JPS4862455A - - Google Patents
Info
- Publication number
- JPS4862455A JPS4862455A JP47103143A JP10314372A JPS4862455A JP S4862455 A JPS4862455 A JP S4862455A JP 47103143 A JP47103143 A JP 47103143A JP 10314372 A JP10314372 A JP 10314372A JP S4862455 A JPS4862455 A JP S4862455A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE12966/71A SE354115B (ja) | 1971-10-13 | 1971-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4862455A true JPS4862455A (ja) | 1973-08-31 |
Family
ID=20296602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47103143A Pending JPS4862455A (ja) | 1971-10-13 | 1972-10-13 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3815996A (ja) |
| JP (1) | JPS4862455A (ja) |
| DE (1) | DE2250095A1 (ja) |
| FR (1) | FR2162852A5 (ja) |
| GB (1) | GB1408414A (ja) |
| SE (1) | SE354115B (ja) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4311390A (en) * | 1979-02-27 | 1982-01-19 | Optimetrix Corporation | Interferometrically controlled stage with precisely orthogonal axes of motion |
| US4261107A (en) * | 1980-03-06 | 1981-04-14 | Caterpillar Tractor Co. | Coordinate locating device |
| WO1982000514A1 (en) * | 1980-08-11 | 1982-02-18 | Kindl G | Laser measuring system and method for turning machine |
| DE3334460A1 (de) * | 1983-09-23 | 1985-04-11 | Fa. Carl Zeiss, 7920 Heidenheim | Mehrkoordinaten-messmaschine |
| DE3827459A1 (de) * | 1988-08-12 | 1990-02-15 | Michael H Dipl Ing Korte | Verfahren und einrichtung zum einrichten und erzeugen eines raeumlichen orthogonalen messnetzes, insbesondere zur aufmasserstellung im rahmen von bauaufnahmen |
| US5164602A (en) * | 1991-08-23 | 1992-11-17 | Westinghouse Electric Corp. | Machine guidance system utilizing fiber optics |
| US5446546A (en) * | 1993-07-02 | 1995-08-29 | The Boeing Company | Laser interferometric single piece force transducer |
| US7362447B2 (en) * | 2004-02-20 | 2008-04-22 | Agilent Technologies, Inc. | Low walk-off interferometer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3622244A (en) * | 1970-01-29 | 1971-11-23 | Optomechanisms Inc | Dual axes interferometer |
| FR2088675A5 (ja) * | 1970-04-21 | 1972-01-07 | Thomson Csf |
-
1971
- 1971-10-13 SE SE12966/71A patent/SE354115B/xx unknown
-
1972
- 1972-10-03 US US00294571A patent/US3815996A/en not_active Expired - Lifetime
- 1972-10-12 DE DE2250095A patent/DE2250095A1/de active Pending
- 1972-10-12 FR FR7236184A patent/FR2162852A5/fr not_active Expired
- 1972-10-13 JP JP47103143A patent/JPS4862455A/ja active Pending
- 1972-10-13 GB GB4734372A patent/GB1408414A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE354115B (ja) | 1973-02-26 |
| US3815996A (en) | 1974-06-11 |
| DE2250095A1 (de) | 1973-04-19 |
| GB1408414A (en) | 1975-10-01 |
| FR2162852A5 (ja) | 1973-07-20 |