JPH11134838A - Sliding member for recording/reproducing operation - Google Patents
Sliding member for recording/reproducing operationInfo
- Publication number
- JPH11134838A JPH11134838A JP10236602A JP23660298A JPH11134838A JP H11134838 A JPH11134838 A JP H11134838A JP 10236602 A JP10236602 A JP 10236602A JP 23660298 A JP23660298 A JP 23660298A JP H11134838 A JPH11134838 A JP H11134838A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- sliding member
- gas
- reproducing
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 21
- 229930195733 hydrocarbon Natural products 0.000 claims description 18
- 150000002430 hydrocarbons Chemical class 0.000 claims description 17
- 239000004215 Carbon black (E152) Substances 0.000 claims description 13
- 239000002994 raw material Substances 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 31
- 150000002500 ions Chemical class 0.000 abstract description 16
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 14
- 238000005299 abrasion Methods 0.000 abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 7
- 239000001257 hydrogen Substances 0.000 abstract description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052786 argon Inorganic materials 0.000 abstract description 3
- 239000012159 carrier gas Substances 0.000 abstract description 2
- 229910052734 helium Inorganic materials 0.000 abstract description 2
- 229910052754 neon Inorganic materials 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 23
- 230000003287 optical effect Effects 0.000 description 9
- -1 ethane and propane Natural products 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 239000004033 plastic Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229930182556 Polyacetal Natural products 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001868 water Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、磁気又は光記録再
生用媒体を装着するための部材及び記録再生装置におけ
る摺動部材の改良に関する。さらに詳しくは、本発明は
磁気テープカセットテープガイド、ガイドローラ等のテ
ープ案内部材、媒体と接触するハーフケース部材、スプ
リングでリールを固定するためのセンターボス、磁気ヘ
ッド、光又は磁気ディスクの回転ハブ、その他磁気テー
プや他の部分と摺動する部分の耐摩擦性で耐摩耗性の摺
動部材に関する。The present invention relates to a member for mounting a magnetic or optical recording / reproducing medium and an improvement of a sliding member in a recording / reproducing apparatus. More specifically, the present invention relates to a magnetic tape cassette tape guide, a tape guide member such as a guide roller, a half case member that comes into contact with a medium, a center boss for fixing a reel with a spring, a magnetic head, and a rotating hub for an optical or magnetic disk. The present invention relates to a friction-resistant and wear-resistant sliding member that slides with a magnetic tape or another part.
【0002】[0002]
【従来の技術】オーディオテープカセット、ビデオテー
プカセット等のカセットテープには磁気テープの走行を
適正に案内して走行安定性を確保するために案内部材が
設けられている。例えばカセット前面の両端に固定テー
プガイドが設けられている。図1は従来のビデオテープ
カセットケースの分解図で、理解を容易にするためにテ
ープガイド部分のみを詳しく示してある。図1において
2は下ハーフ、1は上ハーフであり、下ハーフ2には磁
気テープ繰り出し側から磁気テープ走行路にそって順
に、プラスチックガイドピン3、プラスチック支持ピン
4に支持された金属製の半円筒形または円筒形固定テー
プガイド5、プラスチック支持ピン6に支持された金属
製半円筒形または円筒形固定テープガイド7、およびプ
ラスチックピン8に支持された金属ガイドローラ9が設
けられている。これらのガイド部材のなかでも、特に重
要なものはテープガイド5、7である。これらのガイド
は、ビデオ用としてはステンレス鋼(SUS304
等)、黄銅又はアルミニウムの下地にめっき、ポリアセ
タール等の硬質樹脂、またオーディオ用としてはステン
レス鋼、ポリスチレン等の樹脂、などが使用されてい
る。ステンレス鋼はビデオテープカセットとしては磁気
テープのバックコートの添加材である無機材粒子により
削られることがあり、ドロップアウトの原因と成り、ま
たオーディオ用としては申し分ないが非常にコストが高
くなる。黄銅又はアルミニウムの下地にめっきではコス
トが高くなり、表面粗さが小さくなるため摩擦係数が高
くなり、走行性の悪化が見れられる。ポリアセタール等
の樹脂は削れ易く、粉落ちのため記録媒体の面に付着し
てドロップアウトの原因と成り、また摩擦係数が大きい
ために走行不良を生じ易い。2. Description of the Related Art Cassette tapes such as audio tape cassettes and video tape cassettes are provided with guide members for properly guiding the running of a magnetic tape and ensuring running stability. For example, fixed tape guides are provided at both ends of the front surface of the cassette. FIG. 1 is an exploded view of a conventional video tape cassette case, in which only a tape guide portion is shown in detail for easy understanding. In FIG. 1, reference numeral 2 denotes a lower half, and 1 denotes an upper half. The lower half 2 is made of metal supported by a plastic guide pin 3 and a plastic support pin 4 in order from a magnetic tape feeding side along a magnetic tape running path. A semi-cylindrical or cylindrical fixing tape guide 5, a metal semi-cylindrical or cylindrical fixing tape guide 7 supported by a plastic support pin 6, and a metal guide roller 9 supported by a plastic pin 8 are provided. Of these guide members, the tape guides 5 and 7 are particularly important. These guides are made of stainless steel (SUS304) for video use.
Etc.), plating on a brass or aluminum base, a hard resin such as polyacetal, and a resin such as stainless steel and polystyrene for audio use. Stainless steel may be scraped by inorganic material particles as an additive of a back coat of a magnetic tape for a video tape cassette, which causes dropout, and is extremely satisfactory but extremely expensive for audio. When plating is performed on a brass or aluminum base, the cost increases, and the surface roughness decreases, so that the friction coefficient increases and the running property deteriorates. Resins such as polyacetal are easily scraped off, adhere to the surface of the recording medium due to powder dropping, causing dropout, and are liable to cause running failure due to a large friction coefficient.
【0003】一方、光ディスクや磁気ディスクでは記録
媒体を環状に構成しこれを支持して駆動するためにその
中央孔に金属製の回転ハブを嵌合固定する。回転ハブは
装置側からスピンドルピンを受けるための中央孔と偏心
位置にある駆動ピンを受けるための軸はずれの孔とを有
し、駆動ピンはディスクを記録再生装置に装着すれば自
動的にハブの面を摺動して軸はずれの孔に嵌合する。こ
のときハブの表面には摩耗、擦り傷、粉落ちが発生す
る。On the other hand, in the case of an optical disk or a magnetic disk, a recording medium is formed in an annular shape, and a metal rotary hub is fitted and fixed in a central hole for supporting and driving the recording medium. The rotary hub has a central hole for receiving a spindle pin from the device side and an off-axis hole for receiving a drive pin located at an eccentric position, and the drive pin automatically becomes a hub when a disc is mounted on a recording / reproducing device. Slides over the surface and fits into the hole of the shaft. At this time, abrasion, abrasion, and powder fall occur on the surface of the hub.
【0004】図2は磁気ディスク装置の分解構造の概要
を示し、上ケース11、下ケース12の間に、回転ハブ
13を中央孔に嵌合固定した磁気ディスク14、および
その両側のライナーシート15、16を収納して成る。
回転ハブ13は再生装置側の中心スピンドルピン(図示
せず)を受け入れるための四角形中央孔17と偏心位置
にある駆動ピン(図示せず)を受け入れる軸はずれの四
角形の孔18を有する。ディスク装置を記録再生装置に
装着すれば自動的にスピンドルピンおよび駆動ピンはこ
れらの孔に侵入しようとするがこれらのピンは必ずしも
孔17、18と正しく整列していないから、駆動ピンは
ハブ13の面を摺動しながら回転して孔の位置を探して
嵌合するに至る。回転ハブ13は通常ステンレス鋼(S
US430)又はそれにめっき(例えば硬質クロムめっ
き)をほどこしたものなどが使用されているが、駆動ピ
ンやスピンドルピンと接触する部分が何度も使用してい
る間に次第に摩耗して粉落ちを生じ、これがディスク面
に付着すると擬記録やドロップアウトを生じ、情報の記
録読み取りにおける誤動作を生じることに成る。シャッ
ター等も使用毎に摺動するため耐久性にしないと上述の
問題を発生する。そのほか磁気テープとの接触による磁
気ヘッドの摩擦及び摩耗とその粉落ちによる同様な問題
もある。一般に、磁気記録再生装置、光ディスク記録再
生装置等における摺動部材では、それが記録媒体に近接
した位置にある場合には摺動部材の摩耗による粉落ちで
情報の記録又は再生に誤差が生じる問題があり、出来る
だけ耐摩耗性の摺動部材が望まれ、実際摺動部材の素材
を工夫することにより相当に耐摩耗性の良いものが得ら
れているが、費用の点で簡便に製造できることが更に望
ましい。FIG. 2 shows an outline of an exploded structure of a magnetic disk drive. A magnetic disk 14 having a rotating hub 13 fitted and fixed in a central hole between an upper case 11 and a lower case 12, and liner sheets 15 on both sides thereof. , 16 are housed.
The rotary hub 13 has a square central hole 17 for receiving a center spindle pin (not shown) on the reproducing apparatus side and an off-axis square hole 18 for receiving a drive pin (not shown) in an eccentric position. When the disk device is mounted on the recording / reproducing apparatus, the spindle pin and the drive pin automatically try to enter these holes, but since these pins are not always properly aligned with the holes 17 and 18, the drive pin is It rotates while sliding on the surface of the hole and finds the position of the hole, leading to fitting. The rotating hub 13 is usually made of stainless steel (S
US430) or plating (for example, hard chrome plating) is used, but the parts that come into contact with the drive pins and the spindle pins gradually wear out during use many times, causing powder drop, If this adheres to the disk surface, false recording or dropout occurs, resulting in malfunction in recording and reading information. Since the shutter and the like also slide each time they are used, the above-described problem occurs unless durability is improved. In addition, there are similar problems due to friction and abrasion of the magnetic head due to contact with the magnetic tape and the powder falling off. Generally, when a sliding member in a magnetic recording / reproducing device, an optical disk recording / reproducing device, or the like is located at a position close to a recording medium, an error occurs in recording or reproducing information due to powder drop due to abrasion of the sliding member. There is a need for a sliding member that is as abrasion-resistant as possible. Actually, by devising the material of the sliding member, a material with considerably high abrasion resistance has been obtained, but it can be easily manufactured in terms of cost. Is more desirable.
【0005】[0005]
【発明が解決しようとする課題】従って、本発明の目的
は、磁気テープカセット、光又は磁気ディスク、磁気ヘ
ッド等の磁気又は光記録再生装置における、テープ案内
部材、磁気ヘッド、光又は磁気ディスクの回転ハブ、そ
の他磁気テープや他の部分と摺動する部分の摺動部材の
摩擦を低下し又耐摩耗性を向上する安価な手段を提供す
ることにある。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a tape guide member, a magnetic head, an optical or magnetic disk in a magnetic or optical recording and reproducing apparatus such as a magnetic tape cassette, an optical or magnetic disk, and a magnetic head. It is an object of the present invention to provide an inexpensive means for reducing the friction of a rotating member, a sliding member that slides on a magnetic tape or another part, and improving abrasion resistance.
【0006】[0006]
【課題を解決するための手段】本発明は、記録再生用媒
体を装着するための部材及び記録再生装置に使用する摺
動部材において、前記摺動部材の表面部分が金属とその
表面に形成されたダイヤモンド様被覆とより成ることを
特徴とする記録再生用の耐摩擦性、耐摩耗性摺動部材を
提供する。According to the present invention, there is provided a member for mounting a recording / reproducing medium and a sliding member used in a recording / reproducing apparatus, wherein a surface portion of the sliding member is formed of metal and the surface thereof. And a friction- and wear-resistant sliding member for recording / reproduction characterized by comprising a diamond-like coating.
【0007】[0007]
【発明の実施の形態】本発明の摺動部材は磁気テープカ
セットの磁気テープ案内部材、媒体収納ハーフケース、
リールを固定するためのセンターボス、媒体に接触する
磁気ヘッド面、光ディスク又は磁気ディスク装置のディ
スクを支持する回転ハブ等に適用できる。上記の構成に
よると、記録再生装置に使用する摺動部材は、生産性良
く、安価に低摩擦性及び耐摩耗性の良いダイヤモンド様
膜で被覆することができる。本発明に適するダイヤモン
ド様膜は種々の方法で成膜することが出来るが、好まし
くはイオン化蒸着法が好適に使用できる。すなわち、真
空中に炭化水素原料ガス又は分解又は反応により炭化水
素を生成し得る原料ガスを導入し、これをイオン化さ
せ、これを摺動部材の表面部分中基体となる金属の面に
導いてそこに析出させてダイヤモンド様薄膜を形成させ
る方法により、摺動部材を構成出来る。この方法は低温
度で実施でき、且つ結晶性の良い膜を生成できる点及び
量産がしやすい点で、他の方法よりも好ましい。DESCRIPTION OF THE PREFERRED EMBODIMENTS The sliding member of the present invention is a magnetic tape guide member of a magnetic tape cassette, a medium storage half case,
The present invention can be applied to a center boss for fixing a reel, a magnetic head surface in contact with a medium, a rotating hub for supporting an optical disk or a disk of a magnetic disk device, and the like. According to the above configuration, the sliding member used in the recording / reproducing apparatus can be coated with a diamond-like film having good productivity and low friction and wear resistance at low cost. The diamond-like film suitable for the present invention can be formed by various methods, but preferably, an ionization vapor deposition method can be suitably used. That is, a hydrocarbon raw material gas or a raw material gas capable of generating hydrocarbons by decomposition or reaction is introduced into a vacuum, ionized, and led to a metal surface serving as a substrate in the surface portion of the sliding member. A sliding member can be formed by a method of forming a diamond-like thin film by depositing on a diamond. This method is preferable to other methods because it can be carried out at a low temperature, can form a film with good crystallinity, and can be easily mass-produced.
【0008】上に簡単に述べたように、本発明は記録再
生装置用の摺動部材の表面にダイヤモンド様膜を形成す
ることを特徴とする。成膜方法は特にイオン化蒸着法に
よるダイヤモンド様膜生成法が好適である。イオン化蒸
着法は炭化水素原料ガス又は分解又は反応により炭化水
素を生成し得る原料ガス(ここに炭化水素とはメタン、
エタン、プロパン等の飽和炭化水素、エチレン、プロピ
レン、アセチレン等の不飽和炭化水素等があり、分解し
て炭化水素を生成し得る原料ガスはメチルアルコール、
エチルアルコール等のアルコール類、アセトン、メチル
エチルケトン等のケトン類などがあり、又反応して炭化
水素ガスを生成する原料ガスには一酸化炭素、二酸化炭
素と水素との混合ガス等がある。また前記原料にはヘリ
ウム、ネオン、アルゴン等の希ガスあるいは水素、酸
素、窒素、水、一酸化炭素、二酸化炭素、等の少なくと
も一種を含ませることができる)を陰極−対陰極間のア
ーク放電、陰極熱フィラメント−対陰極間の熱電子放出
によるイオン化等の手段でイオン化してイオン流とし、
この流れを電場で加速して基板に差し向けることにより
ダイヤモンド様薄膜を製膜する方法であり、特開昭58
−174507号、特願昭63−59376号、同63
−59377号等に記載されている通り、イオン化蒸着
法は基体温度として従来のような700℃以上の高温度
を用いる必要がなく(例えば「表面化学」第5巻第10
8号(1984年)第108−115頁の各種の方法参
照)、製膜能率も良く、製膜されたダイヤモンド様膜が
良好な表面性、高硬度、高熱伝導性、高屈折率を有し、
仕上表面処理が不要である等、優れた方法である。As briefly described above, the present invention is characterized in that a diamond-like film is formed on the surface of a sliding member for a recording / reproducing device. As a film forming method, a diamond-like film forming method by ionization vapor deposition is particularly preferable. The ionization vapor deposition method is a hydrocarbon raw material gas or a raw material gas capable of generating hydrocarbon by decomposition or reaction (here, hydrocarbon is methane,
There are saturated hydrocarbons such as ethane and propane, and unsaturated hydrocarbons such as ethylene, propylene and acetylene.The raw material gas which can be decomposed to produce hydrocarbons is methyl alcohol,
There are alcohols such as ethyl alcohol, ketones such as acetone and methyl ethyl ketone, and the like. The raw material gas which reacts to produce a hydrocarbon gas includes carbon monoxide and a mixed gas of carbon dioxide and hydrogen. The raw material may contain a rare gas such as helium, neon, or argon, or at least one of hydrogen, oxygen, nitrogen, water, carbon monoxide, carbon dioxide, and the like). , Ionization by means such as ionization due to thermionic emission between the cathode hot filament and the negative electrode, to form an ion current,
In this method, a diamond-like thin film is formed by accelerating this flow in an electric field and directing it to a substrate.
No. 174507, Japanese Patent Application No. 63-59376, 63
As described in JP-A-59377, it is not necessary to use a high temperature of 700 ° C. or more as a conventional substrate temperature in the ionization vapor deposition method (for example, “Surface Chemistry” Vol. 5, No. 10).
No. 8 (1984) pp. 108-115), the film forming efficiency is good, and the formed diamond-like film has good surface properties, high hardness, high thermal conductivity, and high refractive index. ,
This is an excellent method, such as not requiring a finishing surface treatment.
【0009】なおイオンビームを固定し基板を移動する
か、逆に基板を固定しイオン化された炭化水素のプラズ
マ状のイオンビームを元の方向に対してほぼ直角な方向
に偏向走査することにより広い基板に対してダイヤモン
ド様薄膜の成膜を実施できる。このような偏向磁界は、
イオン流の加速方向にたいして交差する方向の磁界を生
じる永久磁石又は電磁石を用いることにより形成するこ
とができる。本発明の基本技術であるイオン化蒸着法
は、特願昭63−59377号及び同63−59376
号等に記載されており、本発明の実施例ではこれらに記
載された装置を基本とした方法及び装置を用いる。It is to be noted that the ion beam is fixed and the substrate is moved, or conversely, the substrate is fixed and the ionized hydrocarbon plasma ion beam is deflected and scanned in a direction substantially perpendicular to the original direction. A diamond-like thin film can be formed on a substrate. Such a deflection magnetic field is
It can be formed by using a permanent magnet or an electromagnet that generates a magnetic field in a direction crossing the acceleration direction of the ion flow. The ionization deposition method, which is a basic technique of the present invention, is disclosed in Japanese Patent Application Nos. 63-59377 and 63-59376.
In the embodiments of the present invention, a method and an apparatus based on the apparatus described therein are used.
【0010】製膜装置の概要 図3に製膜装置の好ましい例を示す。図中30は真空容
器、31はチャンバーであり、排気系38に接続されて
10-6Torr程度までの高真空に引かれる。32は適
当な駆動手段により一定方向に送られる基板Sの裏面に
設けられた電極であり、この場合電圧Vaが与えられて
いる。33はグリッドでイオンの加速を行なうのに使用
される。34は熱陰極フィラメントであり、交流電源I
fによって加熱されて熱電子を発生し、また負電位に維
持されている。35は原料である炭化水素ガスの供給口
である。また、フィラメント34を取囲んで対電極36
が配置され、フィラメントとの間に電圧Vdを与える。
フィラメント34、対電極36及び供給口35の周りを
取り囲んでイオン化ガスの閉じ込め用の磁界を発生する
電磁コイル39が配置されている。従ってVd、Va及
びコイルの電流を調整することにより膜質を変えること
ができる。なお図3においては、炭化水素ガスの原料導
入通路37にプラズマ励起室36が設けられており、こ
れによりイオン化装置の効率を高めている。プラズマ励
起は例えばマイクロ波、高周波(RF波)、放射線、紫
外線などが利用できる。また、図4に示したように図3
の構成の一部を変更して固定又は可変強度の磁石40を
フィラメント34の上部に配置してプラズマ状のイオン
ビームの偏向用に用いても良い。磁石40の磁界強度は
固定又は可変にし、磁石の磁界はイオン流の走行方向に
たいして交差する方向にする。このようにしてCH3 +、
CH4 +イオン等の所望するイオンに対して偏向角度θ
を得る。固定の場合一方、質量がこれらのイオンと大き
く異なるイオン例えば水素イオンはさらに大きく曲げら
れ、また中性粒子や重質の多量体イオンは直進する。従
って、直進方向にマスクを配置すれば結晶性の高いイオ
ンのみが基板Sに付着する。[0010] Preferred examples of the film formation apparatus Overview Figure 3 of film forming apparatus. In the figure, reference numeral 30 denotes a vacuum vessel, and 31 denotes a chamber, which is connected to an exhaust system 38 and is evacuated to a high vacuum of about 10 -6 Torr. Reference numeral 32 denotes an electrode provided on the back surface of the substrate S which is sent in a certain direction by a suitable driving means, and is supplied with a voltage Va in this case. Reference numeral 33 is used to accelerate ions in the grid. Reference numeral 34 denotes a hot cathode filament,
Heated by f generates thermoelectrons and is maintained at a negative potential. Reference numeral 35 denotes a supply port for a hydrocarbon gas as a raw material. A counter electrode 36 surrounds the filament 34.
Are provided, and a voltage Vd is applied to the filament.
An electromagnetic coil 39 for generating a magnetic field for confining the ionized gas is arranged so as to surround the filament 34, the counter electrode 36, and the supply port 35. Therefore, the film quality can be changed by adjusting Vd, Va and the current of the coil. In FIG. 3, a plasma excitation chamber 36 is provided in the hydrocarbon gas source introduction passage 37, thereby improving the efficiency of the ionization apparatus. For the plasma excitation, for example, microwave, high frequency (RF wave), radiation, ultraviolet light and the like can be used. Also, as shown in FIG.
By changing a part of the configuration, a fixed or variable strength magnet 40 may be arranged above the filament 34 and used for deflecting a plasma-like ion beam. The magnetic field strength of the magnet 40 is fixed or variable, and the magnetic field of the magnet is in a direction crossing the traveling direction of the ion flow. Thus, CH 3 + ,
Deflection angle θ for desired ions such as CH 4 + ions
Get. On the other hand, in the case of fixation, ions whose masses are significantly different from these ions, for example, hydrogen ions, are further bent, and neutral particles and heavy multimeric ions go straight. Therefore, if the mask is arranged in the straight traveling direction, only ions having high crystallinity adhere to the substrate S.
【0011】製膜方法 図3の装置によって製膜方法を詳しく説明する。先ず、
チャンバー31内を10-6Torrまで高真空とし、ガ
ス供給通路37のバルブを操作して所定流量のメタンガ
ス、それと水素との混合ガス、或いはそれとAr、H
e、Ne等のキャリアガス等を各供給口35から導入し
ながら排気系38を調整して所定のガス圧例えば10-1
Torrとする。一方、複数の熱陰極フイラメント34
には交流電流Ifを流して加熱し、フイラメント34と
対陰極36の間には電位差Vdを印加して放電を形成す
る。供給口35から供給されたメタンガスは熱分解され
るとともにフィラメントからの熱電子と衝突してプラス
のイオンと電子を生じる。この電子は別の熱分解粒子と
衝突する。電磁コイルの磁界による閉じ込め作用の下
に、このような現象を繰り返すことによりメタンガスは
熱分解物質のプラスイオンと成る。[0011] manufactured will be described in detail film forming method by a membrane method Figure 3 apparatus. First,
The inside of the chamber 31 is set to a high vacuum of 10 -6 Torr, and a valve of the gas supply passage 37 is operated to operate a predetermined flow rate of methane gas, a mixed gas of hydrogen and hydrogen, or a mixed gas of Ar and H
The evacuation system 38 is adjusted while introducing a carrier gas such as e, Ne or the like from each supply port 35 to a predetermined gas pressure, for example, 10 -1.
Torr. On the other hand, a plurality of hot cathode filaments 34
Is heated by passing an alternating current If, and a potential difference Vd is applied between the filament 34 and the counter electrode 36 to form a discharge. The methane gas supplied from the supply port 35 is thermally decomposed and collides with thermoelectrons from the filament to generate positive ions and electrons. This electron collides with another pyrolysis particle. By repeating such a phenomenon under the confinement effect of the magnetic field of the electromagnetic coil, methane gas becomes a positive ion of a pyrolysis substance.
【0012】プラスイオンは電極32、グリッド36に
印加された負電位Vaにより引き寄せられ、ゆっくりと
移動している基体Sの方へ向けて加速され、基板に衝突
して製膜反応を行ない、ダイヤモンド様薄膜を形成す
る。所望により、上に述べた固定磁石を利用して更に品
質の良い薄膜を得ることができる。なお、各部の電位、
電流、温度等の条件については先に引用した特許出願や
特許公報のほか公知の資料を参照されたい。形成する膜
の厚さは好ましくは100 〜10,000Åであり、厚さが上記
の範囲よりも薄いと耐摩耗性が減じ又厚すぎても効果が
増大せず製造時間が長くなる。また、予め有機溶剤によ
る超音波洗浄等によりダイヤモンド様膜を形成する基体
を清浄化しても良い。The positive ions are attracted by the negative potential Va applied to the electrode 32 and the grid 36, accelerated toward the slowly moving substrate S, collide with the substrate and perform a film forming reaction, and A thin film is formed. If desired, a higher quality thin film can be obtained using the fixed magnet described above. In addition, the potential of each part,
For the conditions such as current and temperature, refer to the above-cited patent applications and patent publications as well as known materials. The thickness of the film to be formed is preferably 100 to 10,000 °. If the thickness is smaller than the above range, the abrasion resistance is reduced, and if the thickness is too large, the effect is not increased and the production time is increased. Further, the substrate on which the diamond-like film is formed may be cleaned in advance by ultrasonic cleaning with an organic solvent or the like.
【0013】[0013]
【実施例】次に本発明の実施例を説明する。実施例1(テープガイド) 図1に示したテープガイドを製作した。先ずテープガイ
ドの基体Sとしてステンレス鋼により直径3mmの円筒
体を製作し、この基体を図3に示し上に説明した製膜装
置に装入し、真空容器10内を10-6Torrに排気し
てからメタンガスを導入しガス圧を10-1Torrとし
て熱陰極フィラメントに放電を起こさせた。電磁コイル
19の磁束密度は400ガウス、基板電圧−300V、
基板温度200℃とした。またフィラメント14には電
流25Aを流した。フィラメントはコイル状としその幅
3mm、その周りを取り囲む電極との隙間8mmとし、
送り速度40mm/hrとした。If=175A、Va
=30V、Vd=−30Vの条件で、膜厚0.8μmの
ダイヤモンド様膜を有するテープガイドを得た。Next, embodiments of the present invention will be described. Example 1 (tape guide) The tape guide shown in FIG. 1 was manufactured. First, a cylindrical body having a diameter of 3 mm was made of stainless steel as a base S of the tape guide, and this base was loaded into the film forming apparatus shown in FIG. 3 and described above, and the inside of the vacuum vessel 10 was evacuated to 10 -6 Torr. After that, methane gas was introduced and the gas pressure was set to 10 -1 Torr to cause discharge in the hot cathode filament. The magnetic flux density of the electromagnetic coil 19 is 400 Gauss, the substrate voltage is -300 V,
The substrate temperature was 200 ° C. A current of 25 A was passed through the filament 14. The filament is coil-shaped and has a width of 3 mm and a gap of 8 mm between the electrodes surrounding the filament,
The feed speed was 40 mm / hr. If = 175A, Va
= 30 V, Vd = -30 V, a tape guide having a diamond-like film having a thickness of 0.8 µm was obtained.
【0014】上記のテープガイドのトルク、ドロップア
ウト、ビッカース硬度を測定したところ表1の通りであ
った。ただしビッカース硬度は加重10gでマイクロビ
ッカース計で測定した。トルク及びドロップアウトの測
定は次の方法により行なった。 1)トルクの測定 VHSテープで、高速で走行させ徐々に走行を低下させ
て、走行に必要な最低のトルクをトルクメーターにて測
定した。 2)ドロップアウトの測定 VHSテープで実機にて録画6分、再生5分を実施し、
接続されたD.O.測定機で、幅15μsec、深さ1
6dB以上のD.O.信号を測定し、1分当りの平均で
個数として表わした。The torque, dropout, and Vickers hardness of the above tape guide were measured. However, the Vickers hardness was measured with a micro Vickers meter with a weight of 10 g. The measurement of torque and dropout was performed by the following method. 1) Measurement of torque The VHS tape was used to run at a high speed and the running was gradually reduced, and the minimum torque required for running was measured with a torque meter. 2) Measurement of dropout Recorded 6 minutes and played back 5 minutes on a real machine using VHS tape.
Connected D. O. Using a measuring machine, width 15μsec, depth 1
D. 6 dB or more. O. The signals were measured and expressed as numbers on average per minute.
【0015】[0015]
【表1】 [Table 1]
【0016】実施例2(ディスクハブ) 図3に示した装置を使用し図2に示したディスクハブを
製作した。先ずディスクハブの形の基体をステンレス鋼
から製作し、この基体を図3に示し上に説明した製膜装
置に装入し、実施例1と同一の条件で基体の表面にダイ
ヤモンド様薄膜を製膜した約0.5μmの膜厚に成るま
で行なった。諸特性の測定結果を表2に示す。なお、チ
ャッキングトルクはディスク駆動ピンとの摺動時に摩擦
によって生じるトルクで1万回着脱試験を行なった後の
値を示す。振れ幅はチャッキングトルクの振れ幅であ
る。表面傷深さは1万回着脱試験を行なった後の値を示
す。ビッカース硬度は加重10gで測定した。 Example 2 (disk hub) The disk hub shown in FIG. 2 was manufactured using the apparatus shown in FIG. First, a substrate in the form of a disk hub was made of stainless steel, and this substrate was loaded into the film forming apparatus shown in FIG. 3 and described above, and a diamond-like thin film was formed on the surface of the substrate under the same conditions as in Example 1. The process was performed until a film thickness of about 0.5 μm was formed. Table 2 shows the measurement results of various characteristics. Note that the chucking torque is a value after performing a detachment test 10,000 times with a torque generated by friction when sliding with a disk drive pin. The swing width is the swing width of the chucking torque. The surface scratch depth indicates a value after 10,000 times of the detachment test. Vickers hardness was measured at a weight of 10 g.
【0017】[0017]
【表2】 [Table 2]
【0018】[0018]
【発明の効果】本発明の摺動部材は磁気テープカセット
の磁気テープ案内部材、接触する磁気ヘッド面、光ディ
スク又は磁気ディスク装置のディスクを支持する回転ハ
ブ等に適用したとき、摺動部材は、生産性良く、安価に
耐摩擦性及び耐摩耗性の良いダイヤモンド様膜で被覆す
ることができる。When the sliding member of the present invention is applied to a magnetic tape guide member of a magnetic tape cassette, a contacting magnetic head surface, a rotating hub for supporting an optical disk or a disk of a magnetic disk device, the sliding member is: It can be coated with a diamond-like film with good friction resistance and abrasion resistance with good productivity and low cost.
【図1】従来のテープガイドを具備した磁気テープカセ
ットの分解斜視図である。FIG. 1 is an exploded perspective view of a magnetic tape cassette provided with a conventional tape guide.
【図2】従来のディスクハブを備えた磁気ディスクケー
スの分解斜視図である。FIG. 2 is an exploded perspective view of a magnetic disk case provided with a conventional disk hub.
【図3】本発明のダイヤモンド様薄膜の製造装置の一例
を示す断面図である。FIG. 3 is a cross-sectional view showing an example of the apparatus for producing a diamond-like thin film of the present invention.
【図4】ダイヤモンド様薄膜の製造装置の他の例を示す
断面図である。FIG. 4 is a cross-sectional view showing another example of the apparatus for producing a diamond-like thin film.
1 上ハーフ 2 下ハーフ 3 ガイドピン 4 支持ピン 5 固定テープガイド 6 支持ピン 7 固定テープガイド 8 プラスチックピン 9 ガイドローラ 30 真空容器 31 チャンバー 32 電極 33 グリッド 34 熱陰極フィラメント 36 対電極 37 原料ガス導入通路 38 排気系 39 電磁コイル 40 磁石 DESCRIPTION OF SYMBOLS 1 Upper half 2 Lower half 3 Guide pin 4 Support pin 5 Fixing tape guide 6 Support pin 7 Fixing tape guide 8 Plastic pin 9 Guide roller 30 Vacuum container 31 Chamber 32 Electrode 33 Grid 34 Hot cathode filament 36 Counter electrode 37 Source gas introduction passage 38 Exhaust system 39 Electromagnetic coil 40 Magnet
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成10年9月2日[Submission date] September 2, 1998
【手続補正1】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】0006[Correction target item name] 0006
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【0006】[0006]
【課題を解決するための手段】本発明は、記録再生用媒
体を装着するための部材又は記録再生装置に使用する摺
動部材において、前記摺動部材の該記録再生用媒体と摺
動する表面部分に形成されたダイヤモンド様被覆を設け
たことを特徴とする記録再生用の摺動部材を提供する。
本発明はまた、真空中に炭化水素原料ガス又は分解又は
反応により炭化水素を生成し得る原料ガスを導入し、こ
れを熱及び電界により正にイオン化させてイオンビーム
を形成し、該イオンビームを該記録再生用媒体と摺動す
る表面部分の近傍に設けたグリッドの負電位によって加
速して、該表面部分の基体上に析出させてダイヤモンド
様薄膜を形成させることを特徴とする摺動部材の製造方
法を提供する。低分子量の炭化水素をイオン化して基板
上にダイヤモンド膜を析出することにより磁気ヘッドの
表面を保護することは特開昭60−193112号に記
載されている。しかし同文献には、炭化水素イオン化用
の負の熱フィラメントと、基板近傍に配置された500
Vの電圧を印加したグリッドとにより、炭素イオンは基
板に誘導し、炭化水素不純物イオンはグリッドにより除
去することを記載しており(第2頁右上欄)又生成され
た膜の電子線回折のパターンがダイヤモンドであったと
記載している(第2頁左下欄)ので、本発明の方法で生
成されるダイヤモンド様薄膜とは明らかに異なる。本発
明では炭化水素イオンを使用して成膜することが必須だ
からである。 SUMMARY OF THE INVENTION The present invention provides a sliding member to be used for members or reproducing apparatus for mounting a recording medium, the sliding member of the recording medium in sliding
Provide a diamond-like coating on the moving surface
Providing sliding member for recording and reproduction, characterized in that the.
The present invention also provides a method for producing hydrocarbon feed gas or cracking or
Introduce a source gas that can produce hydrocarbons by the reaction,
Ionized by heat and electric field
And slide the ion beam with the recording / reproducing medium.
Due to the negative potential of the grid provided near the surface
To be deposited on the surface portion of the substrate,
For producing a sliding member characterized by forming a thin film
Provide the law. Substrate by ionizing low molecular weight hydrocarbons
By depositing a diamond film on the
The protection of the surface is described in JP-A-60-193112.
It is listed. However, the document does not mention hydrocarbon ionization.
A negative hot filament and 500 placed near the substrate.
By the grid to which the voltage of V is applied, carbon ions are
To the plate and remove hydrocarbon impurity ions by the grid.
(Page 2, upper right column)
The electron diffraction pattern of the film was diamond.
Described (lower left column of page 2).
It is distinctly different from the diamond-like thin film formed. Departure
In Ming, it is essential to form films using hydrocarbon ions
Because.
フロントページの続き (72)発明者 中山 正俊 東京都中央区日本橋1丁目13番1号ティー ディーケイ株式会社内 (72)発明者 柴原 正典 東京都中央区日本橋1丁目13番1号ティー ディーケイ株式会社内Continuation of the front page (72) Inventor Masatoshi Nakayama 1-13-1 Nihonbashi, Chuo-ku, Tokyo TDK Corporation (72) Inventor Masanori Shibahara 1-13-1 Nihonbashi, Chuo-ku, Tokyo Inside TDK Corporation
Claims (4)
は記録再生装置に使用する摺動部材において、前記摺動
部材の該記録再生用媒体と摺動する表面部分に形成され
たダイヤモンド様被覆を設けたことを特徴とする記録再
生用の摺動部材。1. A diamond-like coating formed on a surface for sliding a recording / reproducing medium on a member for mounting a recording / reproducing medium or a sliding member used for a recording / reproducing apparatus. A recording / reproducing sliding member comprising:
磁気テープカセットであり、摺動部材が磁気テープ案内
部材である請求項1記載の記録再生用の摺動部材。2. The recording / reproducing sliding member according to claim 1, wherein the member for mounting the recording / reproducing medium is a magnetic tape cassette, and the sliding member is a magnetic tape guiding member.
り、摺動部材が磁気記録媒体と接触する磁気ヘッドの表
面部である請求項1記載の記録再生用の摺動部材。3. The sliding member for recording / reproducing according to claim 1, wherein the recording / reproducing device is a magnetic recording / reproducing device, and the sliding member is a surface portion of a magnetic head in contact with the magnetic recording medium.
反応により炭化水素を生成し得る原料ガスを導入し、こ
れを熱及び電界により正にイオン化させて負電位によっ
て加速して、該表面部分の基体上に析出させてダイヤモ
ンド様薄膜を形成させることを特徴とする請求項1記載
の摺動部材の製造方法。4. A hydrocarbon raw material gas or a raw material gas capable of generating hydrocarbons by decomposition or reaction is introduced into a vacuum, and this is ionized positively by heat and an electric field, accelerated by a negative potential, and accelerated by a negative potential. 2. The method for manufacturing a sliding member according to claim 1, wherein the diamond-like thin film is formed by depositing on the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10236602A JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1145310A JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
JP10236602A JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1145310A Division JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11134838A true JPH11134838A (en) | 1999-05-21 |
Family
ID=15382198
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1145310A Expired - Fee Related JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
JP10236602A Pending JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1145310A Expired - Fee Related JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
Country Status (1)
Country | Link |
---|---|
JP (2) | JP2915001B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8488274B2 (en) | 2003-04-09 | 2013-07-16 | Nitto Denko Corporation | Sliding member for recording media |
JP2015053208A (en) * | 2013-09-09 | 2015-03-19 | 日新イオン機器株式会社 | Ion source |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR940022385A (en) * | 1993-03-31 | 1994-10-20 | 배순훈 | Head drum coating method of video cassette recorder and head drum coated by this method |
JPH08171712A (en) * | 1994-08-26 | 1996-07-02 | Aiwa Co Ltd | Side face exposure type thin-film magnetic head and its production |
-
1989
- 1989-06-09 JP JP1145310A patent/JP2915001B2/en not_active Expired - Fee Related
-
1998
- 1998-08-10 JP JP10236602A patent/JPH11134838A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8488274B2 (en) | 2003-04-09 | 2013-07-16 | Nitto Denko Corporation | Sliding member for recording media |
JP2015053208A (en) * | 2013-09-09 | 2015-03-19 | 日新イオン機器株式会社 | Ion source |
Also Published As
Publication number | Publication date |
---|---|
JP2915001B2 (en) | 1999-07-05 |
JPH0312886A (en) | 1991-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19991221 |