[go: up one dir, main page]

JPH11289148A - Substrate surface treatment method - Google Patents

Substrate surface treatment method

Info

Publication number
JPH11289148A
JPH11289148A JP10107056A JP10705698A JPH11289148A JP H11289148 A JPH11289148 A JP H11289148A JP 10107056 A JP10107056 A JP 10107056A JP 10705698 A JP10705698 A JP 10705698A JP H11289148 A JPH11289148 A JP H11289148A
Authority
JP
Japan
Prior art keywords
substrate
surface treatment
wiring board
printed wiring
concave surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10107056A
Other languages
Japanese (ja)
Inventor
Akihiro Demura
彰浩 出村
Koji Yamada
浩司 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP10107056A priority Critical patent/JPH11289148A/en
Publication of JPH11289148A publication Critical patent/JPH11289148A/en
Pending legal-status Critical Current

Links

Landscapes

  • Screen Printers (AREA)
  • Laser Beam Processing (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To easily take out a surface-treated substrate, regardless of the size of the substrate which can be positioned easily. SOLUTION: In this method, an elastic substrate 2 is placed on a table 1, the substrate 2 is surface-treated, and then the substrate 2 is taken out from the table 1. The surface of the table 1 has an arc-shaped recessed shape. For surface treatment, the substrate 2 is deflected into an arc shape along the arc- shaped recessed surface 11 of the table 1. Then, the substrate 2 is surface- treated. Subsequently, the substrate 2 is formed almost rectilinear by coursing the deflection to be eliminated. Then, the side face 21 of the substrate 2 is held by a chuck, and the substrate is taken out from the table 1.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【技術分野】本発明は,例えばプリント配線板等の基板
への表面処理時において,基板を容易に搬出することが
できる,表面処理方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment method that can easily carry out a substrate when performing surface treatment on a substrate such as a printed wiring board.

【0002】[0002]

【従来技術】基板への表面処理としては,例えばプリン
ト配線板へのソルダーレジスト印刷がある。該印刷方法
としては,従来,以下の方法が取られている。即ち,図
7に示すごとく,吸着孔8を多数有する中央板91を設
けたテーブル9の上に,基板2を載置する。次いで,上
記吸着孔8より吸引を行うことによって,基板2を位置
決め固定する。次いで,その上にスクリーン5を降ろし
ソルダーレジストをスキージ51を用いて印刷する。
2. Description of the Related Art As a surface treatment for a substrate, for example, there is a solder resist printing on a printed wiring board. Conventionally, the following method has been adopted as the printing method. That is, as shown in FIG. 7, the substrate 2 is placed on a table 9 provided with a central plate 91 having a large number of suction holes 8. Next, the substrate 2 is positioned and fixed by suction through the suction holes 8. Next, the screen 5 is lowered thereon, and a solder resist is printed using a squeegee 51.

【0003】印刷後,スクリーン5を取り上げ,図8に
示すごとく,上記テーブル9の中央板91のみを,基板
2を吸着させたままの状態で移動させる。次いで,吸着
を解除しテーブル中央板91よりはみ出している基板2
の両側面21をチャック95で把持することにより,次
工程へ搬出する。
After printing, the screen 5 is taken up, and as shown in FIG. 8, only the center plate 91 of the table 9 is moved while the substrate 2 is attracted. Next, the substrate 2 that has released the suction and protrudes from the table center plate 91
The two side surfaces 21 are carried out by the chuck 95 to carry out to the next step.

【0004】[0004]

【解決しようとする課題】しかしながら,上記従来の方
法には以下の問題がある。即ち,上記基板がテーブル中
央板の幅より小さい場合には,上述の搬出作業の際,基
板の両側面をチャックで把持することができない。何故
ならば,基板全面がテーブル中央部に載置されている状
態では,はみ出している基板部分が無く,チャックで把
持できる部分が無いからである。従って,上記従来の基
板の表面処理方法では,一定のサイズより小さい基板の
処理は非常に困難である。
However, the above conventional method has the following problems. That is, when the substrate is smaller than the width of the table center plate, both sides of the substrate cannot be gripped by the chuck during the unloading operation. This is because when the entire surface of the substrate is placed at the center of the table, there is no protruding portion of the substrate and no portion that can be gripped by the chuck. Therefore, it is very difficult to treat a substrate smaller than a certain size by the conventional substrate surface treatment method.

【0005】本発明は,かかる従来の問題点に鑑みてな
されたもので,位置決めが容易で,かつ基板の大きさに
関係なく,表面処理後の基板の搬出を容易に行うことが
できる基板の表面処理方法を提供しようとするものであ
る。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and is intended to facilitate the positioning of a substrate after the surface treatment, regardless of the size of the substrate. It is intended to provide a surface treatment method.

【0006】[0006]

【課題の解決手段】請求項1の発明は,テーブル上に弾
性を有する基板を載置,固定し,該基板の表面に表面処
理を施し,その後上記基板をテーブルより搬出する表面
処理方法において,上記テーブルの表面は弧状凹面を有
しており,上記表面処理に当っては,上記テーブルの弧
状凹面に沿って上記基板を弧状に撓ませ,次いで上記基
板の表面に表面処理を施し,次いで,上記撓み状態を解
消させて上記基板を略直線状となし,その後,該基板の
側面を把持してテーブルより搬出することを特徴とする
基板の表面処理方法にある。
According to a first aspect of the present invention, there is provided a surface treatment method for mounting and fixing an elastic substrate on a table, performing a surface treatment on the surface of the substrate, and then carrying out the substrate from the table. The surface of the table has an arcuate concave surface, and in the surface treatment, the substrate is bent in an arc shape along the arcuate concave surface of the table, and then the surface of the substrate is subjected to a surface treatment. The substrate surface treatment method is characterized in that the bent state is eliminated, the substrate is made substantially linear, and then the side surface of the substrate is gripped and carried out of a table.

【0007】本発明において最も注目すべき点は,テー
ブルの表面は弧状凹面を有しており,表面処理に当って
は,上記テーブルの弧状凹面に沿って上記基板を弧状に
撓ませること,表面処理後は基板を元の状態即ち略直線
状に戻し,この状態で基板を把持して搬出することにあ
る。
The most notable point in the present invention is that the surface of the table has an arcuate concave surface, and in the surface treatment, the substrate is bent in an arc along the arcuate concave surface of the table. After the processing, the substrate is returned to the original state, that is, substantially straight, and the substrate is held and carried out in this state.

【0008】上記基板を撓ませる方法としては,例えば
上記テーブルに移動可能なピンを設け,これを上記テー
ブル中央方向に移動させることにより行う方法がある。
As a method of bending the substrate, for example, there is a method of providing a movable pin on the table and moving the pin toward the center of the table.

【0009】次に,本発明の作用効果につき説明する。
本発明においては,まず基板に,テーブルの上面方向へ
向かう力を加え,基板を上記のごとくテーブルの弧状凹
面に沿って,これに接触させた状態に撓ませる。そし
て,基板に表面処理を施す。そして,その後,撓み状態
を解消する。
Next, the operation and effect of the present invention will be described.
In the present invention, first, a force is applied to the substrate toward the upper surface of the table, and the substrate is bent along the arcuate concave surface of the table as described above so as to be brought into contact therewith. Then, a surface treatment is performed on the substrate. Then, the bent state is eliminated.

【0010】このとき,上記テーブルの表面は弧状凹面
を有しているため,上記のように,撓み状態を解消させ
て上記基板を略直線状となした際には,該基板の中央部
がテーブルより浮いた状態となる。即ち,弾性を有する
上記基板は,その復元力により略直線状となる。そし
て,弧状凹面を有する上記テーブル上において,上記基
板はその中央部が浮いた状態となる。そのため,上記基
板の両側面中央部をチャック等により把持することが可
能となり,表面処理後の基板搬送を容易に行うことがで
きる。
At this time, since the surface of the table has an arcuate concave surface, as described above, when the bent state is eliminated and the substrate is made substantially linear, the central portion of the substrate is bent. It will be floating above the table. That is, the elastic substrate becomes substantially linear due to its restoring force. Then, on the table having the arcuate concave surface, the substrate is in a state in which the center portion is floating. For this reason, the center of both sides of the substrate can be gripped by a chuck or the like, and the substrate can be easily transported after the surface treatment.

【0011】従って,本発明によれば,位置決めが容易
で,かつ基板の大きさに関係なく,表面処理後の基板の
搬出を容易に行うことができる基板の表面処理方法が得
られる。
Therefore, according to the present invention, there is provided a substrate surface treatment method which facilitates positioning and allows easy carrying out of a substrate after surface treatment irrespective of the size of the substrate.

【0012】次に,請求項2の発明のように,上記基板
は,プリント配線板とすることができる。この場合に
は,薄板であるプリント配線板の表面処理を,容易かつ
効率的に行うことができる。
Next, as in the second aspect of the present invention, the substrate can be a printed wiring board. In this case, the surface treatment of the thin printed wiring board can be easily and efficiently performed.

【0013】次に,請求項3の発明のように,上記表面
処理はプリント配線板上へのソルダーレジストの印刷と
することができる。この場合には,プリント配線板上へ
のソルダーレジストの印刷を,容易かつ効率的に行うこ
とができる。
Next, the surface treatment may be printing of a solder resist on a printed wiring board. In this case, the solder resist can be easily and efficiently printed on the printed wiring board.

【0014】次に,請求項4の発明のように,上記表面
処理は基板上へのレーザーによるマーキングとすること
ができる。この場合には,基板上へのレーザーによるマ
ーキングを,容易かつ効率的に行うことができる。ま
た,基板を円弧状に設置できるため,レーザーの照射距
離が一定となり,マーキングをより正確に行うことがで
きる。
Next, the surface treatment may be performed by laser marking on the substrate. In this case, marking by laser on the substrate can be performed easily and efficiently. In addition, since the substrate can be placed in an arc shape, the irradiation distance of the laser becomes constant, and marking can be performed more accurately.

【0015】次に,請求項5の発明のように,上記表面
処理はプリント配線板のパターン形成におけるレジスト
露光であることが好ましい。この場合には,プリント配
線板上へのパターン形成におけるレジスト露光を,容易
かつ効率的に行うことができる。
Next, it is preferable that the surface treatment is a resist exposure in forming a pattern on a printed wiring board. In this case, resist exposure in pattern formation on the printed wiring board can be performed easily and efficiently.

【0016】また,基板を円弧状に配置することによ
り,基板上の各ポイントにおける光源からの距離を均等
とすることができる。更には,光照射が基板に対し垂直
に行われるため,露光オーバー,露光不足,或いは,露
光かぶりといった不具合が発生しにくく,より正確なパ
ターン形成を行うことができる。
Further, by disposing the substrate in an arc shape, the distance from the light source at each point on the substrate can be made uniform. Furthermore, since light irradiation is performed perpendicular to the substrate, problems such as overexposure, underexposure, and exposure fogging are less likely to occur, and more accurate pattern formation can be performed.

【0017】[0017]

【発明の実施の形態】実施形態例1 本発明の実施形態例1にかかる基板の表面処理方法につ
いて,図1〜図4を用いて説明する。本例においては,
基板としてのプリント配線板上へ,表面処理としてのソ
ルダーレジストの印刷を行う方法について説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 A substrate surface treatment method according to Embodiment 1 of the present invention will be described with reference to FIGS. In this example,
A method of printing a solder resist as a surface treatment on a printed wiring board as a substrate will be described.

【0018】まず,図1(A),(B)に示すごとく,
テーブル1上に弾性を有する基板2を載置する。次に,
図1(C)に示すごとく,上記テーブル1の弧状凹面1
1に沿って上記基板2を弧状に撓ませる。
First, as shown in FIGS. 1A and 1B,
A substrate 2 having elasticity is placed on a table 1. next,
As shown in FIG. 1 (C), an arc-shaped concave surface 1 of the table 1 is provided.
The substrate 2 is bent in an arc shape along 1.

【0019】次いで図2(A)に示すごとく,該基板2
の上に上記弧状凹面11に沿った形状のスクリーン5を
降ろし,ソルダーレジストをスキージ51を用いて印刷
した後,上記スクリーン5を取り上げる。次いで,図2
(B)に示すごとく,上記撓み状態を解消させて上記基
板2を略直線状となす。そして,図2(C)に示すごと
く,上記基板2の側面21をチャック3により把持し
て,該基板2をテーブル1より次工程へ搬出する。
Next, as shown in FIG.
The screen 5 having the shape along the arcuate concave surface 11 is dropped on the surface of the substrate, and after printing a solder resist using a squeegee 51, the screen 5 is picked up. Then, FIG.
As shown in FIG. 3B, the substrate 2 is made substantially linear by eliminating the bending state. Then, as shown in FIG. 2C, the side surface 21 of the substrate 2 is gripped by the chuck 3, and the substrate 2 is carried out of the table 1 to the next step.

【0020】次に,上記につき,それを実施するための
装置及び方法につき詳しく説明する。本発明にかかる,
印刷用テーブル1は,図3,図4に示すごとく,その表
面に弧状凹面11を有している。該弧状凹面11には一
端に移動可能な位置決めピン4が,他端には固定された
固定ピン40が,それぞれ2本づつ設置してある。2本
の位置決めピン4は,長穴42内においてスライド可能
に設けてある。
Next, an apparatus and a method for implementing the above will be described in detail. According to the present invention,
As shown in FIGS. 3 and 4, the printing table 1 has an arcuate concave surface 11 on its surface. The arcuate concave surface 11 is provided with two positioning pins 4 movable at one end and two fixed pins 40 fixed at the other end. The two positioning pins 4 are slidably provided in the elongated hole 42.

【0021】即ち,図4に示すごとく,上記弧状凹面1
1には,上記位置決めピン4がスライドするための長穴
42が設けられている。そして,上記位置決めピン4
は,上記弧状凹面11の下方において,水平なレール4
4上にスライド可能に取り付けられた台座43に固定さ
れている。更に,該台座43は,油圧式のシリンダー6
のロッド61に取り付けられている。なお,上記位置決
めピン4及び固定ピン40は,上下に伸縮可能に設けら
れている。
That is, as shown in FIG.
1 has an elongated hole 42 through which the positioning pin 4 slides. And the positioning pin 4
The horizontal rail 4 is located below the arcuate concave surface 11.
4 is fixed to a pedestal 43 slidably mounted on the pedestal 43. Further, the base 43 is provided with a hydraulic cylinder 6.
Attached to the rod 61. The positioning pins 4 and the fixing pins 40 are provided so as to be able to expand and contract vertically.

【0022】次に,本例の作用効果につき説明する。即
ち,印刷に当っては,図1(A),(B)に示すごと
く,まずテーブル1上に基板2を置く。このとき,該基
板2を位置決めピン4と固定ピン40との間に位置決め
する。
Next, the operation and effect of this embodiment will be described. That is, in printing, the substrate 2 is first placed on the table 1 as shown in FIGS. At this time, the substrate 2 is positioned between the positioning pins 4 and the fixing pins 40.

【0023】次いで,図1(C)に示すごとく,上記シ
リンダー6により,ロッド61を伸ばして,上記位置決
めピン4をテーブル1の中央方向に移動させ,上記基板
2を固定ピン40の方向に押し付けることによって,基
板2を撓ませる。該基板2は薄板で弾力性を有している
ので,もともとテーブル1の弧状凹面11の方向へ若干
撓んでいる。そのため,上記位置決めピン4により,容
易に上記テーブル1の弧状凹面11上へ撓む。
Then, as shown in FIG. 1C, the rod 61 is extended by the cylinder 6, the positioning pin 4 is moved toward the center of the table 1, and the substrate 2 is pressed in the direction of the fixing pin 40. This causes the substrate 2 to bend. Since the substrate 2 is a thin plate and has elasticity, it is originally slightly bent in the direction of the arcuate concave surface 11 of the table 1. Therefore, the positioning pin 4 easily bends onto the arcuate concave surface 11 of the table 1.

【0024】次に,図2(A)に示すごとく,上記のご
とく,弧状凹面11上にある基板2の上に,スクリーン
5を降ろし,スキージ51を用いてソルダーレジスト印
刷を行う。このとき,上記位置決めピン4及び固定ピン
40は,上記スクリーン5の下降と共に下降する。
Next, as shown in FIG. 2A, the screen 5 is lowered onto the substrate 2 on the arcuate concave surface 11 and solder resist printing is performed using a squeegee 51 as described above. At this time, the positioning pins 4 and the fixed pins 40 are lowered together with the screen 5.

【0025】次に,上記スクリーン5を取り上げ,図2
(B)に示すごとく位置決めピン4を戻す。これにより
基板2は撓み状態が解消され,その復元力により略直線
状になる。そして,上記テーブル1の表面は弧状凹面1
1を有しているため,図2(B)に示すごとく,撓み状
態を解消させて上記基板2を略直線状となした際には,
該基板2の中央部22がテーブル1より浮いた状態とな
る。
Next, the screen 5 is taken up, and FIG.
Return the positioning pins 4 as shown in FIG. Thereby, the bent state of the substrate 2 is eliminated, and the substrate 2 becomes substantially linear due to the restoring force. The surface of the table 1 has an arcuate concave surface 1.
As shown in FIG. 2 (B), when the bent state is eliminated and the substrate 2 is made substantially linear as shown in FIG.
The central portion 22 of the substrate 2 is in a state of floating above the table 1.

【0026】即ち,上記位置決めピン4が外側へ戻る
と,弾性を有する上記基板2の復元力により該基板2は
略直線状となる。そして,弧状凹面11を有する上記テ
ーブル1上において,上記基板2はその中央部22が浮
いた状態となる。そこで,図2(C)に示すごとく,チ
ャック3により上記基板2の両側面21中央部を把持
し,搬出する。そのため,印刷後の搬送を容易に行うこ
とができる。
That is, when the positioning pins 4 return to the outside, the substrate 2 becomes substantially linear due to the restoring force of the substrate 2 having elasticity. Then, on the table 1 having the arcuate concave surface 11, the substrate 2 is in a state where the central portion 22 thereof is floating. Then, as shown in FIG. 2 (C), the center of both sides 21 of the substrate 2 is gripped by the chuck 3 and carried out. Therefore, conveyance after printing can be easily performed.

【0027】また,上述のごとく位置決めピン4を中央
方向へ移動させることにより,容易に基板2をテーブル
1上に密着させることができる。そのため,吸引機を用
いて基板2を吸着させる等の手段を用いずに固定するこ
とができ,装置も簡単である。
By moving the positioning pins 4 toward the center as described above, the substrate 2 can be easily brought into close contact with the table 1. Therefore, the substrate 2 can be fixed without using means such as sucking the substrate 2 using a suction device, and the apparatus is simple.

【0028】従って,本発明によれば,位置決めが容易
で,かつ基板の大きさに関係なく,処理後の基板の搬出
を容易に行うことができる,プリント配線板の印刷方法
が得られる。
Therefore, according to the present invention, there is provided a method for printing a printed wiring board, which can easily perform positioning and can easily carry out the processed substrate regardless of the size of the substrate.

【0029】実施形態例2 本例は,図5に示すごとく,プリント配線板上へレーザ
ーによるマーキングを施す例を示したものである。即
ち,まず,実施形態例1と同様の方法により基板2をテ
ーブル1の弧状凹面11に沿って撓ませることによりテ
ーブル1に固定する。次いで,図5に示すごとく,レー
ザー照射源7より上記基板2上にレーザー照射によるマ
ーキングを行う。なお,上記弧状凹面は,円弧状であ
る。その他は,実施形態例1と同様である。
Embodiment 2 As shown in FIG. 5, this embodiment shows an example in which marking is performed on a printed wiring board by laser. That is, first, the substrate 2 is fixed to the table 1 by bending the substrate 2 along the arcuate concave surface 11 of the table 1 in the same manner as in the first embodiment. Next, as shown in FIG. 5, the laser irradiation source 7 performs marking on the substrate 2 by laser irradiation. The arc-shaped concave surface has an arc shape. Other configurations are the same as those of the first embodiment.

【0030】この場合には,レーザー照射源7を上記弧
状凹面の円弧の中心位置に配置することにより,上記基
板2の各ポイントとレーザー照射源7との距離を均等に
することができる。それ故,上記レーザーによるマーキ
ングをより正確に行うことができる。その他は実施形態
例1と同様の作用効果を有する。
In this case, the distance between each point of the substrate 2 and the laser irradiation source 7 can be equalized by arranging the laser irradiation source 7 at the center position of the arc of the arc-shaped concave surface. Therefore, the marking by the laser can be performed more accurately. Others have the same operation and effects as the first embodiment.

【0031】実施形態例3 本例は,図6に示すごとく,プリント配線板のパターン
形成におけるレジスト露光を行う例を示したものであ
る。即ち,まず,図6に示すごとく,感光性レジスト2
4を表面に施した基板2を,実施形態例1と同様の方法
でテーブル1の弧状凹面11に沿って撓ませることによ
りテーブル1に固定する。なお,該弧状凹面11は,円
弧状である。次いで,パターン形成用のマスクフィルム
25を上記基板2上に,位置合せを行いつつ設置する。
その後,光源71より光を照射し,露光を行う。その他
は,実施形態例1と同様である。
Embodiment 3 As shown in FIG. 6, this embodiment shows an example in which resist exposure is performed in forming a pattern on a printed wiring board. That is, first, as shown in FIG.
The substrate 2 on which the surface 4 is applied is fixed to the table 1 by bending along the arcuate concave surface 11 of the table 1 in the same manner as in the first embodiment. The arc-shaped concave surface 11 has an arc shape. Next, a mask film 25 for pattern formation is set on the substrate 2 while performing alignment.
Thereafter, light is emitted from the light source 71 to perform exposure. Other configurations are the same as those of the first embodiment.

【0032】この場合には,光源71を実施形態例2と
同様の位置に配置することにより,上記基板2の各ポイ
ントと光源71との距離を均等にすることができる。更
には,マスクフィルム25及び基板2に対し,各ポイン
トにおいて光照射角度を垂直にできる。
In this case, by arranging the light source 71 at the same position as in the second embodiment, the distance between each point of the substrate 2 and the light source 71 can be equalized. Further, the light irradiation angle can be made perpendicular to the mask film 25 and the substrate 2 at each point.

【0033】それ故,基板中央部22と端部23におけ
る光量の差が無くなり,露光オーバー又は露光不足を容
易に抑制することができる。更には,マスクフィルム2
5に対し光照射が垂直に行われるため,露光かぶり等が
発生しにくく,より正確なパターン形成を行うことがで
きる。その他は実施形態例1と同様の作用効果を有す
る。
Therefore, there is no difference in the amount of light between the central portion 22 and the end portion 23 of the substrate, so that overexposure or underexposure can be easily suppressed. Furthermore, mask film 2
Since the light irradiation is performed perpendicularly to 5, the exposure fogging and the like hardly occur, and more accurate pattern formation can be performed. Others have the same operation and effects as the first embodiment.

【0034】[0034]

【発明の効果】上述のごとく,本発明によれば,位置決
めが容易で,かつ基板の大きさに関係なく,表面処理後
の基板の搬出を容易に行うことができる基板の表面処理
方法を提供しようとするものである。
As described above, according to the present invention, there is provided a method of treating a surface of a substrate which can be easily positioned and which can easily carry out the substrate after the surface treatment irrespective of the size of the substrate. What you want to do.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施形態例1にかかる,基板の載置から位置決
めまでの工程説明図。
FIG. 1 is an explanatory diagram of a process from placement of a substrate to positioning of the substrate according to the first embodiment.

【図2】実施形態例1にかかる,基板の表面処理から搬
出までの工程説明図。
FIG. 2 is an explanatory view of a process from surface treatment of the substrate to unloading according to the first embodiment.

【図3】実施形態例1にかかる,表面処理用テーブルの
斜視図。
FIG. 3 is a perspective view of a surface treatment table according to the first embodiment.

【図4】実施形態例1にかかる,表面処理用テーブルの
平面図及び側面図。
FIG. 4 is a plan view and a side view of the surface treatment table according to the first embodiment.

【図5】実施形態例2にかかる,レーザー照射によるマ
ーキングの説明図。
FIG. 5 is an explanatory diagram of marking by laser irradiation according to the second embodiment.

【図6】実施形態例3にかかる,レジスト露光の説明
図。
FIG. 6 is an explanatory diagram of resist exposure according to a third embodiment.

【図7】従来例にかかる,プリント配線板の印刷方法を
表す断面図。
FIG. 7 is a cross-sectional view illustrating a method of printing a printed wiring board according to a conventional example.

【図8】従来例にかかる,プリント配線板印刷後の基板
搬出の様子を表す平面図。
FIG. 8 is a plan view showing a state of carrying out a substrate after printing a printed wiring board according to a conventional example.

【符号の説明】[Explanation of symbols]

1...テーブル, 11...弧状凹面, 2...基板, 21...側面, 3...チャック, 4...位置決めピン, 40...固定ピン, 5...スクリーン, 6...シリンダー, 1. . . Table, 11. . . 1. arcuate concave surface; . . Substrate, 21. . . Aspect, 3. . . Chuck, 4. . . Positioning pin, 40. . . Fixing pin, 5. . . Screen, 6. . . cylinder,

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 テーブル上に弾性を有する基板を載置,
固定し,該基板の表面に表面処理を施し,その後上記基
板をテーブルより搬出する表面処理方法において,上記
テーブルの表面は弧状凹面を有しており,上記表面処理
に当っては,上記テーブルの弧状凹面に沿って上記基板
を弧状に撓ませ,次いで上記基板の表面に表面処理を施
し,次いで,上記撓み状態を解消させて上記基板を略直
線状となし,その後,該基板の側面を把持してテーブル
より搬出することを特徴とする基板の表面処理方法。
1. An elastic substrate is placed on a table,
In the surface treatment method of fixing and subjecting the surface of the substrate to surface treatment, and then carrying out the substrate from the table, the surface of the table has an arcuate concave surface. The substrate is bent along an arcuate concave surface in an arc shape, then the surface of the substrate is subjected to a surface treatment, and then the bent state is eliminated to make the substrate substantially linear, and then the side surface of the substrate is gripped. A substrate surface treatment method, wherein the substrate is carried out from a table.
【請求項2】 請求項1の発明において,上記基板は,
プリント配線板であることを特徴とする基板の表面処理
方法。
2. The invention according to claim 1, wherein the substrate is
A method for treating a surface of a substrate, which is a printed wiring board.
【請求項3】 請求項1又は2において,上記表面処理
はプリント配線板上へのソルダーレジストの印刷である
ことを特徴とする基板の表面処理方法。
3. The method according to claim 1, wherein said surface treatment is printing of a solder resist on a printed wiring board.
【請求項4】 請求項1又は2において,上記表面処理
は基板上へのレーザーによるマーキングであることを特
徴とする基板の表面処理方法。
4. The method according to claim 1, wherein the surface treatment is marking on the substrate with a laser.
【請求項5】 請求項1又は2において,上記表面処理
はプリント配線板上へのパターン形成におけるレジスト
露光であることを特徴とする基板の表面処理方法。
5. The method according to claim 1, wherein the surface treatment is resist exposure in forming a pattern on a printed wiring board.
JP10107056A 1998-04-02 1998-04-02 Substrate surface treatment method Pending JPH11289148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10107056A JPH11289148A (en) 1998-04-02 1998-04-02 Substrate surface treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10107056A JPH11289148A (en) 1998-04-02 1998-04-02 Substrate surface treatment method

Publications (1)

Publication Number Publication Date
JPH11289148A true JPH11289148A (en) 1999-10-19

Family

ID=14449393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10107056A Pending JPH11289148A (en) 1998-04-02 1998-04-02 Substrate surface treatment method

Country Status (1)

Country Link
JP (1) JPH11289148A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6834582B2 (en) * 2001-06-21 2004-12-28 Exatec, Llc Apparatus for printing on a curved substrate
JP2007038641A (en) * 2005-06-28 2007-02-15 Semiconductor Energy Lab Co Ltd Printing device and printing method
US7182019B2 (en) 2004-01-23 2007-02-27 Exatec, Llc Screen printing apparatus
EP1303400B1 (en) * 2000-06-21 2008-11-26 Exatec, LLC. Method and apparatus for printing on a curved substrate
CN108407444A (en) * 2018-04-16 2018-08-17 南京汇康玻璃制品有限公司 A kind of glass printing anti-scratch pedestal
JPWO2019244844A1 (en) * 2018-06-19 2020-07-30 馬鞍山市明珠電子科技有限公司 Pin fixed position display program and pin fixed position display device
EP3882031A4 (en) * 2019-01-24 2022-07-06 Agc Inc. Base material retention device, base material retention method, and curved surface screen printing device equipped with base material retention device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1303400B1 (en) * 2000-06-21 2008-11-26 Exatec, LLC. Method and apparatus for printing on a curved substrate
US6834582B2 (en) * 2001-06-21 2004-12-28 Exatec, Llc Apparatus for printing on a curved substrate
US7182019B2 (en) 2004-01-23 2007-02-27 Exatec, Llc Screen printing apparatus
JP2007038641A (en) * 2005-06-28 2007-02-15 Semiconductor Energy Lab Co Ltd Printing device and printing method
CN108407444A (en) * 2018-04-16 2018-08-17 南京汇康玻璃制品有限公司 A kind of glass printing anti-scratch pedestal
JPWO2019244844A1 (en) * 2018-06-19 2020-07-30 馬鞍山市明珠電子科技有限公司 Pin fixed position display program and pin fixed position display device
EP3882031A4 (en) * 2019-01-24 2022-07-06 Agc Inc. Base material retention device, base material retention method, and curved surface screen printing device equipped with base material retention device

Similar Documents

Publication Publication Date Title
JP3699575B2 (en) IC package mounting method
JPH11289148A (en) Substrate surface treatment method
CN101276143A (en) Method and system for patterning a mask layer
JP2008155557A (en) Printing method and printing device
KR20190003006A (en) Tray for flexible substrate
JPH10256713A (en) Method of mounting ic package
JP2006017642A (en) Pattern inspection device
JP2002134597A (en) Stage equipment
JP2000250227A (en) Exposure device
TW201035694A (en) Exposure device
KR102554316B1 (en) Apparatus for treating plate and method for treating plate
KR20190053378A (en) Tray for flexible substrate
JP2007324404A (en) Array mask support device
JP2002251017A (en) Aligner
JP4212094B2 (en) Exposure equipment
JP2002283533A (en) Work holding device for printing table
JP3023058B2 (en) Unnecessary resist exposure device on wafer
JP2676278B2 (en) Gap control method in glass substrate exposure apparatus
JPS63117492A (en) Work stage structure of thick film hybrid printer
JPH06177028A (en) Support for circuit board for photoresist application and photoresist application using same
JP3557671B2 (en) Screen printing equipment for printed wiring boards
JP3623961B2 (en) Method for local curing of semiconductor integrated circuit
JP6990990B2 (en) Board transfer holding device and board transfer holding method
JP2002160080A (en) Method and device for laser beam working
JPH0846398A (en) Positioning mechanism for board