-17
JPS5135830B2 (es)	1976-10-05
JPS4890368A (es)	1973-11-26
JPS4881815A (es)	1973-11-01
JPS4890468A (es)	1973-11-26
JPS4933719U (es)	1974-03-25
JPS5242236B2 (es)	1977-10-22
JPS4936056U (es)	1974-03-30
JPS4988355U (es)	1974-07-31
JPS4923348U (es)	1974-02-27
SU390791A2 (es)	1973-07-25
FR2195640B3 (es)	1975-10-31
JPS556285B2 (es)	1980-02-15
JPS518660B2 (es)	1976-03-18
JPS49108978U (es)	1974-09-18
JPS4888234U (es)	1973-10-25
JPS49103946U (es)	1974-09-06
JPS4934756U (es)	1974-03-27
JPS48111703U (es)	1973-12-21
CH574787A5 (es)	1976-04-30
CH568400A5 (es)	1975-10-31
CH572318A5 (es)	1976-02-13
CH573400A5 (es)	1976-03-15
CH572294A5 (es)	1976-01-30