JPH11330702A - Manufacturing method of multilayer printed wiring board - Google Patents
Manufacturing method of multilayer printed wiring boardInfo
- Publication number
- JPH11330702A JPH11330702A JP12726998A JP12726998A JPH11330702A JP H11330702 A JPH11330702 A JP H11330702A JP 12726998 A JP12726998 A JP 12726998A JP 12726998 A JP12726998 A JP 12726998A JP H11330702 A JPH11330702 A JP H11330702A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- blind via
- photosensitive insulating
- insulating resin
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000011347 resin Substances 0.000 claims abstract description 31
- 229920005989 resin Polymers 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 239000011162 core material Substances 0.000 claims abstract description 4
- 238000010030 laminating Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 238000007747 plating Methods 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000005553 drilling Methods 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
(57)【要約】
【課題】 絶縁層の残渣が残らず、接続信頼性の高いブ
ラインドバイアホールを効率良く形成することのできる
多層プリント配線板の製造方法の提供。
【解決手段】 両面に回路形成を施した基板をコア材と
し、その両回路表面に感光性絶縁樹脂膜を形成する工程
と、当該両感光性絶縁樹脂膜上に、ブラインドバイアホ
ール用貫通孔を施した片面銅張積層板を積層する工程
と、当該ブラインドバイアホール用貫通孔内の感光性絶
縁樹脂膜を露光現像して除去する工程と、当該除去後の
ブラインドバイアホール用貫通孔を用いて内層回路と外
層回路を接続するブラインドバイアホールを形成する工
程とを含むことを特徴とする多層プリント配線板の製造
方法。
(57) [Problem] To provide a method of manufacturing a multilayer printed wiring board capable of efficiently forming a blind via hole having high connection reliability without leaving a residue of an insulating layer. SOLUTION: A step of forming a photosensitive insulating resin film on both circuit surfaces by using a substrate having a circuit formed on both surfaces as a core material, and forming a through hole for a blind via hole on both photosensitive insulating resin films. Laminating the applied single-sided copper-clad laminate, exposing and developing the photosensitive insulating resin film in the blind via-hole through-hole and removing the same, and using the blind via-hole through-hole after the removal. Forming a blind via hole connecting the inner layer circuit and the outer layer circuit.
Description
【0001】[0001]
【発明の属する技術分野】本発明は多層プリント配線板
の製造方法、特に内層回路と外層回路を接続する小径か
つ非貫通の導通孔、すなわちブラインドバイアホール
(BVH)を有する多層プリント配線板の製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board having a small-diameter, non-through conductive hole for connecting an inner layer circuit and an outer layer circuit, that is, a blind via hole (BVH). About the method.
【0002】[0002]
【従来の技術】従来、多層プリント配線板のブラインド
バイアホールの孔明け加工方法としては、複数の導体層
と該各導体層間に設けられた樹脂層とで構成される多層
プリント配線板の製造方法において、最外層の導体層に
予めレーザービーム径より小さな径の孔を明け、当該最
外層の導体層をマスクとして利用しながらレーザーを前
記孔を介して照射し、最外層から最下層までの樹脂を除
去する方法が既に知られている。2. Description of the Related Art Conventionally, as a method of forming a blind via hole in a multilayer printed wiring board, a method of manufacturing a multilayer printed wiring board comprising a plurality of conductor layers and a resin layer provided between each of the conductor layers has been known. In the outermost conductor layer, a hole having a diameter smaller than the laser beam diameter is previously formed in the outermost conductor layer, and a laser is irradiated through the hole while using the outermost conductor layer as a mask, and a resin from the outermost layer to the lowermost layer is formed. The method of removing is already known.
【0003】しかしながら、斯かる孔明け加工方法によ
り、最外層の導体層をマスクとして例えば炭酸ガスレー
ザーを照射して層間の樹脂層を除去すると、底面の銅箔
に樹脂層の残膜が生じる結果、この樹脂の残膜を取り除
くために更にエキシマレーザー処理及びデスミア処理の
2つの工程が必要となり、しかもこれらの処理を施して
も完全には樹脂層の残膜を取り除くことができないと云
う問題があった。However, when the resin layer between layers is removed by irradiating, for example, a carbon dioxide gas laser using the outermost conductor layer as a mask by such a drilling method, a residual film of the resin layer is formed on the bottom copper foil. However, two steps of excimer laser treatment and desmear treatment are required in order to remove the residual film of the resin, and even if these treatments are performed, the residual film of the resin layer cannot be completely removed. there were.
【0004】また、炭酸ガスレーザー及びエキシマレー
ザーの装置が高く、エキシマレーザーは、生産性から考
えてもコスト高となり、コストの面で合わないと云う点
も看過し得ない問題となっていた。Further, the cost of the carbon dioxide laser and the excimer laser is high, and the cost of the excimer laser is high even from the viewpoint of productivity.
【0005】[0005]
【発明が解決しようとする課題】本発明は上記の如き従
来の問題に鑑みてなされたものであり、レーザーによる
孔明け加工によることなく、絶縁層の残渣が残らず、接
続信頼性の高いブラインドバイアホールを効率良く形成
することができる多層プリント配線板の製造方法を提供
することを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and does not involve a laser drilling process. It is an object of the present invention to provide a method for manufacturing a multilayer printed wiring board in which via holes can be efficiently formed.
【0006】[0006]
【課題を解決するための手段】本発明は、両面に回路形
成を施した基板をコア材とし、その両回路表面に感光性
絶縁樹脂膜を形成する工程と、当該両感光性絶縁樹脂膜
上に、ブラインドバイアホール用貫通孔を施した片面銅
張積層板を積層する工程と、当該ブラインドバイアホー
ル用貫通孔内の感光性絶縁樹脂膜を露光現像して除去す
る工程と、当該除去後のブラインドバイアホール用貫通
孔を用いて内層回路と外層回路を接続するブラインドバ
イアホールを形成する工程とを含むことを特徴とする多
層プリント配線板の製造方法により上記目的を達成した
ものである。According to the present invention, there is provided a process of forming a photosensitive insulating resin film on both circuit surfaces by using a substrate having a circuit formed on both surfaces as a core material, A step of laminating a single-sided copper-clad laminate provided with through holes for blind via holes, a step of exposing and developing the photosensitive insulating resin film in the through holes for blind via holes, and a step of removing the same. The above object has been achieved by a method for manufacturing a multilayer printed wiring board, comprising: a step of forming a blind via hole for connecting an inner layer circuit and an outer layer circuit using a blind via hole through hole.
【0007】本発明に於て、感光性絶縁樹脂膜はその具
体的形成法の如何を問わないが、感光性絶縁インキの塗
布あるいは感光性絶縁シートの貼合が好ましく、また当
該感光性絶縁樹脂膜としてはポジ型タイプのものが好ま
しい。In the present invention, the photosensitive insulating resin film may be formed by any method, but it is preferable to apply a photosensitive insulating ink or to bond a photosensitive insulating sheet. The film is preferably of a positive type.
【0008】また、本発明に於て、ブラインドバイアホ
ールを形成する好ましい具体的方法としては例えば次の
方法が挙げられる。まず外層回路用として、FR−4材
の片面銅張積層板(板厚0.8mm、絶縁層72μm、銅
箔8μm)に、NCドリルマシンにて、ブラインドバイ
アホールを形成する部分に、φ80μmの孔明け加工し
て貫通孔を施す。他方、内層回路用として、FR−4材
の両面銅張積層板(板厚0.1mm、絶縁層64μm、銅
箔18μm)に、写真法等により回路形成した後、その
回路形成した基板表面に、スクリーン印刷法等により絶
縁樹脂膜を形成し、然る後前記貫通孔を施した片面銅張
積層板と貼り合わせ、積層加工する。この時使用する絶
縁樹脂としては、例えばチバ・スペシャルケミカルズ社
製のポジ型感光性絶縁樹脂(主材:LMB7082/硬
化剤:LMB7092)が挙げられる。この絶縁樹脂
は、UV照射された部分が、現像処理により剥れるた
め、外層材と内層材を積層した時に、ブラインドバイア
ホール用貫通孔内に露出した樹脂は、露光・現像処理す
ることにより除去されるので、容易にしかも樹脂残渣が
生じることなくブラインドバイアホール形成用孔が確実
に形成される。次いで内層回路と外層回路の電気的接続
として銅メッキ処理を行うが、メッキの密着性の観点か
ら、スルーホール加工の有無を問わず、銅メッキ処理前
にデスミア処理をする。尚、銅メッキ処理後の外層回路
形成は、写真法等で行われる。In the present invention, a preferred specific method for forming a blind via hole is, for example, the following method. First, for the outer layer circuit, φ80 μm was formed on a single-sided copper-clad laminate of FR-4 material (plate thickness 0.8 mm, insulating layer 72 μm, copper foil 8 μm) by using an NC drill machine to form a blind via hole. Drilling is performed to make through holes. On the other hand, for an inner layer circuit, a circuit is formed on a double-sided copper-clad laminate of FR-4 material (thickness: 0.1 mm, insulating layer: 64 μm, copper foil: 18 μm) by a photographic method or the like. Then, an insulating resin film is formed by a screen printing method or the like, and thereafter, it is bonded to the single-sided copper-clad laminate having the through-hole and laminated. As the insulating resin used at this time, for example, a positive photosensitive insulating resin (main material: LMB7082 / curing agent: LMB7092) manufactured by Ciba Special Chemicals Co., Ltd. can be mentioned. Because the insulating resin is exposed at the UV-irradiated portion, the exposed portion of the through-hole for the blind via hole is removed by exposure and development when the outer layer and the inner layer are laminated. Therefore, the blind via hole forming hole can be easily formed without any resin residue. Next, copper plating is performed for electrical connection between the inner layer circuit and the outer layer circuit. From the viewpoint of plating adhesion, desmearing is performed before copper plating regardless of whether through-hole processing is performed. The outer layer circuit after the copper plating is formed by a photographic method or the like.
【0009】[0009]
【発明の実施の形態】以下本発明の実施の形態を図面と
共に説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0010】図1は本発明方法の一実施の形態を示す各
工程の断面説明図で、まず片面銅張積層板1のブライン
ドバイアホールを形成する部分に、予め貫通孔2を形設
する(A)。次に、両面銅張積層板3に、予め内層回路
4を形成した積層板3をコア材とし、その両回路4表面
に、感光性絶縁樹脂膜5を形成する(B)。次に、この
両感光性絶縁樹脂膜5上に、前記貫通孔2を形設した2
枚の片面銅張積層板1を、サンドイッチ状に貼合積層し
た後、当該貫通孔2内の不要感光性絶縁樹脂膜5aにU
V光Pを照射して露光せしめる(C)。次に、当該露光
部分をアルコール等の有機溶剤と水の混合液にて現像し
て不要感光性絶縁樹脂膜5aを除去する(D)。次に、
スルーホール6を形設し、デスミア処理後、貫通孔2及
びスルーホール6内壁面を含む全面に銅メッキ処理を施
し、銅メッキ層7を形成する(E)。次に、当該銅メッ
キ層7に写真法等により外層回路8を形成すれば、内層
回路4と外層回路8を接続するブラインドバイアホール
2a及びメッキスルーホール6aを有する多層プリント
配線板が得られる(F)。FIG. 1 is a sectional explanatory view of each step showing an embodiment of the method of the present invention. First, a through hole 2 is previously formed in a portion of a single-sided copper-clad laminate 1 in which a blind via hole is to be formed (see FIG. 1). A). Next, on the double-sided copper-clad laminate 3, a laminate 3 in which an inner layer circuit 4 is formed in advance is used as a core material, and a photosensitive insulating resin film 5 is formed on the surfaces of both circuits 4 (B). Next, on both photosensitive insulating resin films 5, the through holes 2 were formed.
After laminating the single-sided copper-clad laminates 1 in a sandwich shape, the unnecessary photosensitive insulating resin film 5a in the through hole 2
Exposure is performed by irradiating V light P (C). Next, the exposed portion is developed with a liquid mixture of an organic solvent such as alcohol and water to remove the unnecessary photosensitive insulating resin film 5a (D). next,
The through hole 6 is formed, and after desmearing, the entire surface including the through hole 2 and the inner wall surface of the through hole 6 is subjected to copper plating to form a copper plating layer 7 (E). Next, when an outer layer circuit 8 is formed on the copper plating layer 7 by a photo method or the like, a multilayer printed wiring board having a blind via hole 2a connecting the inner layer circuit 4 and the outer layer circuit 8 and a plated through hole 6a is obtained ( F).
【0011】尚、この実施の形態は4層基板に関するも
のであるが、更に、ブラインドバイアホールを絶縁樹脂
にて充填し、表面を平滑にした後感光性樹脂膜を重ね、
予めブラインドバイアホールを形成する部分に貫通孔を
施し、張合わせた感光性絶縁樹脂膜をUV照射にて露光
し、有機溶剤にて現像し、最後に貫通孔を施し、デスミ
ア処理後、銅メッキ処理、回路形成をエッチングにより
行うことで6層基板が完成する。また、更に同じ工程を
繰り返すことにより8層基板を得ることができる。Although this embodiment relates to a four-layer substrate, the blind via holes are filled with an insulating resin, the surface is smoothed, and then a photosensitive resin film is laminated.
A through-hole is formed in the area where the blind via hole is to be formed in advance, and the laminated photosensitive insulating resin film is exposed to UV irradiation, developed with an organic solvent, and finally a through-hole is formed. The processing and circuit formation are performed by etching to complete a six-layer substrate. Further, an eight-layer substrate can be obtained by repeating the same steps.
【0012】[0012]
【発明の効果】本発明によれば、小径のブラインドバイ
アホール用孔の形成加工に際し、絶縁層の残渣を残すこ
となく確実で、しかも効率のよい孔明けが可能であるた
め、自ずと接続信頼性の高いブラインドバイアホールを
有する多層プリント配線板を効率よく製造することがで
きる。According to the present invention, when forming a hole for a blind via hole having a small diameter, it is possible to form the hole reliably and efficiently without leaving a residue of the insulating layer. A multilayer printed wiring board having a blind via hole having a high density can be efficiently manufactured.
【0013】特に、UV露光及び現像処理にてブライン
ドバイアホール用孔の形成が可能なため、レーザーによ
る孔明けでは発生が避けられない内層回路上の絶縁層の
残膜の心配がなく、しかも量産する場合、連続加工がで
き量産性が高い。また、生産設備が、従来の設備で可能
なためレーザー装置のような高価な装置を使用しなくて
すみ、コストの面でも製造効率に優れる。In particular, since a hole for a blind via hole can be formed by UV exposure and development processing, there is no need to worry about a residual film of an insulating layer on an inner circuit, which is inevitably generated by laser drilling. In this case, continuous processing is possible and mass productivity is high. Further, since the production equipment can be realized by the conventional equipment, it is not necessary to use an expensive apparatus such as a laser apparatus, and the production efficiency is excellent in terms of cost.
【図1】本発明方法の実施の形態を示す各工程の断面説
明図。FIG. 1 is a sectional explanatory view of each step showing an embodiment of a method of the present invention.
1:片面銅張積層板 2:ブラインドバイアホール用貫通孔 2a:ブラインドバイアホール 3:両面銅張積層板 4:内層回路 5:感光性絶縁樹脂膜 5a:不要感光性絶縁樹脂膜 6:スルーホール 6a:メッキスルーホール 7:銅メッキ層 8:外層回路 P:UV光 1: Single-sided copper-clad laminate 2: Through hole for blind via hole 2a: Blind via-hole 3: Double-sided copper-clad laminate 4: Inner layer circuit 5: Photosensitive insulating resin film 5a: Unnecessary photosensitive insulating resin film 6: Through hole 6a: Plating through hole 7: Copper plating layer 8: Outer layer circuit P: UV light
Claims (3)
し、その両回路表面に感光性絶縁樹脂膜を形成する工程
と、当該両感光性絶縁樹脂膜上に、ブラインドバイアホ
ール用貫通孔を施した片面銅張積層板を積層する工程
と、当該ブラインドバイアホール用貫通孔内の感光性絶
縁樹脂膜を露光現像して除去する工程と、当該除去後の
ブラインドバイアホール用貫通孔を用いて内層回路と外
層回路を接続するブラインドバイアホールを形成する工
程とを含むことを特徴とする多層プリント配線板の製造
方法。1. A step of forming a photosensitive insulating resin film on both circuit surfaces by using a substrate having a circuit formed on both sides as a core material, and forming a through hole for a blind via hole on both photosensitive insulating resin films. Laminating the single-sided copper-clad laminate subjected to the above, the step of exposing and developing the photosensitive insulating resin film in the blind via-hole through hole, and removing the blind via-hole through hole using the removed via hole Forming a blind via hole connecting the inner layer circuit and the outer layer circuit.
は感光性絶縁シートで形成されていることを特徴とする
請求項1記載の多層プリント配線板の製造方法。2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein the photosensitive insulating resin film is formed of a photosensitive insulating ink or a photosensitive insulating sheet.
ことを特徴とする請求項1又は2記載の多層プリント配
線板の製造方法。3. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein the photosensitive insulating resin film is of a positive type.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12726998A JPH11330702A (en) | 1998-05-11 | 1998-05-11 | Manufacturing method of multilayer printed wiring board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12726998A JPH11330702A (en) | 1998-05-11 | 1998-05-11 | Manufacturing method of multilayer printed wiring board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11330702A true JPH11330702A (en) | 1999-11-30 |
Family
ID=14955835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12726998A Pending JPH11330702A (en) | 1998-05-11 | 1998-05-11 | Manufacturing method of multilayer printed wiring board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11330702A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112822878A (en) * | 2021-01-31 | 2021-05-18 | 惠州中京电子科技有限公司 | Manufacturing method of variable-frequency high-speed printed circuit board |
-
1998
- 1998-05-11 JP JP12726998A patent/JPH11330702A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112822878A (en) * | 2021-01-31 | 2021-05-18 | 惠州中京电子科技有限公司 | Manufacturing method of variable-frequency high-speed printed circuit board |
CN112822878B (en) * | 2021-01-31 | 2023-07-25 | 惠州中京电子科技有限公司 | Manufacturing method of variable-frequency high-speed printed circuit board |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4642160A (en) | Multilayer circuit board manufacturing | |
US5258094A (en) | Method for producing multilayer printed wiring boards | |
US7488428B2 (en) | Method for forming stacked via-holes in printed circuit boards | |
JP2009060076A (en) | Method of manufacturing multilayer printed circuit board | |
JP2007096312A (en) | Manufacturing method of high-density printed circuit board | |
JPH0590756A (en) | Production of rigid/flexible board | |
KR101811940B1 (en) | Manufacture method of a multilayer circuit board formed with a fine via | |
KR100222752B1 (en) | Manufacturing method of multilayer printed circuit board using laser | |
JP3224803B2 (en) | Circuit board manufacturing method | |
KR100327705B1 (en) | Method of producing a multi-layer printed-circuit board | |
JPH07106765A (en) | Multilayered adhesive sheet and manufacture of multilayered wiring board using same | |
JP2001251054A (en) | Method for manufacturing circuit board for multilayer printed wiring board | |
JP4972753B2 (en) | Method for manufacturing printed circuit board | |
KR20040085374A (en) | Method for making through-hole of multi-layer flexible printed circuit board | |
JP2006148038A (en) | Method of manufacturing high density printed circuit board | |
KR100674316B1 (en) | Via hole formation method using laser drill | |
JPH09232760A (en) | Multilayer printed wiring board and method of manufacturing the same | |
JP2002134918A (en) | Method for manufacturing multilayer printed wiring board | |
JPH11330702A (en) | Manufacturing method of multilayer printed wiring board | |
KR20030037738A (en) | Method for creating blind via holes in printed circuit board | |
JP4045120B2 (en) | Multilayer printed wiring board and manufacturing method thereof | |
JPH11261236A (en) | Multi-layer printed wiring board and manufacture thereof | |
JP2021163893A (en) | Circuit wiring board and wiring pattern formation method | |
KR101128559B1 (en) | Method for forming via hole in printed circuit board | |
JP3310539B2 (en) | Manufacturing method of multilayer printed wiring board |