JPS4841669A - - Google Patents
Info
- Publication number
- JPS4841669A JPS4841669A JP7511071A JP7511071A JPS4841669A JP S4841669 A JPS4841669 A JP S4841669A JP 7511071 A JP7511071 A JP 7511071A JP 7511071 A JP7511071 A JP 7511071A JP S4841669 A JPS4841669 A JP S4841669A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7511071A JPS4841669A (en) | 1971-09-28 | 1971-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7511071A JPS4841669A (en) | 1971-09-28 | 1971-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4841669A true JPS4841669A (en) | 1973-06-18 |
Family
ID=13566691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7511071A Pending JPS4841669A (en) | 1971-09-28 | 1971-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4841669A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5017972A (en) * | 1973-06-19 | 1975-02-25 | ||
| JPS61127696A (en) * | 1984-11-27 | 1986-06-14 | Sony Corp | Vapor phase reactor |
-
1971
- 1971-09-28 JP JP7511071A patent/JPS4841669A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5017972A (en) * | 1973-06-19 | 1975-02-25 | ||
| JPS5626140B2 (en) * | 1973-06-19 | 1981-06-17 | ||
| JPS61127696A (en) * | 1984-11-27 | 1986-06-14 | Sony Corp | Vapor phase reactor |