JPH11304834A - Physical value detecting sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide, with simple configuration, a physical value detecting sensor that can detect at least two of acceleration in triaxial directions and angular velocity about three axes. SOLUTION: A physical quantity sensor 1A has an element 3 provided on a substrate. The element 3 comprises a mass section 31 in a quadrilateral in plan view and support members 32 provided on its four corners. Each support member 32 is a bent bar in an L-shape and each of its end is fixed to four fixing portions 33 respectively provided on the substrate 2. Each support member 32 is elastically deformable, which is able to independently displace the mass portion 31 in X-axis, Y-axis and Z-axis directions relative to the substrate 2. The mass portion 31 is excited in the X-axis direction by a driving electrode 41, and four kinds of physical values in total can be detected by the Y-axis directional detection electrode 42 and the Z-axis directional detection electrode, i.e., angular velocity about the Y-axis and acceleration, and angular velocity about the Z-axis and acceleration.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention is directed to X
The present invention relates to a physical quantity detection sensor that detects angular velocities around respective axes of a Y axis, a Y axis, and a Z axis.

[0002]

2. Description of the Related Art Sensors for detecting inertia, such as an acceleration sensor and an angular velocity sensor, include, for example, an airbag of a car, a traveling control device, a 3D input device relating to virtual reality,
It is used for control devices of various manufacturing equipment.

In recent years, as various devices have been miniaturized, demands for miniaturization of sensors mounted thereon have increased. In particular, there is a great demand for a sensor used for a device held by a person or a device worn by a person.

On the other hand, in a travel control device for an automobile,
Although acceleration in only one axis direction has been measured, measurement of acceleration in multiple axes directions, and further, measurement of angular velocity have been required as control becomes more sophisticated.

[0005] Also, the 3D input device has required detection of acceleration or angular velocity in multiple axes directions from the beginning.

As described above, this type of sensor is required to be compact and capable of detecting acceleration and angular velocity in multiple axes.

[0007] Conventional acceleration sensors and angular velocity sensors are 3
One of the axes (X axis, Y axis and Z axis orthogonal to each other)
Most of them detect an acceleration with respect to an axis or an angular velocity around one axis. In particular, there was no sensor capable of detecting acceleration and angular velocity with one sensor.

Therefore, in order to detect accelerations in a plurality of axes and angular velocities around a plurality of axes, a corresponding number of sensors are required. As a result, the complexity of the structure,
There have been problems such as an increase in the size of the apparatus and a decrease in reliability due to an increase in the number of parts.

[0009]

SUMMARY OF THE INVENTION An object of the present invention is to provide a physical quantity detection sensor capable of detecting at least two of acceleration in three axes and angular velocity around three axes with a simple configuration. It is in.

[0010]

This and other objects are achieved by the present invention which is defined below as (1) to (9).

(1) A physical quantity detection sensor for detecting acceleration and / or angular velocity, comprising: a mass portion; and a support member for supporting the mass portion so as to be displaceable in a three-dimensional direction. Physical quantity detection sensor.

(2) A total of accelerations 6 in the X-axis, Y-axis, and Z-axis directions orthogonal to each other and angular velocities around the respective axes 6
A physical quantity detection sensor for detecting at least two of the three physical quantities, comprising: a mass part; and a support member that supports the mass part so as to be displaceable in a three-dimensional direction. .

(3) The physical quantity detection sensor according to (1) or (2), wherein the support member is entirely or partially formed of an elastic body capable of elastic deformation.

(4) The physical quantity detection sensor according to any one of (1) to (3), wherein the support member has a shape that bypasses a shortest distance connecting the mass portion and the fixed portion.

(5) The physical quantity detection sensor according to any one of the above (1) to (4), wherein the support member has a rod shape bent in an L shape or has such a rod portion.

(6) The physical quantity detection sensor according to any one of (1) to (5), wherein the support member has a ring shape or has such a ring portion.

(7) The physical quantity detection sensor according to any one of (1) to (6), wherein the support member has a mesh structure.

(8) The physical quantity detection sensor according to any one of (1) to (7), wherein the support member has a portion that performs displacement of the mass portion in two or three different axes.

(9) The physical quantity detection sensor according to any one of (1) to (8), wherein the support member is arranged point-symmetrically or line-symmetrically with respect to the center of gravity of the mass part.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a physical quantity detection sensor according to the present invention will be described in detail based on an embodiment shown in the accompanying drawings.

FIGS. 1 and 2 are a plan view and a side view, respectively, showing a first embodiment of a physical quantity detection sensor according to the present invention. In FIG. 1, the illustration of the substrate 2 and the case 5 is omitted. Also, two orthogonal axes on the surface of the substrate 2 will be described as an X axis and a Y axis, respectively, and the thickness direction of the substrate 2 will be described as a Z axis (the three axes are orthogonal to each other).

As shown in FIGS. 1 and 2, a physical quantity detection sensor 1A of the present invention comprises a substrate (base) 2, an element 3 mounted on the substrate 2, and a case installed so as to cover the element 3. 5 is provided.

The element 3 includes a mass part (vibrator) 31 having a quadrangular shape in a plan view, and support members (legs) 32 provided at the four corners. The element 3 is made of, for example, silicon.

Each support member 32 has a rod shape bent in an L-shape, and its ends are fixedly installed on four fixing portions 33 provided on the substrate 2. That is, each support member 32 is shaped so as to bypass the shortest distance connecting the mass part 21 and the fixing part 33. Each support member 32 is elastically deformable, so that the mass portion 31 can be independently displaced with respect to the substrate 2 in three-dimensional directions of the X-axis direction, the Y-axis direction, and the Z-axis direction. I like it.

In this case, the mass portion 31 and each support member 3
2 is installed at a predetermined distance (floating) from the upper surface of the substrate 2, and is also separated from the lower surface (inner surface) of the case 5 by a predetermined distance. These separation distances are set such that the upper surface of the substrate 2 and the lower surface of the case 5 do not contact even if the mass portion 31 is displaced by the maximum amount in the Z axis direction.

The support members 32 are arranged point-symmetrically and line-symmetrically with respect to the center of gravity (center) of the mass portion 31. Thereby, the mass part 31 can be uniformly and stably supported.

On both sides of the mass portion 31 in the X-axis direction, a comb-shaped drive electrode 41 for vibrating the mass portion 31 in the X direction, and displacement of the mass portion 31 in the Y-axis direction is detected as a change in capacitance. A comb-shaped Y-axis direction detection electrode (angular velocity sensor around the Z-axis and a Y-axis direction acceleration sensor) 42 is provided.

A comb-shaped electrode 34 formed at the edge of the mass portion 31 is opposed to each drive electrode 41 in a non-contact manner. Each Y
The comb-shaped electrode 35 formed at the edge of the mass portion 31 faces the axial direction detection electrode 42 in a non-contact manner.

The drive electrode 41 and the Y-axis direction detection electrode 42 are fixedly mounted on the substrate 2.

Further, above and below the mass part 31,
A Z-axis direction detection electrode (angular velocity sensor around the Y-axis and a Z-axis direction acceleration sensor) 43 composed of a pair of planar electrodes for detecting displacement of the mass portion 31 in the Z-axis direction as a change in capacitance.
Is installed. The pair of plane electrodes of the Z-axis direction detection electrode 43 are installed and fixed on the upper surface of the substrate 2 and the lower surface of the case 5, respectively.

The detection of the angular velocity by the physical quantity detection sensor 1A as described above will be described.

Vt + Vd sin (ωt) and Vt−Vd sin (ωt) are respectively applied to the drive electrodes 41 and 41 facing each other in the X-axis direction.
t) (Vt: DC bias voltage, Vd sin (ω
t): When a driving AC voltage is applied, an electrostatic force is generated on the corresponding comb-shaped electrode 34. The mass part 31 is X
It is vibrated (resonates) in the axial direction. In this case, in order to increase the detection sensitivity of the Coriolis force, the frequency of the vibration in the X-axis direction is set to a frequency substantially equal to the resonance frequency of the mass unit 31 in the same direction.

In this state, when an angular velocity (Ω _Z ) around the Z-axis acts on the mass portion 31, the Y-axis perpendicular to the vibrating X-axis is applied.
A Coriolis force is generated in the axial direction, and the mass section 31 vibrates in the Y-axis direction.

This vibration is detected by the Y-axis direction detection electrode 42 as a change in capacitance. That is, the mass part 3
When the distance between the one comb-shaped electrode 35 and the Y-axis direction detection electrode 42 changes, the capacitance changes.

The vibration in the Y-axis direction caused by the Coriolis force has the same frequency and a phase advance of 90 ° with respect to the vibration in the X-axis direction by the drive electrode 41. And
The magnitude of the angular velocity about the Z axis corresponds to the amplitude of the vibration in the Y axis direction. Thus, the angular velocity (Ω _Z ) around the Z axis can be detected.

When an angular velocity (Ω _Y ) about the Y axis acts on the mass section 31 in a state where the mass section 31 is vibrating in the X axis direction, the mass section 31 moves in the Z axis direction perpendicular to the vibrating X axis. A Coriolis force is generated, and the mass section 31 vibrates in the Z-axis direction.

This vibration is detected by the Z-axis direction detection electrode 43 as a change in capacitance. That is, the mass part 3
When the distance between the first and second Z-axis direction detection electrodes 43 changes, the capacitance changes.

The vibration in the Z-axis direction caused by the Coriolis force has the same frequency and a phase advance of 90 ° with respect to the vibration in the X-axis direction by the drive electrode 41. And
The magnitude of the angular velocity about the Y axis corresponds to the amplitude of the vibration in the Z axis direction. Thereby, the angular velocity (Ω _Y ) around the Y axis can be detected.

Next, detection of acceleration by the physical quantity detection sensor 1A will be described. When the mass of the mass part 31 is m and the acceleration α _Y in the Y-axis direction is applied to the mass part 31,
The inertia force f _Y = −mα _Y y acts on the mass portion 31. Here, since the displacement Δy of the mass portion 31 in the Y direction is proportional to the acceleration α _Y , the displacement Δy
Is detected as a change in capacitance, the acceleration α
_Y is found. Therefore, Y-axis direction detection electrode 42, and detects an angular velocity Omega _Z around the Z axis as described above, also functions as an acceleration sensor for detecting acceleration alpha _Y in the Y-axis direction.

Similarly, the acceleration α in the Z-axis direction is
_{When Z} is added, the displacement Δz of the mass portion 31 in the Z direction is
It is proportional to the acceleration alpha _Z, by detecting the displacement Δz as a change in capacitance by the Z-axis direction detection electrode 43, the acceleration alpha _Z is obtained. Therefore, Z-axis direction detection electrode 43 detects the angular velocity Omega _Y around the Y axis as described above, functions as an acceleration sensor for detecting acceleration alpha _Z in the Z-axis direction.

The signal output from the Y-axis direction detection electrode 42 is the sum of the signals based on the acceleration α _Y and the angular velocity Ω _Z as described above. that signal is the one signal by the acceleration alpha _Z and angular velocity Omega _Y is added as described above, these are, for example, by performing the following signal processing, easily separated (extracting or removing) be able to.

That is, the excitation frequency in the X-axis direction (= frequency of vibration in the Y-axis direction due to the Coriolis force generated by the angular velocity Ω _Z; = _Z due to the Coriolis force generated by the angular velocity Ω _Y
Since the frequency of the vibration in the axial direction is set to a value sufficiently larger than the frequencies of the accelerations α _Y and α _Z , only the acceleration component can be easily extracted by installing a low-pass filter (LPF), for example. .

For the same reason, the angular velocity component is easily detected by removing the acceleration component by installing a high-pass filter (HPF) and synchronously detecting the remaining component at the excitation frequency in the X-axis direction. Obtainable.

As described above, the physical quantity detection sensor 1A
Thus, the element 3 can detect a total of four kinds of physical quantities: the angular velocity and acceleration around the Y axis and the angular velocity and acceleration around the Z axis.

In this case, the physical quantity detection sensor 1A does not superimpose the Coriolis forces on each other or the vibrations applied and the Coriolis force in any axial direction. Therefore, each physical quantity can be detected with high accuracy. Can be.

Further, since a plurality of physical quantities can be detected by such one element 3, the structure of the sensor is simple, the number of parts is small, and it contributes to miniaturization.

It is preferable that the physical quantity detection sensor according to the present invention can detect at least two physical quantities among acceleration in three axes and angular velocities around three axes. The present invention is not limited to the first embodiment. In this case, the detection electrodes in the respective axial directions provided around the element are appropriately arranged according to the type of the physical quantity to be detected. For example, when the physical quantity detection sensor 1A can further detect acceleration in the X direction, the displacement of the mass section 31 in the X-axis direction is placed on both sides of the mass section 31 in the vertical direction in FIG. A comb-shaped X-axis direction detection electrode similar to the Y-axis direction detection electrode 42 that detects a change in capacitance may be provided.

The method of vibrating the mass portion 31 may be, for example, a method using a piezoelectric effect, an electromagnetic force or the like, in addition to the method based on the electrostatic attraction described in the first embodiment.

The detection of the displacement of the mass portion 31 in each direction may be based on the change in capacitance described in the first embodiment, or may be based on the piezoresistive effect, the piezoelectric effect, or the like. .

FIG. 3 shows a second example of the physical quantity detection sensor according to the present invention.
FIG. 4 shows the structure and operation of the physical quantity detection sensor according to the third embodiment of the present invention. FIG. 5 shows the structure and operation of the physical quantity detection sensor according to the fourth embodiment of the present invention. FIG. 6 is a diagram showing the structure and operation of a physical quantity detection sensor according to a fifth embodiment of the present invention;
FIG. 7 is a diagram showing the structure and operation of a physical quantity detection sensor according to a sixth embodiment of the present invention. FIG. 8 is a diagram showing the structure and operation of a physical quantity detection sensor according to a seventh embodiment of the present invention.
Is a diagram showing the structure and operation of a physical quantity detection sensor according to an eighth embodiment of the present invention; FIG. 10 is a diagram showing the structure and operation of a ninth embodiment of the physical quantity detection sensor according to the present invention;
1 is a diagram showing the structure and operation of a physical quantity detection sensor according to a tenth embodiment of the present invention; FIG. 12 is a diagram showing the structure and operation of an eleventh embodiment of the physical quantity detection sensor of the present invention;
3 is a diagram showing the structure and operation of a physical quantity detection sensor according to a twelfth embodiment of the present invention, and FIG. 14 is a diagram showing the structure and operation of a physical quantity detection sensor according to a thirteenth embodiment of the present invention. In each of these figures, the upper part represents the state of displacement of the mass part in the X-axis direction, the middle part represents the state of displacement of the mass part in the Y-axis direction, and the lower part represents the state of displacement of the mass part in the Z-axis direction by dotted lines. I have. In each of these figures, the substrate, case,
The description of the comb-shaped electrode, the drive electrode, and each detection electrode formed on the mass part is omitted.

Hereinafter, based on these drawings, the first to thirteenth embodiments of the physical quantity detection sensor according to the present invention will be described.
The description will focus on the differences from the embodiment. In each of these embodiments, the support member has a shape that bypasses the shortest distance connecting the mass part and the fixed part, as in the first embodiment. Thereby, 3 parts by mass
The displacement in the axial direction can be easily performed, and the response is improved.

The physical quantity detection sensor 1B shown in FIG. 3 includes a support member 32b at four corners of a mass portion 31b of the element 3b.
However, each is formed by combining a pair of L-shaped rod-shaped members to form a square. That is, the fixing portion 33b
And the corner of the mass portion 31b are supported by two L-shaped beams (bar-shaped members).

According to this configuration, the rigidity (springiness) of the support member 32b is increased, and the rotation (twist) of the mass portion 31b around the Z axis can be effectively prevented.

In the physical quantity detection sensor 1C shown in FIG. 4, the four fixing portions 33c are respectively connected to the mass portions 31c of the element 3c.
The fixing portion 33c and the four corner portions of the mass portion 31c are connected to each other by a pair of L-shaped rod-shaped support members 32c.

According to this configuration, the rotation (twist) of the mass portion 31c around the Z axis can be effectively prevented, and the space near the four corners of the mass portion 31c can be reduced, for example, by the mounting portion of the processing circuit. Can be used effectively.

In the physical quantity detection sensor 1D shown in FIG. 5, the four fixed portions 33d are respectively connected to the mass portion 31d of the element 3d.
, And has a structure in which the fixing portion 33d and the center of the four sides of the mass portion 31d are connected by a support member 32d. In this case, the support member 32d has a rectangular shape and one side thereof (or each of a pair of opposing sides).
And an extended portion 321d extended from the shape.

According to this configuration, the substantial length of the support member 32d is increased, and the displacement of the mass portion 31d in the three axial directions can be increased (enlarged) in a small area. Further, similarly to the physical quantity detection sensor 1C, the mass section 31d
There is also an advantage that the space near the four corners can be effectively used for, for example, a mounting portion of a processing circuit.

In the physical quantity detection sensor 1E shown in FIG. 6, the four fixing portions 33e are respectively connected to the mass portions 31e of the element 3e.
And has a structure in which the fixed portion 33e and the four sides of the mass portion 31e are connected by a mesh-shaped (honeycomb-shaped) support member 32e.

According to this configuration, when the mass portion 31e is displaced, the deformation of the support member 32e adds a small deformation for each mesh, so that there is no stress concentration, and the strength and durability of the support member 32e. Can be improved. Therefore, for example, even when a large force acts instantaneously,
e can be prevented from being damaged.

The shape of the mesh of the support member 32e is not limited to the lattice shape as shown in the figure, but may be any shape as long as it can be deformed.

In the physical quantity detection sensor 1F shown in FIG. 7, the mass part 31f of the element 3f has a circular shape, and has a ring-shaped fixing part 33f on its outer periphery. The outer periphery of the mass part 31f and the fixing part 33f are meshed. It has a structure in which it is connected by a support member 32f having a honeycomb shape.

According to this configuration, the mesh structure has the same effect as that of the physical quantity detection sensor 1E, and the mass portion 31f is circular and supports the entire circumference, so that the balance of support is maintained. Is better.

It should be noted that the mass part 31f and the fixing part 33f may be installed reversely, that is, a fixing part may be provided at the center of the ring-shaped mass part, and these may be supported by similar supporting members. it can.

The shape of the mesh of the support member 32f is not limited to the lattice shape shown in the figure, but may be any shape as long as it can be deformed.

In the physical quantity detection sensor 1G shown in FIG. 8, the mass part 31g of the element 3g has a circular shape, and has four fixing parts 33g on its outer periphery.
3g is connected by a mesh-like (honeycomb-like) support member 32g.

According to this configuration, the same effect as that of the physical quantity detection sensor 1F is obtained, and when the supporting member 32g is deformed due to the displacement of the mass portion 31g, the supporting member 32g
Can escape (move) in the X-axis direction and the Y-axis direction, so that the displacement amount of the mass portion 31g can be increased, and the detection accuracy can be increased.

The shape of the mesh of the support member 32g is not limited to the lattice shape as shown in the figure, but may be any shape as long as it can be deformed.

In the physical quantity detection sensor 1H shown in FIG. 9, the mass part 31h of the element 3h has a circular shape, and has four fixing parts 33h on its outer periphery. Are connected by a ring-shaped (annular or elliptical annular) support member 32h.

According to this configuration, since the support member 32h has no corner, stress concentration on the corner is prevented or reduced, and the strength and durability of the support member 32h can be increased. Further, the spring property of the support member 32h can be improved.

In the physical quantity detection sensor 1I shown in FIG. 10, the mass part 31i of the element 3i has a ring shape (annular or elliptical ring), has a fixed part 33i at the center thereof, and has an inner periphery 4i of the mass part 31i. The location and the fixing portion 33i are connected by a ring-shaped (annular or elliptical annular) support member 32i.

According to this configuration, the same effect as that of the physical quantity detection sensor 1H is obtained, and since the fixed portion 33i does not exist around the mass portion 31i, the degree of freedom of installation of the drive electrode, the detection electrode and the like is high. There are advantages.

In the physical quantity detection sensor 1J shown in FIG. 11, the mass 3j of the element 3j has a circular shape, and has four fixing portions 33j on its outer periphery. Are connected by a support member 32j having the same shape as the support member 32d.

According to this configuration, the mass portion 31j has the same effect as the physical quantity detection sensor 1F due to the circular shape, and similarly to the physical quantity detection sensor 1D, the three-axis direction of the mass portion 31j has a small area. Can be increased.

In the physical quantity detection sensor 1K shown in FIG. 12, the mass portion 31k of the element 3k has a circular shape, and has four fixing portions 33k on its outer periphery. The outer periphery of the mass portion 31k and four fixing portions 33k Are connected by a T-shaped (including an L-shaped portion) support member 32k. In this case, one support member 32k is connected to each of two adjacent fixing portions 33k.

According to this configuration, the mass part 31k has the same effect as the physical quantity detection sensor 1F by making the mass part 31k circular, and the substantial length of the support member 32k becomes longer, so that the mass part 31k of the mass part 31k has a small area. The amount of displacement in the three axial directions can be increased. Further, the spring property of the support member 32k is also excellent.

In the physical quantity detection sensor 1M shown in FIG. 13, the mass part 31m of the element 3m has a quadrangular shape (or may be a circle or the like), and has four fixed parts 33m on its outer periphery. Each of a pair of opposing sides of 31m is connected by a loop-shaped (connecting two L-shaped portions) support member 32m.

According to this configuration, the substantial length of the support member 32m is increased, and the displacement of the mass portion 31m in the three axial directions can be increased with a small area.

In the physical quantity detection sensor 1N shown in FIG. 14, the mass part 31n of the element 3n has a rectangular frame shape (an annular or elliptical ring shape may be used), and has a fixed part 33n at the center thereof. A structure in which four inner peripheral portions of 31n and a fixing portion 33n are connected by a support member 32n.

The support member 32n is a first member extending in the Y-axis direction.
Support member 321n and second support member 3 extending in the X-axis direction
22n, and a relay member 323n that connects them. When the mass part 31n is displaced in the X-axis direction, the first support member 321n is mainly deformed, and when the mass part 31n is displaced in the Y-axis direction, the second support member 322n is mainly distorted. Deform. When the mass part 31n is displaced in the Z-axis direction, both the first support member 321n and the second support member 322n are deformed.

According to this configuration, since there is no fixing portion 33n around the mass portion 31n, there is an advantage that the degree of freedom of installation of the drive electrode, the detection electrode, and the like is high, and the mass portion 31n in the X-axis direction is provided. The displacement and the displacement in the Y-axis direction are respectively applied to different portions (the first support member 321n and the second support member 32
2n), it is possible to more effectively prevent such interference and contribute to improvement in detection accuracy.

As a modification of the physical quantity detection sensor 1N, the support member is provided with a displacement of the mass part in three axial directions (X axis direction,
(Displacements in the Y-axis direction and the Z-axis direction) may be carried by different portions.

Although the physical quantity detection sensor of the present invention has been described based on the illustrated embodiments, the present invention is not limited to these embodiments.

In particular, the conditions such as the shape, structure, number, arrangement pattern, and the like of the mass part, the fixing part, and the support member can be of any configuration other than those shown.

The physical quantity detection sensor of the present invention as described above can be realized by using a micromachining technique such as a bulk surface.

[0085]

As described above, according to the present invention, acceleration and / or angular velocity can be detected with a simple structure and a small number of parts. Can be provided.

Therefore, it is possible to reduce the size, and in particular, it is possible to increase the electrode area and the like of the electrodes arranged on the periphery without increasing the installation space. Improvement can be achieved.

Further, mass production is possible using micromachining technology or the like, and cost reduction can be achieved.

[Brief description of the drawings]

FIG. 1 is a plan view showing a first embodiment of a physical quantity detection sensor according to the present invention.

FIG. 2 is a side view showing the first embodiment of the physical quantity detection sensor of the present invention.

FIG. 3 is a diagram showing the structure and operation of a physical quantity detection sensor according to a second embodiment of the present invention.

FIG. 4 is a view showing the structure and operation of a physical quantity detection sensor according to a third embodiment of the present invention.

FIG. 5 is a diagram showing the structure and operation of a physical quantity detection sensor according to a fourth embodiment of the present invention.

FIG. 6 is a diagram showing the structure and operation of a physical quantity detection sensor according to a fifth embodiment of the present invention.

FIG. 7 is a view showing the structure and operation of a physical quantity detection sensor according to a sixth embodiment of the present invention.

FIG. 8 is a view showing the structure and operation of a physical quantity detection sensor according to a seventh embodiment of the present invention.

FIG. 9 is a diagram showing the structure and operation of a physical quantity detection sensor according to an eighth embodiment of the present invention.

FIG. 10 is a diagram showing the structure and operation of a ninth embodiment of a physical quantity detection sensor according to the present invention.

FIG. 11 is a view showing the structure and operation of a physical quantity detection sensor according to a tenth embodiment of the present invention.

FIG. 12 is a diagram showing the structure and operation of a physical quantity detection sensor according to an eleventh embodiment of the present invention.

FIG. 13 is a diagram showing the structure and operation of a twelfth embodiment of a physical quantity detection sensor according to the present invention.

FIG. 14 is a view showing the structure and operation of a physical quantity detection sensor according to a thirteenth embodiment of the present invention.

[Explanation of symbols]

 1A to 1K, 1M, 1N Physical quantity detection sensor 2 Substrate 3 Element 31 Mass part 31b to 31k, 31m, 31n Mass part 32 Support member 32b to 32k, 32m, 32n Support member 321d Extension 321n First support member 322n Second support Member 323n Relay member 33 Fixed part 33b to 33k, 33m, 33n Fixed part 34 Comb electrode 35 Comb electrode 41 Drive electrode 42 Y-axis direction detection electrode 43 Z-axis direction detection electrode 5 Case

Claims (9)

[Claims] 1. A physical quantity detection sensor for detecting acceleration and / or angular velocity, comprising: a mass part; and a support member that supports the mass part so as to be displaceable in a three-dimensional direction. Detection sensor. 2. A physical quantity detection sensor for detecting at least two of a total of six physical quantities of an acceleration in each of X-axis, Y-axis and Z-axis orthogonal to each other and an angular velocity around each axis. And a support member that supports the mass portion so as to be displaceable in a three-dimensional direction. 3. The physical quantity detection sensor according to claim 1, wherein the support member is entirely or partially formed of an elastic body that can be elastically deformed. 4. The physical quantity detection sensor according to claim 1, wherein the support member is shaped so as to bypass a shortest distance connecting the mass part and the fixed part. 5. The physical quantity detection sensor according to claim 1, wherein the support member has a rod shape bent in an L shape or has such a rod portion. 6. The physical quantity detection sensor according to claim 1, wherein the support member has a ring shape or has such a ring portion. 7. The physical quantity detection sensor according to claim 1, wherein the support member has a mesh structure. 8. The support member is provided with two different mass parts.
The physical quantity detection sensor according to any one of claims 1 to 7, wherein the physical quantity detection sensor has a portion that performs displacement in three axial directions. 9. The physical quantity detection sensor according to claim 1, wherein the support member is arranged point-symmetrically or line-symmetrically with respect to the center of gravity of the mass part.