[go: up one dir, main page]

JPH11106265A - Method for sintering alternate ceramic laminates - Google Patents

Method for sintering alternate ceramic laminates

Info

Publication number
JPH11106265A
JPH11106265A JP9269802A JP26980297A JPH11106265A JP H11106265 A JPH11106265 A JP H11106265A JP 9269802 A JP9269802 A JP 9269802A JP 26980297 A JP26980297 A JP 26980297A JP H11106265 A JPH11106265 A JP H11106265A
Authority
JP
Japan
Prior art keywords
sintering
ceramic
laminate
shrinkage
tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9269802A
Other languages
Japanese (ja)
Inventor
Yasuhiro Shigegaki
康弘 茂垣
Takashi Sugita
孝志 杉田
Masateru Nishi
正輝 西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Industries Co Ltd filed Critical Ishikawajima Harima Heavy Industries Co Ltd
Priority to JP9269802A priority Critical patent/JPH11106265A/en
Publication of JPH11106265A publication Critical patent/JPH11106265A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)

Abstract

(57)【要約】 【課題】 セラミックス交互積層体の焼結中の割れや剥
離を無くす。 【解決手段】 物性の異なる異種の材料からなるセラミ
ックスのテープを交互に積み重ねて一体に成形してなる
セラミックス交互積層体の焼結方法であって、焼結工程
中に直交する3方向の積層体の収縮速度を連続的に測定
し、収縮速度に対応して昇温速度を制御する。
(57) [Summary] [PROBLEMS] To eliminate cracking and peeling during sintering of a ceramic alternating laminate. A method of sintering a ceramic alternate laminate, in which ceramic tapes made of different materials having different physical properties are alternately stacked and integrally formed, the laminate having three directions orthogonal to each other during a sintering step. Is measured continuously, and the temperature rise rate is controlled in accordance with the contraction rate.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ひずみや応力に対
して許容性が大きく靭性の高いセラミックス交互積層体
の焼結方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for sintering a ceramic alternate laminate having a high tolerance to strain and stress and a high toughness.

【0002】[0002]

【従来の技術】構造材料としてセラミックスを用いる場
合、例えば金属系の材料との組み合わせ構造が必要とな
る。このような組み合わせ構造では、セラミックスと他
の材料との熱的、機械的性質の違いからひずみ差が生ず
る。特に、拘束条件の厳しい静止部品に負荷される応力
およびそれに起因する破壊は、このひずみ差から生ず
る。この種類のセラミックスの破壊の回避には、材料の
破断ひずみの増大が有効である。
2. Description of the Related Art When ceramics are used as a structural material, for example, a combination structure with a metallic material is required. In such a combination structure, a difference in strain occurs due to a difference in thermal and mechanical properties between the ceramic and another material. In particular, the stress applied to a stationary part with severe restraint conditions and the resulting fracture are caused by this strain difference. In order to avoid the destruction of this type of ceramics, it is effective to increase the breaking strain of the material.

【0003】こうした観点から、セラミックスの積層体
化が行われてきている。特に積層構造による破断ひずみ
の増大、靭性強化では、層間での物性の差があればある
ほど積層体の特性は向上する。例えば、J.Am.Ceram.So
c.,75[12]3396-400(1992)やJ.Am.Ceram.Soc.,77[3]689-
96(1994) に見られるように、層間の熱膨張係数の差
や、弾性率の差が大きいほど積層体の強度、靭性は向上
する。これらの積層体は通常、押出成形、遠心鋳込、テ
ープ成形で得られたテープを積層し、一体で焼結して製
造されていた。
[0003] From such a viewpoint, lamination of ceramics has been performed. In particular, in the case of an increase in breaking strain and an increase in toughness due to the laminated structure, the more the difference in physical properties between layers, the more the characteristics of the laminated body are improved. For example, J.Am.Ceram.So
c., 75 [12] 3396-400 (1992) and J.Am.Ceram.Soc., 77 [3] 689-
As seen in 96 (1994), the greater the difference in the coefficient of thermal expansion between layers and the greater the difference in the elastic modulus, the more the strength and toughness of the laminate improve. These laminates are usually manufactured by laminating tapes obtained by extrusion molding, centrifugal casting, and tape molding, and sintering them integrally.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記の
製造方法は以下のような問題点があり、その解決が強く
求められていた。
However, the above-mentioned manufacturing method has the following problems, and there has been a strong demand for its solution.

【0005】積層体の特性向上に役立つ層間の物性差
は、製造プロセス中では、数々の問題を生み出す。特
に、問題となっていたのが成形後、積層した積層体が焼
結中に割れや剥離を起こすことであった。これは、各層
間の物性差(焼成収縮差等)が大きく違うため、一体焼
結の昇温中の収縮時に、層間の界面に非常に大きな剪断
応力が働き、結果的に割れや剥離を生ずることが原因で
ある。例えば、J.Am.Ceram.Soc.,72[8]1511-13(1989)に
見られるように、積層体中には焼結後に、主に層間の界
面に剥離が生ずることがる。この割れや剥離を回避する
ために今までは、J.Am.Ceram.Soc.,74[12]2979-87(199
1) に見られるように、層間で意識的に化学組成を傾斜
化させて、焼成収縮差を吸収する方法を採ったり、J.A
m.Ceram.Soc.,75[10]2907-909(1992)に見られるよう
に、極めて薄い層を交互積層し、発生する剪断応力を低
減する努力が必要であった。しかしながら、これらの一
体焼結方法は、コストの上昇、再現性の欠如の問題があ
り、産業利用上の大きな制約となっていた。
[0005] Differences in physical properties between layers, which help to improve the properties of the laminate, cause a number of problems during the manufacturing process. In particular, the problem has been that, after molding, the laminated body cracked or peeled off during sintering. This is because the difference in physical properties (difference in firing shrinkage, etc.) between the respective layers is greatly different, so that when the integrated sintering shrinks during heating, a very large shear stress acts on the interface between the layers, resulting in cracking and peeling. That is the cause. For example, as seen in J. Am. Ceram. Soc., 72 [8] 1511-13 (1989), after sintering, peeling may occur mainly at the interface between layers in the laminate. Until now, J. Am. Ceram. Soc., 74 [12] 2979-87 (199
As can be seen in 1), a method is used in which the chemical composition is intentionally graded between layers to absorb the difference in firing shrinkage.
As seen in m. Ceram. Soc., 75 [10] 2907-909 (1992), efforts were needed to alternately laminate very thin layers to reduce the shear stresses generated. However, these monolithic sintering methods have a problem of an increase in cost and a lack of reproducibility, and have been a great limitation in industrial use.

【0006】このような状況の中で、本発明者らは、上
記従来技術に鑑みて、物性の違う層から成る交互積層体
を、割れや剥離が生じない一体焼結方法を開発する研究
を行った結果、焼結の際の昇温プロセスを工夫すること
により、焼結中に積層体に生じる割れや剥離を防止でき
ることがわかった。
Under these circumstances, the present inventors have studied in view of the above-mentioned prior art to develop an integrated sintering method that does not cause cracking or peeling of an alternate laminated body composed of layers having different physical properties. As a result, it was found that cracking and peeling occurring in the laminated body during sintering can be prevented by devising a heating process during sintering.

【0007】本発明は、以上述べた従来技術の問題点に
鑑みてなされた研究成果から得られた知見により案出さ
れたもので、異種の材料からなるセラミックス交互積層
体を焼成する際に、積層体に生じる割れや剥離を防止
し、生産性の向上を図ることのできるセラミックス交互
積層体の焼結方法を提供することを目的とする。
The present invention has been devised based on the findings obtained from the research results made in view of the above-mentioned problems of the prior art. When firing a ceramic alternate laminate made of different kinds of materials, An object of the present invention is to provide a method for sintering a ceramic alternating laminate, which can prevent cracks and peeling occurring in the laminate and can improve productivity.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
本発明のセラミックス交互積層体の焼結方法は、物性の
異なる異種の材料からなるセラミックスのテープを交互
に積み重ねて一体に成形してなるセラミックス交互積層
体の焼結方法であって、焼結工程中に直交する3方向の
収縮速度を連続的に測定し、収縮速度に対応して、昇温
速度を制御するものである。
In order to achieve the above object, a method of sintering a ceramic alternate laminate according to the present invention comprises alternately stacking and integrally forming ceramic tapes of different materials having different physical properties. This is a method for sintering a ceramic alternate laminated body, in which shrinkage rates in three orthogonal directions are continuously measured during a sintering step, and a heating rate is controlled in accordance with the shrinkage rates.

【0009】収縮速度が大きいときに昇温速度を小さく
するように制御するのが好ましい。
It is preferable to control the heating rate to be low when the shrinking rate is high.

【0010】上記セラミックスのテープは、押出成形、
遠心鋳込または、テープ成形等の手法により作製するの
が好ましい。
[0010] The ceramic tape is extruded,
It is preferable to produce by a technique such as centrifugal casting or tape molding.

【0011】次に、本発明の作用を説明する。焼結中に
発生する割れや剥離は、各層が焼結中に起こす収縮挙動
の違いによって生ずる。セラミックス粉体から成る成形
体は、温度の上昇と共に各材料に応じた収縮挙動を示
す。収縮量の温度依存性は、材料によって大きく異な
り、早く収縮しようとする層と、収縮をしない層の歪み
差によって界面に剪断応力が働き、結果的に積層体に割
れや剥離を生ずる。この場合、割れや剥離を生ずると考
えられるのは、焼結中に各層間の収縮量の差が最も大き
くなる温度で生ずると考えられ、したがって、この温度
付近でゆっくりとした昇温を行ってやれば層間の割れや
剥離を未然に防げる。
Next, the operation of the present invention will be described. Cracks and peeling occurring during sintering are caused by differences in the shrinkage behavior of each layer during sintering. A molded body made of ceramic powder shows a shrinkage behavior according to each material as the temperature rises. The temperature dependence of the amount of shrinkage varies greatly depending on the material, and a shear stress acts on the interface due to the difference in strain between the layer that shrinks quickly and the layer that does not shrink, resulting in cracks and peeling of the laminate. In this case, cracking and peeling are considered to occur at a temperature at which the difference in the amount of shrinkage between the layers during sintering is greatest. Therefore, the temperature is slowly increased near this temperature. By doing so, cracking and peeling between layers can be prevented.

【0012】本発明では、焼結工程中に直交する3方向
の収縮量を測定し、いずれかの収縮速度が大きくなり始
めたら、昇温速度を小さくしてゆっくり昇温させるよう
にすることにより、層間の割れや剥離を未然に防ぐもの
である。
In the present invention, the shrinkage in three orthogonal directions is measured during the sintering process, and when any one of the shrinkage speeds starts to increase, the temperature is increased slowly to increase the temperature slowly. And to prevent cracks and peeling between layers.

【0013】[0013]

【発明の実施の形態】以下本発明の一実施形態につい
て、図面を参照しつつ説明する。図1は、本発明のセラ
ミックス交互積層体の焼結方法により、焼結中のセラミ
ックス交互積層体の斜視図である。図に示すように、セ
ラミックス交互積層体1を焼結装置中の図示しない台に
載置し、直交する2つの側面(例えば、図の左側の側面
と裏側の側面)を動かないように固定し、焼結装置の炉
外から3本の接触棒2a、2b、2cをそれぞれ積層体
の2側面(図の表側の側面と右側の側面)および上面に
接触させる。3本の接触棒2a、2b、2cは、それぞ
れ3軸の変位計に接続されており、接触棒2a、2b、
2cのX、Y、Z方向の動きは、変位計により計測され
る。その計測により、焼結中の積層体1の収縮挙動をモ
ニタリングすることができる。焼結炉を昇温する際に、
この変位計のいずれかの接触棒の動きが、激しくなる温
度では、ゆっくりとした温度の上昇を行う。つまり、積
層体の収縮の速さを、温度のコントロールによって制御
することが可能となり、積層体の焼結中に生ずる割れ、
剥離を防止することが可能となる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of a ceramic alternating laminate during sintering by the method for sintering a ceramic alternating laminate of the present invention. As shown in the drawing, the ceramic alternating laminate 1 is placed on a stand (not shown) in a sintering apparatus, and two orthogonal side surfaces (for example, a left side surface and a back side surface in the figure) are fixed so as not to move. Then, three contact rods 2a, 2b and 2c are brought into contact with the two side surfaces (the front side surface and the right side surface in the figure) and the upper surface of the laminate, respectively, from outside the furnace of the sintering apparatus. The three contact rods 2a, 2b, 2c are respectively connected to three-axis displacement meters, and the contact rods 2a, 2b,
The movement in the X, Y, and Z directions of 2c is measured by a displacement meter. By the measurement, the shrinkage behavior of the laminate 1 during sintering can be monitored. When heating the sintering furnace,
At a temperature at which the movement of one of the contact bars of this displacement meter becomes intense, the temperature rises slowly. In other words, the rate of shrinkage of the laminate can be controlled by controlling the temperature, and cracks generated during sintering of the laminate,
Peeling can be prevented.

【0014】[0014]

【実施例】本発明を実証するために行った2つの実験結
果について、以下実施例Iおよび実施例Jとして説明す
る。 実施例I (1)テープの作製 テープAとして、α型窒化ケイ素粉末に焼結助剤として
5wt%の酸化イットリウムと2wt%の酸化アルミニ
ウムを添加し、トルエン/ブタノール混合液(4/1)
を分散剤、バインダとともに分散媒としたスラリにし
た。このスラリを用いてテープ成形により厚さ100μ
mのテープを製造した。また、テープBとして、β型窒
化ケイ素柱状粒子(短径1μm、アスペクト比30)を
用いて、トルエン/ブタノール混合液(4/1)を分散
剤、バインダとともに分散媒としたスラリにし、このス
ラリを用いてテープ成形により、厚さ50μmのテープ
を製造した。
EXAMPLES The results of two experiments performed to demonstrate the present invention will be described below as Examples I and J. Example I (1) Preparation of Tape As Tape A, 5 wt% yttrium oxide and 2 wt% aluminum oxide were added as a sintering aid to α-type silicon nitride powder, and a toluene / butanol mixed solution (4/1)
Was used as a dispersion medium together with a dispersant and a binder to form a slurry. Using this slurry, 100μ thick by tape forming
m of tape were produced. Further, as the tape B, β-type silicon nitride columnar particles (short diameter: 1 μm, aspect ratio: 30) were used as a slurry using a toluene / butanol mixed solution (4/1) as a dispersion medium together with a dispersant and a binder. Was used to produce a tape having a thickness of 50 μm.

【0015】(2)積層体の作製 作製したテープを計100枚交互に積層し、圧着して積
層体を作製した。この積層体をCIP処理後、脱脂し
た。
(2) Production of Laminate A total of 100 produced tapes were alternately laminated and pressed to produce a laminate. After the CIP treatment, the laminate was degreased.

【0016】(3)焼結 収縮量を3方向で測定できる焼結装置を用いて、窒素雰
囲気で保持温度1850℃、6時間焼結を行った。な
お、焼結装置には炉外から接触棒を挿入し、被焼結体に
接触させる方式の3軸の変位計が設置されており、この
変位計の動きによって被焼結体の収縮挙動をモニタリン
グすることができる。焼結炉を昇温する際に、この変位
計の動きが激しくなる温度では、ゆっくりとした温度の
上昇を行う。つまり、積層体の収縮の速さを温度のコン
トロールによって、制御することが可能となり、積層体
の焼結中に生ずる割れ、剥離を防止することが可能とな
る。
(3) Sintering Sintering was performed at a holding temperature of 1850 ° C. for 6 hours in a nitrogen atmosphere using a sintering apparatus capable of measuring the amount of shrinkage in three directions. The sintering apparatus is equipped with a three-axis displacement meter that inserts a contact rod from the outside of the furnace and makes contact with the object to be sintered. Can be monitored. When the temperature of the displacement meter is increased when the temperature of the sintering furnace is increased, the temperature is slowly increased. That is, the rate of shrinkage of the laminate can be controlled by controlling the temperature, and cracking and peeling during sintering of the laminate can be prevented.

【0017】焼結中の昇温速度は、収縮量が1分あたり
0.1%を越えないように、コントロールした。図2
に、本発明の制御した昇温パターンと従来の昇温パター
ンを比較して示す。本発明では、収縮が最も激しい、1
600℃近辺からは、ゆっくりとした昇温速度になって
いる。
The heating rate during sintering was controlled so that the shrinkage did not exceed 0.1% per minute. FIG.
The following is a comparison between a controlled heating pattern of the present invention and a conventional heating pattern. In the present invention, the most severe shrinkage is 1
From around 600 ° C., the temperature rises slowly.

【0018】(4)積層体中の割れ 本発明の焼結方法によれば、界面付近には、割れや剥離
は認められず、健全な積層体が作製できた。一方、通常
の収縮量を測定しないで焼結した場合、界面には割れが
認められた。
(4) Cracking in Laminated Body According to the sintering method of the present invention, no cracking or peeling was observed near the interface, and a sound laminated body was produced. On the other hand, when sintering was performed without measuring the usual amount of shrinkage, cracks were observed at the interface.

【0019】実施例J (1)テープの作製 テープCとしてアルミナ(平均粒径0.5μm)、テー
プDとして3mol%のイットリアで安定化したジルコ
ニア(平均粒径0.2μm)をそれぞれ原料として、実
施例Iと同様な方法でテープを作製した。テープの厚み
は10μmとした。
Example J (1) Production of Tape As a raw material, a tape C was made of alumina (average particle size: 0.5 μm), and a tape D was made of zirconia stabilized by 3 mol% yttria (average particle size: 0.2 μm). A tape was produced in the same manner as in Example I. The thickness of the tape was 10 μm.

【0020】(2)積層体の作製と焼結 作製したテープを合計1000枚積層し、圧着後の厚み
が10mm程度の積層体を作製した。この際、積層する
枚数比を表1に示す割合で変化させた。この成形体をC
IP処理後、脱脂し大気中保持温度1500℃、1時間
焼結を行った。焼結の装置は、実施例Iと同じ装置を用
いた。
(2) Production and sintering of laminate A total of 1,000 produced tapes were laminated, and a laminate having a thickness of about 10 mm after pressure bonding was produced. At this time, the ratio of the number of sheets to be laminated was changed at the ratio shown in Table 1. This molded body is C
After the IP treatment, the material was degreased and sintered at 1500 ° C. in the atmosphere for 1 hour. The same apparatus as in Example I was used for the sintering.

【0021】[0021]

【表1】 [Table 1]

【0022】(3)積層体中の割れ 表1に示すとおり、通常の収縮量を測定しない焼結法で
は、積層比が1:1の場合は割れがないが、他の積層比
では割れが生じた。これは、積層比が1:1から50
0:500に増加するにつれて、積層構造の界面に発生
する剪断応力が増加するために、通常の焼結方法では、
大きな積層比で割れが生ずることになる。一方、本発明
による焼結方法では、何れの積層比においても割れは生
じず、特に、積層比500:500の厚い層の積層体で
も割れが生じなかったのは、特筆に値する。なお、積層
比とは、同一物質の層中のテープの枚数比をいい、1:
1とは1枚ずつ別の物質を交互に積層したものであり、
10:10とは、同一物質のテープを10枚積層した
後、他の物質のテープを10枚積層し、それを交互に繰
り返すことである。
(3) Cracking in the laminated body As shown in Table 1, in the ordinary sintering method in which the amount of shrinkage is not measured, no cracking occurs when the laminating ratio is 1: 1 but cracks occur when the laminating ratio is other. occured. This means that the stacking ratio is 1: 1 to 50
As the ratio increases to 0: 500, the shear stress generated at the interface of the laminated structure increases.
Cracks will occur at high lamination ratios. On the other hand, in the sintering method according to the present invention, it is notable that cracking did not occur at any lamination ratio, and in particular, cracking did not occur even in a laminate of a thick layer having a lamination ratio of 500: 500. The lamination ratio refers to the ratio of the number of tapes in a layer of the same substance, and is 1: 1:
1 is a material obtained by alternately laminating different substances one by one,
10:10 means that after ten tapes of the same substance are laminated, ten tapes of another substance are laminated, and this is repeated alternately.

【0023】本発明は、以上述べた実施形態や実施例に
限定されるものではなく、発明の要旨を逸脱しない範囲
で種々の変更が可能である。
The present invention is not limited to the embodiments and examples described above, and various changes can be made without departing from the gist of the invention.

【0024】[0024]

【発明の効果】以上述べたように、本発明のセラミック
ス交互積層体の焼結方法は、異種の材料からなるセラミ
ックスのテープを交互に積層してなるセラミックス交互
積層体を焼結する際に、収縮速度に対応して昇温速度を
制御するようにしたので、焼結中に割れや、剥離を起こ
すことがなく、生産性の向上が図れるなどの優れた効果
を有する。
As described above, the method for sintering a ceramic alternating laminate according to the present invention provides a method for sintering a ceramic alternating laminate obtained by alternately laminating ceramic tapes of different materials. Since the rate of temperature rise is controlled in accordance with the rate of shrinkage, cracking and peeling do not occur during sintering, and there are excellent effects such as improvement in productivity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の焼結方法により焼結中のセラミックス
交互積層体の斜視図である。
FIG. 1 is a perspective view of a ceramic alternating laminate during sintering by a sintering method of the present invention.

【図2】本発明の焼結方法と従来の焼結方法における昇
温カーブのグラフである。
FIG. 2 is a graph of a temperature rise curve in the sintering method of the present invention and a conventional sintering method.

【符号の説明】[Explanation of symbols]

1 セラミックス交互積層体 2 接触棒 1 alternate ceramic laminate 2 contact rod

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 物性の異なる異種の材料からなるセラミ
ックスのテープを交互に積み重ねて一体に成形してなる
セラミックス交互積層体の焼結方法であって、焼結工程
中に直交する3方向の積層体の収縮速度を連続的に測定
し、収縮速度に対応して昇温速度を制御することを特徴
とするセラミックス交互積層体の焼結方法。
1. A method of sintering a ceramic alternating laminate in which ceramic tapes made of different materials having different physical properties are alternately stacked and integrally formed, and laminated in three directions orthogonal to each other during a sintering step. A method for sintering a ceramic alternate laminated body, comprising continuously measuring a shrinkage speed of a body and controlling a heating rate according to the shrinkage speed.
【請求項2】 収縮速度が大きいときに昇温速度を小さ
くするように制御する請求項1記載のセラミックス交互
積層体の焼結方法。
2. The method for sintering a ceramic alternate laminate according to claim 1, wherein the temperature raising rate is controlled to be lower when the shrinking rate is high.
【請求項3】 上記セラミックスのテープは、押出成
形、遠心鋳込またはテープ成形により成形されたもので
ある請求項1または請求項2記載のセラミックス交互積
層体の焼結方法。
3. The method according to claim 1, wherein the ceramic tape is formed by extrusion molding, centrifugal casting or tape molding.
JP9269802A 1997-10-02 1997-10-02 Method for sintering alternate ceramic laminates Pending JPH11106265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9269802A JPH11106265A (en) 1997-10-02 1997-10-02 Method for sintering alternate ceramic laminates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9269802A JPH11106265A (en) 1997-10-02 1997-10-02 Method for sintering alternate ceramic laminates

Publications (1)

Publication Number Publication Date
JPH11106265A true JPH11106265A (en) 1999-04-20

Family

ID=17477382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9269802A Pending JPH11106265A (en) 1997-10-02 1997-10-02 Method for sintering alternate ceramic laminates

Country Status (1)

Country Link
JP (1) JPH11106265A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6797093B2 (en) * 2001-06-05 2004-09-28 Murata Manufacturing Co., Ltd. Glass ceramic multilayer substrate manufacturing method and glass ceramic multilayer substrate product

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6797093B2 (en) * 2001-06-05 2004-09-28 Murata Manufacturing Co., Ltd. Glass ceramic multilayer substrate manufacturing method and glass ceramic multilayer substrate product

Similar Documents

Publication Publication Date Title
CN102933519A (en) Max-phase oriented ceramic and production method therefor
KR101534448B1 (en) Flame Spray Coating Substrate Containing Rare-Earth Oxide and Method for Preparing the Same
US5338598A (en) Sintered inorganic composites comprising co-sintered tape reinforcement
CN114180943A (en) Composite sintered body, semiconductor manufacturing apparatus member, and method for manufacturing composite sintered body
EP1582509B1 (en) Dense cordierite based sintered body
Subbarao Grain size effects in advanced ceramics
JP2966375B2 (en) LAMINATED CERAMIC AND PROCESS FOR PRODUCING THE SAME
EP2650272A1 (en) Oxide-based composite material
JPH11106265A (en) Method for sintering alternate ceramic laminates
US9321689B2 (en) Molded object, heating device and method for producing a molded object
CN111278792B (en) Method for producing oriented ceramic sintered body and flat sheet
JP2002110772A (en) Ceramics with built-in electrode and method of manufacturing the same
JPH059393B2 (en)
KR20210052250A (en) Composite sintered body and method of manufacturing composite sintered body
JP4186099B2 (en) Silicon carbide member and method for manufacturing the same
JP2003119083A (en) Heat resistant tool
JPH1087364A (en) Production of laminated ceramics
KR102427219B1 (en) Manufacturing method for plasma resistance edge ring using prepress and the plasma resistance edge ring using thereof
Sergent Ceramic materials
JPH05270957A (en) Ceramic sintered product
JP2675187B2 (en) Gradient silicon nitride composite material and method of manufacturing the same
JPWO2019082916A1 (en) Method for producing oriented ceramic sintered body and flat sheet
JP5532064B2 (en) Rare earth oxide-containing thermal spray substrate manufacturing method and laminate manufacturing method
JP2005126255A (en) Multilayer ceramic electronic component / membrane electronic component and manufacturing method thereof
JP3038425B2 (en) Manufacturing method of laminated ceramic sheet

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040628

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20061211

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061215

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070410