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JPH11121519A - Device and method for mounting conductive ball - Google Patents

Device and method for mounting conductive ball

Info

Publication number
JPH11121519A
JPH11121519A JP28172897A JP28172897A JPH11121519A JP H11121519 A JPH11121519 A JP H11121519A JP 28172897 A JP28172897 A JP 28172897A JP 28172897 A JP28172897 A JP 28172897A JP H11121519 A JPH11121519 A JP H11121519A
Authority
JP
Japan
Prior art keywords
conductive ball
substrate
mounting
work
sealing body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28172897A
Other languages
Japanese (ja)
Other versions
JP3351314B2 (en
Inventor
Toshihiro Matsuki
敏浩 松木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP28172897A priority Critical patent/JP3351314B2/en
Publication of JPH11121519A publication Critical patent/JPH11121519A/en
Application granted granted Critical
Publication of JP3351314B2 publication Critical patent/JP3351314B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/303Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3478Applying solder preforms; Transferring prefabricated solder patterns

Landscapes

  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a device and method for mounting a conductive ball which can be mounted correctly on a substrate of a work, in which chips mounted on the substrate are encapsulated by a resin-encapsulating body. SOLUTION: A resin-encapsulating body 4 formed on a lower face of a substrate 2 is engaged with a recess 23 of a receiving pedestal 22. An elastic material 24 is coated in the recess 23. A mounting head 30 which is vacuum-sucked with a conductive ball 5 is dropped, and a projection 32 is made to land on the substrate. Then, the resin-encapsulating body 4 is engaged firmly with the recess part 23, and a position of the substrate 2 is fixed and becomes completely leveled. Then, a vacuum-sucked state of the conductive ball 5 is cancelled, the conductive ball 5 is mounted on the substrate 2, and the mounting head 30 is lifted.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、基板に搭載された
チップを樹脂封止体で封止して成るワークに導電性ボー
ルを搭載する導電性ボールの搭載装置および搭載方法に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive ball mounting apparatus and method for mounting conductive balls on a work formed by sealing a chip mounted on a substrate with a resin sealing body.

【0002】[0002]

【従来の技術】電子部品にバンプ(突出電極)を形成す
る方法として、半田ボールなどの導電性ボールを用いる
方法が知られている。この方法は、導電性ボールの供給
部に備えられた導電性ボールを搭載ヘッドの下面に真空
吸着してピックアップして電子部品に搭載するものであ
り、多数個の導電性ボールを一括して電子部品に搭載で
きるので生産性が良いという長所を有している。
2. Description of the Related Art As a method for forming bumps (protruding electrodes) on an electronic component, a method using a conductive ball such as a solder ball is known. In this method, a conductive ball provided in a conductive ball supply unit is vacuum-adsorbed to a lower surface of a mounting head, picked up, and mounted on an electronic component. It has the advantage of high productivity because it can be mounted on components.

【0003】[0003]

【発明が解決しようとする課題】導電性ボールは電子部
品の所定の位置に位置ずれなく搭載する必要があり、こ
のため電子部品は位置決め部に正しく位置決めしておく
必要がある。ところで近年、電子部品として、合成樹脂
フィルムなどから成る基板上にチップを搭載し、このチ
ップを樹脂封止体で封止して成るワークが提案されてい
る。このようなワーク(電子部品)は、樹脂封止体を下
側にし、上側の基板上に導電性ボールを搭載するが、樹
脂封止体は形状や大きさのばらつきが大きいのでワーク
を所定の位置に正しく位置決めしにくく、特に基板が水
平とならずに傾斜しやすいことから、導電性ボールの搭
載位置精度に狂いを生じやすいものであった。
The conductive ball must be mounted at a predetermined position on the electronic component without displacement, and therefore, the electronic component must be correctly positioned at the positioning portion. Meanwhile, in recent years, a work has been proposed in which a chip is mounted on a substrate made of a synthetic resin film or the like and the chip is sealed with a resin sealing body as an electronic component. In such a work (electronic component), the resin-sealed body is placed on the lower side, and conductive balls are mounted on the upper substrate. Since it is difficult to position the conductive balls correctly, and in particular, the substrate is liable to be inclined without being horizontal, the mounting position accuracy of the conductive balls tends to be deviated.

【0004】したがって本発明は、基板に搭載されたチ
ップを樹脂封止体で封止して成るワークの基板上に導電
性ボールを正しく搭載できる導電性ボールの搭載装置お
よび搭載方法を提供することを目的とする。
Accordingly, the present invention provides a conductive ball mounting apparatus and a mounting method capable of correctly mounting conductive balls on a work substrate formed by sealing a chip mounted on a substrate with a resin sealing body. With the goal.

【0005】[0005]

【課題を解決するための手段】本発明は、基板に搭載さ
れたチップを樹脂封止体で封止して成るワークに導電性
ボールを搭載する導電性ボールの搭載装置であって、導
電性ボールの供給部と、ワークの位置決め部と、導電性
ボールの供給部に備えられた導電性ボールを下面に真空
吸着してピックアップして位置決め部に位置決めされた
ワークの基板上に搭載する搭載ヘッドとを備え、前記位
置決め部が前記樹脂封止体を下方から支持する凹部を有
する受台を備え、かつこの凹部を弾性材にて形成し、ま
た前記搭載ヘッドが前記基板に着地して前記樹脂封止体
を前記凹部に押しつける複数個の突起を有する。
SUMMARY OF THE INVENTION The present invention relates to a conductive ball mounting apparatus for mounting conductive balls on a work formed by sealing a chip mounted on a substrate with a resin sealing body. A mounting head that supplies a ball supply section, a work positioning section, and a conductive ball provided in the conductive ball supply section by vacuum suction to a lower surface, picks up the picked-up ball, and mounts the conductive ball on the work board positioned at the positioning section. The positioning portion includes a receiving table having a concave portion for supporting the resin sealing body from below, and the concave portion is formed of an elastic material, and the mounting head lands on the substrate and the resin It has a plurality of projections for pressing the sealing body against the recess.

【0006】また好ましくは、前記受台が、前記凹部の
表面に弾性材を装着して成る。また本発明の導電性ボー
ルの搭載方法は、導電性ボールの供給部に備えられた導
電性ボールを搭載ヘッドの下面に真空吸着してピックア
ップする工程と、搭載ヘッドを位置決め部に位置決めさ
れたワークの上方へ相対的に移動させる工程と、搭載ヘ
ッドを下降させて搭載ヘッドの下面に突設された複数個
の突起を基板の上面に着地させ、樹脂封止体をこれを下
方から支持する弾性材から成る凹部に押しつけたうえ
で、導電性ボールを基板の上面に搭載する工程と、を含
む。
Preferably, the pedestal is formed by mounting an elastic material on the surface of the recess. The method of mounting a conductive ball according to the present invention includes a step of vacuum-adsorbing and picking up a conductive ball provided on a conductive ball supply unit on a lower surface of a mounting head, and a step of positioning the mounting head on a positioning unit. Moving the mounting head downward and landing a plurality of projections protruding from the lower surface of the mounting head on the upper surface of the substrate, and supporting the resin sealing body from below. Mounting the conductive ball on the upper surface of the substrate after pressing the conductive ball against the concave portion made of the material.

【0007】上記構成の各発明によれば、搭載ヘッドを
下降させて突起を基板に押しつけることにより、樹脂封
止体を凹部に押しつけてワークを所定の位置に位置決め
するとともに基板を水平な姿勢とし、導電性ボールを正
しく搭載できる。この場合、凹部を弾性材で形成するこ
とにより、樹脂封止体の形状や大きさのばらつきを吸収
し、基板をより確実に水平な姿勢にして導電性ボールを
搭載することができる。
According to each of the above constructions, by lowering the mounting head and pressing the protrusion against the substrate, the resin sealing body is pressed against the concave portion to position the work at a predetermined position and to place the substrate in a horizontal posture. The conductive balls can be mounted correctly. In this case, by forming the concave portion with an elastic material, variations in the shape and size of the resin sealing body can be absorbed, and the conductive ball can be mounted more reliably in a horizontal posture.

【0008】[0008]

【発明の実施の形態】以下、本発明の一実施の形態を図
面を参照して説明する。図1は本発明の一実施の形態の
導電性ボールの搭載装置の正面図、図2は同ワークの半
完成品の斜視図、図3は同導電性ボールの搭載装置に備
えられたワークの位置決め用受台の斜視図、図4は同導
電性ボールの搭載装置の搭載ヘッドの上下反転斜視図、
図5は同導電性ボールの搭載方法の説明図、図6は同ワ
ークの完成品の断面図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. 1 is a front view of a conductive ball mounting apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view of a semi-finished product of the work, and FIG. 3 is a view of a work provided in the conductive ball mounting apparatus. FIG. 4 is a perspective view of a positioning pedestal, FIG. 4 is a vertically inverted perspective view of a mounting head of the conductive ball mounting apparatus,
FIG. 5 is an explanatory view of a method of mounting the conductive balls, and FIG. 6 is a sectional view of a completed product of the work.

【0009】この導電性ボールの搭載装置を説明する前
に、まずこの導電性ボールの搭載装置を用いて製造され
たワーク1の完成品の構造を図6を参照して説明する。
2は基板であり、合成樹脂フィルムなどから成ってい
る。基板2の表面にはチップ3が搭載されており、チッ
プ3は樹脂封止体4で封止されている。5aは基板2の
表面に形成されたバンプであり、チップ3の表面のパッ
ドとワイヤ6で電気的に接続されている。この導電性ボ
ールの搭載装置は、このバンプ5aを形成するための導
電性ボールを基板2の孔部7上に搭載するものである。
Before describing the conductive ball mounting apparatus, the structure of a completed work 1 manufactured using the conductive ball mounting apparatus will be described with reference to FIG.
Reference numeral 2 denotes a substrate, which is made of a synthetic resin film or the like. A chip 3 is mounted on the surface of the substrate 2, and the chip 3 is sealed with a resin sealing body 4. Reference numeral 5 a denotes a bump formed on the surface of the substrate 2, and is electrically connected to a pad on the surface of the chip 3 via a wire 6. The conductive ball mounting apparatus mounts the conductive balls for forming the bumps 5 a on the holes 7 of the substrate 2.

【0010】次に、導電性ボールの搭載装置について説
明する。図1において、10は導電性ボールの供給部で
ある。導電性ボールの供給部10は、台部11上に導電
性ボール5を収納した容器12を載置して構成されてい
る。
Next, a device for mounting a conductive ball will be described. In FIG. 1, reference numeral 10 denotes a conductive ball supply unit. The conductive ball supply unit 10 is configured by placing a container 12 containing the conductive balls 5 on a base 11.

【0011】20はワークの位置決め部である。ワーク
の位置決め部20は、可動テーブル21上にワーク1の
受台22を載置して構成されている。図2は、受台22
に供給されるワーク1の半完成品の斜視図を示してい
る。基板2は長尺のフィルム状であり、その下面に図6
に示すチップ3やワイヤ6を封止する樹脂封止体4が形
成されている。樹脂封止体4はポッティングで形成され
たものであり、その形状や大きさはばらついている。基
板2には孔部7がマトリクス状に多数開孔されており、
孔部7上に導電性ボール5が搭載される。8は基板2を
受台22にピッチ送りするためのピン孔である。この基
板2は、後工程において、破線aに沿って切断され、図
6に示すワーク1が完成する。
Reference numeral 20 denotes a work positioning portion. The work positioning unit 20 is configured by placing a receiving table 22 of the work 1 on a movable table 21. FIG.
FIG. 1 shows a perspective view of a semi-finished product of a work 1 supplied to the work. The substrate 2 is in the form of a long film and has a lower surface as shown in FIG.
The resin sealing body 4 for sealing the chip 3 and the wire 6 shown in FIG. The resin sealing body 4 is formed by potting, and its shape and size vary. A large number of holes 7 are formed in a matrix in the substrate 2.
The conductive ball 5 is mounted on the hole 7. Reference numeral 8 denotes a pin hole for feeding the substrate 2 to the receiving table 22 at a pitch. This substrate 2 is cut along the broken line a in a later step, and the work 1 shown in FIG. 6 is completed.

【0012】図3において、受台22の上面には凹部2
3が形成されており、凹部23の表面にはシート状の弾
性材24が装着されている(図5(a)も参照)。この
弾性材24はゴムや軟質樹脂であり、コーティング手段
などにより形成される。この凹部23は、樹脂封止体4
を下方から弾性的に支持する。
In FIG. 3, a concave portion 2 is provided on the upper surface of the receiving table 22.
3 is formed, and a sheet-like elastic material 24 is mounted on the surface of the concave portion 23 (see also FIG. 5A). The elastic member 24 is rubber or soft resin, and is formed by a coating means or the like. The recess 23 is formed in the resin sealing body 4
Is elastically supported from below.

【0013】図1において、30は搭載ヘッドである。
図4に示すように搭載ヘッド30の下面には導電性ボー
ル5を真空吸着するための吸着孔31がマトリクス状に
多数開孔されている。これらの吸着孔31は、図2に示
す基板2の孔部7に対応する位置に開孔されている。ま
た搭載ヘッド30の下面にはピン状の突起32が複数個
(本例では下面の隅部に4個)突設されている。これら
の突起32の突出長は厳密に同長となっている。
In FIG. 1, reference numeral 30 denotes a mounting head.
As shown in FIG. 4, on the lower surface of the mounting head 30, a large number of suction holes 31 for vacuum suction of the conductive balls 5 are formed in a matrix. These suction holes 31 are opened at positions corresponding to the holes 7 of the substrate 2 shown in FIG. Further, a plurality of pin-shaped projections 32 (four at the corners of the lower surface in this example) protrude from the lower surface of the mounting head 30. The protrusion lengths of these projections 32 are exactly the same.

【0014】図1において、搭載ヘッド30はチューブ
33を介して真空吸引手段34に接続されており、真空
吸引手段34が作動することにより吸着孔31に導電性
ボール52を真空吸着し、また真空吸着状態を解除す
る。搭載ヘッド30は上下動手段35に保持されてお
り、上下動手段35が駆動することにより上下動作を行
う。上下動手段35は移動テーブル36に装着されてお
り、移動テーブル36に沿って水平方向に移動する。矢
印Aは搭載ヘッド30の移動軌跡を示している。
In FIG. 1, the mounting head 30 is connected to a vacuum suction means 34 via a tube 33. When the vacuum suction means 34 is operated, the conductive balls 52 are vacuum-sucked into the suction holes 31 and the vacuum Release the suction state. The mounting head 30 is held by the vertical movement means 35, and performs vertical movement when the vertical movement means 35 drives. The vertical movement means 35 is mounted on the moving table 36 and moves in the horizontal direction along the moving table 36. Arrow A indicates the movement locus of the mounting head 30.

【0015】この導電性ボールの搭載装置は上記のよう
な構成より成り、次に動作を説明する。図1において、
搭載ヘッド30は容器12に対して上下動作を行い、吸
着孔31に導電性ボール5を真空吸着してピックアップ
する。次に移動テーブル36が駆動することにより搭載
ヘッド30は受台22の上方へ移動する。図5(a)は
このときの状態を示している。基板2の下面の樹脂封止
体4は、受台22の凹部23に嵌合しているが、樹脂封
止体4の形状や大きさはばらついているので、樹脂封止
体4は凹部23に正しく嵌合せず、したがってワーク1
の姿勢も定まっていない。次に搭載ヘッド30は下降
し、突起32は基板2の上面に着地する。図5(b)は
このときの状態を示している。すると基板2は突起32
で押えつけられて樹脂封止体4は凹部23にしっかり嵌
合し、ワーク1は所定の位置に位置決めされるとともに
その姿勢は定まって基板2は完全に水平となる。またこ
の場合、凹部23には弾性材24が装着されているの
で、樹脂封止体4の形状や大きさのばらつきは弾性体2
4に吸収される。また突起32の下端部は導電性ボール
5の下面よりも下方へ突出しており、したがって突起3
2が基板2に着地した状態で、導電性ボール5は基板2
の上面よりもやや浮き上った位置にある。
The conductive ball mounting apparatus has the above-described configuration, and the operation will be described next. In FIG.
The mounting head 30 moves up and down with respect to the container 12 and vacuum-adsorbs and picks up the conductive balls 5 in the suction holes 31. Next, when the moving table 36 is driven, the mounting head 30 moves above the receiving table 22. FIG. 5A shows the state at this time. The resin sealing body 4 on the lower surface of the substrate 2 is fitted into the concave portion 23 of the receiving table 22. However, since the shape and size of the resin sealing body 4 vary, the resin sealing body 4 Does not fit properly, so work 1
The attitude is not fixed. Next, the mounting head 30 descends, and the projection 32 lands on the upper surface of the substrate 2. FIG. 5B shows the state at this time. Then, the substrate 2 becomes the protrusion 32
The resin sealing body 4 is firmly fitted into the concave portion 23, the work 1 is positioned at a predetermined position, the posture thereof is determined, and the substrate 2 is completely horizontal. Further, in this case, since the elastic material 24 is attached to the concave portion 23, the variation in the shape and the size of the resin sealing
Absorbed in 4. Further, the lower end of the projection 32 projects below the lower surface of the conductive ball 5, and therefore the projection 3
In a state in which the conductive balls 5 land on the substrate 2, the conductive balls 5
It is located slightly above the upper surface of the.

【0016】そこで導電性ボール5の真空吸着状態を解
除すれば導電性ボール5は吸着孔31から孔部7に落下
する。次に搭載ヘッド30は上昇し、次の動作のために
容器12の上方へ復帰する。以上により導電性ボール5
の搭載動作は終了する。ワーク1を受台22上をピッチ
送りしながら、上記動作を繰り返すことにより、基板2
上には次々に導電性ボール5が搭載される。
Then, when the vacuum suction state of the conductive balls 5 is released, the conductive balls 5 fall from the suction holes 31 into the holes 7. Next, the mounting head 30 rises and returns above the container 12 for the next operation. Thus, the conductive balls 5
Is completed. By repeating the above operation while feeding the work 1 on the pedestal 22 at a pitch, the substrate 2
The conductive balls 5 are mounted one after another on the top.

【0017】以上のようにして導電性ボール5が搭載さ
れたワーク1は、加熱装置(図示せず)に送られて加熱
される。すると孔部7上の導電性ボール5は溶融固化
し、図6に示すバンプ5aになる。次いで基板2を破線
a(図2)に沿って切断すれば、図6に示すワーク1は
完成する。本発明は上記実施の形態に限定されないので
あって、例えば受台22を弾性材で形成してもよく、こ
のようにすれば弾性材24を凹部23に格別に装着しな
くてもよい。
The work 1 on which the conductive balls 5 are mounted as described above is sent to a heating device (not shown) and heated. Then, the conductive balls 5 on the holes 7 are melted and solidified to form bumps 5a shown in FIG. Next, when the substrate 2 is cut along the broken line a (FIG. 2), the work 1 shown in FIG. 6 is completed. The present invention is not limited to the above embodiment. For example, the pedestal 22 may be formed of an elastic material, and in this case, the elastic material 24 does not need to be specially mounted in the recess 23.

【0018】[0018]

【発明の効果】以上説明したように本発明によれば、搭
載ヘッドを下降させて突起を基板に押しつけることによ
り、樹脂封止体を凹部に押しつけてワークを所定の位置
に位置決めするとともに基板を水平な姿勢とし、導電性
ボールを正しく搭載できる。また凹部に弾性材を装着し
ておくことにより、樹脂封止体の形状や大きさのばらつ
きをより一層吸収し、基板をより確実に水平な姿勢にし
て導電性ボールを搭載することができる。
As described above, according to the present invention, by lowering the mounting head and pressing the projection against the substrate, the resin sealing body is pressed against the concave portion to position the work at a predetermined position and to position the substrate. It can be placed horizontally and the conductive balls can be mounted correctly. In addition, by mounting the elastic material in the concave portion, variations in the shape and size of the resin sealing body can be further absorbed, and the conductive ball can be mounted in a more secure horizontal posture.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態の導電性ボールの搭載装
置の正面図
FIG. 1 is a front view of a conductive ball mounting apparatus according to an embodiment of the present invention.

【図2】本発明の一実施の形態のワークの半完成品の斜
視図
FIG. 2 is a perspective view of a semi-finished product of a work according to an embodiment of the present invention.

【図3】本発明の一実施の形態の導電性ボールの搭載装
置に備えられたワークの位置決め用受台の斜視図
FIG. 3 is a perspective view of a work positioning pedestal provided in the conductive ball mounting apparatus according to one embodiment of the present invention;

【図4】本発明の一実施の形態の導電性ボールの搭載装
置の搭載ヘッドの上下反転斜視図
FIG. 4 is an upside down perspective view of a mounting head of the conductive ball mounting apparatus according to one embodiment of the present invention;

【図5】本発明の一実施の形態の導電性ボールの搭載方
法の説明図
FIG. 5 is an explanatory diagram of a method for mounting a conductive ball according to an embodiment of the present invention.

【図6】本発明の一実施の形態のワークの完成品の断面
FIG. 6 is a sectional view of a finished product of a work according to the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 ワーク 2 基板 3 チップ 4 樹脂封止体 5 導電性ボール 5a バンプ 7 孔部 10 導電性ボールの供給部 20 ワークの位置決め部 22 受台 23 凹部 24 弾性材 30 搭載ヘッド 31 吸着孔 32 突起 36 移動テーブル DESCRIPTION OF SYMBOLS 1 Work 2 Substrate 3 Chip 4 Resin sealing body 5 Conductive ball 5a Bump 7 Hole 10 Conductive ball supply part 20 Work positioning part 22 Receiving stand 23 Depression 24 Elastic material 30 Mounting head 31 Suction hole 32 Protrusion 36 Movement table

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】基板に搭載されたチップを樹脂封止体で封
止して成るワークに導電性ボールを搭載する導電性ボー
ルの搭載装置であって、導電性ボールの供給部と、ワー
クの位置決め部と、導電性ボールの供給部に備えられた
導電性ボールを下面に真空吸着してピックアップして位
置決め部に位置決めされたワークの基板上に搭載する搭
載ヘッドとを備え、前記位置決め部が、前記樹脂封止体
を下方から支持する凹部を有する受台を備え、かつこの
凹部を弾性材にて形成し、また前記搭載ヘッドが前記基
板に着地して前記樹脂封止体を前記凹部に押しつける複
数個の突起を有することを特徴とする導電性ボールの搭
載装置。
A conductive ball mounting apparatus for mounting a conductive ball on a work formed by sealing a chip mounted on a substrate with a resin sealing body, comprising: a conductive ball supply unit; A positioning unit, and a mounting head for vacuum-adsorbing and picking up the conductive ball provided on the conductive ball supply unit on the lower surface and mounting the picked-up ball on the substrate of the work positioned in the positioning unit, wherein the positioning unit includes: A pedestal having a concave portion for supporting the resin sealing body from below, and forming the concave portion with an elastic material, and the mounting head lands on the substrate to place the resin sealing body in the concave portion. A mounting device for a conductive ball, comprising a plurality of projections for pressing.
【請求項2】前記受台が、前記凹部の表面に弾性材を装
着して成ることを特徴とする請求項1記載の導電性ボー
ルの搭載装置。
2. The conductive ball mounting apparatus according to claim 1, wherein said receiving table is formed by mounting an elastic material on a surface of said concave portion.
【請求項3】基板に搭載されたチップを樹脂封止体で封
止して成るワークに導電性ボールを搭載する導電性ボー
ルの搭載方法であって、導電性ボールの供給部に備えら
れた導電性ボールを搭載ヘッドの下面に真空吸着してピ
ックアップする工程と、搭載ヘッドを位置決め部に位置
決めされたワークの上方へ相対的に移動させる工程と、
搭載ヘッドを下降させて搭載ヘッドの下面に突設された
複数個の突起を基板の上面に着地させ、樹脂封止体をこ
れを下方から支持する弾性材から成る凹部に押しつけた
うえで、導電性ボールを基板の上面に搭載する工程と、
を含むことを特徴とする導電性ボールの搭載方法。
3. A method for mounting a conductive ball on a work in which a chip mounted on a substrate is sealed with a resin sealing body, wherein the conductive ball is provided in a conductive ball supply unit. A step of vacuum-adsorbing and picking up a conductive ball on the lower surface of the mounting head, and a step of relatively moving the mounting head above the work positioned at the positioning portion;
The mounting head is lowered to land a plurality of protrusions projecting from the lower surface of the mounting head on the upper surface of the substrate, and the resin sealing body is pressed against a concave portion made of an elastic material which supports the resin sealing body from below. Mounting a conductive ball on the upper surface of the substrate;
A method for mounting a conductive ball, comprising:
JP28172897A 1997-10-15 1997-10-15 Apparatus and method for mounting conductive ball Expired - Fee Related JP3351314B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28172897A JP3351314B2 (en) 1997-10-15 1997-10-15 Apparatus and method for mounting conductive ball

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28172897A JP3351314B2 (en) 1997-10-15 1997-10-15 Apparatus and method for mounting conductive ball

Publications (2)

Publication Number Publication Date
JPH11121519A true JPH11121519A (en) 1999-04-30
JP3351314B2 JP3351314B2 (en) 2002-11-25

Family

ID=17643162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28172897A Expired - Fee Related JP3351314B2 (en) 1997-10-15 1997-10-15 Apparatus and method for mounting conductive ball

Country Status (1)

Country Link
JP (1) JP3351314B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7064813B2 (en) * 2001-10-26 2006-06-20 Hitachi High-Technologies Corporation Apparatus and method for measuring micro area in specimen
CN115497858A (en) * 2022-11-17 2022-12-20 深圳市立可自动化设备有限公司 Guide plate of ball planting machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7064813B2 (en) * 2001-10-26 2006-06-20 Hitachi High-Technologies Corporation Apparatus and method for measuring micro area in specimen
CN115497858A (en) * 2022-11-17 2022-12-20 深圳市立可自动化设备有限公司 Guide plate of ball planting machine

Also Published As

Publication number Publication date
JP3351314B2 (en) 2002-11-25

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