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JPH11256195A - New azeotrope and azeotropic composition - Google Patents

New azeotrope and azeotropic composition

Info

Publication number
JPH11256195A
JPH11256195A JP7659098A JP7659098A JPH11256195A JP H11256195 A JPH11256195 A JP H11256195A JP 7659098 A JP7659098 A JP 7659098A JP 7659098 A JP7659098 A JP 7659098A JP H11256195 A JPH11256195 A JP H11256195A
Authority
JP
Japan
Prior art keywords
composition
ether
azeotropic
present
bis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7659098A
Other languages
Japanese (ja)
Other versions
JP2990264B2 (en
Inventor
Yuji Mochizuki
雄司 望月
Hiroshi Yamamoto
博志 山本
Masahiko Yasumoto
昌彦 安本
Katsumi Tochigi
勝己 栃木
Akira Sekiya
章 関屋
Takeshi Sako
猛 佐古
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Research Institute of Innovative Technology for the Earth RITE
Original Assignee
Agency of Industrial Science and Technology
Research Institute of Innovative Technology for the Earth RITE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Research Institute of Innovative Technology for the Earth RITE filed Critical Agency of Industrial Science and Technology
Priority to JP7659098A priority Critical patent/JP2990264B2/en
Publication of JPH11256195A publication Critical patent/JPH11256195A/en
Application granted granted Critical
Publication of JP2990264B2 publication Critical patent/JP2990264B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Detergent Compositions (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a new azeotropic composition useful for a flux cleansing agent manifesting equal detergecy and low toxicity comparable to chlorine based hydrocarbons, preventing disruption of the ozonosphere and decreasing the greenhouse effect by blending a specific fluorine containing ether and butyl ethyl ether. SOLUTION: This composition is an azeotropic composition obtained by blending (A) bis(2,2,2-trifluoroethy)ether with (B) butyl ether. Practically, the composition includes 90 to 99.5 mol.%. of the component (A) and 0.5 to 10.0%. of the component (B), preferably, 96.2%. and 3.8% respectively. The composition further includes (C) 0.01 to 10 wt.% of stabilizers for its use in a severe condition.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ビス(2,2,2
−トリフルオロエチル)エーテルとブチルエチルエーテ
ルとの混合物からなる共沸又は共沸様エーテル組成物に
関するものである。
[0001] The present invention relates to a bis (2,2,2)
Azeotropic or azeotropic ether compositions comprising a mixture of (trifluoroethyl) ether and butyl ethyl ether.

【0002】[0002]

【従来の技術】従来より、電子部品,精密機械部品,樹
脂加工部品等の洗浄用溶剤としては、ハロゲン化炭化水
素が最もよく知られており、塩素原子または塩素原子と
フッ素原子が置換した炭化水素群が用いられている。こ
れらのハロゲン化炭化水素は、毒性が少なく、ハロゲン
の置換数が多いと不燃性を示し、また化学的及び熱的に
安定であって、しかもプラスチックやゴムなどの表面を
侵食することなくワックスや油脂類を溶解するという適
度な溶解性を有することから各種の産業分野に広く使用
されている。例えばこれらのハロゲン化炭化水素として
は、トリクロロエチレン,テトラクロロエチレン,1,
1,1−トリクロロエタン等の塩素系炭化水素や1,1,
2−トリクロロ−1,2,2−トリフルオロエタン(フロ
ン113)等のフロン系炭化水素が知られており、特に
後者のフロン系炭化水素は、毒性が少なく不燃性で化学
的及び熱的に安定であることから、広範囲な分野で使用
されている。しかし、かかる塩素を含むフロン系炭化水
素や1,1,1−トリクロロエタンは塩素原子を有する
為、成層圏のオゾン層を破壊するという重大な欠点が指
摘され、その生産と使用を停止することが国際的に決め
られている。またトリクロロエチレン及びテトラクロロ
エチレンは、地下水汚染問題がクロ−ズアップされ、そ
の後の環境汚染状況調査結果と慢性毒性等が認められる
との有害性の調査結果に基づき、平成元年より第2種特
定化学物質に政令指定された。このような状況下、かか
る塩素を含むフロン系炭化水素や塩素系炭化水素に代わ
る物質の開発強く要望されている。
2. Description of the Related Art Hitherto, halogenated hydrocarbons have been most well known as a solvent for cleaning electronic parts, precision machine parts, resin processed parts, etc., and chlorine atoms or carbon atoms obtained by substituting chlorine atoms for fluorine atoms. Hydrogen groups are used. These halogenated hydrocarbons are less toxic, show non-flammability when the number of substituted halogens is large, are chemically and thermally stable, and do not erode the surface of plastics or rubbers. It is widely used in various industrial fields because it has an appropriate solubility of dissolving fats and oils. For example, these halogenated hydrocarbons include trichloroethylene, tetrachloroethylene, 1,1,
Chlorine hydrocarbons such as 1,1-trichloroethane and 1,1,
2. Description of the Related Art Freon-based hydrocarbons such as 2-trichloro-1,2,2-trifluoroethane (Freon 113) are known. In particular, the latter is less toxic, non-flammable, and chemically and thermally. Because of its stability, it is used in a wide range of fields. However, the serious disadvantage of destruction of the stratospheric ozone layer has been pointed out because such chlorofluorocarbon-based hydrocarbons and 1,1,1-trichloroethane have chlorine atoms. Is decided. Trichlorethylene and tetrachlorethylene have been classified as Class 2 Specified Chemical Substances since 1989, based on the results of surveys on the environmental pollution and subsequent toxicological findings indicating that chronic toxicity, etc., have been raised for groundwater pollution problems. Cabinet order specified. Under such circumstances, there is a strong demand for the development of a fluorocarbon-based hydrocarbon containing chlorine or a substance replacing the chlorine-based hydrocarbon.

【0003】[0003]

【発明が解決しようとする課題】本発明は、塩素を含む
フロン系炭化水素や塩素系炭化水素が有する洗浄性や低
毒性等の優れた性質を有するとともに、オゾン層破壊の
心配がなく、且つ温室効果の小さい新規な組成物を提供
することをその課題とする。
DISCLOSURE OF THE INVENTION The present invention has excellent properties such as detergency and low toxicity of chlorofluorocarbon-based hydrocarbons and chlorine-based hydrocarbons, and has no fear of destruction of the ozone layer. An object of the present invention is to provide a novel composition having a small greenhouse effect.

【0004】[0004]

【課題を解決するための手段】本発明者らは、前記の課
題を解決すべく鋭意研究を重ねた結果、本発明を完成す
るに至った。即ち、本発明によれば、ビス(2,2,2
−トリフルオロエチル)エーテルと、ブチルエチルエー
テルとの混合物からなる共沸又は共沸様エーテル組成物
が提供される。
Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have completed the present invention. That is, according to the present invention, the screws (2, 2, 2
An azeotropic or azeotropic ether composition comprising a mixture of (trifluoroethyl) ether and butyl ethyl ether is provided.

【0005】[0005]

【発明の実施の形態】以下、本発明による共沸及び共沸
様エーテル組成物の具体例を示す。なお、共沸組成物と
は、その蒸気組成と液体組成が同一であり、蒸発、凝縮
を繰り返した後の組成物の組成変化がないものを意味す
る。また、共沸様組成物とは、その蒸気組成と液体組成
がほぼ同一であり、蒸発、凝縮を繰り返した後の組成物
の組成変化が無視できる程度にしか変化しないものを意
味する。本発明による共沸及び共沸様エーテル組成物
は、ビス(2,2,2−トリフルオロエチル)エーテル
90.0〜99.5mol%及びブチルエチルエーテル
0.5〜10.0mol%からなる共沸様組成物、好ま
しくはビス(2,2,2−トリフルオロエチル)エーテ
ル96.2mol%及びブチルエチルエーテル3.8m
ol%からなる共沸組成物である。この共沸組成物の沸
点は、大気圧(101.3kPa)で63.61℃であ
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific examples of the azeotropic and azeotropic ether compositions according to the present invention will be shown below. The azeotropic composition means a composition having the same vapor composition and liquid composition and no change in the composition of the composition after repeated evaporation and condensation. Further, the azeotropic-like composition means a composition whose vapor composition and liquid composition are substantially the same and whose composition change after repeating evaporation and condensation changes to a negligible extent. The azeotropic and azeotrope-like ether composition according to the present invention is composed of 90.0 to 99.5 mol% of bis (2,2,2-trifluoroethyl) ether and 0.5 to 10.0 mol% of butyl ethyl ether. Boiling composition, preferably 96.2 mol% of bis (2,2,2-trifluoroethyl) ether and 3.8 m of butyl ethyl ether
ol% of the azeotropic composition. The boiling point of this azeotropic composition is 63.61 ° C. at atmospheric pressure (101.3 kPa).

【0006】本発明に係る、ビス(2,2,2−トリフ
ルオロエチル)エーテルは既知物質であり、例えばトリ
フルオロエタノールと2,2,2−トリフルオロエチル
パラトルエンスルホネートを反応させることにより容易
に得られる。
The bis (2,2,2-trifluoroethyl) ether according to the present invention is a known substance, and is easily prepared by reacting, for example, trifluoroethanol with 2,2,2-trifluoroethyl paratoluenesulfonate. Is obtained.

【0007】本発明による組成物は、過酷な条件での使
用に際しては更に各種の安定剤を添加してもよい。安定
剤としては、蒸留操作により同伴留出されるもの或いは
共沸様混合物を形成するものが望ましい。このような安
定剤の具体例としては、ニトロメタン、ニトロエタン等
の脂肪族ニトロ化合物、ニトロベンゼン、ニトロスチレ
ン等の芳香族ニトロ化合物、ジメトキシメタン、1,2
−ジメトキシエタン、1,4−ジオキサン、1,3,5−
トリオキサン等のエーテル類、グリシドール、メチルグ
リシジルエーテル、アリルグリシジルエーテル、フェニ
ルグリシジルエーテル、1,2−ブチレンオキシド、シ
クロヘキセンオキシド、エピクロルヒドリン等のエポキ
シド類、ヘキセン、ヘプテン、ペンタジエン、シクロペ
ンテン、シクロヘキセン等の不飽和炭化水素類、アリル
アルコール、1−ブテン−3−オール等のオレフィン系
アルコール類、3−メチル−1−ブチン−3−オール、
3−メチル−1−ペンチン−3−オール等のアセチレン
系アルコール類、アクリル酸メチル、アクリル酸エチ
ル、アクリル酸ブチル、メタクリル酸ビニル等のアクリ
ル酸エステル類が挙げられる。また更に相乗的安定化効
果を得る為に、フェノール類、アミン類、ベンゾトリア
ゾール類を併用してもよい。これらの安定剤は、単独で
使用してもよく或いは2種以上組み合わせて使用しても
よい。安定剤の使用量は、安定剤の種類等により異なる
が、共沸様の性質に支障のない程度とする。その使用量
は、通常本発明組成物の0.01〜10重量%程度であ
り、0.1〜5重量%程度とすることがより好ましい。
The composition according to the present invention may further contain various stabilizers when used under severe conditions. As the stabilizer, those which are entrained by distillation or those which form an azeotropic mixture are desirable. Specific examples of such a stabilizer include aliphatic nitro compounds such as nitromethane and nitroethane, aromatic nitro compounds such as nitrobenzene and nitrostyrene, dimethoxymethane and 1,2.
-Dimethoxyethane, 1,4-dioxane, 1,3,5-
Ethers such as trioxane, epoxides such as glycidol, methyl glycidyl ether, allyl glycidyl ether, phenyl glycidyl ether, 1,2-butylene oxide, cyclohexene oxide, epichlorohydrin, and unsaturated carbonization such as hexene, heptene, pentadiene, cyclopentene and cyclohexene Hydrogens, allyl alcohol, olefinic alcohols such as 1-buten-3-ol, 3-methyl-1-butyn-3-ol,
Acetylene alcohols such as 3-methyl-1-pentyn-3-ol and the like, and acrylates such as methyl acrylate, ethyl acrylate, butyl acrylate and vinyl methacrylate are exemplified. In order to further obtain a synergistic stabilizing effect, phenols, amines and benzotriazoles may be used in combination. These stabilizers may be used alone or in combination of two or more. The amount of the stabilizer used depends on the type of the stabilizer and the like, but is set to such an extent that the azeotropic property is not hindered. The amount used is usually about 0.01 to 10% by weight of the composition of the present invention, and more preferably about 0.1 to 5% by weight.

【0008】また本発明の組成物には、洗浄力、界面作
用等をより一層改善する為に、必要に応じて各種の界面
活性剤を添加することができる。界面活性剤としては、
ソルビタンモノオレエート、ソルビタントリオレエート
等のソルビタン脂肪酸エステル類、ポリオキシエチレン
のソルビットテトラオレエート等のポリオキシエチレン
ソルビット脂肪酸エステル類、ポリオキシエチレンモノ
ラウレート等のポリエチレングリコール脂肪酸エステル
類、ポリオキシエチレンラウリルエーテル等のポリオキ
シエチレンアルキルエーテル類、ポリオキシエチレンノ
ニルフェニルエーテル等のポリオキシエチレンアルキル
フェニルエーテル類、ポリオキシエチレンオレイン酸ア
ミド等のポリオキシエチレンアルキルアミン脂肪酸アミ
ド類等のノニオン系界面活性剤が挙げられ、単独で使用
してもよく或いは2種以上組み合わせて使用してもよ
い。相乗的に洗浄力及び界面作用を改善する目的で、こ
れらのノニオン系界面活性剤に更にカチオン系界面活性
剤またはアニオン系界面活性剤を併用してもよい。界面
活性剤の使用量は、その種類等により異なるが、共沸様
の性質に支障のない程度で、通常本発明組成物の0.1
〜20重量%程度であり、0.3〜5重量%程度とする
ことがより好ましい。
In order to further improve the detergency and the interfacial action, various surfactants can be added to the composition of the present invention as needed. As a surfactant,
Sorbitan fatty acid esters such as sorbitan monooleate and sorbitan trioleate; polyoxyethylene sorbite fatty acid esters such as polyoxyethylene sorbite tetraoleate; polyethylene glycol fatty acid esters such as polyoxyethylene monolaurate; polyoxyethylene Nonionic surfactants such as polyoxyethylene alkyl ethers such as lauryl ether, polyoxyethylene alkyl phenyl ethers such as polyoxyethylene nonylphenyl ether, and polyoxyethylene alkylamine fatty acid amides such as polyoxyethylene oleic amide And may be used alone or in combination of two or more. For the purpose of synergistically improving the detergency and the interfacial action, a cationic surfactant or an anionic surfactant may be used in combination with these nonionic surfactants. The amount of the surfactant to be used varies depending on the kind and the like, but is not so much as to affect the azeotropic property, and is usually 0.1% of the composition of the present invention.
About 20% by weight, more preferably about 0.3 to 5% by weight.

【0009】本発明の組成物は、公知の洗浄及び乾燥用
途に広く使用できるが、特にフラックス洗浄剤,洗浄溶
剤,脱脂洗浄剤,水切り乾燥剤として使用でき、従来の
フロン113や1,1,1−トリクロロエタンの代替物と
して極めて有用なものである。その具体的な用途として
は、フラックス、グリース、油、ワックス、インキ等の
除去剤、電子部品(プリント基板、液晶表示器、磁気記
録部品、半導体材料等)、電機部品、精密機械部品、樹
脂加工部品、光学レンズ、衣料品等の洗浄剤や水切り乾
燥剤等を挙げることができる。その洗浄方法としては、
浸漬、スプレー、沸騰洗浄、超音波洗浄、蒸気洗浄等或
いはこれらの組み合わせ等の従来から用いられている方
法が採用できる。また本発明の組成物は、従来のフロン
と同様に塗料用溶剤、抽出剤、熱媒体及び発泡剤等の各
種用途にも使用できる。
The composition of the present invention can be widely used for known washing and drying applications, but can be used particularly as a flux detergent, a washing solvent, a degreasing detergent and a draining desiccant. It is extremely useful as a substitute for 1-trichloroethane. Specific applications include flux, grease, oil, wax, and ink removers, electronic components (printed circuit boards, liquid crystal displays, magnetic recording components, semiconductor materials, etc.), electrical components, precision machinery components, and resin processing. Examples include cleaning agents for components, optical lenses, clothing, and the like, and draining and drying agents. As the cleaning method,
Conventional methods such as immersion, spraying, boiling cleaning, ultrasonic cleaning, steam cleaning and the like, or a combination thereof can be employed. Further, the composition of the present invention can be used for various uses such as a solvent for a paint, an extractant, a heating medium, and a foaming agent, similarly to the conventional chlorofluorocarbon.

【0010】[0010]

【実施例】次に、本発明を実施例により更に詳細に説明
する。 実施例 気液平衡測定装置を用いてビス(2,2,2−トリフル
オロエチル)エーテルとブチルエチルエーテルとの混合
物の気液平衡組成(x1及びy1)及び沸点(t)を測
定した。ビス(2,2,2−トリフルオロエチル)エー
テルとブチルエチルエーテルとの一定組成の混合試料を
試料容器部に入れ、加熱した。そして気相凝縮液の滴下
速度が適正になるように加熱を調整して、安定した沸騰
を40分間以上保った。圧力及び沸点が安定していること
を確かめた後、それらを測定した。また液相及び気相凝
縮液をサンプリングし、ガスクロマトグラフィーにより
サンプリング液の組成分析を行った。前期実験結果を表
1、図1及び図2に示す。前記実験結果から、ビス
(2,2,2−トリフルオロエチル)エーテル90.0
〜99.5mol%及びブチルエチルエーテル0.5〜
10.0mol%の範囲にある本発明の組成物は、共沸
様組成物である。ここでビス(2,2,2−トリフルオ
ロエチル)エーテル96.2mol%及びブチルエチル
エーテル3.8mol%からなる組成物は共沸組成物で
あり、その沸点は大気圧(101.3kPa)で63.
61℃である。
Next, the present invention will be described in more detail with reference to examples. Example A gas-liquid equilibrium composition (x1 and y1) and a boiling point (t) of a mixture of bis (2,2,2-trifluoroethyl) ether and butylethylether were measured using a gas-liquid equilibrium measuring device. A mixed sample having a constant composition of bis (2,2,2-trifluoroethyl) ether and butylethylether was placed in a sample container and heated. The heating was adjusted so that the dropping rate of the vapor-phase condensate became appropriate, and stable boiling was maintained for 40 minutes or more. After ensuring that the pressure and boiling point were stable, they were measured. The liquid phase and the gas phase condensate were sampled, and the composition of the sampled solution was analyzed by gas chromatography. The results of the first experiment are shown in Table 1, FIG. 1 and FIG. From the above experimental results, bis (2,2,2-trifluoroethyl) ether 90.0
9999.5 mol% and butyl ethyl ether 0.5〜
Compositions of the invention in the range of 10.0 mol% are azeotropic-like compositions. Here, a composition comprising 96.2 mol% of bis (2,2,2-trifluoroethyl) ether and 3.8 mol% of butyl ethyl ether is an azeotropic composition, and its boiling point is at atmospheric pressure (101.3 kPa). 63.
61 ° C.

【0011】[0011]

【表1】 [Table 1]

【0012】[0012]

【発明の効果】本発明の共沸又は共沸様エーテル組成物
は、洗浄性及び低毒性にすぐれるとともに、オゾン層破
壊の心配がなく、且つ温室効果の小さいものである。本
発明の組成物は、溶剤、洗浄剤を始め、抽出剤、熱媒
体、発泡剤等各種の用途に供することができる。
The azeotropic or azeotrope-like ether composition of the present invention has excellent detergency and low toxicity, has no fear of destruction of the ozone layer, and has a small greenhouse effect. The composition of the present invention can be used for various uses such as a solvent, a cleaning agent, an extractant, a heating medium, and a foaming agent.

【図面の簡単な説明】[Brief description of the drawings]

【図1】ビス(2,2,2−トリフルオロエチル)エー
テルとブチルエーテルとの混合物についての気液平衡曲
線(x−y)を示す。
FIG. 1 shows a gas-liquid equilibrium curve (xy) for a mixture of bis (2,2,2-trifluoroethyl) ether and butyl ether.

【図2】ビス(2,2,2−トリフルオロエチル)エー
テルとブチルエーテルとの混合物についての気液平衡曲
線(x−t)を示す。
FIG. 2 shows a vapor-liquid equilibrium curve (xt) for a mixture of bis (2,2,2-trifluoroethyl) ether and butyl ether.

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成11年6月28日[Submission date] June 28, 1999

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】特許請求の範囲[Correction target item name] Claims

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【特許請求の範囲】[Claims]

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0004[Correction target item name] 0004

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0004】[0004]

【課題を解決するための手段】本発明者らは、前記の課
題を解決すべく鋭意研究を重ねた結果、本発明を完成す
るに至った。即ち、本発明によれば、ビス(2,2,2
−トリフルオロエチル)エーテル90.0〜99.5m
ol%と、ブチルエチルエーテル0.5〜10.0mo
l%との混合物からなる共沸又は共沸様エーテル組成物
が提供される。
Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have completed the present invention. That is, according to the present invention, the screws (2, 2, 2
-Trifluoroethyl ) ether 90.0-99.5 m
ol% and butyl ethyl ether 0.5 to 10.0 mol
There is provided an azeotropic or azeotrope-like ether composition consisting of a mixture with 1% by weight.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山本 博志 東京都文京区本郷2−40−17本郷若井ビル 6階 財団法人地球環境産業技術研究機構 新規冷媒等プロジェクト室内 (72)発明者 安本 昌彦 東京都文京区本郷2−40−17本郷若井ビル 6階 財団法人地球環境産業技術研究機構 新規冷媒等プロジェクト室内 (72)発明者 栃木 勝己 東京都大田区久が原5丁目25番19号 (72)発明者 関屋 章 茨城県つくば市東1丁目1番 工業技術院 物質工学工業技術研究所内 (72)発明者 佐古 猛 茨城県つくば市東1丁目1番 工業技術院 物質工学工業技術研究所内 ────────────────────────────────────────────────── ─── Continued on front page (72) Inventor Hiroshi Yamamoto 6F, Hongo Wakai Building, Hongo 2-40-17, Hongo, Bunkyo-ku, Tokyo New Refrigerant, etc., Project Room, etc. (72) Inventor, Masahiko Yasumoto 6F, Hongo Wakai Building, Hongo 2-40-17, Bunkyo-ku, Tokyo New Refrigerants Project Room (72) Inventor Katsumi Tochigi 5-25-19 Kugahara, Ota-ku, Tokyo (72) Invention Person Akira Sekiya 1-1-1, Higashi, Tsukuba City, Ibaraki Prefecture, National Institute of Advanced Industrial Science and Technology (72) Inventor Takeshi Takeshi 1-1-1, Higashi, Tsukuba City, Ibaraki Prefecture, National Institute of Advanced Industrial Science and Technology

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ビス(2,2,2−トリフルオロエチ
ル)エーテルと、ブチルエチルエーテルとの混合物から
なることを特徴とする共沸又は共沸様エーテル組成物。
1. An azeotropic or azeotropic ether composition comprising a mixture of bis (2,2,2-trifluoroethyl) ether and butyl ethyl ether.
JP7659098A 1998-03-10 1998-03-10 Novel azeotropic and azeotropic compositions Expired - Lifetime JP2990264B2 (en)

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JP2990264B2 JP2990264B2 (en) 1999-12-13

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109478499A (en) * 2016-07-15 2019-03-15 应用材料公司 Dry high aspect ratio features

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109478499A (en) * 2016-07-15 2019-03-15 应用材料公司 Dry high aspect ratio features
CN109478499B (en) * 2016-07-15 2023-08-04 应用材料公司 Dry high aspect ratio features

Also Published As

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