JPH1163997A - Electric compass - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electric compass whose shape can be miniaturized and which can accurately measure the direction of a line of magnetic force due to earth magnetism. SOLUTION: This compass is provided with a first magnetic impedance effect element 2 (abbreviated as an MI element in the following) detecting the component in the X axis direction of a line of magnetic force due to external magnetic field, a second MI element 3 detecting the component in the Y axis direction of the line of the magnetic force due to the external magnetic field, windings 5, 6 for applying bias magnetization to the first and the second MI elements. The first and the second MI elements are so arranged in the same plane 4 that current paths of the respective applied AC currents perpendicularly intersect with each other. In the first and the second MI elements 2, 3, the main component is Fe, and Fe group metal glass alloy wherein temperature gap ΔTx of supercooling liquid which is shown by a formula δTx=Tx-Tg (where Tx is crystallization starting temperature, and Tg shows glass transition temperature) is at least 20K is used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic compass for detecting an azimuth of a magnetic field line due to geomagnetism.
In particular, the present invention relates to an electronic compass provided with a magneto-impedance effect element made of an Fe-based metallic glass alloy.

[0002]

2. Description of the Related Art An electronic compass can be used alone as a means for detecting the position of a vehicle such as an on-board compass and a navigation system because it can independently measure the azimuth of lines of magnetic force due to an external magnetic field such as terrestrial magnetism.

[0003] Among the above electronic compasses, the flux gate sensor is widely used because of its excellent operation principle and high magnetic field detection sensitivity of about 10 ^-7 to 10 ^-6 G. However, since this flux gate sensor has a structure consisting of an annular magnetic core, an exciting winding wound around the magnetic core and applying a magnetic field, and a detection winding detecting the magnetic flux density of the magnetic core, the shape becomes massive. However, there is a problem that miniaturization cannot be achieved.

On the other hand, a magnetic sensor using a magnetoresistive element (hereinafter abbreviated as “MR element”) as another electronic compass has the same structure so that current paths of currents applied to two MR elements are orthogonal to each other. By arranging the two MR elements in a plane and connecting these two MR elements to a bridge or the like, the direction of the magnetic field lines due to the external magnetic field is detected, and the shape is planar, so that downsizing can be achieved.

[0005]

However, in a magnetic sensor using a conventional MR element, the rate of change in resistance with respect to the intrinsic resistance of the MR element itself due to a change in the intensity of an external magnetic field is 3 to 6.
%, And the change in resistance is not sharp, so that it is difficult to accurately measure the azimuth of the lines of magnetic force by an external magnetic field such as terrestrial magnetism, which is not suitable as an electronic compass.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an electronic compass whose shape can be reduced in size and which can accurately measure the azimuth of magnetic field lines due to terrestrial magnetism. With the goal.

[0007]

In order to achieve the above object, the present invention employs the following constitution. The electronic compass of the present invention is mainly composed of Fe as a means for detecting the azimuth of the external magnetic field, and is represented by an expression of ΔTx = Tx−Tg (where Tx indicates a crystallization start temperature and Tg indicates a glass transition temperature). And a magnetic impedance effect element made of an Fe-based metallic glass alloy in which the temperature interval ΔTx of the supercooled liquid is 20 K or more. The electronic compass of the present invention is the electronic compass described above, wherein the first magnetic impedance effect element is a means for detecting a component of the magnetic field lines in the X-axis direction due to the external magnetic field;
A second magneto-impedance effect element as means for detecting an axial component.

The electronic compass of the present invention is the electronic compass described above, wherein the first and second magneto-impedance effect elements are arranged such that current paths of alternating currents applied to them are orthogonal to each other. It is characterized by being arranged in the same plane. The electronic compass of the present invention is the electronic compass described above, wherein bias magnetization is applied to the first and second magneto-impedance elements along a current path of an alternating current applied to each element. Is characterized by being wound.

Further, the electronic compass of the present invention is the electronic compass described above, wherein the Fe-based metallic glass alloy contains a metal element other than Fe and a metalloid element, One or more of Al, Ga, In, and Sn are contained as a metal element, and one or two of P, C, B, Ge, and Si are contained as the metalloid element.
It is characterized by containing at least one species. Further, the electronic compass of the present invention is the electronic compass described above, wherein the composition of the Fe-based metallic glass alloy is such that Al: 1 to 10 Ga: 0.5 to 4 P: 0 to 15 in atomic% respectively. C: 2 to 7 B: 2 to 10 Fe: balance

Further, the electronic compass of the present invention is the electronic compass described above, wherein the composition of the Fe-based metallic glass alloy is such that Al: 1 to 10 Ga: 0.5 to 4 P: 0 to 15 C: 2 to 7 B: 2 to 10 Si: 0 to 15 Fe: balance

[0011]

Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, an electronic compass 1 includes a first magneto-impedance effect element (hereinafter, abbreviated as MI element) as a means for detecting a component of an external magnetic field in the X-axis direction.
2 and a second MI element 3 which is a means for detecting a component of an external magnetic field in the Y-axis direction perpendicular to the X-axis direction. A magneto-impedance effect element (MI element) is an element having a magneto-impedance effect. The magneto-impedance effect means that when an alternating current in the MHz band is applied from a power supply to a wire-shaped or ribbon-shaped magnetic material and an external magnetic field is applied in the longitudinal direction of the magnetic material, the external magnetic field is a weak magnetic field of about several gauss. In this case, a voltage is generated at both ends of the magnetic material due to the impedance inherent to the material, and the amplitude of the voltage changes within a range of several tens of percent corresponding to the intensity of the external magnetic field. The first and second MI elements 2 and 3 are made of Fe
The main component is an Fe-based metallic glass alloy having a substantially rectangular shape in plan view and a predetermined thickness. The first and second MI elements 2 and 3 are arranged on the plane 4 such that the directions of the current paths of the alternating current applied to them are orthogonal to each other. That is, the first and second MI elements 2 and 3 are arranged such that their longitudinal directions are orthogonal to each other. Specifically, the first and second MI elements 2 and 3
It is fixed to the plane 4 by any means. The shape of the first and second MI elements 2 and 3 is plate-like in FIG. 1, but is not limited thereto, and may be rod-like or thin ribbon (ribbon).
Shape, a wire shape, a linear shape, a product obtained by twisting a plurality of linear shaped bodies, or the like may be used.

The first and second MI elements 2 and 3 have first and second MI elements 2 and 3, respectively.
A winding 5 for applying a bias magnetization along the direction of the current path of the alternating current applied to the MI elements 2 and 3, ie, along the longitudinal direction of the first and second MI elements 2 and 3. 6 is wound. Both ends of the windings 5 and 6 are connected to winding terminals 5a and 6
are connected to the external winding conductors 5b and 6b via a. Both ends 2a of the first and second MI elements 2 and 3 in the longitudinal direction,
3a, output conductors 7, 8, for extracting an output current,
9 is connected. The conductors 7, 9 are connected to the output terminals 7a, 9
are connected to the output external conductors 7b and 9b via a. Further, both ends of the conductor 8 are connected to the end 2 of the first MI element 2.
a and the end 3 a of the second MI element 3.
The conductor 8 is connected to an output external conductor 8b via an output terminal 8a. Further, a lead wire (not shown) for applying an alternating current is connected to both ends 2a and 3a in the longitudinal direction of the first and second MI elements 2 and 3, respectively.

The operation of the electronic compass 1 described above is as follows. In FIG. 1, first and second MI elements 2 and 3 include:
An alternating current in the MHz band is applied from a conductor (not shown). At this time, a voltage is generated at each end 2a, 3a of each of the first and second MI elements 2, 3 by an impedance unique to each element. As shown in FIG. 1, the direction of the lines of magnetic force caused by the external magnetic field is arbitrary, and when the lines of magnetic force are applied to the first MI element 2, the impedance generated at both ends of the first MI element 2 becomes This corresponds to the size of a component (a component in the X-axis direction) parallel to the longitudinal direction of one MI element 2. Similarly, when this line of magnetic force is applied to the second MI element 3, the second M
The impedance generated at both ends of the I element 3 corresponds to the magnitude of a component (component in the Y-axis direction) of the magnetic force lines parallel to the longitudinal direction of the second MI element 3. That is, when the direction of the line of magnetic force due to the external magnetic field changes with respect to the first and second MI elements 2 and 3, the first and second MI elements 2 and 3 correspondingly change.
Of the first and second MI elements 2 and 3 change.
The voltage value output from the MI elements 2 and 3 changes. Thus, in the electronic compass 1,
An output current indicating a voltage value corresponding to the magnitude of the component of the terrestrial magnetism in the X-axis direction is extracted from the output terminals 7a and 8a, and the output terminals 9a and 8a correspond to the magnitude of the component of the terrestrial magnetism in the Y-axis direction. An output current indicating a voltage value is extracted. These output currents are sent to a processing unit (not shown) via the external output conductors 7b, 8b, 9b. The processing unit measures the azimuth of the line of magnetic force due to terrestrial magnetism based on the obtained output current.

The magnetic detection sensitivity of the conventional MR element is 0.1
In contrast to Oe, an element having a magnetic impedance effect (MI element) can detect about 10 ^-5 Oe of magnetism. In particular, the first and second M of the present invention
When a self-oscillation circuit such as a Colpitts oscillation circuit is connected to the I-elements 2 and 3 and an alternating current of several to several tens of MHz is applied, the external magnetic field is stabilized with high sensitivity of about 10 ^-6 Oe and high resolution. , It is possible to detect a weak external magnetic field. Therefore, even when the first and second MI elements 2 and 3 are shaped such that the length in the longitudinal direction is shortened to reduce the impedance unique to the MI element, good magnetic detection sensitivity can be obtained. Therefore, it is possible to reduce the size of the electronic compass 1.

As described above, the electronic compass 1 of the present invention includes the windings 5 and 6 for applying bias magnetization to the first and second MI elements 2 and 3. As shown in FIG. 2A, the first and second MI elements 2 and 3 according to the present invention have an output voltage substantially symmetrically in the positive and negative directions depending on the absolute value of the external magnetic field with respect to the external magnetic field zero. (Change in impedance).

The first and second MI elements 2 of the electronic compass 1
In the case where no bias magnetization is applied to the first magnetic field 3, the direction of the line of magnetic force due to the external magnetic field is changed to the first MI as shown in FIG.
When the angle is changed from 0 to 90 ° with respect to the longitudinal direction of the element 2,
The output voltage from the first MI element 2 decreases. Further, when the direction of the magnetic field lines due to the external magnetic field is changed to 90 to 180 °, the output voltage from the first MI element 2 increases. At this time, the voltage values of the output voltages at 0 ° and 180 ° are the same, and the direction of the line of magnetic force cannot be measured accurately.

When bias magnetization is applied to the first and second MI elements 2 and 3, as shown in FIG. 2C, a region where the impedance to an external magnetic field changes linearly is used. , The direction of the line of magnetic force
Even when the angle changes by 180 °, the change in the output voltage from the MI element is linear, and the direction of the external magnetic field can be accurately measured.

The magnitude of the bias magnetization applied to the first and second MI elements 2, 3 is preferably in the range of 0.1 to 2 Oe in absolute value. When the magnitude of the bias magnetization is 0.
A range of 1 Oe or less or 2 Oe or more is not preferable because the impedance change with respect to the external magnetic field is not a linear change. Therefore, a DC current of several mA is sufficient as the bias current applied to the windings 5 and 6 for applying the bias magnetization.

Fe forming the first and second MI elements 2 and 3
The base metallic glass alloy contains Fe as a main component and ΔTx = Tx
-Tg (where Tx represents the crystallization onset temperature and Tg represents the glass transition temperature) a temperature range ΔTx of the supercooled liquid region represented by the formula of 20K or more, and depending on the composition, a remarkable temperature of 40 to 60K or more. Since the interval is indicated, it is possible to perform molding by slow cooling, and it is possible to produce a ribbon-shaped or linear molded body having a relatively large thickness.

In order to obtain an Fe-based metallic glass alloy having a high magnetic impedance effect and having a ΔTx of 20 K or more, this Fe-based metallic glass alloy is
A metal element other than e and a metalloid element are contained. Among them, the metals other than Fe include at least one of Group 3B and Group 4B of the periodic table,
Specifically, Al, Ga, In, Tl, Sn, and Pb
Is preferably at least one or more of the following, among which Al, Ga,
In or Sn is more preferred. The metalloid element is
It is preferably at least one of P, C, B, Ge and Si. In particular, it is preferable to contain at least one of P, C, and B. Further, by adding Si, the temperature interval ΔTx of the supercooled liquid can be improved, and the critical thickness at which an amorphous single-phase structure is formed can be increased. S
If the content of i is too large, the supercooled liquid region ΔTx disappears, so the content is preferably 15 atomic% or less.

More specifically, in the present invention, the composition is expressed as atomic%, and Al: 1 to 10, Ga: 0.5 to
4, P: 0 to 15, C: 2 to 7, B: 2 to 10, Fe:
The remaining F which may contain unavoidable impurities
An e-based metallic glass alloy is obtained. Further, in the present invention, the composition is atomic%, Al: 1 to 10, Ga: 0.5 to
4, P: 0 to 15, C: 2 to 7, B: 2 to 10, Si:
0 to 15, Fe: Fe-based metallic glass alloy which is the remainder and may contain unavoidable impurities is obtained.
In order to obtain a larger supercooled liquid region ΔTx, P and C in the above two compositions are represented by atomic% and P: 6 to 15,
When C is 5 to 7, it is more preferable to obtain a supercooled liquid region ΔTx of 35K or more.

The first and second MI elements 2 and 3 made of the Fe-based metallic glass alloy according to the present invention are melted and then cast by a casting method, a single roll or twin roll quenching method, and It is manufactured in various shapes such as bulk, thin ribbon (ribbon), and linear body by spinning or solution extraction. By these manufacturing methods, it is possible to obtain the first and second MI elements 2 and 3 having a thickness and a shape size that are 10 times or more as large as those of a ribbon-shaped MI element made of a conventional amorphous alloy. Even when the electronic compass 1 is used, since the first and second MI elements 2 and 3 have a high degree of freedom in shape, the design and manufacture of the electronic compass 1 become easy.

The Fe-based soft magnetic metallic glass alloy of the above composition obtained by these methods has soft magnetism at room temperature. This soft magnetic property is further improved by performing a heat treatment in the range of 300 ° C to 500 ° C. Therefore, it is useful for application to the electronic compass 1.

The above-mentioned electronic compass 1 is composed of a supercooled liquid containing Fe as a main component and represented by the following formula: ΔTx = Tx−Tg (where Tx represents a crystallization start temperature and Tg represents a glass transition temperature). A temperature interval ΔTx is 20K or more, more preferably 35K or more, and an MI element made of an Fe-based metallic glass alloy containing a metal element other than Fe and a metalloid element is provided. Is large, a weak external magnetic field such as terrestrial magnetism can be detected. Further, since the first and second MI elements 2 and 3 according to the present invention have high detection sensitivity for an external magnetic field, the size of the first and second MI elements 2 and 3 can be reduced, and the electronic compass can be reduced. 1 can be downsized. Further, the first and second MI elements 2 and 3 according to the present invention can easily obtain a compact having a larger thickness than a conventional amorphous alloy by a casting method, a single roll method, a twin roll method, or the like. So that
Even when used for the electronic compass 1, the first and second M
Since the degree of freedom in the shape of the I elements 2 and 3 is high, the design of the electronic compass 1 is facilitated, and the first and second MI elements 2 and 3 are further improved.
Of the electronic compass 1 can be easily manufactured, and the manufacturing cost can be reduced.

The above-mentioned electronic compass 1 comprises a first MI element 2 which is a means for detecting an external magnetic field component in the X-axis direction and a second MI element 3 which is a means for detecting an external magnetic field component in the Y-axis direction. The first and second MI elements 2 and 3 are arranged in the same plane 4 so that current paths of alternating currents applied to the first and second MI elements 2 and 3 are orthogonal to each other. Since the windings 5 and 6 for applying the bias magnetization along the current path of the alternating current applied to are wound, it is possible to accurately measure the azimuth of the magnetic lines of force due to terrestrial magnetism.

The first and second MI elements 2, 3
In an external magnetic field in the range of a weak magnetic field of about −2 Oe to +2 Oe, the change of the output voltage value is gentle, the change of the output voltage value is linear, and the quantitativeness is good. The accuracy of the azimuth measurement of the magnetic field lines by the external magnetic field can be further improved. Further, the circuit configuration for processing the output voltage for measuring the azimuth of the external magnetic field is relatively simple, and the manufacturing cost of the electronic compass 1 can be reduced. Furthermore, since the bias magnetization applied to the first and second MI elements 2 and 3 can be as small as about 2 Oe at the maximum, the circuit configuration for applying the bias magnetization can be simplified.

The above-mentioned electronic compass 1 is applied to the first and second MI elements 2 and 3 made of an Fe-based metallic glass alloy at a temperature of 300.degree.
Since heat treatment in the range of 500 ° C. has been performed, good soft magnetic characteristics are exhibited, and the magnetic impedance effect can be improved, so that a weak external magnetic field such as terrestrial magnetism can be easily detected. .

[0028]

The present invention will be described in detail below with reference to embodiments. (Example 1) Fe, Al, Ga, Fe-C alloy, Fe-P
A predetermined amount of each of the alloy and B was weighed and mixed,
Under an atmosphere, these raw materials were melted in a high-frequency induction heating furnace to produce an ingot of a composition having an atomic composition ratio of Fe ₇₂ Al ₅ Ga ₂ P ₁₁ C ₆ B ₄ . The ingot was put into a crucible and melted, and a quenched ribbon having a thickness of 20 μm was obtained under a reduced-pressure Ar atmosphere by a single roll method in which a molten metal was blown out from a nozzle of the crucible and was rapidly cooled by blowing a molten metal. From this ribbon, length 31mm, width 0.1mm ~
A sample having a thickness of 0.2 mm and a thickness of 20 μm was cut out to obtain an MI device. At this time, the supercooled liquid region ΔTx is 47
It was K.

Example 2 The atomic composition is Fe ₇₂ Al ₅ Ga ₂
An MI device was obtained in the same manner as in Example 1 except that the device was P ₁₀ C ₆ B ₄ Si ₁ . From the X-ray diffraction pattern shown in FIG. 7, the obtained quenched ribbon has a halo pattern at 2θ = 40 to 60 ° for all samples having a plate thickness of 20 to 160 μm. It can be seen that On the other hand, in a sample with a plate thickness of 170 μm or more,
A peak was observed only around 2θ = 50 °. This peak is considered to be a peak attributed to Fe ₃ C and Fe ₃ B. Further, the supercooled liquid region ΔTx in the present embodiment
Showed a high value of 50K or more.

The MI elements of Examples 1 and 2 were inserted into the magnetic field detection circuit shown in FIG. 3, and an external magnetic field Hex was applied in the longitudinal direction of the MI element while an AC current of 3 MHz was applied. Magnetic field Hex (Oe) and generated output voltage (mV)
And examined the relationship. The external magnetic field Hex was changed from 0 Oe to 5 Oe, 0 Oe, −5 Oe, and 0 Oe in a continuous reciprocating manner. The amplification rate was set to 10 times. The measurement results are shown in FIGS. Further, FIG.
MI element and the conventional Fe ₇₈ Si ₁₉ B ₁₃ and (Fe ₆
The results of examining the relationship between the external magnetic field Hex (Oe) and the generated output voltage (mV) for comparison with the MI element having the composition of Co ₉₄ ) _72.5 Si _12.5 B ₁₅ are shown below.

The magnetic field detection circuit shown in FIG.
B and C, a high-frequency power supply unit, an external magnetic field (Hex) detection unit, and an amplification output unit, respectively. The MI element (Mi) is inserted in the external magnetic field detection unit (B). The high-frequency power supply unit (A) is a circuit for generating a high-frequency AC current and supplying it to the external magnetic field detection unit (B), and the type thereof is not particularly limited. Here, an example employing a stabilized Colwitz oscillation circuit will be described as an example. In the self-oscillation system, the magnetic field sensing operation can be performed by applying amplitude modulation (AM), frequency modulation (FM), or phase modulation (PM) using magnetic modulation. External magnetic field detector (B)
Represents an MI element (Mi) and a demodulation circuit. The impedance change generated by the MI element in a standby state by the high-frequency AC current supplied from the high-frequency power supply section (A) in response to the external magnetic field (Hex) is represented by: The signal is demodulated by the demodulation circuit and transmitted to the amplification output section (C). The amplification output section (C) has a differential amplifier circuit and an output terminal. An output voltage (mV) from the MI element is obtained from this output terminal.

4 and 5, the MI elements of Examples 1 and 2 have a region where the output voltage is high and the linearity is excellent in the weak magnetic field band of about -2 Oe to +2 Oe. Good quantification. Therefore, when such an MI element is used for an electronic compass,
A weak external magnetic field such as terrestrial magnetism can be detected, and the circuit configuration for measuring the azimuth of the external magnetic field by processing the output voltage from the MI element by the external magnetic field can be simplified. Further, since the bias magnetization only needs to have a magnetization of about 2 Oe in absolute value, the circuit configuration for applying the bias magnetization can be simplified.

FIG. 6 shows that the MI device of Example 1 has a higher output voltage and a higher sensitivity for detecting an external magnetic field than the conventional MI device having the composition of Fe ₇₈ Si ₁₉ B _13. . On the other hand, the MI element of Example 1 has the conventional (Fe ₆ C) within the range of the weak magnetic field (−2 Oe to +2 Oe).
o ₉₄ ) Since the rise of the output voltage is slower than that of the MI element having the composition of _72.5 Si _12.5 B ₁₅ , the quantitative property is improved, and the circuit configuration of the electronic compass using the same is facilitated.

Example 3 An ingot of a composition having an atomic composition ratio of Fe ₇₃ Al ₅ Ga ₂ P ₁₁ C ₅ B ₄ was produced in the same manner as in Example 1, and a quenched ribbon was obtained by a single roll method. Was. The diameter of the nozzle, the distance (gap) between the nozzle tip and the roll surface, the number of rotations of the roll, the injection pressure, and the atmospheric pressure at the time of production by the single roll method are set as shown in Table 1 below. A ribbon-shaped Fe-based metallic glass alloy having a thickness of 35 μm to 229 μm was obtained.

[0035]

[Table 1]

The X-ray diffraction pattern of each metallic glass alloy shown in Table 1 is, as shown in FIG.
All have a halo pattern of μm alloy,
It turns out that it is an amorphous single phase structure. On the other hand, in the alloys having a plate thickness of 151 μm and 180 μm, a peak attributed to Fe ₂ B is observed. Further, in the case of the 229 μm alloy, a peak belonging to Fe ₃ B was observed in addition to the above-mentioned peak, and it is considered that another compound was generated.

According to the metallic glass alloy of Example 3, a ribbon-shaped metallic glass alloy having a plate thickness of 20 to 135 μm and a sufficient plate thickness can be obtained. As in the case of using an electronic compass, since the MI element has a high degree of freedom, the design of the electronic compass is easy, and the processing of the MI element is easy. The compass can be easily manufactured, and the manufacturing cost can be reduced.

[0038]

As described above in detail, the electronic compass of the present invention has Fe as a main component and ΔTx = Tx−T
g (where Tx is the crystallization onset temperature and Tg is the glass transition temperature), the temperature interval ΔTx of the supercooled liquid.
Is 20K or more, and has an MI element made of an Fe-based metallic glass alloy containing a metal element other than Fe and a metalloid element, and has a high detection sensitivity to changes in an external magnetic field. Can be detected,
The size of the MI element can be reduced, and the shape of the electronic compass can be reduced. Further, according to the present invention, M
As the I element, a ribbon-shaped or linear MI element having excellent workability can be easily obtained, so that the design and production of the electronic compass can be facilitated and the production cost can be reduced.

Further, the electronic compass of the present invention comprises: a first MI element which is a means for detecting an X-axis component of an external magnetic field;
The second MI, which is means for detecting a component of the external magnetic field in the Y-axis direction,
And the first and second MI elements are arranged on the same plane so that current paths of AC currents applied to the first and second MI elements are orthogonal to each other, and are arranged along a current path of the AC current applied to the MI element. Since the winding for applying the bias magnetization is wound and the bias magnetization can be applied, the direction of the magnetic field lines due to the external magnetic field such as the terrestrial magnetism can be accurately measured.

[Brief description of the drawings]

FIG. 1 is a plan view showing an electronic compass according to an embodiment of the present invention.

FIGS. 2A and 2B are diagrams showing a relationship between an external magnetic field and an output voltage of the MI element according to the embodiment of the present invention, wherein FIG.
5B is a graph showing the relationship between the external magnetization of the device and the output voltage, and FIG. 5B shows the relationship between the external magnetic field when the direction of the magnetic field lines of the external magnetic field is changed in the range of 0 to 180 ° with respect to the longitudinal direction of the MI device. It is a graph which shows the relationship with an output voltage, (c)
Is a graph showing the relationship between the external magnetic field and the output voltage when the direction of the magnetic field lines of the external magnetic field is changed in the same manner as in FIG.

FIG. 3 is a circuit diagram showing a magnetic detection circuit using an MI element according to an embodiment of the present invention.

FIG. 4 is a graph showing the relationship between the external magnetization and the output voltage of the MI element of Example 1.

FIG. 5 is a graph showing the relationship between the external magnetization and the output voltage of the MI element of Example 2.

FIG. 6 is a graph showing the relationship between the external magnetization and the output voltage of the MI element of Example 1 and the conventional MI element.

FIG. 7 is a view showing an X-ray diffraction pattern at various plate thicknesses of an alloy having a composition of Fe ₇₂ Al ₅ Ga ₂ P ₁₀ C ₆ B ₄ Si ₁ .

FIG. 8 is a view showing an X-ray diffraction pattern at various plate thicknesses of an alloy having a composition of Fe ₇₃ Al ₅ Ga ₂ P ₁₁ C ₅ B ₄ .

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Electronic compass 2 1st MI element 3 2nd MI element 4 Plane 5 Winding for applying bias magnetization 6 Winding for applying bias magnetization 7 Output lead 8 Output lead 9 Output lead

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akihiro Makino 1-7 Yukiya Otsukacho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Norihiro Sudo 1-7 Yukiya Otsukacho, Ota-ku, Tokyo Alp (72) Inventor Shinichi Sasakawa 1-7 Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihisa Inoue 35, Kawauchi Moto Hasekura, Aoba-ku, Sendai City, Miyagi Prefecture Kawauchi House 11-806

Claims (7)

[Claims] 1. As means for detecting the direction of a magnetic field line caused by an external magnetic field, Fe is used as a main component, and ΔTx = Tx−Tg (where Tx indicates a crystallization start temperature and Tg indicates a glass transition temperature). The temperature interval ΔTx of the supercooled liquid is 20
An electronic compass comprising a magneto-impedance effect element made of an Fe-based metallic glass alloy having a temperature of K or more. 2. The electronic compass according to claim 1, wherein the first magnetic impedance effect element is a means for detecting a component in the X-axis direction of the magnetic field lines due to the external magnetic field, and the Y-axis of the magnetic field lines due to the external magnetic field. An electronic compass comprising: a second magneto-impedance effect element that is a means for detecting a direction component. 3. The electronic compass according to claim 2, wherein the first and second magneto-impedance effect elements are arranged in the same plane so that current paths of alternating currents applied to the respective elements are orthogonal to each other. Electronic compass characterized by being done. 4. The electronic compass according to claim 3, wherein the first and second magneto-impedance elements are configured to apply a bias magnetization along a current path of an alternating current applied to each of the first and second magneto-impedance effect elements. An electronic compass, wherein the winding is wound. 5. The electronic compass according to claim 1, wherein the Fe-based metallic glass alloy contains a metal element other than Fe and a metalloid element, One or more of Al, Ga, In, and Sn are contained as metal elements, and as the metalloid element,
An electronic compass comprising one or more of P, C, B, Ge, and Si. 6. The electronic compass according to claim 1, wherein the composition of the Fe-based metallic glass alloy is:
An electronic compass characterized by Al: 1 to 10 Ga: 0.5 to 4 P: 0 to 15 C: 2 to 7 B: 2 to 10 Fe: balance in atomic%, respectively. 7. The electronic compass according to claim 1, wherein the composition of the Fe-based metallic glass alloy is:
An electronic compass characterized by Al: 1 to 10 Ga: 0.5 to 4 P: 0 to 15 C: 2 to 7 B: 2 to 10 Si: 0 to 15 Fe: balance in atomic%, respectively.