JPH11156263A - How to apply photoresist agent - Google Patents

Abstract

(57) [Problem] In a method of applying a photoresist agent to apply a photoresist to a material to be coated using a plurality of rolls, a uniform film thickness is obtained even in a portion of the material to be coated corresponding to an end of the roll. Provided is a method for applying the obtained photoresist agent. In a method of applying a photoresist agent to apply a photoresist to a material to be applied using a plurality of rolls, a positive potential is supplied to both the material to be applied and the photoresist material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a film, a substrate,
The present invention relates to a method of applying a photoresist agent to a surface of paper or the like with a uniform thickness.

[0002]

2. Description of the Related Art A conventional method of applying a photoresist agent is as follows.
A plurality of rolls are provided in a coating device, a coating agent is adhered to the rolls, and the rolls are rubbed on a material to be coated to perform coating. At least three rolls are required: an application agent pumping roll that pumps up the application agent, an application agent coating roll that applies the application agent to the application material, and an application material guide roll that guides the application material.

[0003] The feature of the method of coating using a plurality of rolls is that the thickness of the coating film can be relatively easily changed by the number of rotations of the rolls, the rotation direction, the distance between the rolls and the material to be coated, and the like. It is in. Another feature is that the structure of the coating apparatus is simplified, so that maintenance is excellent.

[0004]

The conventional method of applying a photoresist agent has the following problems.

[0005] Since the coating is performed by rubbing the coating roll with the coating material, the coating film at the coating material portion corresponding to the end of the roll is 2-3 times thicker than the other coating portions. As a result, a uniform film thickness cannot be obtained.

FIG. 3 is an explanatory diagram of this problem. The state where the coating material 12 adhered to the coating material coat roll 16 is rubbed on the material 11 to be coated is shown. Coating roll 1
6, a material 11 to be coated is sent out in a direction perpendicular to the paper surface. FIG. 3A shows the state before the coating agent 12 is applied, and FIG. 3B shows the state immediately after the application.

At the portion of the coating material 11 corresponding to the end of the coating roll 16, the thickness of the coating material 12 is about twice as large as that of the central coating portion. In the case of a photosensitive agent as described above, this difference in the thickness of the coating film is particularly problematic. In other words, the portion corresponding to the end of the roll requires an exposure time twice or more that of the other portions, and the normal exposure results in underexposure of only that portion. Therefore, a problem occurs in that only that portion must be exposed again. This tendency becomes more conspicuous as the thickness of the coating film increases.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a method of applying a photoresist agent which can solve the above-mentioned disadvantages of the prior art and can apply a uniform film thickness even at a portion corresponding to the end of a roll. Is to do.

[0009]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a method of applying a photoresist agent using a plurality of rolls to apply the photoresist agent to the object. Both photoresist agents were set at the same potential.

[0010] The potential is a positive potential.

[0011]

FIG. 1 is a schematic sectional view for explaining one embodiment of a method for applying a photoresist agent according to the present invention.
The coating apparatus that enables this coating method includes a coating roll 6 for coating the coating material 2 on the material 1 to be coated, a coating roll 5 for pumping the coating material 2 in the tank 3,
The apparatus includes a material guide roll 7 for guiding the material 1 to be applied, an electrode 4 for supplying a potential to the material 2, and a power supply roll 8 for supplying a potential to the material 1.

The material 1 to be coated is, for example, a TAB tape.
A positive (positive) potential is supplied by the feeding roll 8.
On the other hand, a positive (positive) potential having the same value as that of the material to be coated 1 is supplied to the coating material 2 by the electrode 4 provided in the tank 3. The material 1 to be coated is guided by the material guide roll 7 to the coating agent coating roll 6, and the coating material 2 is transferred to the coating material coating roll 6 by the coating material pumping roll 5 and finally applied to the material 1 to be coated. You. Thereafter, the material to be coated 1 is wound up through a bake portion (not shown).
Therefore, the material 1 is fed from right to left on the paper of FIG.

FIG. 2 shows a coating material 1 and a coating material 2 before and after coating.
FIG. FIG. 2A shows a state immediately before the application, and the applied material 1 and the application material 2 are set to the same positive (positive) potential by the power supply roll 8 and the electrode 4 as described above.

FIG. 2B shows a state immediately after the coating material 2 is applied to the material 1 to be coated. The coating material 2 having the same potential is rubbed on the material 1 to be applied with a positive potential, and an electric repulsive force is generated between the coating material 2 and the material 1 to be applied, and physically corresponds to the end of the roll. The coating agent accumulated in the portion to be spread is diffused by this force.

FIG. 2C shows a state in which the diffusion of the accumulated coating agent is completed and a uniform coating film is obtained.

This repulsive force follows Coulomb's law. A positive potential is supplied to the photoresist agent,
As a result, each molecule of the photoresist agent becomes positively charged. When the molecules having the positive charges gather, a repulsive force is generated which is proportional to the product of the charges of each other and half proportional to the square of the distance between the molecules. This is Coulomb's law. Therefore, the magnitude of the positive potential may be adjusted according to the amount of the coating agent to be diffused.

When the potentials are set to be negative, diffusion of the coating agent occurs, but another problem arises. That is, there is dust in the air, and the air generally has a positive charge in many cases. Therefore, if both potentials are negative,
The dust in the air adheres to the negatively charged photoresist agent, causing a problem that the quality of the photoresist agent is reduced. Therefore, it is desirable that both potentials are positive.

[0018]

According to the method of applying a photoresist agent of the present invention, since both the coating agent and the material to be coated are set to the same positive (positive) potential, an electric repulsive force is generated between them. The coating agent physically collected at the end of the coating surface was diffused, and it was possible to ensure a uniform coating film thickness up to the end.

[Brief description of the drawings]

FIG. 1 is an explanatory front view illustrating an embodiment of a method of applying a photoresist agent according to the present invention.

FIG. 2 is an explanatory view of the state of the coating agent and the material to be applied immediately after the application, according to one embodiment of the method of applying the photoresist agent of the present invention.

FIG. 3 is an explanatory diagram of a problem with a conventional photoresist coating method.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 11 Coating material 2, 12 Coating agent 3 Tank 4 Electrode 5 Coating material pumping roll 6, 16 Coating agent coating roll 7 Coating material guide roll 8 Power supply roll

Continuation of front page (72) Inventor Yuki Matsumoto 3550 Kida Yomachi, Tsuchiura-shi, Ibaraki Hitachi Cable, Ltd.

Claims (2)

[Claims] In a method of applying a photoresist agent to a material to be applied by using a plurality of rolls, it is preferable that both the material to be applied and the photoresist agent are applied at the same potential. Characteristic method of applying a photoresist agent. 2. The method for applying a photoresist agent according to claim 1, wherein both the material to be coated and the photoresist agent have a positive potential.