JPH11183390A - Surface inspecting method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect a surface defect different in reflection characteristic accurately and efficiently by automatically controlling an inspection light quantity adjusting device so that the quantity of light reflected on an inspected surface for adjusting the quantity of light is uniform on the inspected surface for adjusting the quantity of light. SOLUTION: Before inspection for a body 1, the quantity of reflected light is measured by using a previously manufactured master inspection body 1, and a signal is output to a light quantity regulating device 4 so that the quantity of reflected light in divided areas 1a-1d is uniform. According to the output signal, an inspection light radiating device 3 is controlled to automatically regulate the quantity of light of light sources 3a-3d. Secondly, with inspection light is applied to the surface of a general inspected body l by the light sources 3a-3d, while the quantity of reflected light from the divided very small visual field areas of the surface of the inspected body l is detected by photo detectors 5a-5d, the very small visual field areas are moved, and the quantity of reflected light from the divided areas 1a-1d of the inspected body 1 is detected by the photo detectors 5a-5d. In the case where the quantity of reflected light from the surface of the inspected body 1 is different from the reference value, designated defect processing is conducted to detect the defect.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface inspection method and apparatus for inspecting a surface state for detecting a surface state of an object to be inspected. The present invention relates to a surface layer of a test object having a substrate and a surface layer formed on the surface thereof, for example, a photosensitive layer on a photosensitive drum surface used for an image output device such as a copying machine or a laser printer, and a developing roll. It is used for inspection of the surface, transfer roll surface, or base material (core material) surface of those rolls.

[0002]

2. Description of the Related Art Photoreceptor drums used in the above-mentioned copying machines and laser printers suffer from defects in the function of the photoreceptor caused in the process of applying or depositing the photoreceptor material and scratches on the surface of the photoreceptor during product assembly. Image defects such as black spots and white spots occur on the copy due to a defect called "mechanical scratch". For this reason, quality is assured by surface inspection of all the parts. In particular, OPC (organic photoreceptor), which accounts for the majority of production in recent years
The black and white image quality defects caused by the above-mentioned causes and the defects caused by the non-uniform thickness of the photoconductor in the photoconductor coating process do not appear in the copying of a black and white binary document. May cause image quality defects.

[0003] Halftone copying is used, for example, in photographic originals and is an important function of copying machines. Defects due to uneven film thickness are classified into "stains", "irregularities", "patterns", "bulges", "dents", "blinds", "axial streaks", "foreign matter", etc., from the shape and the like. 0.1 for size
mm or more and about several mm. Defects such as "unevenness" appear as subtle changes in the tint of the photoreceptor, and can be detected only by careful observation with the naked eye. As a conventional inspection method for surface defects of the surface of the photoreceptor, the development roll, the transfer roll, and other inspection objects, a visual inspection by an inspector is performed. However, the visual inspection has problems such as variations in inspection quality, an increase in inspection man-hours, deterioration in work efficiency due to visual fatigue, difficulty in securing workers, and an increase in worker training time.

[0004] In order to automate the visual inspection work, a surface inspection method and apparatus for inspecting surface defects such as dust, scratches, and surface unevenness existing on the surface of an object to be inspected have been proposed.
2. Description of the Related Art A surface of an object to be inspected is irradiated with light, and a change in reflected light obtained from the object to be inspected is used to optically inspect a surface state such as a surface defect. There are various types of surface defects of the object to be inspected depending on the size and form, and the surface defects have various reflection characteristics depending on the types of the defects. Therefore, in inspecting the surface state using the optical change of the reflected light, it is important to be able to inspect various surface defects having different reflection characteristics more accurately and efficiently.

The following techniques (a) to (d) are known as techniques relating to a surface inspection method and apparatus for solving the above-mentioned problems. (A) Technique described in Japanese Patent Application Laid-Open No. 5-107196. This publication discloses an apparatus for detecting a surface defect of an object to be inspected, which detects the amount of light detected on the surface of the object to be inspected which is configured in the same manner as the object to be inspected. A technique for detecting a surface defect using a threshold set based on the technique is described. (B) Technique described in Japanese Patent Application Laid-Open No. 9-26399. In this publication, a coating appearance inspection apparatus that detects the quality of coating of an inspection object uses a coating state of the inspection object having no coating failure as a master image. A technique is described in which the quality of a painted state is detected by comparing the image with a painted state image of a painted object to be inspected. (C) Technique described in Japanese Patent Application Laid-Open No. 7-325039 In this publication, a change in the amount of reflected light is detected for each test object using a photodetector, and the detection sensitivity is adjusted based on the detection information. A technique for detecting a defect is described. (D) Technique described in Japanese Patent Application Laid-Open No. 8-75659. In this publication, the amount of light received by one photodetector is determined by performing different signal processing for each of a plurality of light receiving areas set on the photodetector. A technique for determining the type of a defect and determining whether the inspection object is acceptable or not is described.

[0006]

[Problems to be Solved by the Invention] (Problems of the Prior Art (a) and (b)) As described in the above (a) and (b), the amount of reflected light or the surface state In the surface inspection technology for setting the reference value and the threshold value, the object to be inspected as a master is manufactured by the same manufacturing process as the object to be inspected for defect detection. However, in the case of an object to be inspected such as an electrophotographic photosensitive member, there is a difference in the amount of reflected light within one drum due to the state of the substrate surface treatment for preventing interference fringes, unevenness in film thickness, and the like. In some cases, variation in the amount of reflected light from the light source may cause a problem. If the material, composition, and manufacturing method of the test object are different, it is necessary to prepare a master test object for each product type. In addition, it is impossible to reproduce a plurality of master test objects with the same characteristics. Further, when the reference value and the threshold value are set by using one master test object, the number of positions in the master test object (for example, in the related art (a), the entire length of the photosensitive drum in the axial direction). ), And the thresholds of all the light receiving elements for detecting the reflected light from the surface of the inspection object need to be determined, and the operation is extremely time-consuming.

(Problems of the prior arts (a) to (d)) Also, in the above prior arts (a) to (d), one of
In order to reduce the inspection time per book, for example, one inspection object surface is divided into a plurality of inspection surfaces (light amount adjustment inspection surfaces), and each of the plurality of light amount adjustment inspection surfaces is It is conceivable that an inspection light irradiation device and a reflected light detection device can be used to simultaneously inspect the plurality of light amount adjustment inspected surfaces. In such a case, there are the following problems. That is, there is a problem that the inspection accuracy (defect detection accuracy) for each of the divided inspection surfaces varies if the amount of light applied to the plurality of divided inspection surfaces obtained by dividing the surface of the inspection object is not constant. Further, when the surface of the object to be inspected is irradiated with an appropriate amount of inspection light in accordance with the type of the object to be inspected, the defect can be detected with optimum sensitivity. There is a problem that it cannot be detected with high accuracy.

[0008] In view of the above problems, the present invention provides the following (O0
1) and (O02) are to be described. (O01) To make the amount of detection light irradiating the surface of the inspection object uniform. (O02) To be able to irradiate the surface of the inspection object with an appropriate amount of light according to the type of the inspection object.

[0009]

Next, the configuration of the present invention devised to solve the above-mentioned problem will be described. The components of the present invention correspond to the components of the embodiments described later. For the sake of simplicity, the reference numerals of the components of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(1st invention) In order to solve the aforementioned problem,
The surface inspection apparatus of the first invention of the present invention has the following requirements (A01)
(A07) to (A07). (A01) The surface of a general inspection object (1) and the master inspection object (1) having the same shape as the general inspection object (1) and having a uniform and uniform color value on the surface. Inspection light irradiation device (3) having a plurality of light sources (3a to 3d) for irradiating the surface with inspection light, (A02) Adjusting the inspection light amount of each light source (3a to 3d) of the inspection light irradiation device (3) (A03) The surface of each of the general and master inspected objects (1) is divided into small visual field regions, and arranged on a surface for detecting the amount of reflected light from the micro visual field region. Photodetector having a plurality of light receiving elements, (A04)
(A + 5) a micro-field-of-view area moving device that continuously moves the micro-field-of-view area of the photodetector within the entire surface of the inspection object (1); (A05) detection detected by the photodetector A surface for detecting a defect on the surface of the inspection object (1) by performing a predetermined defect detection process based on the detected reflection light amount with respect to the surface of the general inspection object (1) having a reflected light amount different from a reference value. Defect detection means (C
6), (A06) A plurality of light amount adjusting surfaces to be inspected are set on the surface of the master object to be inspected (1), and based on the amount of light detected by the photodetector from the surface of the master object to be inspected (1). A light intensity adjustment inspected surface reflected light amount detecting means (C4) for detecting a light intensity adjusted inspected surface reflected light amount which is a reflected light amount of each of the light intensity adjusted inspected surfaces on the surface of the master inspected object (1); A07) An automatic light amount adjusting device (3 + 4 + C5) for automatically adjusting the inspection light amount adjusting device (4) such that the reflected light amount of the inspection surface for light amount adjustment is the same on all inspection surfaces for light amount adjustment.

The inspection light irradiating device (3) is not particularly limited as long as it can irradiate light. For example, a light source that emits diffused light can be used. The photodetector is not particularly limited as long as it can detect the amount of reflected light from the master test object (1) and the general test object (1), but may be an area sensor (for example, a CCD) or a line sensor. Can be used. The surface defect detecting means (C6) can use the conventional technique disclosed in the above publications (a) to (d). The automatic light amount adjusting device (3+
4 + C5), it is possible to use a manual light amount adjusting means. In such a case, a display device for displaying the reflected light amount of the inspection surface for light amount adjustment for each inspection surface for light amount adjustment, a display device for displaying the adjustment amount of the light amount adjustment means, and the like are provided. The operator can manually adjust the light amount. As the reflected light amount of the inspection surface for light intensity adjustment, an average value of the detected light amounts of the plurality of inspection surfaces for light intensity adjustment of the master inspection object (1) can be adopted. As the average value, an average value of all, an average value excluding a part thereof, and various other average values can be adopted. The inspection light irradiating device (3) and the photodetector can be arranged in an appropriate number, respectively, and the number of the light amount adjusting inspection surfaces obtained by dividing the surface of the master inspection object (1) is described. It is preferable to arrange them one by one.

The master test object (1) is prepared as follows. (1) A reflected light from the surface of the general inspection object (1) using a defect-free object (or a defect-free object) from the general inspection object (1) to be inspected. Is detected, and a color corresponding to the color value is printed on the surface of a sheet, paper, or the like. (2) The printed surface of the printed sheet is used as the master inspection object (1). The colorimetric value of the general object to be inspected (1) can be measured using the surface inspection device of the present invention when the surface inspection device of the present invention is provided with a colorimetric value measuring means. Although it is possible, it is also possible to use a colorimetric value measuring device different from the surface inspection device of the present invention. When the general inspection object (1) to be inspected is a surface (cylindrical surface) of a cylindrical member such as a photosensitive drum or a developing roll, the master inspection object (1) prints the sheet. It is preferable to use one wound around a cylinder so that the surface becomes the surface.

As means for specifying the master inspected object (1) by color values, for example, hue indicating hue, lightness indicating brightness, saturation indicating vividness, and the like can be used. It is preferable to use a color specification value that combines lightness and saturation. The method of expressing the color specification value is not particularly limited. For example, Munsell color system, L * a * b color system, L * C * h color system, Hunter Lab color system, XYZ
A system (Yzy) color system or the like can be used. Printing or painting on paper, sheet, film or other solid, printing or painting on the same shape as the specimen (1) is used as the master specimen (1) specified by the color specification values. However, it is preferable to use a sheet that can be processed and cut arbitrarily. In addition, the surface of the object to be inspected (1) has a high gloss, semi-gloss, no gloss (no gloss) with respect to the state of the printed or painted surface gloss. What is necessary is just to specify according to a state, and it does not specifically limit. Also, the reproducibility of the master test object (1) can be easily and accurately reproduced by specifying the color specification value. Further, by specifying the color specification value according to the type of the test object (1), the master test object (1) can be easily and accurately created.

(Operation of the First Invention) In the surface inspection apparatus according to the first invention of the present application having the above-described configuration, a plurality of light sources (3a to 3a) are provided.
3d) The inspection light irradiating device (3) having the same shape as the general inspection object (1) and having a uniform and uniform color specification value on the surface of the master inspection object (1). The inspection object (1) of the master is irradiated with the inspection light.
While detecting the amount of reflected light from the small micro-field of view with the surface divided by the photodetector, the micro-field of view is moved by the micro-field-of-view moving device (2 + 7) to reflect the light from the surface of the master inspection object (1). Detect light intensity. Next, based on the light intensity detected by the photodetector from the surface of the master inspected object (1), the master inspected object (1) is detected by a light intensity adjusting inspected surface reflected light amount detecting means (C4).
A reflected light amount of the inspection surface for light amount adjustment, which is a reflected light amount for each inspection surface for light amount adjustment set on the surface, is detected.

Next, the inspection light amount adjusting device (4) is automatically operated by the automatic light amount adjusting device (3 + 4 + C5) so that the reflected light amount of the inspection surface for light amount adjustment becomes the same on all the inspection surfaces for light amount adjustment. Adjust. Next, the surface of the general object to be inspected (1) was divided while the surface of the general object to be inspected (1) was irradiated with the inspection light by the inspection light irradiation device (3) in which the irradiation amount was adjusted. While detecting the amount of reflected light from the small minute visual field region by the photodetector, the minute visual field region is moved by the minute visual region moving device (2 + 7) to detect the reflected light amount from the surface of the general inspection object (1). I do. Next, when the amount of reflected light from the surface of the general object to be inspected (1) is different from a reference value, the detected reflected light amount for the surface of the general object to be inspected (1) is determined by a surface defect detecting means (C6). Based on this, a predetermined defect detection process (the processes described in the related arts (a) to (d)) is performed to detect a defect on the surface of the inspection object (1). By detecting the amount of reflected light of the master object (1) and adjusting the amount of light of the inspection light irradiation device (3), the amount of reflected light from the previous object (1) can always be detected under the same conditions. (The same reflected light can be detected at any position on the surface of the test object (1) having the same color specification value), and the surface state of the test object (1) is detected efficiently and accurately. be able to.

(Second Invention) A surface inspection apparatus according to a second invention of the present application is characterized by having the following requirements (B01) to (B07). (B01) The surface of the general inspection object (1) and the master inspection object (1) having the same shape as the general inspection object (1) and having a uniform and uniform color value on the surface. Inspection light irradiation device (3) having a plurality of light sources (3a to 3d) for irradiating the surface with inspection light, (B02) Adjusting the inspection light amount of each light source (3a to 3d) of the inspection light irradiation device (3) (B03) The surface of each of the general and master inspected objects (1) is divided into a plurality of divided inspected surfaces (1a, 1b, 1c, 1d) to divide the inspected light. The surface (1a, 1b, 1c, 1d) is further divided into smaller minute visual field regions, and a plurality of light receiving elements arranged in a plane for detecting the amount of reflected light from the minute visual field regions is provided. (1a, 1b, 1c, 1d) A plurality of photodetectors (5a, 5b, c, 5d), (B04) the minute visual field regions of the photodetectors (5a, 5b, 5c, 5d) provided for each of the plurality of divided inspection surfaces (1a, 1b, 1c, 1d), Each divided inspection surface (1a, 1b, 1c,
1d) a micro-field-of-view area moving device (2 + 7) for continuously moving within the entire surface; (B05) each of the photodetectors (5a, 5)
b, 5c, 5d), by performing a predetermined defect detection process based on the detected reflected light amount for the surface portion of the general inspected object (1) in which the detected reflected light amount is different from a reference value. Surface defect detecting means (C6) for detecting a defect on the surface of the body (1), (B06) the divided inspection surfaces (1a, 1b, 1c, 1) of the surface of the master inspection object (1);
d) An inspection surface for light quantity adjustment is set for each, and the photodetectors (5a, 5b, 5) from the surface of the master inspection object (1) are set.
c, 5d) based on the detected light quantity, the light quantity adjustment target surface light quantity adjustment inspection light quantity which is the reflected light quantity of each of the light quantity adjustment inspection surfaces on the master inspection object (1) surface is detected. Inspection surface reflected light amount detection means (C4), (B07) The inspection light amount adjustment device (4) such that the inspection surface reflection light amount for the light amount adjustment is the same on all inspection surfaces for light amount adjustment.
Automatic light intensity adjustment device (3 + 4 + C5) that automatically adjusts.

(Operation of the Second Invention) The second invention differs from the operation of the first invention in that a plurality of photodetectors (5a, 5b, 5c, 5d) are provided. In the surface inspection apparatus according to the second invention of the present application having the above configuration, a plurality of light sources (3a to 3a) are provided.
The inspection light irradiating device (3) having d) has the same shape as that of the general inspection object (1), and the surface of the master inspection object (1) having a uniform and uniform color value on the surface. Is irradiated with inspection light. The surface of each of the general and master inspection objects (1) is divided into a plurality of divided inspection surfaces (1a, 1).
b, 1c, 1d) and divided into the inspected surfaces (1a, 1d).
b, 1c, 1d) is further divided into smaller fields of view,
A plurality of photodetectors (5a, 5a,
5b, 5c, 5d) are the divided inspection surfaces (1a, 1b,
1c, 1d). Micro visual field area moving device (2
+7) indicates the plurality of divided inspection surfaces (1a, 1b, 1).
c, 1d) and photodetectors (5a, 5b, 5c, 5)
d) dividing the micro-field of view into each of the divided inspection surfaces (1
a, 1b, 1c, 1d).
The light amount adjustment inspection surface reflected light amount detection means (C4) is configured to detect the light amount adjustment inspection surface set on each of the divided inspection surfaces (1a, 1b, 1c, 1d) of the master inspection object (1). The plurality of photodetectors (5a, 5b, 5c, 5d)
Based on the detected light amount, the reflected light amount of the inspection surface for light amount adjustment, which is the reflected light amount of each inspection surface for light amount adjustment on the surface of the master inspection object (1), is detected. Automatic light intensity adjustment device (3
+ 4 + C5) automatically adjusts the inspection light amount adjusting device (4) such that the reflected light amount of the light amount adjustment inspection surface is constant for each of the plurality of light amount adjustment inspection surfaces. The inspection light amount adjusting device (4) includes the plurality of inspection light irradiation devices (3).
Are adjusted so that all the inspection light amounts are constant.

As described above, the master test object (1)
The inspection light irradiating device (3) whose light amount is adjusted using the surface irradiates the surface of the general inspection object (1) with inspection light. The micro-field-of-view area moving device (2 + 7) is configured to perform the plurality of divided inspection surfaces (1) on the surface of a general inspection object (1).
a, 1b, 1c, 1d) provided with photodetectors (5a, 5a).
The small visual field regions (b, 5c, 5d) are continuously moved within the entire surface of each of the divided inspection surfaces (1a, 1b, 1c, 1d). The plurality of photodetectors (5a, 5b, 5c, 5)
The plurality of light receiving elements arranged in a plane in d) detect the amount of reflected light from the minute visual field region. The surface defect detection means (C6) is provided for detecting the surface portion of the general inspection object (1) in which the amount of reflected light detected by each of the photodetectors (5a, 5b, 5c, 5d) is different from a reference value. A defect on the surface of the inspection object (1) is detected by performing a predetermined defect detection process based on the amount of reflected light.

(Third Invention) A surface inspection apparatus according to a third invention of the present application is characterized by having the following requirements (C01) to (C07). (C01) The surface of the general inspection object (1) and the master inspection object (1) having the same shape as the general inspection object (1) and having a uniform and uniform surface color value. Inspection light irradiation device (3) having a plurality of light sources (3a to 3d) for irradiating the surface with inspection light, (C02) adjusting the inspection light amount of each light source (3a to 3d) of the inspection light irradiation device (3) (C03) The surface of each of the general and master inspection objects (1) is divided into small minute visual field regions, and is arranged in a plane to detect the amount of reflected light from the minute visual field region. Photodetector having a plurality of light receiving elements, (C04)
A micro-field-of-view area moving device (2 + 7) for continuously moving the micro-field-of-view area of the photodetector within the entire surface of the inspection object (1); (C05) detection detected by the photodetector A surface for detecting a defect on the surface of the inspection object (1) by performing a predetermined defect detection process based on the detected reflection light amount with respect to the surface of the general inspection object (1) having a reflected light amount different from a reference value. Defect detection means (C
6), (C06) setting a plurality of light amount adjusting surfaces to be inspected on the surface of the master object (1), based on the detected light amount of the photodetector from the surface of the master object (1); A light intensity adjustment inspected surface reflected light amount detecting means (C4) for detecting a light intensity adjusted inspected surface reflected light amount which is a reflected light amount of each of the light intensity adjusted inspected surfaces on the surface of the master inspected object (1); C07) Master reflected light amount information display means for displaying information on the reflected light amount of the inspection surface for light amount adjustment for each inspection surface for light amount adjustment.

The "information on the amount of reflected light from the inspection surface for adjusting the amount of light" in (C07) includes the detected amount of reflected light itself for each inspection surface for adjusting the amount of light or the inspection light amount determined based on the detected amount of reflected light. It is possible to display the adjustment amount and the like of the adjustment device (4).

(Operation of the Third Invention) In the surface inspection apparatus of the third invention of the present application having the above configuration, a master reflected light amount display means is provided instead of the automatic light amount adjustment device (3 + 4 + C5) of the first invention. ing. Therefore, the first
In the present invention, the inspection light amount adjustment device (4) is automatically adjusted so that the reflected light amount of the inspection surface for light amount adjustment is the same on all inspection surfaces for light amount adjustment.
In the invention, by the master reflected light amount information display means,
Information on the amount of reflected light on the inspection surface for light quantity adjustment is displayed for each inspection surface for light quantity adjustment. Therefore, the operator manually operates the inspection light amount adjusting device (4) according to the displayed information to adjust the detected light amount. Other functions of the third invention are the same as those of the first invention.

(Fourth Invention) A surface inspection apparatus according to a fourth invention of the present application is characterized by having the following requirements (D01) to (D07). (D01) The surface of the general inspection object (1) and the master inspection object (1) having the same shape as the general inspection object (1) and having a uniform and uniform colorimetric value on the surface. An inspection light irradiation device (3) having a plurality of light sources (3a to 3d) for irradiating the surface with inspection light; (D02) adjusting an inspection light amount of each light source (3a to 3d) of the inspection light irradiation device (3). (D03) The surface of each of the general and master inspected objects (1) is divided into a plurality of divided inspected surfaces (1a, 1b, 1c, 1d), respectively. (1a, 1b, 1c, 1d) is further divided into small visual field areas, and a plurality of light receiving elements arranged in a plane for detecting the amount of reflected light from the micro visual field areas is provided. A plurality of photodetectors (5a, 5b, 5c) provided for each of 1a, 1b, 1c, 1d) , 5d), (D04) the micro-field-of-view regions of the photodetectors (5a, 5b, 5c, 5d) provided for each of the plurality of divided inspection surfaces (1a, 1b, 1c, 1d) Divided inspection surface (1a, 1b, 1c, 1
(d) a micro-field-of-view area moving device (2 + 7) for continuously moving within the entire surface; (D05) each of the photodetectors (5a, 5b,
5c, 5d), by performing a predetermined defect detection process based on the detected reflected light amount with respect to the surface portion of the general inspected object (1) where the detected reflected light amount is different from a reference value. 1) Surface defect detection means (C6) for detecting surface defects, (D06) The divided inspection surfaces (1a, 1b, 1c, 1) of the master inspection object (1) surface
d) An inspection surface for light quantity adjustment is set for each, and the photodetectors (5a, 5b, 5) from the surface of the master inspection object (1) are set.
c, 5d) based on the detected light quantity, the light quantity adjustment target surface light quantity adjustment inspection light quantity which is the reflected light quantity of each of the light quantity adjustment inspection surfaces on the master inspection object (1) surface is detected. Inspection surface reflected light amount detection means (C4), (D07) Master reflected light amount information display means for displaying information on the light amount adjustment inspected surface reflected light amount for each of the light amount adjustment inspected surfaces.

(Operation of the Fourth Invention) In the surface inspection device of the fourth invention of the present application having the above-mentioned configuration, a master reflected light amount display means is provided instead of the automatic light amount adjustment device (3 + 4 + C5) of the second invention. ing. Therefore, the second
In the present invention, the inspection light amount adjusting device (4) is automatically adjusted so that the reflected light amount of the inspection surface for light amount adjustment is the same and uniform on all inspection surfaces for light amount adjustment.
In the fourth aspect, the information on the reflected light amount of the inspection surface for light amount adjustment is displayed for each of the inspection surfaces for light amount adjustment by the master reflected light amount information display means. Therefore, the operator manually operates the inspection light amount adjusting device (4) according to the displayed information to adjust the detected light amount. Other functions of the fourth invention are the same as those of the second invention.

(Fifth Invention) A surface inspection method according to a fifth invention of the present application is characterized by having the following requirements (E01) to (E05). (E01) A master light source having the same shape as a general test object (1) and having a uniform surface color value by a test light irradiation device (3) having a plurality of light sources (3a to 3d). In a state where the surface of the inspection object (1) is irradiated with the inspection light, the amount of light reflected from a small minute visual field region obtained by dividing the surface of the inspection object (1) of the master is detected by a photodetector (5a, 5b, 5c, 5).
While detecting in step d), the micro visual field region is moved by the micro visual field region moving device (2 + 7) to detect the amount of reflected light from the surface of the master inspected object (1). (E02) detecting the photodetectors (5a, 5a,
5b, 5c, 5d) based on the detected light amounts, the light amount adjustment for detecting the reflected light amount of the inspected surface for light amount adjustment, which is the reflected light amount for each inspected surface for light amount adjustment set on the surface of the master inspected object (1). Inspection surface reflected light quantity detection process for (E03)
The inspection light irradiation device (3) such that the reflected light amount of the inspection surface for light quantity adjustment is the same on all inspection surfaces for light quantity adjustment.
(E04) a light amount adjusting step of adjusting an irradiation amount of the inspection light, (E04) a state in which the inspection light is irradiated on the surface of the general inspection object (1) by the inspection light irradiation device (3) in which the irradiation amount is adjusted, A light detector (5a, 5b, 5c, 5d) measures the amount of light reflected from a small minute visual field region obtained by dividing the surface of the general inspection object (1).
A general inspected surface reflected light amount detection step of detecting the amount of reflected light from the surface of the general inspected object (1) by moving the minute visual field region by the minute visual field region moving device (2 + 7) while detecting E05) When the amount of light reflected from the surface of the general inspection object (1) is different from a reference value, a predetermined defect detection process is performed on the surface portion of the general inspection object (1) based on the detected reflected light amount. A surface defect detection step of detecting a defect on the surface of the inspection object (1).

(Effect of the Fifth Invention) In the surface inspection method of the fifth invention of the present application having the above configuration, in the step of detecting the amount of reflected light on the surface of the master object to be inspected (1), a plurality of light sources (3
a to 3d) of the master inspection object (1) having the same shape as the general inspection object (1) and having a uniform surface color value formed by the inspection light irradiating device (3). In a state where the surface is irradiated with the inspection light, while detecting the amount of reflected light from a small minute visual field region obtained by dividing the surface of the inspection object (1) of the master by a photodetector (5a, 5b, 5c, 5d), A micro visual field area moving device (2+
7) to detect the amount of reflected light from the surface of the master test object (1). Next, in a light amount adjustment inspection surface reflection light amount detection step, the light amount adjustment inspection surface reflection light amount detection means (C4) detects the photodetectors (5a, 5b, 5c) from the surface of the master inspection object (1). , 5d)
Based on the detected light amount, the amount of reflected light on the inspection surface for light amount adjustment, which is the amount of reflected light for each inspection surface for light amount adjustment set on the surface of the master inspection object (1), is detected.

Next, in the light amount adjusting step, the inspection light amount adjusting device (4) is controlled by the automatic light amount adjusting device (3 + 4 + C5) so that the reflected light amount of the inspection surface for light amount adjustment becomes the same on all the inspection surfaces for light amount adjustment. ) Automatically adjusts.
Next, in a general inspection surface reflected light amount detection step, the inspection light is irradiated onto the surface of the general inspection object (1) by the inspection light irradiation device (3) in which the irradiation amount is adjusted. The minute field of view is detected by the photodetectors (5a, 5b, 5c, 5d) while detecting the amount of reflected light from the small minute field of view obtained by dividing the surface of the test object (1), and the minute field of view is moved by the minute field of view moving device (2 + 7). It is moved to detect the amount of light reflected from the surface of the general test object (1). Next, in the surface defect detection step, when the amount of reflected light from the surface of the general object to be inspected (1) is different from a reference value by the surface defect detection means (C6), the surface portion of the general object to be inspected (1) is detected. A predetermined defect detection process (the processes described in the related arts (a) to (d)) is performed based on the detected reflected light amount to detect a defect on the surface of the inspection object (1).

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION

Next, a specific example (embodiment) of an embodiment of the surface inspection apparatus of the present invention will be described with reference to the drawings. FIG. 1 is an explanatory diagram of one embodiment of a surface inspection apparatus. FIG. 2 is an explanatory diagram of a control device of the surface inspection device of the embodiment. In FIG. 1, a test object (photosensitive drum) 1 representing a master test object or a general test object is rotatably supported by a turntable 2 a of a test object rotation support device 2. The rotary table 2a is driven by a table rotation motor (see FIG. 2) 2b. The inspection light irradiating device 3 for irradiating the inspection object 1 with inspection light includes four light sources 3a using fluorescent lamps.
3b, 3c and 3d. The light amounts of the light sources 3a to 3d are adjusted by light amount adjustment circuits 4a, 4b, 4c, and 4d of a light amount adjustment device (inspection light amount adjustment device) 4.

The inspection light radiated from the inspection light irradiating device 3 onto the inspection object 1 is reflected from the surface of the inspection object 1. This reflected light is applied to the photodetectors 5a, 5b, 5c, 5d.
Is detected by The light detectors 5a to 5d are supported by a detector support device 6, and the detector support device 6 can be moved up and down by a lifting table (see FIG. 2) 7a of a detector lifting device 7. Therefore, each photodetector 5a, 5b, 5c, 5d
Moves up and down integrally with the detector supporting device. The elevating table 7a is driven by a table drive motor (see FIG. 2) 7b composed of a stepping motor.

Each of the photodetectors 5a, 5b, 5c, 5d receives reflected light from a minute area on the surface of the object 1 to be inspected, but each of the photodetectors 5a, 5b, 5c, 5d. The light reflected from the front surface of the test object 1 can be detected by the vertical movement of the test object and the rotational movement of the test object 1. Each of the photodetectors 5a, 5b, 5c, and 5d is a divided area (divided inspected surface) obtained by dividing the surface of the inspected object 1 into four.
The reflected light from 1a, 1b, 1c, 1d is detected. When the inspection object 1 is a master, an inspection surface (not shown) for adjusting the light amount is set in each of the divided areas. The reflected light amount of the inspection surface for light amount adjustment is detected based on the average value of the detected light amount for each inspection surface for light amount adjustment. In addition,
The inspection object rotation support device 2 and the detector elevating device 7 constitute a micro visual field region moving device (2 + 7).

In FIG. 2, the surface inspection control device C
PU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), I / O
(I / O interface) and the like. The surface inspection control device C receives a detection signal of reflected light input from each of the photodetectors 5a, 5b, 5c, 5d and other signals.

The surface inspection control device C responds to the input signal by using the light amount adjusting circuits 4a and 4a of the light amount adjusting device 4.
Control signals are output to the drive circuits 4b, 4c, 4d and the following devices. The table rotation motor drive circuit 2c of the inspection object rotation support device 2 drives the table rotation motor 2b. The table lifting motor drive circuit 7c of the detector lifting device 7 drives the table lifting motor 7b.

The RO of the surface inspection control device C
M stores a program that operates according to each of the input signals and necessary data. The surface inspection control device C operated by the program has the following functions and other functions. Rotation support device control output means C1: The rotation support device control output means C1 controls the table rotation motor drive circuit 2c of the test object rotation support device 2 to drive the table rotation motor 2b to a constant rotation speed. To do. Lifting device control output means C2: The lifting device control output means C2 has a pulse counter C2a, and the pulse counter C2a counts the number of pulses output to a table lifting motor 7b for raising and lowering the lifting table 7a. The count upper limit value detecting means C2b of the elevating device control output means C2 detects whether the number of pulses has reached a predetermined cant number. When the counted number has reached a predetermined number, that is, when the lifting table 7a has moved to a predetermined position, the output of the pulse is stopped, the driving of the table lifting motor 7b is stopped, and the lifting table 7a is stopped. Stop moving.

Reflected light amount detecting means C3: The reflected light amount detecting means C3 irradiates inspection light to the surface of the general inspection object 1 by the light sources 3a to 3d whose irradiation amount has been adjusted, and the general inspection object Small divided areas 1a, 1 obtained by dividing one surface
The reflected light amounts from b, 1c, and 1d are detected. Inspection surface reflection light quantity detection means C4 for light quantity adjustment: The inspection surface reflection light quantity detection means C4 for light quantity adjustment is based on the detection light quantity of the photodetectors 5a, 5b, 5c, 5d from the surface of the master DUT 1. Then, the reflected light amount of the inspection surface for light amount adjustment, which is the reflected light amount for each inspection surface for light amount adjustment set on the surface of the master inspection object 1, is detected. Light intensity adjustment output means C5: The light intensity adjustment output means C5 adjusts the light intensity so that the amount of reflected light from the inspection surface for light intensity adjustment is the same on all the inspection surfaces for light intensity adjustment set on the surface of the master inspection object 1. A signal is output to the device 4 so as to adjust the amount of light. The light amount adjusting device 4 controls the inspection light irradiation device 3 to automatically adjust the light amounts of the light sources 3a to 3d. In addition, the inspection light irradiation device 3, the light amount adjustment device 4, and the light amount adjustment output unit C5 output the light amount adjustment device (3+
4 + C5). Surface defect detecting means C6: The surface defect detecting means C6 detects the surface portion of the general inspection object 1 in which the amount of reflected light detected by the photodetectors 5a, 5b, 5c, 5d is different from a reference value. By performing a predetermined defect detection process based on the amount of reflected light, a defect on the surface of the general inspection object 1 is detected.

(Operation of the Embodiment) In the embodiment having the above-described configuration, the master inspection object 1 is prepared in advance before the surface inspection of the inspection object 1 is performed. The master test object 1 is created as follows. The colorimetric value of the surface of the inspection object having no defect on the surface (master inspection object 1) is measured using a spectrophotometer CM-5.
03 * C (Minolta Co., Ltd.), L * a * b
A color specification value is calculated using a color specification system. Next, printing specified by the color specification values is performed on the coated paper of A3 size, and the printing is arbitrarily cut in accordance with the photosensitive drum having the same shape as the inspected object, and wrapped around the surface of the photosensitive drum to form a master coating. An inspection object 1 is created. Printing was performed with high gloss specifications according to the surface condition of the photosensitive drum.

Next, the surface inspection method of the present invention will be described with reference to the flowchart shown in FIG. FIG. 3 is a flowchart of the surface inspection process. The process shown in FIG. 3 starts at the same time when the power of the surface inspection apparatus is turned on. In ST1 (step 1), a selection screen for the defect inspection mode and the light amount adjustment mode is displayed. In ST2, it is determined whether the defect inspection mode has been selected. If no (N), that is, if the light amount adjustment mode is selected, the process proceeds to ST3. S
At T3, the screen indicates that the light amount is being adjusted.
In ST4, the amount of reflected light is measured using the master inspection object 1. In this operation, in a state where the surface of the master object 1 is irradiated with inspection light, the amount of light reflected from the divided areas 1a to 1d on the surface of the master object 1 moves vertically along the surface. While being detected by the detectors 5a to 5d, the divided areas 1a to 1d are rotated by the rotary table 2a of the inspection object rotation support device 2, and each of the light amount adjustment inspection surfaces set on the master inspection object 1 Is detected. Based on the detected light amounts of the photodetectors 5a to 5d, the reflected light amount of the inspection surface for adjusting the light amount on the surface of the master inspection object 1 is detected. In ST5, it is determined whether or not the reflected light amounts of the divided regions 1a to 1d obtained based on the reflected light amounts of the inspection surface for light amount adjustment are within the specification. If yes (Y), the process returns to ST1, and if no (N), the process moves to ST6. In ST6, the divided areas 1a to 1d
A signal is output to the light amount adjusting device 4 so that the reflected light amount of all the divided regions 1a to 1d becomes the same, and the light amount adjusting device 4 controls the inspection light irradiation device 3 to control the light amount of the light sources 3a to 3d. Is automatically adjusted, and the process returns to ST4.

If yes (Y) in ST2,
That is, when the defect inspection processing mode is selected, ST7
Move on to In ST7, a message indicating that the defect inspection processing is being performed is displayed on the screen. In ST8, the surface of the general inspection object 1 is irradiated with inspection light by the light sources 3a to 3d of the inspection light irradiation device 3 whose irradiation amount has been adjusted, and the surface of the general inspection object 1 is divided. While detecting the amount of reflected light from the minute visual field area by the photodetectors 5a, 5b, 5c, and 5d,
The micro visual field area is moved by the micro visual field area moving device 2 + 7 to divide the general visual inspection object 1 into divided areas 1a to 1a.
The amount of reflected light from 1d is detected by the photodetectors 5a to 5d. In ST9, when the amount of reflected light from the surface of the general object 1 differs from the reference value, the general object 1
With respect to the surface portion, a defect on the surface of the inspection object 1 is detected by performing a predetermined defect detection process (the processes described in the related arts (a) to (d)) based on the detected reflected light amount. In ST10, the inspection result of the surface of the inspection object 1 is stored, and the process returns to ST1. According to the above-described method, the amount of reflected light from the object to be inspected can always be set to be constant, and the inspection of the general surface state of the object to be inspected can be performed accurately and efficiently.

Table 1 shows the results of measuring the variation in the amount of reflected light in each of the master test object 1 defined by the colorimetric values prepared by the above-described method and the master test object 1 conventionally used. is there. The measured values in the table are the gradation values of the luminance level of the CCD camera. In Table 1, in a defect-free test object configured in the same manner as the test object used as the conventional master test object 1, there is only one (the same light-quantity adjustment test surface on the same test object surface). The variation in the amount of reflected light from the object was confirmed. When the light amount is adjusted by using the master inspection object 1 defined by the color specification values created by the above-described method, the light amount is adjusted within the inspection object (at any light amount adjustment inspection surface of the inspection object surface). A uniform amount of reflected light was always obtained, and good results were obtained.

[Table 1]

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) The present invention is not limited to the photoreceptor surface, but is also effective for a defect inspection of a surface on which a film is uniformly provided on a substrate. (H02) As the light sources 3a to 3d of the embodiment of the present invention, it is possible to use a xenon lamp that emits diffused light.

[0039]

The above-described surface inspection apparatus and method of the present invention can provide the following effects. (E01) The amount of detection light applied to the surface of the inspection object can be made uniform. (E02) It is possible to irradiate the surface of the inspection object with an appropriate amount of light according to the type of the inspection object.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of one embodiment of a surface inspection apparatus.

FIG. 2 is an explanatory diagram of a control device of the surface inspection device of the embodiment.

FIG. 3 is a flowchart of a surface inspection process.

[Explanation of symbols]

C4: light intensity adjustment surface reflection light amount detecting means for inspection, C6: surface defect detection means, 1: inspection object (photosensitive drum), 1
a, 1b, 1c, 1d: divided surface to be inspected, 2 + 7: microscopic field area moving device, 3: inspection light irradiation device, 3 + 4 + C5: automatic light amount adjustment device, 4: inspection light amount adjustment device, 5a, 5b, 5
c, 5d ... Photodetector

Claims (5)

[Claims] 1. A surface inspection apparatus having the following requirements (A01) to (A07): (A01) a surface of a general inspection object and a surface color value having the same shape as the general inspection object An inspection light irradiating device (A0) having a plurality of light sources for irradiating inspection light onto the surface of the master object to be inspected, in which is uniformly and uniformly formed.
2) Inspection light amount adjusting device for adjusting the inspection light amount of each light source of the inspection light irradiation device. (A03) The surface of each of the general and master inspection objects is divided into small minute visual field regions and reflected from the minute visual field regions. A photodetector having a plurality of light receiving elements arranged in a plane for detecting the amount of light, (A04) a microscopic device for continuously moving the microscopic field of view of the photodetector within the entire surface of the surface of the inspection object; Viewing area moving device, (A05)
With respect to the general inspected object surface portion where the detected reflected light amount detected by the photodetector is different from a reference value, a predetermined defect detection process is performed based on the detected reflected light amount to detect a defect on the inspected object surface. Surface defect detection means for detecting,
(A06) A plurality of light intensity adjustment inspection surfaces are set on the master inspection object surface, and each of the master inspection object surfaces is detected based on the light intensity detected by the photodetector from the master inspection object surface. A light amount adjusting inspected surface reflected light amount detecting means for detecting a light amount adjusting inspected surface reflected light amount which is a reflected light amount for each light amount adjusting inspected surface, (A07) the light amount adjusting inspected surface reflected light amount is all light amounts An automatic light amount adjusting device for automatically adjusting the inspection light amount adjusting device so that the inspection light amount adjusting device becomes the same on the adjustment inspection surface. 2. A surface inspection apparatus having the following requirements (B01) to (B07): (B01) a surface of a general inspection object and a surface color value having the same shape as the general inspection object An inspection light irradiating device (B0) having a plurality of light sources for irradiating inspection light to the surface of the master object to be inspected in which the surface is uniformly and uniformly formed.
2) an inspection light amount adjusting device for adjusting an inspection light amount of each light source of the inspection light irradiation device; and (B03) dividing the general and master inspection object surfaces into a plurality of divided inspection object surfaces, respectively; The surface is further divided into smaller minute visual field regions, and a plurality of light receiving elements arranged in a plane for detecting the amount of reflected light from the minute visual field region are provided, and a plurality of light detectors provided for each divided inspection surface are provided. Container, (B0
4) a micro-field-of-view area moving device that continuously moves the micro-field-of-view area of the photodetector provided for each of the plurality of divided inspection surfaces within the entire surface of each of the divided inspection surfaces;
05) The surface of the inspection object is subjected to a predetermined defect detection process based on the detected amount of reflected light with respect to the general inspection object surface portion where the amount of reflected light detected by each of the photodetectors is different from a reference value. (B06) setting a light quantity adjusting inspection surface for each of the divided inspection surfaces of the master inspection object surface, and detecting the light detector from the master inspection object surface A light amount adjusting inspected surface reflected light amount detecting means for detecting a light amount adjusting inspected surface reflected light amount which is a reflected light amount of each of the light amount adjusting inspected surfaces on the master inspected object surface based on the detected light amount; B07) An automatic light amount adjusting device for automatically adjusting the inspection light amount adjusting device so that the reflected light amount of the inspection surface for light amount adjustment is the same on all inspection surfaces for light amount adjustment. 3. A surface inspection apparatus having the following requirements (C01) to (C07): (C01) a surface of a general inspection object and a surface color value having the same shape as the general inspection object An inspection light irradiating device (C0) having a plurality of light sources for irradiating inspection light onto the surface of the master object to be inspected, which is formed uniformly and uniformly.
2) An inspection light amount adjusting device for adjusting the inspection light amount of each light source of the inspection light irradiation device. (C03) The surface of each of the general and master inspection objects is divided into small minute visual field regions, and reflection from the minute visual field regions is performed. A photodetector having a plurality of light receiving elements arranged in a plane for detecting the amount of light; (C04) a microscopic device for continuously moving the microscopic field of view of the photodetector within the entire surface of the surface of the inspection object; Viewing area moving device, (C05)
With respect to the general inspected object surface portion where the detected reflected light amount detected by the photodetector is different from a reference value, a predetermined defect detection process is performed based on the detected reflected light amount to detect a defect on the inspected object surface. Surface defect detection means for detecting,
(C06) A plurality of light intensity adjustment inspection surfaces are set on the master inspection object surface, and each of the master inspection object surfaces is determined based on the amount of light detected by the photodetector from the master inspection object surface. A light amount adjusting inspected surface reflected light amount detecting means for detecting a light amount adjusting inspected surface reflected light amount which is a reflected light amount for each light amount adjusting inspected surface; and (C07) information relating to the light amount adjusting inspected surface reflected light amount. Master reflected light amount information display means for displaying each light amount adjusting surface to be inspected. 4. A surface inspection apparatus having the following requirements (D01) to (D07): (D01) a surface of a general inspection object and a surface color value having the same shape as the general inspection object An inspection light irradiating device (D0) having a plurality of light sources for irradiating inspection light onto the surface of the master object to be inspected, which is formed uniformly and uniformly.
2) an inspection light amount adjusting device for adjusting an inspection light amount of each light source of the inspection light irradiation device; and (D03) dividing each of the general and master inspection object surfaces into a plurality of divided inspection surfaces and dividing the inspection object surfaces. Is further divided into smaller microscopic field areas, and has a plurality of light receiving elements arranged in a plane for detecting the amount of reflected light from the microscopic field area, and a plurality of photodetectors provided for each of the divided inspection surfaces. , (D04)
(D05) a micro-field-of-view area moving device for continuously moving the micro-field-of-view area of the photodetector provided for each of the plurality of divided inspected surfaces within the entire surface of each of the divided inspected surfaces;
Defects on the surface of the inspection object are obtained by performing a predetermined defect detection process based on the detected reflection light amount with respect to the general inspection object surface portion in which the amount of reflected light detected by each of the photodetectors is different from a reference value. (D06) setting a light amount adjusting inspection surface for each of the divided inspection surfaces on the master inspection object surface, and detecting the light amount of the photodetector from the master inspection object surface Based on the light amount adjustment inspection surface reflection light amount detection means for detecting the light amount adjustment inspection surface reflection light amount that is the reflection light amount for each of the light amount adjustment inspection surfaces of the master inspection object surface,
(D07) Master reflected light amount information display means for displaying information on the reflected light amount of the inspection surface for light amount adjustment for each inspection surface for light amount adjustment. 5. A surface defect detection method having the following requirements (E01) to (E05): (E01) a plurality of inspection light irradiation devices having the same shape as a general inspection object and having a surface color value In a state where the inspection light is applied to the surface of the master inspection object formed uniformly and uniformly, while detecting the amount of reflected light from a small minute visual field region obtained by dividing the surface of the inspection object of the master by a photodetector, A step of detecting the amount of reflected light from the surface of the master inspected object by detecting the amount of reflected light from the surface of the master inspected object by moving the minute visual field region by a device for moving the minute visual field region; (E02) the light from the surface of the master inspected object; Based on the amount of light detected by the detector, the amount of light reflected on the surface to be inspected for light amount adjustment, which is the amount of reflected light for each surface to be inspected for light amount adjustment set on the surface of the master object to be inspected, is used to detect the amount of reflected light from the surface to be inspected. (E03) a light amount adjusting step of adjusting the irradiation amount of the inspection light of the inspection light irradiation device so that the reflected light amount of the inspection surface for light amount adjustment is the same on all inspection surfaces for light amount adjustment; In a state in which the surface of a general inspection object is irradiated with inspection light by the plurality of inspection light irradiation devices in which the irradiation amount is adjusted, the amount of reflected light from a small minute visual field region obtained by dividing the general inspection object surface is measured. A general inspection surface reflected light amount detection step of detecting the amount of reflected light from the general inspection object surface by moving the minute visual field region by the minute visual field region moving device while detecting with the detector;
(E05) when the amount of reflected light from the general inspection object surface is different from a reference value, the general inspection object surface portion
A surface defect detection step of detecting a defect on the surface of the inspection object by performing a predetermined defect detection process based on the detected reflected light amount.