JPH11262865A - Grinding tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sufficiently supply cooling liquid onto grinding tool segments, effectively cool the grinding tool segments and reliably discharge and remove grinding refuse following grinding. SOLUTION: A plurality of grinding tool segments 33 are arranged on the outer periphery on the end face of a tool mainbody 25. On the tool mainbody 25, a supply passage 36 for cooling liquid is formed corresponding to the grinding tool segments 33. At one end of the supply passage 36, an inlet 36a open to the outer periphery of the tool mainbody 25 is formed for receiving the cooling liquid jet from a nozzle 37. At the other end of the supply passage 36, an outlet 36b open to the end face of the tool mainbody 25 is formed for spraying the cooling liquid to the inner peripheries of the grinding tool segments 33.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding tool provided in a grinding device for grinding a surface of a work.

[0002]

2. Description of the Related Art Conventionally, in a grinding apparatus for grinding both surfaces of a wafer of a hard and brittle material cut into a slice shape by a wire saw, for example, a pair of grinding wheels having a plurality of grinding wheel segments arranged on an outer peripheral edge of an end surface of a tool body. Equipped with tools. Then, both grinding tools are rotated in a state where the grinding wheel segments of each grinding tool are joined to both surfaces of the wafer, so that both surfaces of the wafer are simultaneously ground.

[0003] When grinding a wafer by this type of grinding apparatus, it is necessary to cool each grinding wheel segment and discharge and remove grinding chips generated during grinding from each grinding wheel segment.

Therefore, a coolant supply path is formed at the center of the tool body, and a coolant such as coolant or water is jetted from the supply path to the end face of the tool body to supply the coolant onto each of the grinding wheel segments. A configured grinding tool has been conventionally proposed. In addition, a configuration in which a plurality of nozzles are arranged to face each other on the outer periphery of the tool body and the cooling liquid is directly injected from these nozzles toward the outer periphery of the grindstone segment has been conventionally proposed.

[0005]

However, these conventional arrangements have the following problems. That is, in the former configuration, since the coolant is ejected from the supply path to the end face side of the tool body at the center position of the tool body, centrifugal force does not sufficiently act on the coolant, and the coolant is applied to each grinding wheel segment. Not supplied enough towards. Especially in the case of a vertical double-headed grinder, the amount of coolant supplied to the upper and lower tools differs due to the influence of gravity, even if coolant or water is supplied to the center of the upper and lower tool bodies. Due to the different processing conditions, warpage and undulation of the workpiece were caused, and sufficient processing accuracy could not be obtained.

Further, in the latter configuration, since the cooling liquid jetted to the outer periphery of the grinding wheel segment is blown outward by centrifugal force, the cooling liquid is not sufficiently supplied to the inner peripheral side of each grinding wheel segment. Therefore, in these conventional configurations, it was not possible to sufficiently expect the cooling effect of the grinding wheel segments and the removal effect of the grinding debris.

The present invention has been made by paying attention to such problems existing in the prior art. The purpose is to supply a sufficient amount of coolant on each grinding wheel segment, effectively cool each grinding wheel segment, and reliably remove and remove grinding chips generated during grinding. It is to provide a grinding tool that can perform the grinding. Further, in the vertical double-headed grinding machine, by using the grinding tools having exactly the same structure for the upper and lower tool bodies, the cooling liquid having the same upper and lower sides is surely supplied, and extremely high-precision machining becomes possible.

[0008]

In order to achieve the above object, according to the first aspect of the present invention, there is provided a grinding tool in which a plurality of grinding wheel segments are arranged on an outer peripheral edge of an end face of a disk-shaped tool body. A coolant supply passage is formed in the tool body corresponding to each grinding wheel segment, and one end of each supply passage has an inlet for opening the outer peripheral surface of the tool body and for taking in a coolant injected from a nozzle. At the same time, an outlet is formed at the other end of each supply passage to open to the end face of the tool main body to spray the coolant toward the inner peripheral surface of the grinding wheel segment.

According to a second aspect of the present invention, in the grinding tool according to the first aspect, a plurality of discharge passages are formed in an outer peripheral edge of an end surface of the tool main body so as to be located between the respective whetstone segments. It is.

According to a third aspect of the present invention, in the grinding tool according to the first or second aspect, the supply passages are arranged such that an outlet is located closer to an outer peripheral side of a tool body than an inlet. It is formed in an inclined state.

According to a fourth aspect of the present invention, in the grinding tool according to any one of the first to third aspects, each of the supply passages is formed such that an outlet has a larger diameter than an inlet. It was done.

According to a fifth aspect of the present invention, in the grinding tool according to any one of the first to fourth aspects, a cooling liquid sprayed from a nozzle is provided on a back surface of the tool body in each supply passage. A guide surface for guiding to the entrance is formed.

According to a sixth aspect of the present invention, in the grinding tool according to any one of the first to fifth aspects, the coolant introduced at the inlet of each of the supply passages is guided to the outlet side. This is a regulation surface for the regulation.

According to a seventh aspect of the present invention, in the grinding tool according to any one of the first to sixth aspects, a recess is formed on an end face of the tool body except for an outer peripheral edge thereof. A mounting seat for the grinding wheel segment is formed on the outer peripheral edge, and an outlet of the supply passage is opened in the recess.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) As shown in FIG. 1, a double-sided surface grinder according to a first embodiment includes a lower frame 11, on which an intermediate frame 202 is provided. The upper frame 201 is fixed to an upper portion of the intermediate frame 202. The lower frame 11 is provided with a lower grindstone rotating / elevating mechanism 12 and a work support mechanism 14, and the upper frame 201 is equipped with an upper grindstone rotating / elevating mechanism 13. The lower and upper grindstone rotation elevating mechanisms 12, 13 function as a grindstone driving device. Grinding tools 18 are attached to the lower and upper grindstone rotary elevating mechanisms 12 and 13 so as to face each other. Then, the upper and lower surfaces of the work 22 are simultaneously ground by rotating the two grinding tools 18 in a state where the upper and lower surfaces of the work 22 on the work support mechanism 14 are joined.

The lower and upper grindstones 15 and 16 are disposed on the grinding tools 18 of the grindstone rotating / elevating mechanisms 12 and 13, respectively. These grindstones 15 and 16 have an upper end surface or a grindstone working surface on a lower end surface thereof. 15a and 16a are parallel to each other, and the rotation axes of the respective grindstones 15 and 16 are arranged to face each other on a straight line. In the lower and upper grindstone rotation elevating mechanisms 12 and 13, the feed of the lower and upper grindstones 15 and 16 is controlled by a control device (not shown).

Next, the grinding tool 18 will be described in detail. As shown in FIGS. 2 and 3, the tool body 25 is formed in a disk shape, and a mounting boss 26
Are formed to protrude. Tool body 25 and mounting boss 2
6, a plurality of mounting screw holes 27 are formed extending in the axial direction at predetermined intervals. Then, in a state where the mounting boss portion 26 is fitted to the rotating shafts 12a, 13a of the respective grindstone rotating elevating mechanisms 12, 13, each mounting screw hole 27 and the rotating shaft 12a,
By screwing the bolt 29 to the tool body 13a, the tool body 2
5 is attached to each of the grindstone rotating and lifting mechanisms 12 and 13.

At the center of the end face of the tool body 25, a recess 31 is provided.
Is formed, and a step-like mounting seat 32 is formed on the outer peripheral edge thereof. A plurality of rectangular parallelepiped grinding stone segments 33 are adhesively fixed to the mounting seat 32 so as to be arranged at predetermined intervals on the same circumference. Screw holes 34 are respectively formed on the back surface of the tool body 25 so as to correspond to the respective whetstone segments 33. By selectively screwing screws 35 into these screw holes 34, the rotational balance of the tool body 25 can be adjusted. Adjustments are made.

As shown in FIGS. 2 to 4, a plurality of circular supply passages 36 are provided in the tool main body 25 in correspondence with the respective grinding wheel segments 33. Is formed in an inclined state so as to be located on the outer peripheral side of the tool main body 25. The outlet 36b is located in the recess 31. The inclination angle A1 of each supply passage 36 with respect to the end face of the tool main body 25 is determined by drilling the supply passage 3
6 is set to be the minimum as long as it does not interfere with the inner edge 32a of the mounting seat 32.

An inlet 36a of each of the supply passages 36 is formed so as to open to the back surface of the tool body 25 and the outer peripheral surface of the mounting boss portion 26, and from a plurality of nozzles 37 disposed outside the tool body 25. Coolant such as coolant or water to be injected is taken in. In addition, each supply passage 36
The outlet 36b is formed so as to open toward the end face side of the tool main body 25, and the coolant introduced from the inlet 36a is sprayed toward the inner peripheral surface 33a of each grinding wheel segment 33. The outlet 36 of each supply passage 36
b is formed so as to be larger in diameter than the inner diameter of the supply passage 36 including the inlet 36a.

An inclined guide surface 38 is formed on the back surface of the tool body 25, and the cooling liquid injected from the nozzle 37 is guided to the inlet 36a of each supply passage 36 along the guide surface 38. ing. Further, the provision of the guide surface 38 prevents the tool body 25 from obstructing the injection path of the coolant, and the inlet 36a is expanded so that the coolant can be introduced smoothly. Each supply passage 3
A regulating surface 39 is formed at the entrance 36a of the sixth port 6a.
The coolant taken in from is regulated by the regulating surface 39 and guided to the outlet 36b side.

As shown in FIGS. 2 and 3, a plurality of groove-shaped discharge passages 40 are formed in the outer peripheral edge of the end surface of the tool body 25 between the respective whetstone segments 33, and the inner ends thereof are recessed 31. Opened inside. And each supply passage 3
The coolant sprayed from 6 onto the inner peripheral surface 33a of the grinding wheel segment 33 is discharged and removed to the outer peripheral side of the tool main body 25 through these discharge passages 40 together with the chips generated during the grinding.

Next, the operation of the grinding tool configured as described above will be described. At the time of grinding the work 22, a coolant such as coolant or water is sprayed toward the tool body 25 from a plurality of nozzles 37 disposed outside the grinding tool 18, as shown in FIGS. 2 and 3. You. Then, the tool body 2
Each time the inlet 36a of each supply passage 36 on the nozzle 5 corresponds to the nozzle 37, the coolant is taken into the supply passage 36 from the inlet 36a. Then, the coolant introduced into the supply passage 36 is subjected to centrifugal force caused by the rotation of the grinding tool 18 and the tool body 25, and the outlet 36 b is supplied along the supply passage 36.
To the grinding wheel segment 33 from the outlet 36b.
Is sprayed toward the inner peripheral surface 33a.

The coolant is discharged to the outer peripheral side of the tool main body 25 through the discharge passage 40 from the inside of the recess 31 on the end face of the tool main body 25 together with the chips generated during the grinding. Thereby, each grinding wheel segment 33 is cooled,
Overheating of the grinding wheel segment 33 and the work 22 during grinding is prevented. In addition, grinding chips generated during grinding are quickly discharged and removed from the periphery of the grinding wheel segment 33.

The effects that can be expected from the above embodiment will be described below. In the grinding tool of this embodiment, the tool body 2
A plurality of whetstone segments 33 are arranged on the outer peripheral edge of the end face of No. 5. In the tool main body 25, a coolant supply passage 36 is formed corresponding to each grinding wheel segment 33. At one end of each of the supply passages 36, an inlet 36a that opens to the outer peripheral surface of the tool main body 25 and that takes in the coolant injected from the nozzle 37 is formed. The other end of each supply passage 36 is formed with an outlet 36b that is open to the end face of the tool body 25 and that sprays a coolant toward the inner peripheral surface 33a of the grindstone segment 33.

For this reason, when the workpiece is ground by the rotation of the grinding tool, after the coolant injected from the nozzle 37 is introduced into each supply passage 36 from the inlet 36a, the coolant 36 is supplied to the outlet 36b by centrifugal force. And is sprayed on the inner peripheral surface 33 a of the grinding wheel segment 33. Therefore,
The coolant can be sufficiently supplied onto the grindstone segments 33, so that the respective grindstone segments 33 can be effectively cooled, and the grinding dust generated during the grinding can be reliably discharged and removed.

In the grinding tool of this embodiment, a plurality of discharge passages 40 are formed on the outer peripheral edge of the end face of the tool main body 25 so as to be located between the respective grinding wheel segments 33. For this reason, the coolant supplied on each of the grinding wheel segments 33 and the grinding dust generated by the grinding can be reliably discharged and removed to the outer peripheral side of the tool body 25 along the discharge passage 40.

In the grinding tool of this embodiment, each supply passage 36 is formed in an inclined state such that the outlet 36b is located closer to the outer periphery of the tool body 25 than the inlet 36a. For this reason, the coolant introduced into each supply passage 36 is supplied to the supply passage 36 inclined by centrifugal force.
Along the inner peripheral surface 33a of the grindstone segment 33. Therefore, the cooling effect of the grindstone segments 33 can be enhanced, and the possibility that the cooling liquid is directly sprayed onto the work 22 such as a wafer and the like and the vibration of the work 22 can be prevented can be prevented.

In the grinding tool of this embodiment, each supply passage 36 is formed such that the outlet 36b has a larger diameter than the inlet 36a. Therefore, the cooling liquid can be sprayed from the large-diameter outlet 36b of the supply passage 36 toward the inner peripheral surface 33a of the grinding wheel segment 33 over a wide range, and the cooling effect of the grinding wheel segment 33 can be enhanced.

In the grinding tool according to this embodiment, the coolant jetted from the nozzle 37 is guided to the inlet 36 a of each supply passage 36 on the back surface of the tool body 25.
A guide surface 38 for facilitating the introduction of the cooling liquid is formed. For this reason, the cooling liquid injected from the nozzle 37 is effectively taken into each of the supply passages 36 along the guide surface 38, and the cooling effect of the grinding wheel segment 33 can be enhanced.

In the grinding tool of this embodiment, the coolant is supplied to the inlet 36 a of each supply passage 36 through the outlet 36 a.
A regulating surface 39 for regulating and guiding to the b side is formed. For this reason, the coolant introduced into the supply passage 36 is regulated and guided to the outlet 36 b side by the regulating surface 39,
The inner peripheral surface 33a of the grinding wheel segment 33 is reliably blown, and the cooling effect of the grinding wheel segment 33 can be enhanced.

In the grinding tool according to this embodiment, the end face of the tool main body 25 has a recess 3 except for the outer peripheral edge thereof.
1 and whetstone segments 33 on the outer peripheral edge.
Is formed, and an outlet 36 b of the supply passage 36 is opened in the recess 31. Therefore, the outlet 36 b of the supply passage 36 facing the grindstone segment 33 is located lower than the grindstone segment 33. Therefore,
Even if a high centrifugal force is applied, the cooling liquid is supplied to the grinding wheel segments 33.
, And the cooling and the discharge of the grinding dust can be efficiently performed.

Second Embodiment Next, a second embodiment of the present invention will be described.
This embodiment will be described focusing on the differences from the first embodiment.

In the second embodiment, as shown in FIG. 5, each supply passage 36 has an outlet 36b located closer to the outer peripheral side of the tool body 25 than an inlet 36a and has a rotational direction. It is formed in an inclined state so as to be located on the rear side. Then, due to the centrifugal force accompanying the rotation of the grinding tool 18, the coolant is moved to the outlet 36 b side along the supply passage 36, and from the outlet 36 b toward the vicinity of the center of the inner peripheral surface 33 a of the grinding wheel segment 33. To be sprayed.

Therefore, also in the second embodiment,
As in the first embodiment described above, each whetstone segment 3
3, the cooling liquid can be sufficiently supplied, and each grinding wheel segment 33 can be effectively cooled.
It is possible to reliably discharge and remove grinding dust generated during grinding. Further, in the second embodiment, since the coolant is reliably sprayed near the center of the inner peripheral surface 33a of the grinding wheel segment 33, the grinding wheel segment 33 can be cooled more effectively, and the cooling efficiency can be improved. Can be increased.

(Third Embodiment) Next, a third embodiment of the present invention will be described.
This embodiment will be described focusing on the differences from the first embodiment.

In the third embodiment, as shown in FIG. 6, each supply passage 36 is inclined such that the outlet 36b is located closer to the outer periphery of the tool body 25 than the inlet 36a. Thus, the supply passage 36 is formed so as to be deflected forward in the rotation direction of the tool body 25. Then, due to the centrifugal force accompanying the rotation of the grinding tool 18, the coolant is moved to the outlet 36 b side along the supply passage 36, and from the outlet 36 b toward the vicinity of the center of the inner peripheral surface 33 a of the grinding wheel segment 33. To be sprayed.

Therefore, also in the third embodiment,
As in the first embodiment described above, each whetstone segment 3
3, the cooling liquid can be sufficiently supplied, and each grinding wheel segment 33 can be effectively cooled.
It is possible to reliably discharge and remove grinding dust generated during grinding. Also in the third embodiment, as in the second embodiment described above, since the coolant is sprayed near the center of the inner peripheral surface 33a of the grindstone segment 33, the grindstone segment 33 can be more effectively formed. Cooling can be performed, and cooling efficiency can be increased.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described.
This embodiment will be described focusing on the differences from the first embodiment.

In the fourth embodiment, as shown in FIGS. 7 and 8, a plurality of groove-shaped supply portions are provided on the outer peripheral edge of the end surface of the tool main body 25 corresponding to the central portion of each grinding wheel segment 33. A passage 36 is formed. Each supply passage 36 is opened on the outer peripheral surface of the tool main body 25.

Therefore, also in the fourth embodiment,
Almost the same effects as in the first embodiment can be exerted. Also, in the fourth embodiment,
The coolant supply passage 36 has a groove shape, and the tool body 2
5, the plurality of supply passages 36 can be easily formed on the tool body 25 by cutting.

This embodiment can be embodied with the following modifications. -Each supply passage 36 is formed in an elliptical hole shape. In this case, it is desirable that the major axis of the ellipse be along the circumferential direction of the tool body 25.

Each supply passage 36 is formed in a tapered shape so that the outlet 36b side has a larger diameter than the inlet 36a side. -Arrange the grinding wheel segments 33 at an irregular pitch. Alternatively, the tool body 25 may be used as each grinding wheel segment 33.
Of different lengths in the circumferential direction. In these cases, the outlet 36b is arranged at the center in the length direction of each grinding wheel segment 33.

[0044]

The present invention is configured as described above, and has the following effects. According to the invention described in claim 1, the coolant can be sufficiently supplied onto each of the grinding wheel segments, and each of the grinding wheel segments can be effectively cooled. It can be reliably discharged and removed.

According to the second aspect of the present invention, the coolant supplied onto each of the grinding wheel segments and the grinding dust generated during the grinding are reliably discharged to the outer peripheral side of the tool body along the discharge passage. Can be removed.

According to the third aspect of the present invention, the cooling liquid can be reliably sprayed toward the inner peripheral surface of each grinding wheel segment by the centrifugal force along the inclined supply passage, and the cooling effect of the grinding wheel segment can be improved. Can be enhanced. Also,
It is also possible to prevent the cooling liquid from being directly sprayed on a work such as a wafer and generating vibrations on the work.

According to the fourth aspect of the present invention, the coolant can be sprayed from the large-diameter outlet of the supply passage toward the inner peripheral surface of the grinding wheel segment over a wide range, and the cooling effect of the grinding wheel segment is enhanced. be able to.

According to the fifth aspect of the invention, the cooling liquid injected from the nozzle can be effectively taken into each of the supply passages along the guide surface, and the cooling effect of the grinding wheel segment can be enhanced. it can.

According to the sixth aspect of the present invention, the coolant introduced into the supply passage is guided to the outlet side by the regulating surface without leaking from the inlet to the outside, so that the inner circumference of each grinding wheel segment is formed. The surface can be reliably sprayed, and the cooling effect of the grinding wheel segments can be enhanced.

According to the seventh aspect of the present invention, cooling and discharge of grinding chips can be efficiently performed.

[Brief description of the drawings]

FIG. 1 is a sectional view of a grinding apparatus provided with a grinding tool according to a first embodiment.

FIG. 2 is an enlarged plan view showing a grinding tool.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is an enlarged partial cross-sectional view showing a part of FIG. 3;

FIG. 5 is an essential part plan view showing a grinding tool according to a second embodiment;

FIG. 6 is a main part plan view showing a grinding tool according to a third embodiment.

FIG. 7 is an essential part plan view showing a grinding tool according to a fourth embodiment;

FIG. 8 is a partial cross-sectional view of the grinding tool.

[Explanation of symbols]

18: grinding tool, 22: workpiece, 25: tool body, 3
DESCRIPTION OF SYMBOLS 1 ... recessed part, 33 ... grinding stone segment, 36 ... coolant supply path, 36a ... inlet, 36b ... outlet, 37 ... nozzle, 3
8: guide surface, 39: regulating surface, 40: discharge passage.

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Shiro Murai 100 Fukuno-cho, Higashi-Tonami-gun, Toyama Prefecture Inside the Hihei Toyama Toyama Plant (72) Inventor Toyohashi Wada 100 Fukuno-cho, Higashi Tonami-gun, Toyama Prefecture in the factory

Claims (7)

[Claims] 1. A grinding tool in which a plurality of grinding wheel segments are provided on an outer peripheral edge of an end surface of a disk-shaped tool body, wherein a coolant supply passage is formed in the tool body corresponding to each grinding wheel segment. At one end of the supply passage, an inlet is formed to open the outer peripheral surface of the tool body to take in the coolant ejected from the nozzle, and at the other end of each supply passage, the coolant is opened at the end surface of the tool body. Grinding tool with an outlet for spraying water toward the inner peripheral surface of the grinding wheel segment. 2. The grinding tool according to claim 1, wherein a plurality of discharge passages are formed in an outer peripheral edge of an end face of the tool body so as to be located between the respective grinding wheel segments. 3. The grinding tool according to claim 1, wherein each of the supply passages is formed so as to be inclined such that an outlet is located closer to an outer peripheral side of the tool body than an inlet. 4. The grinding tool according to claim 1, wherein each of the supply passages is formed such that an outlet has a larger diameter than an inlet. 5. The grinding tool according to claim 1, wherein a guide surface is formed on a back surface of the tool main body for guiding a cooling liquid injected from a nozzle to an inlet of each supply passage. tool. 6. The grinding tool according to claim 1, wherein a regulating surface for regulating and guiding the taken-in coolant to an outlet side is formed at an inlet of each of the supply passages. 7. An end face of the tool body is formed with a recess except for an outer peripheral edge thereof, and a mounting seat for a grinding wheel segment is formed on the outer peripheral edge, and an outlet of a supply passage is opened in the recess. The grinding tool according to any one of claims 1 to 6.