JPH11297808A - Carrier for discoidal work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a carrier of a structure, wherein droplets do never remain on the contact parts of support parts with a work. SOLUTION: This carrier 1A supports the outer periphery of a discoidal work W put in the vertical direction, and has a plurality of support members 2 which are positioned at intervals narrower than the diameter of this work W. Here, these support members 2 respectively have each of a plurality of V-shaped recessed parts, which are made contact with the outer periphery of the work W in a state that the outer periphery of the work W is fitted in the V-shaped recessed parts, each suction opening 14 for droplet which is opened in such a way as to face each recessed part, each of connection holes for connecting with suction means, such as a vacuum pump, and each of communicating holes for communicating the connection holes with the suction openings 14 and droplets adhered to the contact parts of the members 2 with the work W are forcedly sucked by the above suction means through the suction openings 14.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention accommodates disk-shaped workpieces such as semiconductor wafers, aluminum or glass substrates for magnetic disks or other ceramic substrates, various electronic components, optical components or mechanical components. The carrier to perform.

[0002]

2. Description of the Related Art As a carrier for accommodating a disk-type work of this type, a carrier as shown in FIGS. 7 and 8 is conventionally known. This carrier has a V-shaped circumferential groove 4
The three rod-shaped support members 40 each having an outer periphery 1 are supported between the left and right side plates 42, 42, and the work W is vertically supported in the circumferential grooves 41 of the support members 40. It is used in a cleaning step of brush-holding the held work W in a cleaning liquid, a hot pure water drying step of dipping in warm pure water and then pulling up to dry with residual heat.

In general, however, in the above-described conventionally known carriers, droplets tend to remain on a contact portion between the work W and the support member 40, and drying of this portion is delayed, so that a water mark is formed on the outer peripheral portion of the work W. However, there is a problem that it is easy to adhere. Such adhesion of the water mark is not a problem for a work that does not require very high cleaning accuracy, but a work that requires a high degree of cleaning accuracy, such as a magnetic disk substrate, is a cause of quality deterioration. Must be avoided as much as possible. For that purpose, it is necessary to use a carrier that does not leave droplets at the contact portion with the workpiece.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a carrier in which droplets do not remain at a contact portion with a workpiece.

[0005]

According to the present invention, there is provided, in accordance with the present invention, a plurality of supports which support an outer periphery of a vertically disposed disk-shaped work and are located at a smaller interval than the diameter of the work. A member, and the support member has a plurality of recesses with which the outer periphery of the workpiece abuts in a fitted state, a suction port for droplets opening to face each of the recesses, and a connection port for connecting to a suction unit. And a communication hole for communicating the connection port with the suction port.

In the carrier having the above-mentioned structure, the outer periphery of a plurality of works is vertically placed on each recess formed in the support member, and the work is brush-cleaned in a cleaning liquid. It is used in a warm pure water drying process where it is immersed in water, pulled up and dried with residual heat. At this time, the carrier pulled up from the cleaning solution, hot pure water, etc.
The connection port of each support member is connected to suction means such as a vacuum pump by an appropriate means, and the liquid droplets attached to the contact portion between the work and the recess are forcibly sucked from the suction port. As a result, the liquid droplets adhering to the contact portion between the work and the concave portion are completely removed without remaining, thereby preventing drying delay and water mark adhesion due to the remaining liquid droplets.

According to a specific mode of the present invention, the supporting member includes a first member having a concave portion connected to the corrugation, and a second member overlapping the first member. The suction port and the communication hole facing the bottom of each recess are formed between the first member and the second member.

[0008] Thus, by forming the support member by superimposing the two members, the suction port and the communication hole can be easily formed between these two members.

According to another specific embodiment of the present invention,
The suction port is formed by a gap between the first member and the second member, and the gap is open in a continuous state along the bottom of each of the concave portions.

According to a preferred embodiment of the present invention, the first
The concave portion is formed at the upper end of the member, and the upper end surface of the second member is formed at a lower position than the concave portion, and the upper end surface is inclined so as to become gradually lower as the distance from the concave portion increases.

According to another preferred embodiment of the present invention,
Each of the support members has a plate shape and is attached to the stand member in a vertical direction. In this case, it is preferable that the attachment point of the support member to the stand member is formed at a position lower than the lowermost end of the work supported by the support member.

With this configuration, for example, when the carrier is used for drying with hot pure water, the mounting point is exposed from the liquid surface after the workpiece is completely lifted from the hot pure water. Can be prevented from being affected by the waving of the liquid surface due to the exposure of the liquid.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Some embodiments of the carrier according to the present invention will be described below in detail with reference to the drawings. 1 and 2 show a state in which a plurality of disc-shaped works W are vertically accommodated in a carrier 1A of the first embodiment. The carrier 1A supports a plurality of workpieces W which support the outer periphery of the work W. And a stand member 3 for attaching these support members 2.

The stand member 3 includes left and right side plates 5 and 5.
The three mounting rods 6 are mounted sideways with different heights so that the center mounting rod 6 is lowest, and the lower end of the support member 2 is fixed to each mounting rod 6 with a screw 7. Have been. In the figure, reference numeral 8 denotes a connecting rod for connecting the left and right side plates 5 and 5 to each other.

Each of the support members 2 is in the form of a rectangular plate, and has a plurality of concave portions 10 connected in a waveform at the upper end thereof. The three support members 2 are arranged at intervals smaller than the diameter of the work W, and the outer periphery of the work W is supported by these support members 2 at three points.

As is apparent from FIGS. 3 and 4, each of the support members 2 is composed of a first and second plate 2 made of synthetic resin, metal or other ceramic.
A liquid droplet suction port 14 opening to the bottom of each of the concave portions 10 and a suction means such as a vacuum pump are provided between these members 11 and 12 which are coupled in a superposed state. A connection port 15 for connection and a communication hole 16 communicating the connection port 15 with the suction port 14 are formed.

The configuration of this point will be described in more detail. The first member 11 has a thick main body 11a occupying most of the first member 11, and a thin wall extending upward from the upper end of the main body 11a. And the supporting portion 11b. The corrugated concave portion 10 is formed at an upper end portion of the support portion 11b, and a concave step portion 18 having a length extending over each concave portion 10 is formed at the upper end of the thick main body portion 11a. At the same time, a concave groove 19 extending downward from the central portion of the concave step portion 18 is formed. 20 are formed.

On the other hand, the second member 12 includes a main body 12a having a shape and a size corresponding to the main body 11a of the first member 11, and a first member 1 from the upper end of the main body 12a.
The head 12b protrudes in a hook shape toward one side, and the head 12b has a protruding length a from the main body 12a.
The first member 11 is formed to be slightly smaller than the protruding length b of the main body portion 11a from the support portion 11b, and has a height h substantially equal to the height from the upper end of the main body portion 11a to the bottom of the concave portion 10. It is formed, and the upper end surface of the head portion 12b is inclined so as to become gradually lower as the distance from the concave portion 10 increases. The connection port 15 is formed in the center of the second member 12 at a position corresponding to the groove 19 in the first member 11.

The first member 11 and the second member 12
When polymerization is performed, the gap formed between the support portion 11b and the head portion 12b forms the continuous liquid drop suction port 14 along each recess 10 and
The communication groove 16 is formed by the concave step portion 18 and the concave groove 19.

As described above, the support member 2 is divided into two members 1
The suction port 14 and the communication hole 16 can be easily formed inside the support member 2 by forming the concave step portion 18 and the concave groove 19 in these members. it can.

In the drawings, reference numerals 23a and 23b denote mounting holes for mounting a screw member connecting the two members 11 and 12, and 24 denotes fixing holes for fixing the support member 2 to the mounting rod 6 with screws 7. is there.

The carrier 1A having the above-described structure includes a cleaning step of vertically placing the outer periphery of the work W in the concave portion 10 of each of the support members 2 and brush-cleaning the work W in a cleaning liquid. Is immersed in warm pure water, pulled up, and dried with residual heat. At this time, the carrier 1A pulled up from the cleaning liquid, hot pure water, or the like is connected to the suction port such as a vacuum pump at the connection port 15 of each support member 2 so that droplets adhering to the contact portion between the workpiece W and the recess 10 are removed. It is forcibly sucked from the suction port 14. As a result, the liquid droplets adhering to the contact portion between the work W and the concave portion 10 are completely removed without remaining, thereby preventing drying delay and water mark adhesion due to the remaining liquid droplets.

When each of the support members 2 is connected to the suction means, the connection port 15 of each support member 2 may be individually connected to the suction means via a pipe joint and piping.
A common external connection port is provided on any of the side plates 5 in
It is easy to connect the connection port 15 of each support member 2 to the external connection port by piping, and to connect the suction means to the external connection port. In this case, a through hole is formed inside each of the mounting rods 6, a common external connection port is formed in any one of the mounting rods 6 or the side plate 5, and the support member 2 is attached to each of the mounting rods 6. The connection port 15 of the support member 2 and the through hole inside the mounting rod 6 may be configured to communicate with each other.

The carrier 1A is shown in FIGS.
As shown in the figure, the mounting point between each support member 2 and the mounting rod 6 is
It is desirable to provide the work W supported by the support member 2 at a position lower than the lowermost end, whereby the carrier 1A
Is used in the hot pure water drying step, the mounting point is exposed from the liquid surface after the workpiece W is completely lifted from the hot pure water, and thus is affected by the waving of the liquid surface accompanying the exposure of the mounting point. Can not be.

In the illustrated embodiment, the droplet suction ports 14 are formed so as to extend continuously along each recess 10, but this suction port 14 is formed independently for each recess 10. It may be. Further, the outer periphery of the work W is supported at three points by using three support members 2,
The number of the support members 2 may be two or four or more.
Moreover, these support members 2 need not be provided completely vertically, and may be slightly inclined.

FIG. 5 shows a second embodiment of the carrier of the present invention. The carrier 1B has the same basic structure as the known carrier 1A as shown in FIGS. Is provided with a mechanism for sucking droplets. That is, in the carrier 1B of the second embodiment, a rod-shaped support member 32 provided with a plurality of concave portions 30 formed of V-shaped circumferential grooves is provided between the left and right side plates 35, 35 to support these members. The support member 32 vertically supports the outer periphery of the work W in the concave portion 30 of the member 32, and a communication hole 36 is provided inside each support member 32, and a suction port 34 communicating with the communication hole 36 is provided in each of the concave portions 30. It is configured such that the communication hole 36 of each support member 32 is connected to the suction means through a common connection port 35 provided in any of the side plates 35.

[0027]

As described above, according to the present invention, a suction port for a droplet is provided in a concave portion for supporting a work provided in a support member, and a droplet attached to a contact portion with a work is sucked through the suction port. Forcibly sucks, so that no droplets remain at the contact portion between the work and the support member. As a result, it is possible to reliably prevent a delay in drying due to the remaining droplets and adhesion of a water mark. can do.

[Brief description of the drawings]

FIG. 1 is a partially broken side view showing a first embodiment of a carrier according to the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is an enlarged sectional view of one support member.

FIG. 4 is an exploded perspective view of one support member.

FIG. 5 is a partially broken side view showing a second embodiment of the carrier according to the present invention.

FIG. 6 is an enlarged view of a main part of FIG. 5;

FIG. 7 is a partially cutaway side view of a conventional carrier.

FIG. 8 is a front view of the carrier of FIG. 7;

[Explanation of symbols]

1A, 1B Carrier 2, 32 Support member 3 Stand member 10, 30 Recess 11 First member 12 Second member 14, 34 Suction port 15, 35 Connection port 16, 36 Communication hole W Work

Claims (6)

[Claims] A plurality of supporting members for supporting an outer periphery of a disk-shaped work placed in a vertical direction, the supporting members being located at intervals smaller than a diameter of the work; A plurality of recesses contacting with each other, a suction port for droplets opening to face each recess, a connection port for connecting to suction means, and a communication hole communicating the connection port and the suction port. A carrier for a disc-shaped work, characterized in that: 2. The carrier according to claim 1, wherein the supporting member comprises a first member having a concave portion connected to the corrugation, and a second member overlapping the first member.
The suction port facing the bottom of each recess is formed between the member and the second member, and a communication hole is formed. 3. The carrier according to claim 2, wherein the suction port comprises a gap between the first member and the second member, and the gap is formed continuously along the bottom of each of the concave portions. It is characterized by being open in a continuous state. 4. The carrier according to claim 2, wherein the recess is formed at an upper end of the first member.
An upper end surface of the second member is formed at a position lower than the concave portion, and the upper end surface is inclined so as to become gradually lower as the distance from the concave portion increases. 5. The carrier according to claim 1, wherein each of said support members has a plate shape and is attached to a stand member in a vertical direction. . 6. The carrier according to claim 5, wherein a point of attachment of each of said support members to a stand member is lower than a lowermost end of a work supported by said support members.