JPH112764A - Optical opening and closing device, display device and manufacture of optical opening and closing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical opening/closing device, a display device and manufacture of the optical opening/closing device with high availability of light and obtaining a high contrast ratio. SOLUTION: Both ends of a flexible member 2 having a transparent part and an opaque part are fixed to a first transparent substrate 5, a second transparent substrate 8 opposite to each other at a prescribed interval. A first transparent electrode 3 is formed on the flexible member 2, and a second transparent electrode 6, a third transparent electrode 9 are formed respectively on the first transparent substrate 5, the second transparent substrate 8. A drive power source 14 supplies power between the first transparent electrode 3 and the second transparent electrode 6, and between the first transparent electrode 3 and the third transparent electrode 9. By controlling the power from the this drive power source 14, the flexible member 2 is deformed, and whether the part of the flexible member 2 corresponding to an optical opening/closing area 300 is made the transparent part or the opaque part is controlled.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light switching device for blocking and transmitting an incident light beam, and more particularly to a light switching device, a display device, and a light switching device for blocking and transmitting an incident light beam by deforming a flexible member. The present invention relates to a device manufacturing method.

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open No. 6-222290 discloses a display device which transmits and blocks light using a light opening / closing member.

[0003] Here, a transparent region and an opaque region are formed on a glass substrate, and an opaque light opening / closing member (shutter) is arranged in the opaque region when transmitting light. The light opening / closing member (shutter) slides and is disposed in the transparent area. Thus, transmission and blocking of light are controlled, and a desired image is displayed.

[0004]

However, in the display device having the light opening / closing member described in JP-A-6-222290, the opaque area is always opaque irrespective of the transmission or blocking of light. Since it must have an area equal to or greater than the transmission region, a sufficient aperture ratio cannot be obtained. Similarly, the opaque area is always opaque irrespective of whether light is transmitted or blocked, so that sufficient contrast cannot be obtained. There was a problem that.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a light switching device, a display device, and a method for manufacturing the light switching device, which have high light use efficiency and can obtain a high contrast ratio. The purpose is to do.

[0006]

According to a first aspect of the present invention, there is provided an optical switching device for blocking and transmitting a light beam incident on a light switching region, the light switching device having the light switching region, and opposing at a predetermined interval. And a flexible member having a transparent portion and an opaque portion formed at one end fixed to the first substrate and the other end fixed to the second substrate. ,
By deforming the flexible member so as to be adsorbed to the first substrate side, a portion corresponding to the light opening / closing area of the flexible member is made the transparent portion, and the flexible member is By deforming so as to adsorb to the second substrate side,
And a drive unit that sets a portion of the flexible member corresponding to the light opening / closing region as the opaque portion.

[0007] The optical switching device according to the second aspect is the first aspect.
5. The optical switching device according to claim 1, wherein the driving unit includes: a flexible member electrode formed on the flexible member; two substrate electrodes formed on the first substrate and the second substrate; A power supply unit that controls deformation of the flexible member by supplying power between a flexible member electrode and the substrate electrode;
It is characterized by comprising.

According to a third aspect of the present invention, there is provided an optical switching device.
Alternatively, the optical switching device according to claim 2, wherein the first
The distance between the substrate and the second substrate is g, and the length of the movable portion of the transparent portion and the opaque portion of the flexible member excluding the fixed portion with the first substrate or the second substrate is a. Where 1.8 <a / g <2.2.

According to a fourth aspect of the present invention, there is provided an optical switching device.
The optical switching device according to any one of claims 3 to 3,
An opaque portion of the flexible member or the first substrate,
A portion of the second substrate other than the light opening / closing region is coated with a metal film.

[0010] A display device according to a fifth aspect is characterized in that the light switching devices according to any one of the first to fourth aspects are arranged on a plane or a curved surface according to a fixed arrangement rule. .

A display device according to a sixth aspect of the present invention is the display device according to the fifth aspect, wherein a color filter is formed on at least one of the first substrate and the second substrate. .

According to a seventh aspect of the present invention, there is provided a method of manufacturing an optical switchgear according to the second aspect.
Forming the substrate electrode on the first substrate, forming an insulating film on the substrate electrode on the first substrate, applying a photoresist on the insulating film, Patterning a shape of the opaque portion of the flexible member, forming a spacer that defines a distance between the first substrate and the second substrate, and tilting the first substrate to form the photo Forming a transparent polymer material forming a main part of the flexible member on the resist and on one side surface; and forming the flexible member electrode on the polymer material while the first substrate is tilted. Forming, forming a metal film in a region corresponding to the opaque portion of the flexible member, and applying an adhesive to an upper surface of the spacer and a part of an upper surface of the flexible member. And forming the substrate electrode on the second substrate. And forming an insulating film on the substrate electrode on the second substrate, and the insulating film opposes the first substrate and the second substrate via the adhesive. And bonding the photoresist, and etching the photoresist.

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a light switching device having a flexible member according to an embodiment of the present invention.

Here, between two transparent electrode plates facing each other with a gap, both ends are fixed and the length is longer than the distance between the fixed portions, and two optical characteristics of a transparent region and an opaque region are different. A light opening and closing device and a display device that open and close light by using a band-shaped flexible member having a shape and changing an opening ratio according to a shape change generated in response to an electric signal will be described.

FIG. 1 and FIG. 2 are diagrams showing the configuration and principle of the optical switching device of the present invention.

FIG. 1 is a diagram showing a case where the channel 11 is non-transmissive and a channel 12 is transmissive. FIG. 2 is a diagram showing a case where the channel 11 is transmissive and the channel 12 is non-transparent. In both figures, light enters from the lower side of the paper and exits from the upper side.

In FIG. 1, the light switch device 1 has a flexible member 2, a first transparent substrate 5, and a second transparent substrate 8.

The flexible member 2 has a strip shape and has a first transparent electrode 3 on its surface and a mask 4 on a part of its surface, and the portion where the mask 4 is formed becomes an opaque region. The portion where the mask 4 is not formed becomes a transparent region.

The first transparent substrate 5 has a second transparent electrode 6 on its surface, and a first insulating film 7 on its surface. The second transparent electrode 6 is patterned according to the shape of the flexible member 2. A third transparent electrode 9 is provided on the surface of the second transparent substrate 8, and a second insulating film 1 is provided on the surface thereof.
0 is provided. The third transparent electrode 9 is patterned according to the shape of the flexible member 2.

One end of the transparent region and one end of the opaque region of the flexible member 2 are connected to a first transparent substrate 5 and a second transparent substrate 8.
Are fixed to the substrates 5 and 8 respectively. The flexible member is provided in a buckled shape so that the height (h) is equal to or less than half of the length (l).

The above-mentioned flexible member 2, the second transparent electrode 6,
By arranging a plurality of third transparent electrodes 9, a plurality of light transmitting regions are formed.

The first transparent substrate 5 and the second transparent substrate 8
It is fixed by a spacer 13 with a predetermined gap length g. Here, the gap length is set to 7 as an example.
It was set to 0 μm.

The dimensions of the flexible member 2 are, for example, 20 μm, 50 μm in length and 50 μm in height.

In the optical switching device having the above-described configuration, a method of applying a voltage to the first transparent electrode 3 of the flexible member 2, the second transparent electrode 6 of the transparent substrate, and the third transparent electrode 9 is described. By
By switching the shape of the flexible member 2, it is possible to select whether the flexible member is to be attracted to the first transparent substrate 5 side or to the second transparent substrate 8 side. This makes it possible to select whether the portion corresponding to the light opening / closing region 300 is a transparent region or an opaque region.

Next, the principle of operation of the light switching device will be described.

The first transparent electrode 3 and the second
When the transparent electrode 6 is grounded and a positive voltage is applied to the third transparent electrode 9, the opaque area of the flexible member 2 covered with the mask 4 as shown in FIG. Adsorb to the transparent substrate 8 side. Therefore, the light incident from the vertical direction of the first transparent substrate 5 of the light switching device 1
Is cut off.

Conversely, the first transparent electrode 3 of the channel 11
While the third transparent electrode 9 is grounded,
When a positive voltage is applied to the first transparent substrate 5, as shown in FIG. 2, the transparent region of the flexible member 2 not covered by the mask 4 is attracted to the first transparent substrate 5 side. Therefore, light is transmitted through the channel 11.

The principle of the light opening and closing is the same in other channels.

The light switch device of the present invention described above does not slide the light switch (shutter) for blocking light as in the prior art, and therefore needs to always block light. Can be made very small, the light transmittance can be increased, and the contrast ratio can be increased.

The relationship between the distance g between the two transparent substrates 5 and 8 and the length a (= 1 + h) of the effective movable portion of the transparent region and the opaque region of the flexible member 2 is 1.8 <a / g <2.2
In this case, the flexible member 2 moves smoothly, light is reliably opened and closed, and the contrast ratio of the light opening and closing device 1 is increased.

In FIGS. 1 and 2, the spacing between the transparent electrodes is shown large for the sake of explanation. However, in practice, the gap between the channels is controlled to several μm, and the leakage of light to adjacent channels is extremely small. Become.

Next, a display device to which the light switching device is applied will be described.

FIG. 3 shows a planar display element 20 in which the light switching devices 1 in FIGS. 1 and 2 are arranged in a matrix on a plane. However, here, only the first transparent substrate 5, the second transparent substrate 8, the spacer 13, the transmissive and opaque displays are shown, and the flexible members and the like are omitted.

Since the state of transmission 21 and non-transmission 22 can be arbitrarily switched by switching the manner of applying a voltage to the second transparent electrode 6 and the third transparent electrode 9 of each channel, it is used as a display element. can do.

FIG. 4 is a diagram showing a color display device to which the light switching device 1 in FIGS. 1 and 2 is applied. Here, 2
The color display element 3 is formed by forming the color filter 31 on at least one of the transparent substrates 5 and 8.
0 is formed.

FIG. 5 shows a modification of the display device shown in FIGS. 3 and 4. One of the two transparent substrates 5 and 8 of the flat display element 20 or the color display element 30 is shown. A display device in which a black mask 41 is formed in a region where a movable region of a flexible member does not adsorb and a light opening / closing effect is not exerted. With such a structure, it is possible to prevent light leaking from the gap between the channels, so that a light shielding effect is improved and a display device with a high contrast ratio can be provided.

Next, a method for manufacturing the light switching device 1 will be described.

6 and 7 are process diagrams for explaining the manufacturing steps. (A) to (o) in the figure show the procedure of the process.

(A) A glass substrate 100 (first transparent substrate 5 in FIGS. 1 and 2) is prepared as a substrate.

(B) On the surface of the glass substrate 100, a transparent electrode 110 (the second transparent electrode 6 in FIGS. 1 and 2) is formed. As the transparent electrode 110, for example, a transparent electrode formed by depositing ITO to a predetermined thickness (for example, 0.05 μm) by a sputtering method or the like can be used.

(C) Next, an insulating film 120 (FIG. 1,
2) is formed. As an example,
Silicon dioxide is formed into a predetermined thickness (for example, 0.1 μm) by, for example, a sputtering method.

(D) Subsequently, a metal film 130 for forming an electrode for electroplating on the surface is patterned and formed in the shape of a spacer (spacer 13 in FIGS. 1 and 2). For example, nickel having a thickness of 0.01 μm is patterned and formed into a spacer shape by a sputtering method.

(E) Next, in order to form a channel,
A photoresist 140 is applied on the insulating film 120 to a predetermined thickness (for example, 50 μm), and is patterned into a shape of an opaque region (for example, the length is 50 μm).

(F) Using the metal film 130 as an electrode, nickel plating 150 having a spacer thickness (for example, 70 μm) is performed by an electrolytic plating method.

(G) The glass substrate 100 is tilted, and a flexible member (flexible member 2 in FIGS. 1 and 2) 160 (eg, PET: polyethylene terephthalate) made of a transparent polymer material is placed on the glass substrate 100 by, for example, vacuum evaporation. A predetermined thickness (for example, 20 μm) is formed by a technique.

(H) While the glass substrate 100 is tilted, the transparent electrode 170 (the first transparent electrode 3 in FIGS. 1 and 2) is made of, for example, ITO by a technique such as a sputtering method to a predetermined thickness (for example, 0). .05 μm).

(I) A region other than the pattern of the opaque region is masked with, for example, a metal mask 180, and a metal 185 (for example, nickel) is formed in a predetermined thickness (for example, 1 μm) on the opaque region by, for example, a sputtering method. .

(J) Glass substrate 200 as another substrate
(The second transparent substrate 8 in FIGS. 1 and 2) is prepared.

(K) On the surface of the glass substrate 200, as the transparent electrode 210 (the third transparent electrode 9 in FIGS. 1 and 2), for example, ITO is formed to a predetermined thickness (for example, 0.05 μm).
Then, a film is formed and patterned by a method such as a sputtering method.

(L) As the insulating film 220 (the second insulating film 10 in FIGS. 1 and 2) on the surface, for example, silicon dioxide 220 is formed to a predetermined thickness (for example, 0.1 μm) by a method such as a sputtering method. Form a film.

(M) Metal mask 1 of glass substrate 100
An adhesive 190 is applied to a part of the surface of the substrate 80 and the surface of the nickel plating 150 serving as a spacer.

(N) The glass substrate 100 and another glass substrate 200 are aligned and joined with an adhesive 190.

(O) Glass substrates 100 and 20 in this state
When 0 is immersed in, for example, a sodium hydroxide solution, the photoresist 140 is removed by etching, and the light switching device 1 is completed.

[0054]

As is clear from the above, according to the present invention, a flexible member having a transparent region and an opaque region, both ends of which are fixed to two substrates facing each other at a predetermined interval, is provided. Depending on which of the two substrates the member adheres to, it is determined whether the region for opening and closing the light is a transparent region or an opaque region.

For this reason, the opening and closing of light is reliable, the transmittance is high, and the contrast ratio is high.

It is desirable that the flexible member be attracted to the substrate by electrostatic force because power consumption can be reduced.

If the relationship between the distance g between the two substrates and the length a of the effective movable portion of the transparent region and the opaque region of the flexible member is 1.8 <a / g <2.2, light The movement of the opening and closing device is smooth and the contrast ratio is high.

Further, since the opaque area is covered with the metal film, the light shielding power is high and the contrast ratio is high.

Further, since the light switching devices as described above are arranged in a matrix on a plane, a display device having a high transmittance and a high contrast ratio can be realized.

Since a color filter is formed on one of the two substrates, a color display device having a high transmittance and a high contrast ratio can be realized.

If the light switch is manufactured by using a semiconductor manufacturing process, a low-cost and high-definition light switch can be realized.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration and a principle of a light switching device as an example of the present invention when light is blocked.

FIG. 2 is a diagram illustrating a configuration and a principle of a light switching device as an example of the present invention when light is transmitted.

FIG. 3 is a diagram illustrating a configuration example of a display device of the present invention.

FIG. 4 is a diagram illustrating a configuration example of a color display device of the present invention.

FIG. 5 is a diagram showing a modification of the color display device of FIG.

FIG. 6 is a process diagram illustrating a method for manufacturing a light switching device and a display device of the present invention.

FIG. 7 is a process chart for explaining a process following FIG. 6;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Optical switch device 2 Flexible member 3 1st transparent electrode 4 Mask 5 1st transparent substrate 6 2nd transparent electrode 7 1st insulating film 8 2nd transparent substrate 9 3rd transparent electrode 14 Drive power supply Reference Signs List 20 flat display element 30 color display element 31 color filter 41 black mask 300 light opening / closing area

Claims (7)

[Claims] 1. A light switching device for blocking and transmitting a light beam incident on a light switching region, comprising: a first substrate and a second substrate having the light switching region and facing at a predetermined interval; An opaque portion is formed, a flexible member having one end fixed to the first substrate and the other end fixed to the second substrate, and the flexible member being attracted to the first substrate side By making the portion corresponding to the light opening / closing region of the flexible member a transparent portion, and deforming the flexible member so as to be attracted to the second substrate side,
A drive unit for setting a portion of the flexible member corresponding to the light opening / closing area as the opaque portion. 2. The optical switching device according to claim 1, wherein the driving unit is formed on a flexible member electrode formed on the flexible member, and on the first substrate and the second substrate. And a power supply unit that controls the deformation of the flexible member by supplying power between the flexible member electrode and the substrate electrode. Light switchgear. 3. The optical switching device according to claim 1, wherein a distance between the first substrate and the second substrate is g, and a distance between the transparent portion and the opaque portion of the flexible member is g. When the length of the movable portion excluding the fixed portion to the first substrate or the second substrate is a, 1.8 <a / g <2.2. 4. The optical switching device according to claim 1, wherein an opaque portion of the flexible member or the first substrate,
A light switching device, wherein a portion of the second substrate other than the light switching region is coated with a metal film. 5. A display device, wherein the light switching devices according to claim 1 are arranged on a plane or a curved surface according to a fixed arrangement rule. 6. The display device according to claim 5, wherein a color filter is formed on at least one of the first substrate and the second substrate. 7. The method according to claim 2, wherein the substrate electrode is formed on the first substrate, and the substrate electrode is insulated on the first substrate. Forming a film, applying a photoresist on the insulating film, and patterning into a shape of the opaque portion of the flexible member, and a distance between the first substrate and the second substrate. Forming a spacer defining the following: a step of inclining the first substrate to form a transparent polymer material forming a main part of the flexible member on the photoresist and on one side surface; Forming the flexible member electrode on the polymer material while the first substrate is tilted; forming a metal film in a region corresponding to the opaque portion of the flexible member; One of the upper surface of the flexible member and the upper surface of the flexible member. A step of applying an adhesive; a step of forming the substrate electrode on the second substrate; a step of forming an insulating film on the substrate electrode on the second substrate; A step of bonding the first substrate and the second substrate through the insulating film so that the insulating films face each other, and a step of etching the photoresist. Method.