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JPS4812039B1 - - Google Patents

Info

Publication number
JPS4812039B1
JPS4812039B1 JP3853069A JP3853069A JPS4812039B1 JP S4812039 B1 JPS4812039 B1 JP S4812039B1 JP 3853069 A JP3853069 A JP 3853069A JP 3853069 A JP3853069 A JP 3853069A JP S4812039 B1 JPS4812039 B1 JP S4812039B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3853069A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3853069A priority Critical patent/JPS4812039B1/ja
Publication of JPS4812039B1 publication Critical patent/JPS4812039B1/ja
Pending legal-status Critical Current

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Landscapes

  • Safety Devices In Control Systems (AREA)
  • Numerical Control (AREA)
JP3853069A 1969-05-20 1969-05-20 Pending JPS4812039B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3853069A JPS4812039B1 (en) 1969-05-20 1969-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3853069A JPS4812039B1 (en) 1969-05-20 1969-05-20

Publications (1)

Publication Number Publication Date
JPS4812039B1 true JPS4812039B1 (en) 1973-04-17

Family

ID=12527818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3853069A Pending JPS4812039B1 (en) 1969-05-20 1969-05-20

Country Status (1)

Country Link
JP (1) JPS4812039B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405802B2 (en) 2003-06-30 2008-07-29 Asml Holding N.V. Large field of view 2X magnification projection optical system for FPD manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405802B2 (en) 2003-06-30 2008-07-29 Asml Holding N.V. Large field of view 2X magnification projection optical system for FPD manufacture
US7643128B2 (en) 2003-06-30 2010-01-05 Asml Holding N.V. Large field of view projection optical system with aberration correctability

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