JPH11142637A - Light shieldable photosensitive resin composition and color filter using the same - Google Patents
Light shieldable photosensitive resin composition and color filter using the sameInfo
- Publication number
- JPH11142637A JPH11142637A JP30820697A JP30820697A JPH11142637A JP H11142637 A JPH11142637 A JP H11142637A JP 30820697 A JP30820697 A JP 30820697A JP 30820697 A JP30820697 A JP 30820697A JP H11142637 A JPH11142637 A JP H11142637A
- Authority
- JP
- Japan
- Prior art keywords
- light
- photosensitive resin
- meth
- acrylate
- resin composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 title claims description 35
- 239000011347 resin Substances 0.000 claims abstract description 33
- 229920005989 resin Polymers 0.000 claims abstract description 33
- 238000002835 absorbance Methods 0.000 claims abstract description 17
- 239000011159 matrix material Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000006229 carbon black Substances 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 47
- -1 2-ethylhexyl Chemical group 0.000 description 32
- 239000000178 monomer Substances 0.000 description 10
- PESYEWKSBIWTAK-UHFFFAOYSA-N cyclopenta-1,3-diene;titanium(2+) Chemical compound [Ti+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 PESYEWKSBIWTAK-UHFFFAOYSA-N 0.000 description 9
- 239000006185 dispersion Substances 0.000 description 9
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 8
- 238000004040 coloring Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000004925 Acrylic resin Substances 0.000 description 6
- 229920000178 Acrylic resin Polymers 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- 230000031700 light absorption Effects 0.000 description 6
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 5
- 239000011324 bead Substances 0.000 description 5
- 239000002270 dispersing agent Substances 0.000 description 5
- 239000003999 initiator Substances 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229940059574 pentaerithrityl Drugs 0.000 description 4
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 3
- 241000721047 Danaus plexippus Species 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- RBGUKBSLNOTVCD-UHFFFAOYSA-N 1-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C RBGUKBSLNOTVCD-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- 125000004172 4-methoxyphenyl group Chemical group [H]C1=C([H])C(OC([H])([H])[H])=C([H])C([H])=C1* 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- YKXVZTWMMZZVRA-UHFFFAOYSA-N CC1(C=CC=C1)[Ti]C1(C=CC=C1)C Chemical compound CC1(C=CC=C1)[Ti]C1(C=CC=C1)C YKXVZTWMMZZVRA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- WBYWAXJHAXSJNI-UHFFFAOYSA-N cinnamic acid group Chemical group C(C=CC1=CC=CC=C1)(=O)O WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical compound ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
- CKGKXGQVRVAKEA-UHFFFAOYSA-N (2-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=CC=C1 CKGKXGQVRVAKEA-UHFFFAOYSA-N 0.000 description 1
- URBLVRAVOIVZFJ-UHFFFAOYSA-N (3-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC(C(=O)C=2C=CC=CC=2)=C1 URBLVRAVOIVZFJ-UHFFFAOYSA-N 0.000 description 1
- KEOLYBMGRQYQTN-UHFFFAOYSA-N (4-bromophenyl)-phenylmethanone Chemical compound C1=CC(Br)=CC=C1C(=O)C1=CC=CC=C1 KEOLYBMGRQYQTN-UHFFFAOYSA-N 0.000 description 1
- WXPWZZHELZEVPO-UHFFFAOYSA-N (4-methylphenyl)-phenylmethanone Chemical compound C1=CC(C)=CC=C1C(=O)C1=CC=CC=C1 WXPWZZHELZEVPO-UHFFFAOYSA-N 0.000 description 1
- WLQXEFXDBYHMRG-OWOJBTEDSA-N (e)-4-(oxiran-2-ylmethoxy)-4-oxobut-2-enoic acid Chemical compound OC(=O)\C=C\C(=O)OCC1CO1 WLQXEFXDBYHMRG-OWOJBTEDSA-N 0.000 description 1
- WLQXEFXDBYHMRG-UPHRSURJSA-N (z)-4-(oxiran-2-ylmethoxy)-4-oxobut-2-enoic acid Chemical compound OC(=O)\C=C/C(=O)OCC1CO1 WLQXEFXDBYHMRG-UPHRSURJSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- FKASFBLJDCHBNZ-UHFFFAOYSA-N 1,3,4-oxadiazole Chemical compound C1=NN=CO1 FKASFBLJDCHBNZ-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- ALVZNPYWJMLXKV-UHFFFAOYSA-N 1,9-Nonanediol Chemical compound OCCCCCCCCCO ALVZNPYWJMLXKV-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- OTHANJXFOXIOLL-UHFFFAOYSA-N 1-hydroxy-1-(2-methylphenyl)propan-2-one Chemical compound CC(=O)C(O)C1=CC=CC=C1C OTHANJXFOXIOLL-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- 125000006017 1-propenyl group Chemical group 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- BRKORVYTKKLNKX-UHFFFAOYSA-N 2,4-di(propan-2-yl)thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC(C(C)C)=CC(C(C)C)=C3SC2=C1 BRKORVYTKKLNKX-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- 125000004215 2,4-difluorophenyl group Chemical group [H]C1=C([H])C(*)=C(F)C([H])=C1F 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- GBOJZXLCJZDBKO-UHFFFAOYSA-N 2-(2-chlorophenyl)-2-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 GBOJZXLCJZDBKO-UHFFFAOYSA-N 0.000 description 1
- OBNDKPYBWSTKBI-UHFFFAOYSA-N 2-(2-fluorophenyl)-2-[2-(2-fluorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound FC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)F)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 OBNDKPYBWSTKBI-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- DVZGSAUNAZEWAI-UHFFFAOYSA-N 2-(2-methoxyphenyl)-2-[2-(2-methoxyphenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound COC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)OC)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 DVZGSAUNAZEWAI-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- NLNVSTLNDJGLTL-UHFFFAOYSA-N 2-(4-ethoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OCC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 NLNVSTLNDJGLTL-UHFFFAOYSA-N 0.000 description 1
- FVNIIPIYHHEXQA-UHFFFAOYSA-N 2-(4-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 FVNIIPIYHHEXQA-UHFFFAOYSA-N 0.000 description 1
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 1
- QTUVQQKHBMGYEH-UHFFFAOYSA-N 2-(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC=NC=N1 QTUVQQKHBMGYEH-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- MCNPOZMLKGDJGP-UHFFFAOYSA-N 2-[2-(4-methoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 MCNPOZMLKGDJGP-UHFFFAOYSA-N 0.000 description 1
- JIKJXWFVPDDJNU-UHFFFAOYSA-N 2-[2-(4-methoxyphenyl)ethenyl]-5-(trichloromethyl)-1,3,4-oxadiazole Chemical compound C1=CC(OC)=CC=C1C=CC1=NN=C(C(Cl)(Cl)Cl)O1 JIKJXWFVPDDJNU-UHFFFAOYSA-N 0.000 description 1
- UNCGZTFKGOWFIW-UHFFFAOYSA-N 2-[3-(2-chlorophenyl)-4,5-diphenyl-4H-imidazol-2-ylidene]-4,5-diphenylimidazole Chemical compound ClC1=C(C=CC=C1)N1C(N=C(C1C1=CC=CC=C1)C1=CC=CC=C1)=C1N=C(C(=N1)C1=CC=CC=C1)C1=CC=CC=C1 UNCGZTFKGOWFIW-UHFFFAOYSA-N 0.000 description 1
- 125000004182 2-chlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(*)C([H])=C1[H] 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- YJQMXVDKXSQCDI-UHFFFAOYSA-N 2-ethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3SC2=C1 YJQMXVDKXSQCDI-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- UDXXYUDJOHIIDZ-UHFFFAOYSA-N 2-phosphonooxyethyl prop-2-enoate Chemical compound OP(O)(=O)OCCOC(=O)C=C UDXXYUDJOHIIDZ-UHFFFAOYSA-N 0.000 description 1
- KTALPKYXQZGAEG-UHFFFAOYSA-N 2-propan-2-ylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=C1 KTALPKYXQZGAEG-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- NMSZFQAFWHFSPE-UHFFFAOYSA-N 3-(oxiran-2-ylmethoxycarbonyl)but-3-enoic acid Chemical compound OC(=O)CC(=C)C(=O)OCC1CO1 NMSZFQAFWHFSPE-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- FEIQOMCWGDNMHM-UHFFFAOYSA-N 5-phenylpenta-2,4-dienoic acid Chemical compound OC(=O)C=CC=CC1=CC=CC=C1 FEIQOMCWGDNMHM-UHFFFAOYSA-N 0.000 description 1
- DPTGFYXXFXSRIR-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-ylmethyl prop-2-enoate Chemical compound C1C(COC(=O)C=C)CCC2OC21 DPTGFYXXFXSRIR-UHFFFAOYSA-N 0.000 description 1
- FMWQYKDNAFZCNB-UHFFFAOYSA-N 9,10-dimethylbenzo[a]phenazine Chemical compound C1=CC=CC2=C(N=C3C(C=C(C(=C3)C)C)=N3)C3=CC=C21 FMWQYKDNAFZCNB-UHFFFAOYSA-N 0.000 description 1
- MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N Benzoic acid Natural products OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OMFQJJSPKDBRCO-UHFFFAOYSA-N C(=O)(C=C)C(O)C(CO)(COCC(CO)(CO)CO)CO Chemical compound C(=O)(C=C)C(O)C(CO)(COCC(CO)(CO)CO)CO OMFQJJSPKDBRCO-UHFFFAOYSA-N 0.000 description 1
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 101000962345 Homo sapiens NACHT, LRR and PYD domains-containing protein 12 Proteins 0.000 description 1
- JCYZMTMYPZHVBF-UHFFFAOYSA-N Melarsoprol Chemical compound NC1=NC(N)=NC(NC=2C=CC(=CC=2)[As]2SC(CO)CS2)=N1 JCYZMTMYPZHVBF-UHFFFAOYSA-N 0.000 description 1
- 102100039240 NACHT, LRR and PYD domains-containing protein 12 Human genes 0.000 description 1
- SSIWGBPAKGJIPJ-UHFFFAOYSA-N OC(C)(C)C1=C(C=CC(=C1)CCCCCCCCCCCC)C(=O)C1=C(C=C(C=C1)CCCCCCCCCCCC)C(C)(O)C Chemical compound OC(C)(C)C1=C(C=CC(=C1)CCCCCCCCCCCC)C(=O)C1=C(C=C(C=C1)CCCCCCCCCCCC)C(C)(O)C SSIWGBPAKGJIPJ-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229920001665 Poly-4-vinylphenol Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 235000014443 Pyrus communis Nutrition 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000008425 anthrones Chemical class 0.000 description 1
- 229940027998 antiseptic and disinfectant acridine derivative Drugs 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001540 azides Chemical class 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- FAMJVEVTWNPFSF-UHFFFAOYSA-N bis[2-(2-hydroxypropan-2-yl)-4-propan-2-ylphenyl]methanone Chemical compound CC(O)(C)C1=CC(C(C)C)=CC=C1C(=O)C1=CC=C(C(C)C)C=C1C(C)(C)O FAMJVEVTWNPFSF-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- 125000000490 cinnamyl group Chemical group C(C=CC1=CC=CC=C1)* 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- 239000012975 dibutyltin dilaurate Substances 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- DDXLVDQZPFLQMZ-UHFFFAOYSA-M dodecyl(trimethyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C DDXLVDQZPFLQMZ-UHFFFAOYSA-M 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- XPKFLEVLLPKCIW-UHFFFAOYSA-N ethyl 4-(diethylamino)benzoate Chemical compound CCOC(=O)C1=CC=C(N(CC)CC)C=C1 XPKFLEVLLPKCIW-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 125000005394 methallyl group Chemical group 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- ODWNMLQSQNQLNP-UHFFFAOYSA-N n',n'-bis(methylamino)propane-1,3-diamine Chemical compound CNN(NC)CCCN ODWNMLQSQNQLNP-UHFFFAOYSA-N 0.000 description 1
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 125000001791 phenazinyl group Chemical class C1(=CC=CC2=NC3=CC=CC=C3N=C12)* 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical class N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- MZSDGDXXBZSFTG-UHFFFAOYSA-M sodium;benzenesulfonate Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC=C1 MZSDGDXXBZSFTG-UHFFFAOYSA-M 0.000 description 1
- HIEHAIZHJZLEPQ-UHFFFAOYSA-M sodium;naphthalene-1-sulfonate Chemical group [Na+].C1=CC=C2C(S(=O)(=O)[O-])=CC=CC2=C1 HIEHAIZHJZLEPQ-UHFFFAOYSA-M 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000005207 tetraalkylammonium group Chemical group 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical group C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Paints Or Removers (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Filters (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、高遮光性を有する
と共に画像形成性に優れた遮光性感光性樹脂組成物、及
び、その遮光性感光性樹脂組成物を用いたカラーフィル
タに関し、特に、カラーテレビ、液晶表示素子、固体撮
像素子、カメラ等に使用される光学的カラーフィルタの
ブラックマトリックス形成用の遮光性感光性樹脂組成
物、及び、その遮光性感光性樹脂組成物からなるブラッ
クマトリックスが透明基板上に形成されたカラーフィル
タに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light-shielding photosensitive resin composition having high light-shielding properties and excellent image forming properties, and a color filter using the light-shielding photosensitive resin composition. A light-shielding photosensitive resin composition for forming a black matrix of an optical color filter used for a color television, a liquid crystal display device, a solid-state imaging device, a camera, and the like, and a black matrix comprising the light-shielding photosensitive resin composition The present invention relates to a color filter formed on a transparent substrate.
【0002】[0002]
【従来の技術】カラーテレビ、液晶表示素子、固体撮像
素子、カメラ等に使用される光学的カラーフィルタにお
けるブラックマトリックスは、通常、ガラス、プラスチ
ックシート等の透明基板上に、赤、緑、青(RGB)等
の3種以上の異なる色パターンの間に格子状、ストライ
プ状又はモザイク状等に配置して形成されており、各色
間の混色抑制によるコントラストの向上や光漏れによる
駆動素子(例えば、TFT)の誤作動を防ぐ役割を果た
している。このため、ブラックマトリックスには高い遮
光性が要求される。2. Description of the Related Art A black matrix in an optical color filter used for a color television, a liquid crystal display device, a solid-state imaging device, a camera, and the like is usually formed on a transparent substrate such as a glass or plastic sheet by forming red, green, blue ( RGB) or the like, and are formed in a lattice, stripe, mosaic, or the like between three or more different color patterns, thereby improving the contrast by suppressing color mixture between the colors and driving elements (for example, TFT) to prevent malfunction. For this reason, a high light-shielding property is required for the black matrix.
【0003】従来より、ブラックマトリックスは、透明
基板上にクロム等の金属の蒸着膜を形成し、フォトリソ
グラフィー工程を経てその金属膜をエッチング処理する
方法により形成されているが、薄い膜厚で高遮光性が高
精度で得られる反面、製造工程が長く生産性が劣るとい
う問題と共に、エッチング処理廃液の処理等の環境上の
問題も抱えていた。Conventionally, a black matrix is formed by a method of forming a deposited film of a metal such as chromium on a transparent substrate and etching the metal film through a photolithography process. Although light-shielding properties can be obtained with high precision, there is a problem that the manufacturing process is long and the productivity is inferior, and also there are environmental problems such as treatment of an etching waste liquid.
【0004】これに対して、遮光性色材を含有する遮光
性感光性樹脂組成物を用いてブラックマトリックスを形
成する方法が精力的に検討され提案されているが(例え
ば、特開平6−51499号公報等)、この方法におい
て、従来のクロム等の金属膜と同等の遮光性を発現させ
るためには、樹脂組成物中の遮光性色材の含有量を上げ
るか、膜厚を厚くする必要があった。しかしながら、遮
光性色材の含有量を上げると、感光性樹脂の感度、現像
性、解像性、基板に対する密着性等が低下し、カラーフ
ィルタとしての性能自体に問題が生じることとなり、
又、膜厚を厚くすると、そのブラックマトリックスの凹
凸のためカラーフィルタとしてのRGBの着色画素の平
坦性が損なわれて液晶セルギャップの不均一や液晶の配
向の乱れを生じさせ、表示能が低下したり、透明電極
(例えば、ITO)膜の断線が発生し易くなる等の問題
が生じることとなるため、この感光性樹脂組成物による
ブラックマトリックスの形成方法は、未だ実用化に到っ
ていないのが現状である。On the other hand, a method of forming a black matrix using a light-shielding photosensitive resin composition containing a light-shielding colorant has been energetically studied and proposed (for example, Japanese Patent Application Laid-Open No. 6-51499). In this method, it is necessary to increase the content of the light-shielding coloring material in the resin composition or to increase the film thickness in order to exhibit the same light-shielding property as a conventional metal film such as chromium. was there. However, when the content of the light-shielding coloring material is increased, the sensitivity, the developing property, the resolution, the adhesion to the substrate, and the like of the photosensitive resin are reduced, and a problem occurs in the performance itself as a color filter.
Further, when the film thickness is increased, the flatness of the RGB colored pixels as a color filter is impaired due to the unevenness of the black matrix, causing the liquid crystal cell gap to become non-uniform and the liquid crystal orientation to be disturbed, thereby deteriorating the display performance. And a problem such as disconnection of a transparent electrode (for example, ITO) film is likely to occur. Therefore, a method of forming a black matrix using the photosensitive resin composition has not yet been put to practical use. is the current situation.
【0005】[0005]
【発明が解決しようとする課題】本発明は、前述の従来
技術に鑑み、遮光性色材を含有する遮光性感光性樹脂組
成物を用いてブラックマトリックスを形成する方法にお
ける前記問題に解決を与えるべくなされたものであっ
て、従って本発明は、高遮光性を有すると共に画像形成
性に優れた遮光性感光性樹脂組成物、及び、その遮光性
感光性樹脂組成物を用いたカラーフィルタを提供するこ
とを目的とする。SUMMARY OF THE INVENTION In view of the above-mentioned prior art, the present invention solves the above-mentioned problem in a method of forming a black matrix using a light-shielding photosensitive resin composition containing a light-shielding color material. Accordingly, the present invention provides a light-shielding photosensitive resin composition having high light-shielding properties and excellent image-forming properties, and a color filter using the light-shielding photosensitive resin composition. The purpose is to do.
【0006】[0006]
【課題を解決するための手段】本発明者等は、前記課題
を解決すべく鋭意検討した結果、遮光性感光性樹脂組成
物中の遮光性色材としてのカーボンブラック等の含有量
が同じであっても、その分散状態により光吸収特性が異
なり、この分散状態の制御により可視光領域の吸光度と
紫外光領域の吸光度を特定の範囲に制御し得、それによ
り、可視光領域の吸光度を上げてカラーフィルタのブラ
ックマトリックスとしての高遮光性を発現させると共
に、紫外光領域の光透過率を上げてブラックマトリック
スとしての優れた画像形成性をも発現させ得ることを見
出し、本発明を完成したものであって、即ち、本発明
は、遮光性色材を含有する遮光性感光性樹脂組成物であ
って、膜厚1μm当たりの波長550nmにおける吸光
度OD550 が3以上で、且つ、そのOD550 に対する波
長365nmにおける吸光度OD365 の比(OD365/O
D550 )が1.00〜1.65である遮光性感光性樹脂
組成物、及び、透明基板上に、その遮光性感光性樹脂組
成物からなるブラックマトリックスが形成されてなるカ
ラーフィルタ、を要旨とする。Means for Solving the Problems The present inventors have conducted intensive studies in order to solve the above-mentioned problems, and as a result, the content of carbon black and the like as the light-shielding coloring material in the light-shielding photosensitive resin composition is the same. Even so, the light absorption characteristics vary depending on the dispersion state, and by controlling the dispersion state, the absorbance in the visible light region and the absorbance in the ultraviolet light region can be controlled to specific ranges, thereby increasing the absorbance in the visible light region. The present inventors have found that, while exhibiting high light-shielding properties as a black matrix of a color filter and increasing the light transmittance in the ultraviolet region, it can also exhibit excellent image-forming properties as a black matrix, and completed the present invention. a is, i.e., the present invention is, in a light-shielding photosensitive resin composition containing a light shielding colorant absorbance OD 550 at a wavelength 550nm per thickness 1μm is 3 or more, One, the ratio of the absorbance OD 365 at a wavelength of 365nm for the OD 550 (OD 365 / O
D 550) is light-blocking photosensitive resin composition is 1.00 to 1.65, and, on a transparent substrate, the light-shielding photosensitive color filter black matrix comprising the resin composition is formed, the gist And
【0007】[0007]
【発明の実施の形態】本発明の遮光性感光性樹脂組成物
における感光性樹脂としては、アクリル系樹脂とアクリ
ル系モノマーと光重合開始剤とを組み合わせた光重合型
感光性樹脂、ノボラック樹脂やポリビニルフェノール樹
脂等と架橋剤と光酸発生剤とを組み合わせた化学増幅型
感光性樹脂、アジド又はジアゾ系樹脂を用いた感光性樹
脂、桂皮酸基又はカルコン基含有樹脂等の光二量化型の
感光性樹脂、ナフトキノンジアジドとアルカリ可溶性樹
脂とを組み合わせた感光性樹脂等の公知のものが挙げら
れる。BEST MODE FOR CARRYING OUT THE INVENTION As the photosensitive resin in the light-shielding photosensitive resin composition of the present invention, a photopolymerizable photosensitive resin obtained by combining an acrylic resin, an acrylic monomer and a photopolymerization initiator, a novolak resin or the like can be used. Photodimerization-type photosensitivity such as a chemically amplified photosensitive resin in which a crosslinking agent and a photoacid generator are combined with a polyvinylphenol resin or the like, a photosensitive resin using an azide or diazo resin, or a resin containing a cinnamic acid group or a chalcone group. And known resins such as a photosensitive resin obtained by combining a naphthoquinonediazide and an alkali-soluble resin.
【0008】これらの中で、本発明においては、アクリ
ル系樹脂とアクリル系モノマーと光重合開始剤とを組み
合わせた光重合型感光性樹脂が好ましく、そのアクリル
系樹脂としては、例えば、(メタ)アクリル酸(尚、
ここで、(メタ)アクリル酸とは、アクリル酸及びメタ
クリル酸を意味するものとする。)、メチル(メタ)ア
クリレート、エチル(メタ)アクリレート、プロピル
(メタ)アクリレート、ブチル(メタ)アクリレート、
2−エチルヘキシル(メタ)アクリレート、ヒドロキシ
エチル(メタ)アクリレート、ヒドロキシプロピル(メ
タ)アクリレート、ベンジル(メタ)アクリレート、ヒ
ドロキシフェニル(メタ)アクリレート、メトキシフェ
ニル(メタ)アクリレート等の(メタ)アクリル酸エス
テル、(メタ)アクリロニトリル、(メタ)アクリルア
ミド等の(メタ)アクリル酸のその他誘導体等の単量体
の単独重合体又は共重合体、前記記載の単量体と、
スチレン、α−メチルスチレン、ビニルトルエン等のビ
ニル芳香族単量体、マレイン酸、無水マレイン酸、フマ
ル酸、イタコン酸、桂皮酸等の不飽和カルボン酸単量体
等との共重合体、前記及びの単独重合体や共重合
体に、アリルグリシジルエーテル、グリシジル(メタ)
アクリレート、α−エチルグリシジル(メタ)アクリレ
ート、3,4−エポキシシクロヘキシルメチル(メタ)
アクリレート、グリシジルクロトネート、グリシジルイ
ソクロトネート、クロトニルグリシジルエーテル、イタ
コン酸モノアルキルモノグリシジルエステル、フマール
酸モノアルキルモノグリシジルエステル、マレイン酸モ
ノアルキルモノグリシジルエステル等のエポキシ基含有
エチレン性不飽和化合物を反応させた変性重合体、前
記記載の単量体と、アリル(メタ)アクリレート、3
−アリルオキシ−2−ヒドロキシプロピル(メタ)アク
リレート、シンナミル(メタ)アクリレート、クロトニ
ル(メタ)アクリレート、メタリル(メタ)アクリレー
ト、N,N−ジアリル(メタ)アクリルアミド、ビニル
(メタ)アクリレート、1−クロロビニル(メタ)アク
リレート、2−フェニルビニル(メタ)アクリレート、
1−プロペニル(メタ)アクリレート、ビニル(メタ)
アクリルアミド等の2種以上のエチレン性不飽和基を有
する化合物との共重合体、等が挙げられ、中で、及び
の、側鎖にエチレン性不飽和結合を有するものが好ま
しく、又、酸価が5〜200mgKOH/gの範囲のも
のがアルカリ現像性の面で好ましく、分子量がGPCの
ポリスチレン換算で1000〜500000の範囲のも
のが塗布性の面で好ましい。Among these, in the present invention, a photopolymerizable photosensitive resin obtained by combining an acrylic resin, an acrylic monomer, and a photopolymerization initiator is preferable. As the acrylic resin, for example, (meth) Acrylic acid (in addition,
Here, (meth) acrylic acid means acrylic acid and methacrylic acid. ), Methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate,
(Meth) acrylates such as 2-ethylhexyl (meth) acrylate, hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, benzyl (meth) acrylate, hydroxyphenyl (meth) acrylate, and methoxyphenyl (meth) acrylate; (Meth) acrylonitrile, homopolymers or copolymers of monomers such as other derivatives of (meth) acrylic acid such as (meth) acrylamide, the monomers described above,
Styrene, α-methylstyrene, vinyl aromatic monomers such as vinyltoluene, copolymers with unsaturated carboxylic acid monomers such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, and cinnamic acid, And allyl glycidyl ether, glycidyl (meth)
Acrylate, α-ethylglycidyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth)
Epoxy group-containing ethylenically unsaturated compounds such as acrylate, glycidyl crotonate, glycidyl isocrotonate, crotonyl glycidyl ether, monoalkyl monoglycidyl itaconate, monoalkyl monoglycidyl fumarate, and monoalkyl monoglycidyl maleate. The reacted modified polymer, the monomer described above, allyl (meth) acrylate, 3
-Allyloxy-2-hydroxypropyl (meth) acrylate, cinnamyl (meth) acrylate, crotonyl (meth) acrylate, methallyl (meth) acrylate, N, N-diallyl (meth) acrylamide, vinyl (meth) acrylate, 1-chlorovinyl (Meth) acrylate, 2-phenylvinyl (meth) acrylate,
1-propenyl (meth) acrylate, vinyl (meth)
Copolymers with two or more compounds having an ethylenically unsaturated group such as acrylamide, etc., among which are preferred those having an ethylenically unsaturated bond in a side chain, and an acid value Is preferably in the range of 5 to 200 mgKOH / g in terms of alkali developability, and those having a molecular weight in the range of 1,000 to 500,000 in terms of GPC in terms of polystyrene are preferable in terms of coatability.
【0009】又、そのアクリル系モノマーとしては、例
えば、1,4−ブタンジオールジ(メタ)アクリレー
ト、1,6−ヘキサンジオールジ(メタ)アクリレー
ト、1,9−ノナンジオールジ(メタ)アクリレート、
ネオペンチルグリコールジ(メタ)アクリレート、エチ
レングリコールジ(メタ)アクリレート、ジエチレング
リコールジ(メタ)アクリレート、トリエチレングリコ
ールジ(メタ)アクリレート、テトラエチレングリコー
ルジ(メタ)アクリレート、プロピレングリコールジ
(メタ)アクリレート、トリプロピレングリコールジ
(メタ)アクリレート、トリメチロールエタントリ(メ
タ)アクリレート、トリメチロールプロパントリ(メ
タ)アクリレート、グリセロールジ(メタ)アクリレー
ト、グリセロールトリ(メタ)アクリレート、ペンタエ
リスリトールジ(メタ)アクリレート、ペンタエリスリ
トールトリ(メタ)アクリレート、ペンタエリスリトー
ルテトラ(メタ)アクリレート、ジペンタエリスリトー
ルテトラ(メタ)アクリレート、ジペンタエリスリトー
ルペンタ(メタ)アクリレート、ジペンタエリスリトー
ルヘキサ(メタ)アクリレート、ヒドロキノンジ(メ
タ)アクリレート、レゾルシンジ(メタ)アクリレー
ト、ピロガロールトリ(メタ)アクリレート、ビスフェ
ノールA・エチレンオキサイド付加物ジ(メタ)アクリ
レート、トリメチロールプロパン・エチレンオキサイド
付加物トリ(メタ)アクリレート、グリセリン・プロピ
レンオキサイド付加物トリ(メタ)アクリレート、(メ
タ)アクリロイルオキシエチルホスフェート、ビス
((メタ)アクリロイルオキシエチル)ホスフェート、
トリス((メタ)アクリロイルオキシエチル)ホスフェ
ート、等の分子内にアクリロイル基を2個以上有するも
のが挙げられ、中で、アクリロイル基を3個以上有する
ものが好ましい。The acrylic monomers include, for example, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate,
Neopentyl glycol di (meth) acrylate, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, Tripropylene glycol di (meth) acrylate, trimethylolethane tri (meth) acrylate, trimethylolpropane tri (meth) acrylate, glycerol di (meth) acrylate, glycerol tri (meth) acrylate, pentaerythritol di (meth) acrylate, penta Erythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol tetra (meth) acryl Dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hydroquinone di (meth) acrylate, resorcinol di (meth) acrylate, pyrogallol tri (meth) acrylate, bisphenol A / ethylene oxide adduct (Meth) acrylate, trimethylolpropane / ethylene oxide adduct tri (meth) acrylate, glycerin / propylene oxide adduct tri (meth) acrylate, (meth) acryloyloxyethyl phosphate, bis ((meth) acryloyloxyethyl) phosphate,
Examples thereof include those having two or more acryloyl groups in the molecule, such as tris ((meth) acryloyloxyethyl) phosphate, and among them, those having three or more acryloyl groups are preferable.
【0010】又、その光重合開始剤としては、例えば、
2−(4−メトキシフェニル)−4,6−ビス(トリク
ロロメチル)−s−トリアジン、2−(4−メトキシナ
フチル)−4,6−ビス(トリクロロメチル)−s−ト
リアジン、2−(4−エトキシナフチル)−4,6−ビ
ス(トリクロロメチル)−s−トリアジン、2−(4−
エトキシカルボニルナフチル)−4,6−ビス(トリク
ロロメチル)−s−トリアジン、2−(4−メトキシス
チリル)−4,6−ビス(トリクロロメチル)−s−ト
リアジン等のハロメチル化s−トリアジン誘導体、2−
(4−メトキシフェニル)−5−トリクロロメチル−
1,3,4−オキサジアゾール、2−(4−メトキシス
チリル)−5−トリクロロメチル−1,3,4−オキサ
ジアゾール等のハロメチル化1,3,4−オキサジアゾ
ール誘導体、2,2’−ビス(o−クロロフェニル)−
4,4’,5,5’−テトラフェニルビイミダゾール、
2,2’−ビス(o−クロロフェニル)−4,4’,
5,5’−テトラ(m,m−ジメトキシフェニル)ビイ
ミダゾール、2,2’−ビス(o−フルオロフェニル)
−4,4’,5,5’−テトラフェニルビイミダゾー
ル、2,2’−ビス(o−メトキシフェニル)−4,
4’,5,5’−テトラフェニルビイミダゾール、2,
2’−ビス(p−メトキシフェニル)−4,4’,5,
5’−テトラフェニルビイミダゾール等のビイミダゾー
ル誘導体、ベンゾインメチルエーテル、ベンゾインイソ
プロピルエーテル、ベンゾインイソブチルエーテル、ベ
ンゾインフェニルエーテル等のベンゾイン誘導体、2−
メチルアントラキノン、2−エチルアントラキノン、2
−t−ブチルアントラキノン、1−クロロアントラキノ
ン等のアントラキノン誘導体、ベンズアンスロン等のア
ンスロン誘導体、ベンゾフェノン、2−メチルベンゾフ
ェノン、3−メチルベンゾフェノン、4−メチルベンゾ
フェノン、2−クロロベンゾフェノン、4−ブロモベン
ゾフェノン、2−カルボキシベンゾフェノン、ミヒラー
ケトン、4,4’−ビス(ジエチルアミノ)ベンゾフェ
ノン等のベンゾフェノン誘導体、2,2−ジメトキシ−
2−フェニルアセトフェノン、2,2−ジエトキシアセ
トフェノン、1−ヒドロキシシクロヘキシルフェニルケ
トン、α−ヒドロキシ−2−メチルフェニルプロパノ
ン、1−ヒドロキシ−1−メチルエチル−(p−イソプ
ロピルフェニル)ケトン、1−ヒドロキシ−1−メチル
エチル−(p−ドデシルフェニル)ケトン、2−メチル
−(p−メチルチオフェニル)−2−モルホリノ−1−
プロパノン、1,1,1−トリクロロメチル−(p−ブ
チルフェニル)ケトン等のアセトフェノン誘導体、チオ
キサントン、2−エチルチオキサントン、2−イソプロ
ピルチオキサントン、2−クロロチオキサントン、2,
4−ジメチルチオキサントン、2,4−ジエチルチオキ
サントン、2,4−ジイソプロピルチオキサントン等の
チオキサントン誘導体、p−ジメチルアミノ安息香酸エ
チル、p−ジエチルアミノ安息香酸エチル等の安息香酸
エステル誘導体、9−フェニルアクリジン、9−(p−
メトキシフェニル)アクリジン等のアクリジン誘導体、
9,10−ジメチルベンズフェナジン等のフェナジン誘
導体、ジシクロペンタジエニルチタニウムジクロライ
ド、ジシクロペンタジエニルチタニウムビスフェニル、
ジシクロペンタジエニルチタニウムビス(2,4−ジフ
ルオロフェニル)、ジシクロペンタジエニルチタニウム
ビス(2,6−ジフルオロフェニル)、ジシクロペンタ
ジエニルチタニウムビス(2,4,6−トリフルオロフ
ェニル)、ジシクロペンタジエニルチタニウムビス
(2,3,5,6−テトラフルオロフェニル)、ジシク
ロペンタジエニルチタニウムビス(2,3,4,5,6
−ペンタフルオロフェニル)、ジ(メチルシクロペンタ
ジエニル)チタニウムビス(2,6−ジフルオロフェニ
ル)、ジ(メチルシクロペンタジエニル)チタニウムビ
ス(2,3,4,5,6−ペンタフルオロフェニル)、
ジシクロペンタジエニルチタニウムビス(2,6−ジフ
ルオロ−3−(1−ピロリル)フェニル)等のチタノセ
ン誘導体、等が挙げられ、中で、ハロメチル化s−トリ
アジン誘導体、ハロメチル化1,3,4−オキサジアゾ
ール誘導体、ビイミダゾール誘導体が好ましい。As the photopolymerization initiator, for example,
2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4 -Ethoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-
Halomethylated s-triazine derivatives such as ethoxycarbonylnaphthyl) -4,6-bis (trichloromethyl) -s-triazine and 2- (4-methoxystyryl) -4,6-bis (trichloromethyl) -s-triazine; 2-
(4-methoxyphenyl) -5-trichloromethyl-
Halomethylated 1,3,4-oxadiazole derivatives such as 1,3,4-oxadiazole and 2- (4-methoxystyryl) -5-trichloromethyl-1,3,4-oxadiazole; 2'-bis (o-chlorophenyl)-
4,4 ′, 5,5′-tetraphenylbiimidazole,
2,2′-bis (o-chlorophenyl) -4,4 ′,
5,5′-tetra (m, m-dimethoxyphenyl) biimidazole, 2,2′-bis (o-fluorophenyl)
-4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (o-methoxyphenyl) -4,
4 ', 5,5'-tetraphenylbiimidazole, 2,
2'-bis (p-methoxyphenyl) -4,4 ', 5
Biimidazole derivatives such as 5'-tetraphenylbiimidazole, benzoin derivatives such as benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether and benzoin phenyl ether;
Methylanthraquinone, 2-ethylanthraquinone, 2
Anthraquinone derivatives such as -t-butylanthraquinone and 1-chloroanthraquinone, anthrone derivatives such as benzuanthrone, benzophenone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, -Carboxybenzophenone, Michler's ketone, benzophenone derivatives such as 4,4'-bis (diethylamino) benzophenone, 2,2-dimethoxy-
2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexylphenyl ketone, α-hydroxy-2-methylphenylpropanone, 1-hydroxy-1-methylethyl- (p-isopropylphenyl) ketone, 1- Hydroxy-1-methylethyl- (p-dodecylphenyl) ketone, 2-methyl- (p-methylthiophenyl) -2-morpholino-1-
Acetophenone derivatives such as propanone, 1,1,1-trichloromethyl- (p-butylphenyl) ketone, thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, 2,
Thioxanthone derivatives such as 4-dimethylthioxanthone, 2,4-diethylthioxanthone and 2,4-diisopropylthioxanthone; benzoic acid ester derivatives such as ethyl p-dimethylaminobenzoate and ethyl p-diethylaminobenzoate; 9-phenylacridine; − (P−
Acridine derivatives such as methoxyphenyl) acridine,
Phenazine derivatives such as 9,10-dimethylbenzphenazine, dicyclopentadienyltitanium dichloride, dicyclopentadienyltitanium bisphenyl,
Dicyclopentadienyl titanium bis (2,4-difluorophenyl), dicyclopentadienyl titanium bis (2,6-difluorophenyl), dicyclopentadienyl titanium bis (2,4,6-trifluorophenyl) , Dicyclopentadienyl titanium bis (2,3,5,6-tetrafluorophenyl), dicyclopentadienyl titanium bis (2,3,4,5,6
-Pentafluorophenyl), di (methylcyclopentadienyl) titanium bis (2,6-difluorophenyl), di (methylcyclopentadienyl) titanium bis (2,3,4,5,6-pentafluorophenyl) ,
Titanocene derivatives such as dicyclopentadienyltitanium bis (2,6-difluoro-3- (1-pyrrolyl) phenyl); and the like. -Oxadiazole derivatives and biimidazole derivatives are preferred.
【0011】尚、光重合型感光性樹脂において、前記ア
クリル系樹脂100重量部に対して、前記アクリル系モ
ノマー10〜200重量部、前記光重合開始剤0.5〜
20重量部の範囲で調製したものが特に好ましく用いら
れる。In the photopolymerizable photosensitive resin, 10 to 200 parts by weight of the acrylic monomer and 0.5 to 0.5 parts by weight of the photopolymerization initiator are added to 100 parts by weight of the acrylic resin.
Those prepared in the range of 20 parts by weight are particularly preferably used.
【0012】本発明の遮光性感光性樹脂組成物は、基本
的には、前記感光性樹脂と遮光性色材としてのカーボン
ブラックからなり、感光性樹脂にカーボンブラックイン
キを配合し乾燥することにより調製されたものである。
ここで、カーボンブラックインキは、カーボンブラック
に分散剤と溶剤を加えて、例えば、ペイントシェーカ
ー、サンドグラインダー、ボールミル、ロールミル、ス
トーンミル、ジェットミル、ホモジナイザー等の分散機
で、通常は、ガラスビーズ、ジルコニアビーズ等のビー
ズを用いて、100℃以下の温度で分散処理することに
より調製される。The light-shielding photosensitive resin composition of the present invention basically comprises the above-mentioned photosensitive resin and carbon black as a light-shielding coloring material, and is prepared by blending a carbon black ink with the photosensitive resin and drying. It was prepared.
Here, carbon black ink is obtained by adding a dispersant and a solvent to carbon black, for example, a dispersing machine such as a paint shaker, a sand grinder, a ball mill, a roll mill, a stone mill, a jet mill, and a homogenizer. It is prepared by performing a dispersion treatment at a temperature of 100 ° C. or less using beads such as zirconia beads.
【0013】遮光性色材としてのカーボンブラックとし
ては、市販のものが用いられ、例えば、三菱化学社製の
商品名で、「MA7」、「MA8」、「MA11」、
「MA100」、「MA220」、「MA230」、
「♯52」、「♯50」、「♯47」、「♯45」、
「♯2700」、「♯2650」、「♯2200」、
「♯1000」、「♯990」、「♯900」等、デグ
サ社製の商品名で、「Printex95」、「Pri
ntex90」、「Printex85」、「Prin
tex75」、「Printex55」、「Print
ex45」、「Printex40」、「Printe
x30」、「Printex3」、「Printex
A」、「PrintexG」、「SpecialBla
ck550」、「SpecialBlack350」、
「SpecialBlack250」、「Specia
lBlack100」等、キャボット社製の商品名で、
「Monarch460」、「Monarch43
0」、「Monarch280」、「Monarch1
20」、「Monarch800」、「Monarch
4630」、「REGAL99」、「REGAL99
R」、「REGAL415」、「REGAL415
R」、「REGAL250」、「REGAL250
R」、「REGAL330」、「BLACK PEAR
LS480」、「BLACK PEARLS130」
等、コロンビアンカーボン社製の商品名で、「RAVE
N11」、「RAVEN15」、「RAVEN30」、
「RAVEN35」、「RAVEN40」、「RAVE
N410」、「RAVEN420」、「RAVEN45
0」、「RAVEN500」、「RAVEN780」、
「RAVEN850」、「RAVEN890H」、「R
AVEN1000」、「RAVEN1020」、「RA
VEN1040」等が挙げられ、これらの中で、1次粒
子の平均粒径が30nm以上、特には35nm以上のも
のが、目的とする光吸収、透過特性を得る上で好まし
い。As the carbon black as the light-shielding color material, commercially available carbon black is used. For example, "MA7", "MA8", "MA11",
"MA100", "MA220", "MA230",
"$ 52", "$ 50", "$ 47", "$ 45",
"$ 2700", "$ 2650", "$ 2200",
"Printex95", "Prix95", "$ 1000", "$ 990", "$ 900"
ntex90 ”,“ Printex85 ”,“ Prin ”
tex75 ”,“ Printex55 ”,“ Print
ex45 ”,“ Printex40 ”,“ Printe ”
x30 "," Printex3 "," Printex "
A "," PrintexG "," SpecialBla "
ck550 "," SpecialBlack350 ",
"SpecialBlack250", "Specia
lBlack100 ”and other product names from Cabot Corporation,
"Monarch 460", "Monarch 43
0 "," Monarch280 "," Monarch1 "
20 "," Monarch800 "," Monarch "
4630 "," REGAL99 "," REGAL99 "
R "," REGAL415 "," REGAL415
R "," REGAL250 "," REGAL250 "
R "," REGAL330 "," BLACK PEAR "
LS480 ”,“ BLACK PEARLS130 ”
Such as "RAVE"
N11 "," RAVE15 "," RAVE30 ",
“RAVE35”, “RAVE40”, “RAVE”
N410 "," RAVEN420 "," RAVEN45 "
0 "," RAVEN500 "," RAVEN780 ",
“Raven850”, “Raven890H”, “R”
AVEN1000 "," RAVEN1020 "," RA
VEN1040 "and the like. Among them, those having an average primary particle size of 30 nm or more, particularly 35 nm or more are preferable from the viewpoint of obtaining desired light absorption and transmission characteristics.
【0014】又、分散剤としては、カーボンブラックに
親和性のある界面活性剤、顔料誘導体、高分子化合物等
が挙げられ、中で、高分子化合物が、目的とする光吸
収、透過特性を得る上で好ましい。Examples of the dispersant include a surfactant, a pigment derivative, and a polymer compound having an affinity for carbon black. Among them, the polymer compound obtains desired light absorption and transmission characteristics. Preferred above.
【0015】又、溶剤としては、感光性樹脂を溶解させ
るものであれば特に限定はされないが、沸点が120〜
190℃の範囲にある有機溶剤、例えば、プロピレング
リコールモノメチルエーテル、プロピレングリコールモ
ノエチルエーテル、プロピレングリコールモノブチルエ
ーテル、プロピレングリコールモノメチルエーテルアセ
テート、プロピレングリコールモノエチルエーテルアセ
テート、プロピレングリコールモノブチルエーテルアセ
テート、ジプロピレングリコールジメチルエーテル等の
プロピレングリコール系溶媒は、カーボンブラックの分
散を制御し易く、目的とする吸収、透過特性を得る上で
好ましい。The solvent is not particularly limited as long as it can dissolve the photosensitive resin.
Organic solvents in the range of 190 ° C., for example, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monobutyl ether acetate, dipropylene glycol dimethyl ether A propylene glycol-based solvent such as described above is preferable in that the dispersion of carbon black is easily controlled and the desired absorption and transmission characteristics are obtained.
【0016】本発明の遮光性感光性樹脂組成物は、前記
感光性樹脂に前記カーボンブラックインキを、遮光性感
光樹脂組成物中のカーボンブラック含有量が35〜70
重量%、特には40〜65重量%となるように配合され
たものが好ましい。The light-shielding photosensitive resin composition of the present invention comprises the photosensitive resin and the carbon black ink, and the light-shielding photosensitive resin composition has a carbon black content of 35 to 70.
%, Particularly preferably 40 to 65% by weight.
【0017】本発明の遮光性感光性樹脂組成物は、前記
方法により調製され、膜厚1μm当たりの波長550n
mにおける吸光度OD550 が3以上、好ましくは3〜6
で、且つ、そのOD550 に対する同じく膜厚1μm当た
りの波長365nmにおける吸光度OD365 の比(OD
365 /OD550 )が1.00〜1.65、好ましくは
1.05〜1.60という特定の吸光度を示すものであ
る。OD550 が3未満では高遮光性が得られず、又、O
D365 /OD550 が1.00未満では、カーボンブラッ
ク以外の他の遮光性色材の併用が必要となって、高遮光
性が得られず、1.65超過では画像形成性が劣ること
となる。The light-shielding photosensitive resin composition of the present invention is prepared by the above method, and has a wavelength of 550 nm per 1 μm of film thickness.
absorbance OD 550 of 3 or more in m, preferably 3 to 6
And the ratio of the absorbance OD 365 at a wavelength of 365 nm per 1 μm of film thickness to the OD 550 ( OD 550) .
365 / OD 550 ) shows a specific absorbance of 1.00 to 1.65, preferably 1.05 to 1.60. If the OD 550 is less than 3, high light-shielding properties cannot be obtained.
If D 365 / OD 550 is less than 1.00, it is necessary to use a light-shielding coloring material other than carbon black in combination, and high light-shielding properties cannot be obtained. If D 365 / OD 550 exceeds 1.65, image forming properties are poor. Become.
【0018】尚、本発明における光吸収特性は、カーボ
ンブラックの分散状態の制御により得られるものである
が、光吸収、透過特性は顔料粒径の影響を受けることか
らカーボンブラック凝集体の粒径を反映して特定の吸光
度を示していることが考えられるものの、現在のとこ
ろ、カーボンブラックが高濃度で配合された遮光性感光
性樹脂膜の凝集体粒径を実測する手段はなく、確認は困
難である。従って、適切な分散条件の設定に当たって
は、カーボンブラックインキ或いは樹脂組成物の光吸収
特性を分光光度計で確認して設定するのが実際的な手法
である。The light absorption characteristics in the present invention are obtained by controlling the dispersion state of carbon black. However, since the light absorption and transmission characteristics are affected by the pigment particle size, the particle size of the carbon black aggregates Although it is conceivable that it shows a specific absorbance reflecting the above, at present, there is no means to actually measure the aggregate particle size of the light-shielding photosensitive resin film in which carbon black is mixed at a high concentration, and confirmation has been made. Have difficulty. Therefore, in setting appropriate dispersion conditions, it is a practical method to confirm and set the light absorption characteristics of the carbon black ink or the resin composition with a spectrophotometer.
【0019】又、本発明の遮光性感光性樹脂組成物は、
遮光性色材としてカーボンブラック以外の、例えばフタ
ロシアニン誘導体等の顔料や染料を含有していてもよい
が、本発明における特定の吸光度を得るためにはカーボ
ンブラックのみからなるものが好ましく、従って、本発
明における「実質的にカーボンブラックのみからなる」
とは、カーボンブラック以外の顔料や染料を本発明にお
ける特定の吸光度が得られる範囲で少量含有することを
意味するものである。又、本発明の樹脂組成物は、前記
成分以外に、例えば、塗布性改良剤、現像性改良剤、密
着性改良剤、感度改良剤、感脂化剤等の通常用いられる
各種の添加剤をさらに含有していてもよい。Further, the light-shielding photosensitive resin composition of the present invention comprises:
As a light-shielding color material, other than carbon black, for example, a pigment or a dye such as a phthalocyanine derivative may be contained.However, in order to obtain a specific absorbance in the present invention, a material consisting of only carbon black is preferable. "Consisting essentially of carbon black" in the invention
The expression means that a small amount of a pigment or a dye other than carbon black is contained within a range where the specific absorbance in the present invention can be obtained. In addition, the resin composition of the present invention, in addition to the above components, for example, various commonly used additives such as a coating improver, a developability improver, an adhesion improver, a sensitivity improver, and a sensitizer. Further, it may be contained.
【0020】本発明の遮光性感光性樹脂組成物は、透明
基板上に、前記の遮光性色材を含有する遮光性感光性樹
脂組成物溶液として塗布され乾燥されて遮光性感光性樹
脂組成物の層として形成された後、該層をフォトマスク
を介して画像露光し、必要に応じて硬化させ、現像する
ことにより、ブラックマトリックスとして形成され、さ
らにこの操作がRGB3色について各々繰り返され、カ
ラーフィルタが製造される。The light-shielding photosensitive resin composition of the present invention is applied as a light-shielding photosensitive resin composition solution containing the above-mentioned light-shielding coloring material on a transparent substrate and dried to form a light-shielding photosensitive resin composition. After being formed as a layer, the layer is image-exposed through a photomask, cured and developed as necessary, thereby forming a black matrix. This operation is further repeated for each of the three colors RGB, and A filter is manufactured.
【0021】ここで、透明基板としては、例えば、ポリ
エチレンテレフタレート等の飽和ポリエステル、ポリプ
ロピレンやポリエチレン等のポリオレフィン、ポリカー
ボネート、ポリメチルメタクリレート、ポリスルホン等
の熱可塑性樹脂、エポキシ樹脂、不飽和ポリエステル樹
脂、ポリ(メタ)アクリル樹脂等の熱硬化性樹脂、或い
は各種のガラス板等が挙げられ、特に、耐熱性の点から
ガラス板、耐熱性プラスチックが好ましく用いられる。
尚、これら透明基板には、表面の接着性等を改良するた
めに、予め、コロナ放電処理、オゾン処理、シランカッ
プリング剤やウレタンポリマー等によるアンダーコート
処理等が行われていてもよい。As the transparent substrate, for example, saturated polyester such as polyethylene terephthalate, polyolefin such as polypropylene or polyethylene, thermoplastic resin such as polycarbonate, polymethyl methacrylate, polysulfone, epoxy resin, unsaturated polyester resin, poly ( Examples thereof include thermosetting resins such as (meth) acrylic resins, and various types of glass plates. In particular, glass plates and heat-resistant plastics are preferably used from the viewpoint of heat resistance.
Incidentally, these transparent substrates may be previously subjected to a corona discharge treatment, an ozone treatment, an undercoat treatment with a silane coupling agent, a urethane polymer or the like in order to improve the adhesiveness of the surface.
【0022】又、塗布方法は、特に限定されないが、例
えば、スピンコーター、ワイヤーバー、フローコータ
ー、ダイコーター、ロールコーター、スプレーコーター
等の塗布装置を用いて、乾燥後の樹脂組成物の膜厚が好
ましくは0.1〜2μm、特に好ましくは0.1〜1.
5μm、更に好ましくは0.1〜1μmの範囲となるよ
うに塗布される。乾燥は、ホットプレート、IRオーブ
ン、コンベンションオーブン等を用いて、40〜150
℃程度の温度で、10秒〜60分程度の時間でなされ
る。The coating method is not particularly limited. For example, the film thickness of the dried resin composition is measured using a coating device such as a spin coater, a wire bar, a flow coater, a die coater, a roll coater, or a spray coater. Is preferably 0.1 to 2 μm, particularly preferably 0.1 to 1.
The coating is performed so as to have a thickness of 5 μm, more preferably 0.1 to 1 μm. Drying is performed using a hot plate, an IR oven, a convention oven, or the like, for 40 to 150 days.
The temperature is about 10 ° C. for about 10 seconds to about 60 minutes.
【0023】又、画像露光する光源としては、例えば、
キセノンランプ、ハロゲンランプ、タングステンラン
プ、メタルハライドランプ、超高圧水銀灯、高圧水銀
灯、中圧水銀灯、低圧水銀灯等のランプ光源や、アルゴ
ンイオンレーザー、YAGレーザー、エキシマーレーザ
ー、窒素レーザー等のレーザー光源等が用いられる。
尚、特定の照射光のみを用いる場合には、光学フィルタ
を利用してもよい。As a light source for image exposure, for example,
Lamp light sources such as xenon lamps, halogen lamps, tungsten lamps, metal halide lamps, ultra-high pressure mercury lamps, high pressure mercury lamps, medium pressure mercury lamps, low pressure mercury lamps, and laser light sources such as argon ion laser, YAG laser, excimer laser, and nitrogen laser are used. Can be
When only specific irradiation light is used, an optical filter may be used.
【0024】又、現像液としては、未露光部のレジスト
膜を溶解させ得る有機溶剤、例えば、アセトン、塩化メ
チレン、トリクレン、シクロヘキサノン等を用いること
もできるが、例えば、炭酸ナトリウム、炭酸カリウム、
珪酸ナトリウム、珪酸カリウム、水酸化ナトリウム、水
酸化カリウム等の無機のアルカリ剤、或いは、ジエタノ
ールアミン、トリエタノールアミン、水酸化テトラアル
キルアンモニウム塩等の有機のアルカリ剤の水溶液が好
ましい。As the developing solution, an organic solvent capable of dissolving the unexposed resist film, for example, acetone, methylene chloride, trichlene, cyclohexanone and the like can be used.
An aqueous solution of an inorganic alkali agent such as sodium silicate, potassium silicate, sodium hydroxide and potassium hydroxide, or an organic alkali agent such as diethanolamine, triethanolamine, and tetraalkylammonium hydroxide salt is preferable.
【0025】尚、後者のアルカリ現像液には、必要に応
じて、例えば、ナフタレンスルホン酸ナトリウム基、ベ
ンゼンスルホン酸ナトリウム基を有するアニオン性界面
活性剤、ポリアルキレンオキシ基を有するノニオン性界
面活性剤、テトラアルキルアンモニウム基を有するカチ
オン性界面活性剤等の界面活性剤、水溶性の有機溶剤、
水酸基又はカルボン酸基を有する低分子化合物等を含有
させることができ、特に、界面活性剤は、現像性、解像
性、地汚れ等の改良に有効である。現像は、浸漬現像、
スプレー現像、ブラシ現像、超音波現像等により、通
常、10〜50℃、特には15〜45℃程度の温度でな
されるのが好ましい。If necessary, the latter alkali developer may contain, for example, an anionic surfactant having a sodium naphthalenesulfonate group or a sodium benzenesulfonate group, or a nonionic surfactant having a polyalkyleneoxy group. , A surfactant such as a cationic surfactant having a tetraalkylammonium group, a water-soluble organic solvent,
A low molecular weight compound having a hydroxyl group or a carboxylic acid group can be contained. In particular, a surfactant is effective for improving developability, resolution, background stain, and the like. Development is immersion development,
Usually, it is preferably carried out at a temperature of about 10 to 50 ° C, particularly about 15 to 45 ° C, by spray development, brush development, ultrasonic development or the like.
【0026】[0026]
【実施例】以下、本発明を実施例によりさらに具体的に
説明するが、本発明はその要旨を越えない限り、以下の
実施例に限定されるものではない。EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples, but the present invention is not limited to the following examples unless it exceeds the gist of the present invention.
【0027】カーボンブラックインキ調製用分散剤の製
造 トリレンジイソシアネートの三量体(固形分50重量%
の酢酸ブチル溶液、三菱化学社製、「マイテックGP7
50A」)32gと触媒としてのジブチルチンジラウレ
ート0.02gをプロピレングリコールモノメチルエー
テルアセテート(PGMEA)47gに溶解し、攪拌
下、ポリエチレングリコール(片末端メトキシ基、分子
量1000、日本油脂社製、「ユニオックスM−100
0」)14.4gとポリプロピレングリコール(分子量
1000、三洋化成工業社製、「サンニックスPP−1
000」)9.6gとの混合物を滴下して、70℃で3
時間反応させた。引き続いて、N,N−ジメチルアミノ
−1,3−プロパンジアミン1gを加え、40℃で更に
1時間反応させた。得られた樹脂の中和滴定によるアミ
ン価は14mgKOH/gであり、固形分濃度は40重
量%であった。 Preparation of dispersant for preparing carbon black ink
Concrete tolylene diisocyanate trimer (solid content 50 wt%
Butyl acetate solution, manufactured by Mitsubishi Chemical Corporation, "Mytec GP7
50A "), 32 g of dibutyltin dilaurate as a catalyst and 0.02 g of a catalyst were dissolved in 47 g of propylene glycol monomethyl ether acetate (PGMEA), and polyethylene glycol (a methoxy group at one end, molecular weight 1000, manufactured by NOF Corporation," Uniox "was stirred. M-100
0 ") and polypropylene glycol (molecular weight 1000, Sanyo Kasei Kogyo Co., Ltd.," SANNIX PP-1 ").
000 ") at 70 g.
Allowed to react for hours. Subsequently, 1 g of N, N-dimethylamino-1,3-propanediamine was added, and the mixture was further reacted at 40 ° C. for 1 hour. The amine value of the obtained resin by neutralization titration was 14 mgKOH / g, and the solid content concentration was 40% by weight.
【0028】感光性樹脂用バインダー樹脂の製造 スチレン−アクリル酸共重合体樹脂(酸価200、分子
量5000)20g、p−メトキシフェノール0.2
g、ドデシルトリメチルアンモニウムクロリド0.2
g、PGMEA40gをフラスコに仕込み、3,4−エ
ポキシシクロヘキシルメチルアクリレート7.6gを滴
下し、100℃で30時間反応させた。反応液を水に再
沈殿し、乾燥して樹脂を得た。得られた樹脂の酸価は8
0mgKOH/gであった。Preparation of binder resin for photosensitive resin 20 g of styrene-acrylic acid copolymer resin (acid value 200, molecular weight 5000), p-methoxyphenol 0.2
g, dodecyltrimethylammonium chloride 0.2
g, 40 g of PGMEA were charged into a flask, 7.6 g of 3,4-epoxycyclohexylmethyl acrylate was added dropwise, and reacted at 100 ° C. for 30 hours. The reaction solution was reprecipitated in water and dried to obtain a resin. The acid value of the obtained resin is 8
It was 0 mgKOH / g.
【0029】実施例1〜4、比較例1〜2 表1に記載のカーボンブラック50重量部と前記製造例
で得た分散剤樹脂5重量部(固形分)を固形分濃度が5
0重量%となるようにPGMEAを加え、攪拌機により
プレミキシングした後、ペイントシェーカーにより25
〜45℃で6時間分散処理し、カーボンブラックインキ
を調製した。尚、ビーズは0.5mm径のジルコニアビ
ーズを分散液と同量用い、分散終了後、フィルターによ
り分離、除去した。このカーボンブラックインキを用い
て、遮光性色材としてのカーボンブラック50g、分散
剤樹脂5g、前記製造例で得たバインダー樹脂としての
アクリル系樹脂25g、アクリル系モノマーとしてのジ
ペンタエリスリトールヘキサアクリレート15g、光重
合開始剤としての2,2’−ビス(o−クロロフェニ
ル)−4,4’,5,5’−テトラフェニルビイミダゾ
ール2g、4,4’−ビス(ジエチルアミノ)ベンゾフ
ェノン1g、ペンタエリスリトールテトラキスチオプロ
ピオネート2g、及び溶剤としてのPGMEA300g
の配合割合になるように、各成分を加え、スターラーに
より攪拌、溶解させ、遮光性感光性樹脂組成物溶液を調
整した。Examples 1 to 4 and Comparative Examples 1 and 2 50 parts by weight of carbon black shown in Table 1 and 5 parts by weight (solid content) of the dispersant resin obtained in the above Production Example were mixed with a solid content of 5 parts by weight.
PGMEA was added to a concentration of 0% by weight, premixed with a stirrer, and then mixed with a paint shaker.
A dispersion treatment was performed at -45 ° C for 6 hours to prepare a carbon black ink. The beads were zirconia beads having a diameter of 0.5 mm in the same amount as the dispersion, and after the dispersion was completed, the beads were separated and removed by a filter. Using this carbon black ink, 50 g of carbon black as a light-shielding coloring material, 5 g of a dispersant resin, 25 g of an acrylic resin as a binder resin obtained in the above production example, 15 g of dipentaerythritol hexaacrylate as an acrylic monomer, 2,2′-bis (o-chlorophenyl) -4,4 ′, 5,5′-tetraphenylbiimidazole 2 g, 4,4′-bis (diethylamino) benzophenone 1 g, pentaerythritol tetrakisthio as photopolymerization initiator 2 g of propionate and 300 g of PGMEA as a solvent
Were added to each other so as to obtain the mixing ratio, and the mixture was stirred and dissolved with a stirrer to prepare a light-shielding photosensitive resin composition solution.
【0030】この遮光性感光性樹脂組成物溶液をスピン
コーターにてガラス基板(コーニング社製、「705
9」)に塗布し、ホットプレートにて80℃で1分間乾
燥した。乾燥後のレジストの膜厚を触針式膜厚計(テン
コール社製、「α−ステップ」)で測定したところ、1
μmであった。この樹脂組成物膜について、分光光度計
(日立製作所製、「U−3500」)にて吸収スペクト
ルを測定し、波長365nmにおける吸光度OD365 と
波長550nmにおける吸光度OD550 を読み取り、更
に両者の比OD365 /OD550を算出して結果を表1に
示した。引き続いて、ステップタブレットを通して高圧
水銀灯で150mj/cm2 の露光量で露光した後、温
度25℃で、濃度0.05%の水酸化カリウム水溶液に
1分間浸漬現像し、画像が形成された最大段数を求め感
度を評価し、結果を表1に示した。The light-shielding photosensitive resin composition solution was applied to a glass substrate (Corning Co., Ltd., “705”) using a spin coater.
9 ") and dried on a hot plate at 80 ° C. for 1 minute. The film thickness of the dried resist was measured with a stylus-type film thickness meter (manufactured by Tencor, "α-step").
μm. The absorption spectrum of this resin composition film was measured with a spectrophotometer (“U-3500” manufactured by Hitachi, Ltd.), and the absorbance OD 365 at a wavelength of 365 nm and the absorbance OD 550 at a wavelength of 550 nm were read. the results to calculate the 365 / OD 550 is shown in Table 1. Subsequently, after exposure through a step tablet with a high-pressure mercury lamp at an exposure amount of 150 mj / cm 2 , the film was immersed and developed in a 0.05% -concentration aqueous solution of potassium hydroxide at a temperature of 25 ° C. for 1 minute to form an image. And the sensitivity was evaluated. The results are shown in Table 1.
【0031】[0031]
【表1】 [Table 1]
【0032】[0032]
【発明の効果】本発明によれば、高遮光性を有すると共
に画像形成性に優れ、従って、遮光性色材の低含有量化
及び薄膜化が可能な遮光性感光性樹脂組成物、及び、そ
の遮光性感光性樹脂組成物をブラックマトリックスに用
いることによる高品位の液晶表示能を有するカラーフィ
ルタを提供することができる。According to the present invention, a light-shielding photosensitive resin composition having high light-shielding properties and excellent image-forming properties, and thus capable of reducing the content of light-shielding coloring materials and reducing the thickness thereof, By using a light-shielding photosensitive resin composition for a black matrix, a color filter having high-quality liquid crystal display capability can be provided.
Claims (3)
組成物であって、膜厚1μm当たりの波長550nmに
おける吸光度OD550 が3以上で、且つ、そのOD550
に対する波長365nmにおける吸光度OD365 の比
(OD365/OD 550 )が1.00〜1.65であること
を特徴とする遮光性感光性樹脂組成物。1. A light-shielding photosensitive resin containing a light-shielding color material.
A composition, having a wavelength of 550 nm per 1 μm of film thickness.
Absorbance OD550Is 3 or more and its OD550
Absorbance OD at a wavelength of 365 nm with respect to365Ratio
(OD365/ OD 550) Is 1.00 to 1.65
A light-shielding photosensitive resin composition comprising:
のみからなる請求項1に記載の遮光性感光性樹脂組成
物。2. The light-shielding photosensitive resin composition according to claim 1, wherein the light-shielding color material is substantially composed of only carbon black.
遮光性感光性樹脂組成物からなるブラックマトリックス
が形成されてなることを特徴とするカラーフィルタ。3. A color filter, comprising a black matrix comprising the light-shielding photosensitive resin composition according to claim 1 formed on a transparent substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30820697A JP3915201B2 (en) | 1997-11-11 | 1997-11-11 | Light-shielding photosensitive resin composition and color filter using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30820697A JP3915201B2 (en) | 1997-11-11 | 1997-11-11 | Light-shielding photosensitive resin composition and color filter using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH11142637A true JPH11142637A (en) | 1999-05-28 |
JP3915201B2 JP3915201B2 (en) | 2007-05-16 |
Family
ID=17978202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30820697A Expired - Lifetime JP3915201B2 (en) | 1997-11-11 | 1997-11-11 | Light-shielding photosensitive resin composition and color filter using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3915201B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006162716A (en) * | 2004-12-03 | 2006-06-22 | Tokyo Ohka Kogyo Co Ltd | Photosensitive composition for forming light shielding film and black matrix formed with the photosensitive composition for forming light shielding film |
US7399574B2 (en) | 2001-09-28 | 2008-07-15 | Dai Nippon Printing Co., Ltd. | Curable resin for photo-patterning, process for producing the same, curable resin composition, color filter, liquid crystal panel substrate, and liquid crystal panel |
JP2008306188A (en) * | 2007-06-07 | 2008-12-18 | Dongjin Semichem Co Ltd | Light-shielding water-soluble resin composition |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101804259B1 (en) | 2015-03-24 | 2017-12-04 | 삼성에스디아이 주식회사 | Photosensitive resin composition, black column spacerusing the same and color filter |
-
1997
- 1997-11-11 JP JP30820697A patent/JP3915201B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7399574B2 (en) | 2001-09-28 | 2008-07-15 | Dai Nippon Printing Co., Ltd. | Curable resin for photo-patterning, process for producing the same, curable resin composition, color filter, liquid crystal panel substrate, and liquid crystal panel |
JP2006162716A (en) * | 2004-12-03 | 2006-06-22 | Tokyo Ohka Kogyo Co Ltd | Photosensitive composition for forming light shielding film and black matrix formed with the photosensitive composition for forming light shielding film |
JP4611724B2 (en) * | 2004-12-03 | 2011-01-12 | 東京応化工業株式会社 | Photosensitive composition for forming light-shielding film, and black matrix formed with the photosensitive composition for forming light-shielding film |
JP2008306188A (en) * | 2007-06-07 | 2008-12-18 | Dongjin Semichem Co Ltd | Light-shielding water-soluble resin composition |
Also Published As
Publication number | Publication date |
---|---|
JP3915201B2 (en) | 2007-05-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20040157140A1 (en) | Photosensitive coloring composition, color filter using the composition and method of producing the same | |
EP0780731A3 (en) | Photopolymerizable composition for a color filter, color filter and liquid crystal display device | |
US20050258406A1 (en) | Black resist composition for color filter | |
JP4108303B2 (en) | Curable resin composition, color filter, method for producing color filter, and liquid crystal display device | |
JP2002341533A (en) | Color composition and photosensitive color composition for color filter | |
JP3644201B2 (en) | Color filter resist composition and color filter | |
JP3641894B2 (en) | Black photopolymerizable composition for color filter | |
JP2003043685A (en) | Color composition, and photosensitive color composition for color filter | |
JP2000001522A (en) | Light-screening photopolymer composition and color filter prepared therefrom | |
JPH10282325A (en) | Photopolymerizing composition for color filter and color filter | |
JP2003035815A (en) | Composition for color filter, and color filter | |
JP3960311B2 (en) | Curable resin composition for die coating, color filter, method for producing color filter, and liquid crystal display device | |
JPH11323143A (en) | Light-screening photosensitive resin composition and color filter prepared therefrom | |
JP3915201B2 (en) | Light-shielding photosensitive resin composition and color filter using the same | |
JP2003322716A (en) | Composition for color filter and color filter | |
JP2001164142A (en) | Pigment dispersion composition | |
JP2005255753A (en) | Curable resin composition, color filter, and liquid crystal display | |
JP3641895B2 (en) | Photopolymerizable composition for color filter and color filter | |
JP2005331938A (en) | Photosensitive composition for black matrix | |
JP2004219979A (en) | Colored photosensitive composition, color filter, and liquid crystal display device formed by using the same | |
JP3572731B2 (en) | Color filter | |
JPH11109616A (en) | Colored resin composition and color filter | |
JP2006171781A (en) | Method for preparing light-shielding photosensitive composition, the light shielding photosensitive composition and color filter | |
JPH11174671A (en) | Shading photosensitive composition and color filter | |
JPH11327128A (en) | Light shielding photosensitive resin compound and color filter using same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20041129 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050201 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050331 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20061011 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20061109 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061115 |
|
A911 | Transfer of reconsideration by examiner before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20061218 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070116 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070129 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100216 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110216 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120216 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120216 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130216 Year of fee payment: 6 |
|
EXPY | Cancellation because of completion of term |