JPH11186454A - BGA type integrated circuit component, its manufacturing method and its mounting method - Google Patents
BGA type integrated circuit component, its manufacturing method and its mounting methodInfo
- Publication number
- JPH11186454A JPH11186454A JP36480297A JP36480297A JPH11186454A JP H11186454 A JPH11186454 A JP H11186454A JP 36480297 A JP36480297 A JP 36480297A JP 36480297 A JP36480297 A JP 36480297A JP H11186454 A JPH11186454 A JP H11186454A
- Authority
- JP
- Japan
- Prior art keywords
- solder
- terminal
- temperature
- integrated circuit
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229910000679 solder Inorganic materials 0.000 claims abstract description 165
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 230000008018 melting Effects 0.000 claims abstract description 10
- 238000002844 melting Methods 0.000 claims abstract description 10
- 239000006071 cream Substances 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 21
- 238000003303 reheating Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 3
- 230000005496 eutectics Effects 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/11334—Manufacturing methods by local deposition of the material of the bump connector in solid form using preformed bumps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3463—Solder compositions in relation to features of the printed circuit board or the mounting process
Landscapes
- Wire Bonding (AREA)
Abstract
(57)【要約】
【課題】 ICなどのBGA型集積回路部品とマザーボ
ードとの間のはんだ接続部が樽型に大きく膨らんで信頼
性の低下を招いたり、隣接する接続端子間にはんだブリ
ッジが発生して製品不良を発生させるのを防止する。
【解決手段】 ICチップを搭載した基板の接続端子面
に2次元的に配列された多数の端子接続用はんだバンプ
を有するBGA型集積回路部品において、基板の下面に
はんだバンプよりも融点が高い高温はんだバンプを少く
とも3個突設した。高温はんだバンプは基板下面の4隅
に近い位置に合計4個設けるのがよい。高温はんだバン
プの高さは端子接続用はんだバンプよりも高くするのが
よい。
(57) [Summary] [PROBLEMS] A solder connection portion between a BGA type integrated circuit component such as an IC and a mother board is greatly bulged into a barrel shape to cause a decrease in reliability, or a solder bridge is formed between adjacent connection terminals. To prevent product defects from occurring. SOLUTION: In a BGA type integrated circuit component having a large number of terminal connection solder bumps two-dimensionally arranged on a connection terminal surface of a substrate on which an IC chip is mounted, a high temperature having a melting point higher than that of the solder bumps on a lower surface of the substrate. At least three solder bumps were provided. It is preferable to provide a total of four high-temperature solder bumps near four corners on the lower surface of the substrate. The height of the high-temperature solder bump is preferably higher than that of the terminal connection solder bump.
Description
【0001】[0001]
【発明の属する技術分野】この発明はBGA型集積回路
部品と、その製造方法と、その実装方法とに関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a BGA type integrated circuit component, a method of manufacturing the same, and a method of mounting the same.
【0002】[0002]
【従来の技術】ICチップを搭載した基板の下面(接続
端子面)に、多数の突起電極を2次元的に配列したBG
A(Ball Grid Array)型のICやLSIなどの集積回
路部品が公知である。ここに突起電極は通常基板の中央
付近に格子状に配列される。突起電極としては通常はん
だバンプが用いられる。2. Description of the Related Art A BG in which a number of projecting electrodes are two-dimensionally arranged on the lower surface (connection terminal surface) of a substrate on which an IC chip is mounted.
2. Description of the Related Art Integrated circuit components such as A (Ball Grid Array) type ICs and LSIs are known. Here, the protruding electrodes are usually arranged in a lattice shape near the center of the substrate. Usually, solder bumps are used as the protruding electrodes.
【0003】図5は従来のBGA型ICのはんだバンプ
形成工程と、マザーボードへの搭載方法を説明する図で
ある。この図で符号10は集合回路部品としてのICで
あり、このIC10は基板(サブストレート)12に搭
載したICチップ14を封止樹脂16で封止したもので
ある。基板12はセラミックやガラスエポキシ樹脂(ガ
ラス繊維にエポキシ樹脂を含浸させて硬化させたもの)
で形成される。FIG. 5 is a view for explaining a conventional solder bump forming process of a BGA type IC and a method of mounting the same on a motherboard. In this figure, reference numeral 10 denotes an IC as a collective circuit component. The IC 10 is obtained by sealing an IC chip 14 mounted on a substrate 12 with a sealing resin 16. The substrate 12 is made of ceramic or glass epoxy resin (glass fiber impregnated with epoxy resin and cured)
Is formed.
【0004】このIC10の基板12の下面すなわち接
続端子面には、多数の格子状に配列された接続端子パッ
ド18が形成されている。これらの接続端子パッド18
は、基板12の下面に貼った銅箔やこの下面に形成した
銅めっき層にフォトエッチングなどの手法によって不要
な銅箔あるいは銅めっき層を除去することにより形成さ
れる。これらの接続端子パッド18は、基板12に形成
した内層回路によってICチップ14の端子(図示せ
ず)に接続されている。On the lower surface of the substrate 12 of the IC 10, that is, on the connection terminal surface, a large number of connection terminal pads 18 arranged in a grid are formed. These connection terminal pads 18
Is formed by removing unnecessary copper foil or a copper plating layer from a copper foil stuck on the lower surface of the substrate 12 or a copper plating layer formed on the lower surface by a method such as photoetching. These connection terminal pads 18 are connected to terminals (not shown) of the IC chip 14 by an inner layer circuit formed on the substrate 12.
【0005】この基板12の下面(接続端子面)にはフ
ラックス20が塗布され、この面を上にして、各接続端
子パッド18上にはんだボール22が1個づつ供給され
る(図5の(A))。ここにフラックス20ははんだボ
ール22を接続端子パッド18上に一時的に保持すると
共に、接続端子18の接合面を清浄にして溶融はんだの
接合を向上させる機能を持つ。[0005] A flux 20 is applied to the lower surface (connection terminal surface) of the substrate 12, and solder balls 22 are supplied one by one onto each connection terminal pad 18 with this surface facing up ((FIG. 5) A)). Here, the flux 20 has a function of temporarily holding the solder ball 22 on the connection terminal pad 18, and at the same time, cleaning the bonding surface of the connection terminal 18 to improve the bonding of the molten solder.
【0006】ここに用いるはんだボール22は一定量の
一般的な共晶はんだを球状に形成したものである。はん
だボール22は、接続端子パッド18の位置に小孔をあ
けたテンプレートを基板12の上に重ね、テンプレート
の各小孔に1つづつのはんだボール22を入れることに
より供給される。The solder ball 22 used here is formed by forming a fixed amount of general eutectic solder into a spherical shape. The solder balls 22 are supplied by stacking a template having small holes at the positions of the connection terminal pads 18 on the substrate 12 and placing one solder ball 22 in each small hole of the template.
【0007】次にこの基板12は赤外線ヒータ24によ
り加熱される。基板12がはんだの共晶温度まで加熱さ
れると、はんだボール22は一気に溶融し、溶融したは
んだはその表面張力により球状になる。この時接続端子
パッド18と溶融はんだとの間の表面張力によって、溶
融はんだは接続端子パッド18の中央に自動的に位置調
整される(セルフアライメント作用)。このためそのま
ま冷却すれば各接続端子パッド18の上に球状のはん
だ、すなわちはんだバンプ26が形成される(図5の
(B))。Next, the substrate 12 is heated by an infrared heater 24. When the substrate 12 is heated to the eutectic temperature of the solder, the solder balls 22 melt at once, and the molten solder becomes spherical due to its surface tension. At this time, the position of the molten solder is automatically adjusted to the center of the connection terminal pad 18 by the surface tension between the connection terminal pad 18 and the molten solder (self-alignment action). Therefore, if cooled as it is, a spherical solder, that is, a solder bump 26 is formed on each connection terminal pad 18 (FIG. 5B).
【0008】一方このようにはんだバンプ26が形成さ
れたIC10を実装するマザーボード28には、IC1
0の接続端子パッド18に対応した接続端子パッド30
が形成され、これらの接続端子パッド30にはクリーム
はんだ32が供給される。このクリームはんだ32は、
スクリーン印刷の方法によって供給される。またディス
ペンサによって一定量づつのクリームはんだ32を各接
続端子に順に供給してもよい。On the other hand, a mother board 28 on which the IC 10 on which the solder bumps 26 are formed is mounted on the mother board 28.
Connection terminal pad 30 corresponding to connection terminal pad 18
Are formed, and cream solder 32 is supplied to these connection terminal pads 30. This cream solder 32
Supplied by screen printing method. Alternatively, a predetermined amount of cream solder 32 may be supplied to each connection terminal in order by a dispenser.
【0009】このマザーボード28には前記のIC10
が位置合せされて載せられる(図5の(C))。すなわ
ちIC10のはんだバンプ26をマザーボード28の対
応する接続端子パッド30に位置合せして載せる。そし
て全体を赤外線ヒータ34により加熱すれば、はんだバ
ンプ26およびクリームはんだ32が溶融(リフロー)
する。そのまま全体を冷却すればはんだバンプ26とク
リームはんだ32が凝固して接続端子パッド18と30
とを接続する接続部36となる(図5の(D))。The motherboard 28 includes the IC 10
Are aligned and placed (FIG. 5C). That is, the solder bumps 26 of the IC 10 are placed on the corresponding connection terminal pads 30 of the motherboard 28 while being aligned. When the whole is heated by the infrared heater 34, the solder bumps 26 and the cream solder 32 melt (reflow).
I do. If the whole is cooled as it is, the solder bumps 26 and the cream solder 32 solidify, and the connection terminal pads 18 and 30 are solidified.
(FIG. 5D).
【0010】[0010]
【従来技術の問題点】このように従来の方法では、IC
10のはんだバンプ26をマザーボード28の接続端子
パッド30に載せて、全てのはんだバンプ26およびク
リームはんだ32を同時にリフローする。このためこの
状態では、IC10の重量は全ての端子上の溶融ハンダ
の表面張力によって支えられることになる。As described above, in the conventional method, the IC
The ten solder bumps 26 are placed on the connection terminal pads 30 of the motherboard 28, and all the solder bumps 26 and the cream solder 32 are simultaneously reflowed. Therefore, in this state, the weight of the IC 10 is supported by the surface tension of the molten solder on all the terminals.
【0011】しかしIC10の重さに比較して接続端子
パッドの数が少なかったり、接続端子パッドの面積が小
さくその上に載るハンダの量も少ない場合には、溶融は
んだがIC10の重さによって押し潰される。図6はこ
の状態を示す断面図であるこのように溶融はんだが押し
潰されると凝固したはんだ接続部36Aも樽型に径が大
きく膨らむ。このため隣接するはんだ接続部36Aとの
間隔が小さくなって回路の信頼性特に熱膨張や熱収縮に
対する信頼性の低下を招く(図6の(A))。However, when the number of connection terminal pads is smaller than the weight of the IC 10 or the area of the connection terminal pads is small and the amount of solder placed thereon is small, the molten solder is pushed by the weight of the IC 10. Crushed. FIG. 6 is a cross-sectional view showing this state. When the molten solder is crushed as described above, the solidified solder connection portion 36A also has a large barrel-shaped diameter. For this reason, the interval between the adjacent solder connection portions 36A becomes small, and the reliability of the circuit, particularly the reliability against thermal expansion and thermal contraction, is reduced (FIG. 6A).
【0012】またIC10の重量と溶融はんだの表面張
力とのアンバランスや、接続端子パッドのピッチ(間
隔)とはんだバンプ26の径とのミスマッチングの程度
が大きい場合には、隣接した接続端子上の溶融したはん
だが表面張力によって互いに接合し、はんだブリッジ3
8が形成されることがある。このため接続端子間の短絡
(ショート)が発生し、製品不良となる。If the weight of the IC 10 and the surface tension of the molten solder are unbalanced, or if there is a large degree of mismatch between the pitch (interval) of the connection terminal pads and the diameter of the solder bumps 26, the adjacent connection terminals may be damaged. Melted solder is joined to each other by surface tension, and the solder bridge 3
8 may be formed. For this reason, a short circuit (short) between the connection terminals occurs, resulting in a product defect.
【0013】[0013]
【発明の目的】この発明はこのような事情に鑑みなされ
たものであり、ICなどのBGA型集積回路部品とマザ
ーボードとの間のはんだ接続部が樽型に大きく膨らんで
信頼性の低下を招いたり、隣接する接続端子間にはんだ
ブリッジが発生して製品不良を発生させるのを防止する
ことができるBGA型集積回路部品を提供することを第
1の目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and a solder connection between a BGA type integrated circuit component such as an IC and a motherboard is greatly expanded into a barrel shape, which causes a decrease in reliability. It is a first object of the present invention to provide a BGA type integrated circuit component capable of preventing occurrence of product defects due to occurrence of solder bridges between adjacent connection terminals.
【0014】またこのBGA型集積回路部品の製造方法
を供給することを第2の目的とする。さらにこのBGA
型集積回路部品をマザーボードに実装する方法を提供す
ることを第3の目的とする。It is a second object of the present invention to provide a method of manufacturing the BGA type integrated circuit component. Furthermore, this BGA
It is a third object to provide a method for mounting a die integrated circuit component on a motherboard.
【0015】[0015]
【発明の構成】本発明によればこの目的は、ICチップ
を搭載した基板の接続端子面に2次元的に配列された多
数の端子接続用はんだバンプを有するBGA型集積回路
部品において、前記基板の下面に前記はんだバンプより
も融点が高い高温はんだバンプが少くとも3個突設され
ていることを特徴とするBGA型集積回路部品、により
達成される。According to the present invention, an object of the present invention is to provide a BGA type integrated circuit component having a large number of terminal connection solder bumps two-dimensionally arranged on connection terminal surfaces of a substrate on which an IC chip is mounted. At least three high-temperature solder bumps having a melting point higher than that of the solder bump projecting from the lower surface of the BGA type integrated circuit component.
【0016】ここに高温はんだバンプは基板下面のでき
るだけ離れた位置に3ヶ所以上設けるのがよく、例えば
4隅に近い位置に合計4個設けるのがよい。高温はんだ
バンプの高さは端子接続用はんだバンプよりも高くする
のがよい。なぜならばマザーボード側の端子パッドには
クリームはんだが供給され、この端子接続用はんだバン
プはこのクリームはんだと共に溶融して一体化するか
ら、このクリームはんだの容積を予め考慮して高温はん
だバンプの高さを設定しておくべきであるからである。Here, three or more high-temperature solder bumps are preferably provided on the lower surface of the substrate as far as possible, and for example, a total of four high-temperature solder bumps are preferably provided near four corners. The height of the high-temperature solder bump is preferably higher than that of the terminal connection solder bump. This is because cream solder is supplied to the terminal pads on the motherboard side, and the solder bumps for connecting the terminals are melted and integrated with the cream solder. Is to be set.
【0017】前記第2の目的は、ICチップを搭載した
基板の接続端子面に2次元的に配列された多数の端子接
続用はんだバンプを有するBGA型集積回路部品の製造
方法において、 a)前記基板の接続端子面の周辺付近の少なくとも3ヶ
所に接続端子パッドと共にダミー端子パッドを形成する
工程; b)これらダミー端子パッドに高温はんだボールを供給
し第1のリフロー加熱温度過熱することにより高温はん
だバンプを形成する工程; c)前記接続端子パッドに端子接続用はんだボールを供
給し、前記工程b)の第1のリフロー加熱温度より低い
リフロー加熱温度に過熱して端子接続用はんだバンプを
形成する工程;以上の各工程を有することを特徴とする
BGA型集積回路部品の製造方法、により達成される。A second object of the present invention is to provide a method of manufacturing a BGA type integrated circuit component having a large number of terminal connection solder bumps two-dimensionally arranged on connection terminal surfaces of a substrate on which an IC chip is mounted. Forming dummy terminal pads together with connection terminal pads in at least three places near the periphery of the connection terminal surface of the substrate; b) supplying high-temperature solder balls to these dummy terminal pads and heating them at a first reflow heating temperature to thereby heat the high-temperature solder. Forming a bump; c) supplying a solder ball for terminal connection to the connection terminal pad, and heating to a reflow heating temperature lower than the first reflow heating temperature in the step b) to form a solder bump for terminal connection. Steps: This is achieved by a method for manufacturing a BGA type integrated circuit component having the above steps.
【0018】前記第3の目的は、請求項1のBGA型集
積回路部品をマザーボードに表面実装する実装方法にお
いて、 a)マザーボードの部品実装面に前記BGA型集積回路
部品の端子接続用はんだバンプに対応する端子パッドと
共に、高温はんだバンプに対応するダミーパッドとを形
成する工程; b)前記工程a)で形成した端子パッドにクリームはん
だを供給する工程; c)BGA型集積回路部品の端子接続用はんだバンプお
よび高温はんだバンプをマザーボードの端子パッドおよ
びダミーパッドに位置合せして搭載する工程; d)高温はんだバンプの溶融温度以下の第1のリフロー
加熱温度まで過熱して端子接続甲はんだバンプをリフロ
ーする工程;以上の各工程を有することを特徴とするB
GA型集積回路部品の実装方法、により達成される。A third object of the present invention is to provide a mounting method for surface mounting a BGA type integrated circuit component on a motherboard according to claim 1, wherein: a) a solder bump for connecting a terminal of the BGA type integrated circuit component on a component mounting surface of the motherboard; Forming a dummy pad corresponding to a high-temperature solder bump together with a corresponding terminal pad; b) supplying cream solder to the terminal pad formed in the step a); c) connecting terminals of a BGA type integrated circuit component Aligning and mounting the solder bumps and the high-temperature solder bumps on the terminal pads and the dummy pads of the motherboard; d) reheating the terminal connection upper solder bumps by heating to a first reflow heating temperature not higher than the melting temperature of the high-temperature solder bumps. B; comprising each of the above steps
This is achieved by a mounting method of a GA type integrated circuit component.
【0019】[0019]
【実施態様】図1は本発明による製造方法の一実施態様
を示す図、図2は同じく実装方法の一実施態様を示す
図、図3ははんだバンプの配列例を示すICの底面図で
ある。FIG. 1 is a view showing an embodiment of a manufacturing method according to the present invention, FIG. 2 is a view showing an embodiment of the same mounting method, and FIG. 3 is a bottom view of an IC showing an example of arrangement of solder bumps. .
【0020】図1〜3において符号50はBGA型IC
であり、基板52,ICチップ54,封止樹脂56を持
つ。基板50の下面(接続端子面)には中央付近に密集
して格子状に配列された多数の接続端子パッド58が形
成され、下面の4隅にはそれぞれ1個づつのダミー端子
パッド60が形成されている。ダミー端子パッド60は
接続端子パッド58と同じ工程で形成される。このダミ
ー端子パッド60は電気的に他の回路パターンと接続す
る必要はなく、基板52の下面に他の回路から独立して
形成しておけばよい。In FIGS. 1 to 3, reference numeral 50 denotes a BGA type IC.
And has a substrate 52, an IC chip 54, and a sealing resin 56. On the lower surface (connection terminal surface) of the substrate 50, a large number of connection terminal pads 58 are densely arranged in a lattice pattern near the center, and one dummy terminal pad 60 is formed at each of the four corners of the lower surface. Have been. The dummy terminal pad 60 is formed in the same step as the connection terminal pad 58. The dummy terminal pad 60 need not be electrically connected to another circuit pattern, and may be formed on the lower surface of the substrate 52 independently of other circuits.
【0021】このIC50は基板52の下面を上にして
保持され、この状態でダミー端子パッド60にクリーム
はんだ62が供給される(図1の(A))。ここに用い
るクリームはんだ62は広く用いられる共晶はんだの微
小粒を粘度の高いフラックスに混入したものでもよい
が、高温ハンダの微小粒を用いたものが好ましい。The IC 50 is held with the lower surface of the substrate 52 facing upward, and in this state, the cream solder 62 is supplied to the dummy terminal pads 60 (FIG. 1A). The cream solder 62 used here may be a mixture of fine particles of eutectic solder widely used in a high-viscosity flux, but it is preferable to use fine particles of high-temperature solder.
【0022】このダミー端子パッド60に供給したクリ
ームはんだ62の上には高温はんだボール64が載せら
れる(図1の(A))。例えばダミー端子パッド60の
位置に小孔をあけたメタルマスクを載せ、その上からこ
の小孔に高温はんだボール64を1個づつ入れる。高温
はんだボール64はクリームはんだ62の粘性によって
仮止めされる。A high-temperature solder ball 64 is placed on the cream solder 62 supplied to the dummy terminal pad 60 (FIG. 1A). For example, a metal mask having a small hole is placed at the position of the dummy terminal pad 60, and high-temperature solder balls 64 are put into the small holes one by one from above. The high-temperature solder balls 64 are temporarily fixed by the viscosity of the cream solder 62.
【0023】この状態で全体を高温の赤外線ヒータ66
に入れ、高温はんだボール64の溶融温度(第1のリフ
ロー加熱温度T1)。まで加熱し、リフローする(図1
の(B))。このリフローにより高温はんだボール64
およびクリームはんだ62が溶融し、両者が一体化して
凝固することにより高温はんだバンプ68が形成され
る。In this state, the high-temperature infrared heater 66 is entirely heated.
And the melting temperature of the high-temperature solder ball 64 (first reflow heating temperature T 1 ). And reflow (Fig. 1
(B)). By this reflow, the high-temperature solder balls 64
The high-temperature solder bump 68 is formed by melting the solder paste 62 and solidifying the two together.
【0024】次に接続端子パッド58にクリームはんだ
70を供給する(図1の(C))。このクリームはんだ
70は共晶はんだの微小粒を用いたものであり、例えば
ディスペンサ(図示せず)によって接続端子パッド58
ごとに順に一定量のクリームはんだ70を載せてゆく。
このクリームはんだ70を載せた各接続端子パッド58
には、端子接続用はんだボール72が1個づつ供給さ
れ、クリームはんだ70自身の粘性によって仮止めされ
る(図1の(C))。このはんだボール72は共晶はん
だで作られる。Next, cream solder 70 is supplied to the connection terminal pads 58 (FIG. 1C). The cream solder 70 uses fine grains of eutectic solder, and is connected to the connection terminal pads 58 by, for example, a dispenser (not shown).
A fixed amount of cream solder 70 is placed in order for each time.
Each connection terminal pad 58 on which this cream solder 70 is placed
The solder balls 72 for terminal connection are supplied one by one, and are temporarily fixed by the viscosity of the cream solder 70 itself (FIG. 1C). This solder ball 72 is made of eutectic solder.
【0025】そして全体を赤外線ヒータ74を有するリ
フロー炉に入れて加熱する(図1の(D))。この時の
温度(第2リフロー加熱温度)T2ははんだボール72
が温融する共晶温度であり、前記した高温はんだボール
64が溶融する第1リフロー加熱温度T1よりも低い。
このリフローによって、はんだボール72およびクリー
ムはんだ70が溶融し一体化した後、凝固すると、端子
接続用はんだバンプ76ができる。この時高温はんだバ
ンプ68は溶融しない。図3はこれら端子接続用はんだ
バンプ76と高温はんだバンプ68の配置を表してい
る。Then, the whole is put into a reflow furnace having an infrared heater 74 and heated (FIG. 1D). The temperature (second reflow heating temperature) T 2 at this time is the solder ball 72.
There is a eutectic temperature of YutakaToru, the high temperature solder balls 64 that is less than the first reflow heating temperatures T 1 for melting.
By this reflow, the solder ball 72 and the cream solder 70 are melted and integrated, and then solidified to form a solder bump 76 for terminal connection. At this time, the high-temperature solder bump 68 does not melt. FIG. 3 shows the arrangement of the terminal connection solder bumps 76 and the high-temperature solder bumps 68.
【0026】このように高温はんだバンプ68と端子接
続用はんだバンプ76を形成したIC50は、図2に示
すようにしてマザーボード78に実装される。すなわち
マザーボード78には、このIC50の接続端子パッド
58とダミー端子パッド60とに対応する端子パッド8
0およびダミー端子パッド82が予め形成され、これら
のパッド80,82にクリームはんだ84,86がそれ
ぞれ供給されている(図2の(E))。The IC 50 having the high-temperature solder bumps 68 and the terminal connection solder bumps 76 formed thereon is mounted on a motherboard 78 as shown in FIG. That is, the terminal pads 8 corresponding to the connection terminal pads 58 and the dummy terminal pads 60 of the IC 50 are provided on the motherboard 78.
0 and dummy terminal pads 82 are formed in advance, and cream solders 84 and 86 are supplied to these pads 80 and 82, respectively (FIG. 2E).
【0027】これらのパッド80,82に前記IC50
のはんだバンプ76および高温はんだバンプ68を位置
合せして載せ、リフロー炉に入れる。リフロー炉の赤外
線ヒータ88はリフロー炉内を第2リフロー温度T2に
加熱し保持している。このためこのリフロー炉でははん
だバンプ76とクリームはんだ80,86だけが溶融
し、高温はんだバンプ68は溶融しない(図2の
(F))。The IC 50 is attached to these pads 80 and 82.
The solder bumps 76 and the high-temperature solder bumps 68 are placed in alignment and placed in a reflow furnace. Infrared heaters 88 in the reflow furnace holds heating reflow furnace to a second reflow temperature T 2. Therefore, in this reflow furnace, only the solder bump 76 and the cream solders 80 and 86 are melted, and the high-temperature solder bump 68 is not melted (FIG. 2 (F)).
【0028】高温はんだバンプ68は溶融しないから、
マザーボード78のダミーパッド82に当ってマザーボ
ード78とIC50との間隔を一定に保つ。すなわち接
続端子パッド58と80との間隙寸法がこの高温はんだ
バンプ68の高さによって一定に保たれる。この結果端
子パッド58,80間の接続部が図6に示したように樽
状に膨らんだり(図6の(A))、隣接するパッドとの
間にはんだブリッジ(図6の(B))が生成されること
がなくなる。Since the high temperature solder bump 68 does not melt,
The gap between the motherboard 78 and the IC 50 is kept constant by hitting the dummy pad 82 of the motherboard 78. That is, the gap size between the connection terminal pads 58 and 80 is kept constant by the height of the high-temperature solder bump 68. As a result, the connection between the terminal pads 58 and 80 bulges in a barrel shape as shown in FIG. 6 (FIG. 6A), or a solder bridge between adjacent pads (FIG. 6B). Will not be generated.
【0029】なお図2の(F)に示す工程では、はんだ
バンプ76が溶融する第2リフロー加熱温度T2に加熱
すると説明したが、クリームはんだ84,86だけが溶
融しはんだバンプ76および68が溶融しない温度(第
3リフロー加熱温度)T3(T3<T2<T1)に加熱して
クリームはんだ84、86だけをリフローしてもよい。It should be noted in the step shown in (F) in FIG. 2, although the solder bumps 76 have been described as heated to a second reflow heating temperature T 2 of melting, the solder bumps 76 and 68 only the cream solder 84 is melted The cream solders 84 and 86 alone may be reflowed by heating to a temperature at which they do not melt (third reflow heating temperature) T 3 (T 3 <T 2 <T 1 ).
【0030】次に高温はんだバンプ68の適切な寸法の
決定方法を図4を用いて説明する。図4は高温はんだバ
ンプ68と端子接続用はんだバンプ76とを拡大しこれ
らの寸法を対比して示す図である。端子接続用はんだバ
ンプ76の高さをa、クリームはんだ84,86の厚さ
をb、高温はんだバンプ68の高さをcとする。Next, a method for determining an appropriate size of the high-temperature solder bump 68 will be described with reference to FIG. FIG. 4 is an enlarged view of the high-temperature solder bump 68 and the terminal-connecting solder bump 76 and comparing their dimensions. The height of the terminal connection solder bump 76 is a, the thickness of the cream solders 84 and 86 is b, and the height of the high-temperature solder bump 68 is c.
【0031】クリームはんだ84,86はリフローする
ことにより、これに含まれたフラックス成分が消失する
からその容積が減少する。この減少量を考慮し、また端
子接続用はんだバンプ68の先端が半球状であることを
考慮すると、端子接続用はんだバンプ68とクリームは
んだ84の容積により接続されるパッド58と80の理
想的な間隔cは、ほぼc=a+(b×0.5)により求め
ることができる。The reflow of the cream solders 84 and 86 causes the flux components contained therein to disappear, so that the volume thereof is reduced. Considering this reduction amount and considering that the tip of the terminal connection solder bump 68 is hemispherical, ideal pads 58 and 80 connected by the volume of the terminal connection solder bump 68 and the cream solder 84 are formed. The interval c can be substantially obtained by c = a + (b × 0.5).
【0032】高温はんだバンプ68は溶融せずにその先
端がマザーボード78のダミー端子パッド82に当接す
るから、高温はんだバンプ68の高さをこのように求め
たcに設定すれば、全ての接続端子パッド58と80の
間隔をこの寸法cに管理することができる。従って全て
の接続端子パッド58と80の間を接続するはんだの形
状を適正にして樽型になったりブリッジができたりする
ことがなくなる。Since the tip of the high-temperature solder bump 68 does not melt and the tip of the high-temperature solder bump 68 abuts on the dummy terminal pad 82 of the motherboard 78, setting the height of the high-temperature solder bump 68 to c obtained in this manner allows all connection terminals to be connected. The distance between the pads 58 and 80 can be controlled to this dimension c. Therefore, the shape of the solder connecting all the connection terminal pads 58 and 80 is properly adjusted, and the solder does not become a barrel shape or a bridge.
【0033】[0033]
【発明の効果】請求項1の発明は以上のように、基板の
下面に端子接続用ハンダバンプよりも高融点を持つ高温
はんだバンプを少くとも3個突設したものであるから、
BGA型集積回路部品(集積回路素子、IC、LSI)
とマザーボードの間隔を一定に保つことができ、端子間
を接続するはんだ端子部が樽状に過大に膨らんだり、隣
接する端子間にはんだブリッジが発生したりすることを
防ぐことができる。このため製品の信頼性が向上し、製
品の歩溜まりが向上する。As described above, according to the first aspect of the present invention, at least three high-temperature solder bumps having a higher melting point than the terminal connection solder bumps are provided on the lower surface of the substrate.
BGA type integrated circuit parts (integrated circuit elements, IC, LSI)
The distance between the terminal and the motherboard can be kept constant, and it is possible to prevent the solder terminal portion connecting between the terminals from being excessively expanded in a barrel shape and the occurrence of a solder bridge between adjacent terminals. Therefore, the reliability of the product is improved, and the yield of the product is improved.
【0034】高温はんだバンプは基板の互いにできるだ
け離れた位置に設けるのが、基板を安定させるために望
ましく、基板の4隅に1個づつ設けるのが最も望ましい
(請求項2)。また高温はんだバンプは、マザーボード
の接続端子に供給するクリームはんだが端子接続用はん
だバンプと一体化することを考慮すれば、端子接続用は
んだバンプよりも高く突設するのが望ましい(請求項
3)。It is desirable to provide the high-temperature solder bumps as far as possible from each other on the substrate for the purpose of stabilizing the substrate, and it is most desirable to provide one at each of the four corners of the substrate. In consideration of the fact that the cream solder supplied to the connection terminals of the mother board is integrated with the terminal connection solder bumps, it is desirable that the high-temperature solder bumps be protruded higher than the terminal connection solder bumps. .
【0035】請求項4の発明によれば、このBGA型集
積回路部品の製造方法が得られる。また請求項5の発明
によれば、このBGA型集積回路部品のマザーボードへ
の実装方法が得られる。According to the fourth aspect of the present invention, a method of manufacturing the BGA type integrated circuit component is obtained. According to the fifth aspect of the present invention, there is provided a method of mounting the BGA type integrated circuit component on a motherboard.
【図1】本発明に係る製造方法の一実施態様を示す図FIG. 1 is a diagram showing one embodiment of a manufacturing method according to the present invention.
【図2】同じく実装方法の一実施態様を示す図FIG. 2 is a diagram showing an embodiment of the mounting method.
【図3】はんだバンプの配列例を示す図FIG. 3 is a diagram showing an example of an arrangement of solder bumps;
【図4】はんだバンプの高さの説明図FIG. 4 is an explanatory view of a height of a solder bump.
【図5】従来方法を示す図FIG. 5 shows a conventional method.
【図6】従来方法による不都合を説明する図FIG. 6 is a diagram illustrating inconvenience caused by a conventional method.
10、50 BGA型集積回路部品(IC、LSI) 12、52 基板 14、54 ICチップ 16、56 封止樹脂 18、30、58、80 接続端子パッド 28、78 マザーボード 60、82 ダミー端子パッド 62、70、84、86 クリームはんだ 64 高温はんだボール 68 高温はんだバンプ 72 端子接続用はんだボール 76 端子接続用はんだバンプ 10, 50 BGA type integrated circuit component (IC, LSI) 12, 52 substrate 14, 54 IC chip 16, 56 sealing resin 18, 30, 58, 80 connection terminal pad 28, 78 motherboard 60, 82 dummy terminal pad 62, 70, 84, 86 Cream solder 64 High-temperature solder ball 68 High-temperature solder bump 72 Solder ball for terminal connection 76 Solder bump for terminal connection
Claims (5)
に2次元的に配列された多数の端子接続用はんだバンプ
を有するBGA型集積回路部品において、 前記基板の下面に前記はんだバンプよりも融点が高い高
温はんだバンプが少くとも3個突設されていることを特
徴とするBGA型集積回路部品。1. A BGA type integrated circuit component having a large number of terminal connection solder bumps two-dimensionally arranged on connection terminal surfaces of a substrate on which an IC chip is mounted, wherein the lower surface of the substrate has a lower melting point than the solder bumps. BGA type integrated circuit component characterized in that at least three high temperature solder bumps having a high height are projected.
近にそれぞれ1個づつ突設されている請求項1のBGA
型集積回路部品。2. The BGA according to claim 1, wherein each of the high-temperature solder bumps protrudes one at a time near each of four corners on the lower surface of the substrate.
Type integrated circuit parts.
ンプよりも高く突設されている請求項1または2のBG
A型集積回路部品。3. The BG according to claim 1, wherein the high-temperature solder bump protrudes higher than the terminal connection solder bump.
A-type integrated circuit components.
に2次元的に配列された多数の端子接続用はんだバンプ
を有するBGA型集積回路部品の製造方法において、 a)前記基板の接続端子面の周辺付近の少なくとも3ヶ
所に接続端子パッドと共にダミー端子パッドを形成する
工程; b)これらダミー端子パッドに高温はんだボールを供給
し第1のリフロー加熱温度に加熱することにより高温は
んだバンプを形成する工程; c)前記接続端子パッドに端子接続用はんだボールを供
給し、前記工程b)の第1のリフロー加熱温度より低い
第2のリフロー加熱温度に過熱して端子接続用はんだバ
ンプを形成する工程;以上の各工程を有することを特徴
とするBGA型集積回路部品の製造方法。4. A method of manufacturing a BGA type integrated circuit component having a large number of terminal connection solder bumps two-dimensionally arranged on a connection terminal surface of a substrate on which an IC chip is mounted, comprising: a) a connection terminal surface of the substrate; Forming dummy terminal pads together with connection terminal pads in at least three places near the periphery of the semiconductor device; b) forming high-temperature solder bumps by supplying high-temperature solder balls to these dummy terminal pads and heating them to a first reflow heating temperature; C) supplying a solder ball for terminal connection to the connection terminal pad, and heating to a second reflow heating temperature lower than the first reflow heating temperature in the step b) to form a solder bump for terminal connection. A method of manufacturing a BGA-type integrated circuit component, comprising the above steps.
ーボードに表面実装する実装方法において、 a)マザーボードの部品実装面に前記BGA型集積回路
部品の端子接続用はんだバンプに対応する端子パッドと
共に、高温はんだバンプに対応するダミー端子パッドと
を形成する工程; b)前記工程a)で形成した端子パッドにクリームはん
だを供給する工程; c)BGA型集積回路部品の端子接続用はんだバンプお
よび高温はんだバンプをマザーボードの端子パッドおよ
びダミー端子パッドに位置合せして搭載する工程; d)高温はんだバンプの溶融温度以下の第1のリフロー
加熱温度まで加熱して端子接続用はんだバンプをリフロ
ーする工程;以上の各工程を有することを特徴とするB
GA型集積回路部品の実装方法。5. A mounting method for surface mounting a BGA type integrated circuit component on a motherboard according to claim 1, wherein: a) a terminal pad corresponding to a solder bump for connecting a terminal of the BGA type integrated circuit component on a component mounting surface of the motherboard. Forming a dummy terminal pad corresponding to the high-temperature solder bump; b) supplying cream solder to the terminal pad formed in the step a); c) solder bump for terminal connection of the BGA type integrated circuit component and high temperature Aligning and mounting the solder bumps on the terminal pads and the dummy terminal pads on the motherboard; d) reheating the terminal connection solder bumps by heating to a first reflow heating temperature equal to or lower than a melting temperature of the high-temperature solder bumps; B comprising the above steps
A mounting method for GA type integrated circuit components.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36480297A JPH11186454A (en) | 1997-12-22 | 1997-12-22 | BGA type integrated circuit component, its manufacturing method and its mounting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36480297A JPH11186454A (en) | 1997-12-22 | 1997-12-22 | BGA type integrated circuit component, its manufacturing method and its mounting method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11186454A true JPH11186454A (en) | 1999-07-09 |
Family
ID=18482702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP36480297A Pending JPH11186454A (en) | 1997-12-22 | 1997-12-22 | BGA type integrated circuit component, its manufacturing method and its mounting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11186454A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002329745A (en) * | 2001-05-01 | 2002-11-15 | Fujitsu Ltd | Electronic component mounting method and paste material |
JP2003100949A (en) * | 2001-09-26 | 2003-04-04 | Hitachi Ltd | Semiconductor device |
US6717275B2 (en) | 2001-10-29 | 2004-04-06 | Renesas Technology Corp. | Semiconductor module |
US20220216071A1 (en) * | 2021-01-05 | 2022-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and method of manufacture |
-
1997
- 1997-12-22 JP JP36480297A patent/JPH11186454A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002329745A (en) * | 2001-05-01 | 2002-11-15 | Fujitsu Ltd | Electronic component mounting method and paste material |
JP2003100949A (en) * | 2001-09-26 | 2003-04-04 | Hitachi Ltd | Semiconductor device |
US6717275B2 (en) | 2001-10-29 | 2004-04-06 | Renesas Technology Corp. | Semiconductor module |
US20220216071A1 (en) * | 2021-01-05 | 2022-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and method of manufacture |
US11830746B2 (en) * | 2021-01-05 | 2023-11-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and method of manufacture |
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