JPH11105283A - Ink-jet head and production thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the ink droplet discharging stability with respect to the liquid room internal pressure change and the impact force and achieve a high speed printing capable of obtaining a high image quality by forming a liquid room partition wall with a vibrating plate and an electrocast metal integrally so as to improve the rigidity of a head constituent. SOLUTION: By driving a piezoelectric element 4 for generating the elongation in the lamination direction, a diaphragm part 12 of a vibrating plate 7 is deformed to the ink liquid room 11 side so as to press an ink inside the ink liquid room 11. Accordingly, ink droplets are discharged from a nozzle hole 16. In this case, since a liquid room partition wall 8 comprising the ink liquid room 11 is formed with the vibrating plate 7 and an electrocast metal integrally, the rigidity of the liquid room partition wall part can be improved so that resonance among the liquid rooms and vibration of a nozzle plate can be reduced with respect to the ink liquid room internal pressure change and the impact force by the piezoelectric element 4 for coping with a high density of the nozzle hole and a high printing speed, and thus the image quality can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head and a method of manufacturing the same, and more particularly, to an ink jet head using an electromechanical transducer as energy generating means and a method of manufacturing the same.

[0002]

2. Description of the Related Art As an ink jet head constituting a recording head of an ink jet recording apparatus used as an image forming apparatus such as a printer, a facsimile, a copier, and the like,
A nozzle communicating with the pressurized liquid chamber is formed by deforming the diaphragm portion of the diaphragm constituting the wall surface of the pressurized liquid chamber with the electromechanical transducer to pressurize the ink in the ink liquid chamber (pressurized liquid chamber). Ink droplets are known to be discharged from an ink discharge port.

As such an ink jet head, as described in, for example, Japanese Patent Application Laid-Open No. 8-142324, a diaphragm having a diaphragm deformed by displacement of an electromechanical transducer and a diaphragm corresponding to the diaphragm are used. There is a type in which a liquid chamber partition wall forming an ink liquid chamber and a nozzle forming member having a nozzle hole communicating with the ink liquid chamber are sequentially laminated.

In such an ink jet head, a separate process and a different material are used for the nozzle forming member and the liquid chamber partition, and the nozzle forming member deposits metal on the conductive substrate surface which has been subjected to resist patterning by an electroforming method. For example, a metal layer formed by etching or a nozzle formed by etching a stainless steel foil material is used. On the other hand, the liquid chamber partition walls are formed by laminating a photosensitive dry film resist (DFR) on the back surface of the nozzle forming member and performing pattern exposure and development.

[0005]

However, in the case of a liquid chamber structure in which a nozzle forming member made of a flat thin layer and a liquid chamber partition made of a low-synthesis dry film resist are combined like this ink jet head, As the density of the nozzles increases and the printing speed increases, resonance between the liquid chambers and vibration of the nozzle forming member due to the change in the pressure of the liquid chambers and the impact force at the time of discharging the ink droplets are likely to occur, and the stability of the ink droplet discharge is hindered. Image quality cannot be ensured.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has increased the rigidity of a head-constituting structure to enhance the stability of ink droplet ejection against changes in the liquid chamber pressure and the impact force, thereby obtaining high image quality. It is an object of the present invention to provide an inkjet head capable of performing high-speed printing and a method of manufacturing an inkjet head capable of efficiently manufacturing such an inkjet head.

[0007]

According to a first aspect of the present invention, there is provided an ink jet head comprising: a diaphragm having a diaphragm deformed by displacement of an electromechanical transducer; and an ink corresponding to the diaphragm. In an ink jet head in which a liquid chamber partition forming a liquid chamber and a nozzle forming member having a nozzle hole communicating with the ink liquid chamber are sequentially laminated, the liquid chamber partition is integrally formed of the vibration plate and the electroformed metal. The configuration was as follows.

According to a second aspect of the present invention, in the inkjet head of the first aspect, most of the liquid chamber partition wall is formed of the electroformed metal.

According to a third aspect of the present invention, there is provided a method for manufacturing an ink jet head according to the first or second aspect, wherein the liquid chamber partition walls are formed by using an electroformed substrate having excellent adhesion to an electroformed metal. After forming a partition metal layer by electroforming and cleaning the surface of the partition metal layer, a diaphragm metal layer forming a diaphragm portion of the diaphragm is formed on the partition metal layer by electroforming, and further, the diaphragm metal layer is formed. A joining metal layer for forming a joining portion with the electromechanical conversion element and a joining portion with the support portion is formed on the upper portion by electroforming.

According to a fourth aspect of the present invention, in the method for manufacturing an inkjet head of the third aspect, an adhesive organic film having an adhesive function and having a property of not being dissolved and removed is formed on the partition metal layer. It was configured to be a film.

According to a fifth aspect of the present invention, there is provided an ink jet head having a diaphragm having a diaphragm deformed by displacement of an electromechanical transducer, a liquid chamber partition for forming an ink liquid chamber corresponding to the diaphragm, and the ink liquid chamber. In the ink jet head in which a nozzle forming member having a nozzle hole communicating with the nozzle is sequentially laminated, the liquid chamber partition is formed integrally with the nozzle forming member by electroforming metal.

According to a sixth aspect of the present invention, in the inkjet head of the fifth aspect, most of the liquid chamber partition wall is formed of the electroformed metal.

According to a seventh aspect of the invention, there is provided a method of manufacturing an ink jet head according to the fifth or sixth aspect, wherein the nozzle forming member is formed by using an electroformed substrate having excellent adhesion to an electroformed metal. The nozzle metal layer to be formed is formed by electroforming, and after cleaning the surface of the nozzle metal layer, a partition wall metal layer forming a liquid chamber partition is formed by electroforming on the nozzle metal layer.

According to an eighth aspect of the present invention, in the method for manufacturing an inkjet head according to the seventh aspect, after the partition metal layer is formed by electroforming, the partition metal layer has an adhesive function, and The structure is such that an adhesive organic film having a property that cannot be removed is formed.

According to a ninth aspect of the present invention, there is provided a method of manufacturing an ink jet head according to any one of the third to fourth aspects, wherein the electroformed substrate for depositing the electroformed metal is provided. Is made of a material that can selectively dissolve and remove only the electroformed substrate without dissolving the electroformed metal.

According to a tenth aspect of the present invention, in the ink jet head, a diaphragm having a diaphragm deformed by the displacement of the electromechanical transducer, a liquid chamber partition for forming an ink liquid chamber corresponding to the diaphragm, and the ink liquid chamber In the ink jet head in which a nozzle forming member having a nozzle hole communicating with the nozzle is sequentially laminated, a part of the liquid chamber partition wall is formed integrally with the diaphragm and the nozzle forming member by electroforming metal.

[0017]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a schematic sectional view of an ink jet head according to a first embodiment of the present invention. This ink jet head has a driving section 1 and a liquid chamber section 2. The drive unit 1 is configured such that a laminated piezoelectric element 4 as an electromechanical transducer and a column 5 are alternately arranged in a row on a substrate 3 made of ceramic or the like and joined together. A drive circuit 6 is provided.

On the other hand, the liquid chamber section 2 includes a diaphragm 7, a liquid chamber partition 8 formed integrally with the diaphragm 7 by electroformed metal, and a photosensitive dry film resist ( DFR), which also serves as liquid chamber partition and adhesive layer
A layer 9 and a nozzle plate 10 as a nozzle forming member are sequentially laminated to form an ink liquid chamber 11 which is pressurized by the displacement of the piezoelectric element 4.

Here, the diaphragm 7 is deformed by the displacement of the piezoelectric element 4 together with the liquid chamber partition 8 on the diaphragm 7.
2, a joint projection 13 joined to the piezoelectric element 4, and a support 5
Is integrally formed with the joining beam portion 14 to be joined. Further, the DFR layer 9 is provided with an ink inlet hole 15 for the ink liquid chamber 11.
Is also formed. Further, the nozzle plate 16 is formed with a nozzle hole 16 communicating with the ink liquid chamber 11.

The bonding projection 13 and the bonding beam 14 formed on the vibration plate 7 of the liquid chamber 2 are bonded to the piezoelectric element 4 and the support 5 of the driving section 1 with an adhesive 17 to form an ink jet head. .

In this ink jet head, the piezoelectric element 4 is driven to cause elongation in the stacking direction, whereby the diaphragm 12 of the diaphragm 7 is deformed toward the ink liquid chamber 11 and The ink is pressurized, whereby an ink droplet is ejected from the nozzle hole 16.

In this case, since the liquid chamber partition 8 for forming the ink liquid chamber 11 is formed integrally with the vibration plate 7 by electroforming metal, the rigidity of the liquid chamber partition is increased, and the piezoelectric element 4 The resonance between the liquid chambers and the vibration of the nozzle plate are reduced, and the density of the nozzle holes is increased and the printing speed is increased (the maximum driving frequency of the piezoelectric element is increased). ), And the image quality is improved.

The liquid chamber partition 8 formed integrally with the vibrating plate 7 and the electroformed metal is almost all of the liquid chamber partition required between the nozzle plate 10 and the vibrating plate 7. The rigidity of the chamber partition is further increased, so that the density of the nozzle holes can be increased and the printing speed can be increased.

Next, a method for manufacturing the ink jet head will be described with reference to FIGS. First, the manufacturing process of the diaphragm 17 will be described with reference to FIG.
An electroformed substrate 21 for depositing an electroformed metal is prepared as shown in FIG. As the electroformed substrate 21, the electroformed substrate 2 can be used without dissolving the electroformed metal (electroformed deposited metal).
A material that can selectively dissolve and remove only 1; that is,
Use a material that can select a solvent (chemical solution) that can be dissolved without affecting the electroformed metal. For example, when the electroformed metal is Ni, the solvent can be removed only from the electroformed substrate by using Al as the electroformed substrate and using an alkaline aqueous solution such as NaoH as a chemical solution. By using such an electroformed substrate, it becomes possible to omit the process for adjusting the adhesion between the unstable electroformed substrate and the electroformed deposited metal,
An electroformed substrate having excellent adhesion to the electroformed metal is obtained.

Then, a DFR is laminated on the electroformed substrate 21 (the lower side in the figure), exposed using a predetermined mask pattern, and developed, so that an opening 22 a is formed in a portion corresponding to the liquid chamber partition 8. DFR pattern 22 having
To form Thereafter, the electroformed substrate 21 is subjected to Ni electroforming to deposit an electroformed metal in the openings 22a of the DFR pattern 22, and as shown in FIG. 23, and the partition metal layer 2
The surface of No. 3 is washed, dried and cleaned.

Next, as shown in FIG. 1C, a diaphragm metal layer 24 having a thickness of the diaphragm portion 12 of the diaphragm 7 is formed by electroforming, and DFR is laminated on the diaphragm metal layer 24 as a laminate. Exposure and development are performed using a predetermined mask pattern, and the bonding projections 13 of the diaphragm 7 are exposed.
And openings 25a and 25b at portions corresponding to the joint beams 14.
Is formed.

Then, electroforming is further performed to form a joining metal layer 26 which becomes the joining projection 13 and the joining beam 14 of the diaphragm 7 as shown in FIG. Next, by dissolving and removing the electroformed substrate 21 and removing the DFR patterns 22 and 25, the liquid chamber partition 8, the diaphragm portion 12, the joining convex portion 13, and the joining beam portion 14 are formed as shown in FIG. Is obtained by integrally forming a vibrating plate 7 by electroforming.

Next, the manufacturing process of the nozzle plate 10 will be described with reference to FIG. First, as shown in FIG. 2A, a resist is coated on an electroformed substrate 31, exposed using a predetermined mask pattern, and developed to form a circular resist pattern at a position corresponding to the nozzle hole 16. 32 are formed at a predetermined pitch, and electroforming is performed to form a metal layer 33 to be the nozzle plate 10 as shown in FIG. At this time, by controlling the amount of protrusion on the resist pattern 32, the nozzle hole diameter can be controlled to a predetermined diameter.

Next, as shown in FIG. 3C, the electroformed metal layer 33 is peeled from the electroformed substrate 31 to remove the resist pattern 3.
By removing 2, the nozzle plate 10 having the nozzle holes 16 is obtained. Thereafter, as shown in FIG. 4D, the DFR is placed on the back side (liquid chamber side) of the nozzle plate 10.
The DFR layer 34 was exposed by using a predetermined mask pattern, and a cured portion 35 corresponding to the DFR layer 9 was formed. This was developed to form the DFR layer 9 as shown in FIG. The nozzle plate 10 is obtained. At this time, the mask pattern is formed so that the ink inlet 15 is also formed by the DFR layer 9.

The end face of the liquid chamber partition 8 of the vibrating plate 7 and the DFR layer 9 of the nozzle plate 10 are aligned, heated and pressurized, so that the end face of the liquid chamber partition 8 is
The liquid layer 2 is completed by joining the FR layers 9. Further, an adhesive is pattern-applied to the piezoelectric element 4 and the support section 5 of the driving section 1 by silk-screen printing or the like, and the joining projections 13 and the joining beam sections 14 of the diaphragm 7 of the liquid chamber section 2 are aligned. Then, the adhesive layer is cured in a state of light pressure bonding to complete the head.

As described above, the partition metal layer forming the liquid chamber partition is formed by electroforming using the electroformed substrate having excellent adhesion to the electroformed metal, and the surface of the partition metal layer is cleaned. A diaphragm metal layer for forming a diaphragm portion of a diaphragm is electroformed on a partition metal layer, and a bonding metal layer for forming a bonding portion with an electromechanical transducer and a bonding portion with a support portion on the diaphragm metal layer. By electroforming, a diaphragm having a liquid chamber partition wall can be stably manufactured.

Next, a modification of the first embodiment will be described with reference to FIG. In this example, after the step of FIG. 2G, the substrate 21 is removed, and then an adhesive organic film 37 having an adhesive function and not being dissolved and removed is formed on the end surface of the partition wall metal layer 22 by an electrolytic method. The film is formed to form an adhesive layer 37 for bonding to the nozzle plate 10 and an ink inlet (not shown). In this case, the DFR layer 9 on the nozzle plate 10 side becomes unnecessary.

As described above, the adhesive pattern layer and the ink inlet are formed with high precision and high efficiency by forming the adhesive organic film having the adhesive function and being not dissolved and removed on the partition metal layer. can do.

FIG. 5 is a schematic sectional view of an ink jet head according to a second embodiment of the present invention. This ink jet head has a driving section 41 and a liquid chamber section 42. The drive unit 41 is configured such that the stacked piezoelectric elements 44 as the electromechanical conversion elements and the support parts 45 are alternately arranged in a row on a substrate 43 made of ceramic or the like and joined together. A drive circuit 46 is provided.

On the other hand, the liquid chamber 42 is formed by integrally forming a vibration plate 47, a liquid chamber partition made of a photosensitive dry film resist (DFR), a DFR layer 48 also serving as an adhesive layer, and a liquid chamber partition 49. A nozzle plate 50 which is a nozzle forming member made of cast metal is sequentially laminated,
An ink liquid chamber 51 pressurized by the displacement of No. 4 is formed.

Here, the diaphragm 47, which is deformed by the displacement of the piezoelectric element 44,
And a joining beam portion 54 joined to the column 45 are integrally formed. DFR layer 4
8 also forms an ink inflow hole 55 into the ink liquid chamber 51. Further, the ink liquid chamber 51 is provided in the nozzle plate 50.
Is formed.

Then, the joining convex portion 53 and the joining beam portion 54 formed on the vibration plate 47 of the liquid chamber portion 42 are joined to the piezoelectric element 44 and the support portion 45 of the driving portion 41 with an adhesive 57 to form an ink jet head. .

In this ink jet head, the diaphragm 52 of the vibration plate 47 is moved by driving the piezoelectric element 44 to cause elongation in the laminating direction.
Side, and pressurizes the ink in the ink liquid chamber 51, whereby an ink droplet is ejected from the nozzle hole 56.

In this case, since the liquid chamber partition walls 49 for forming the ink liquid chambers 51 are formed integrally with the nozzle plate 50 by electroforming metal, the rigidity of the liquid chamber partition walls increases.
The resonance between the liquid chambers and the vibration of the nozzle plate are also reduced with respect to the ink liquid chamber pressure change and the impact force by the piezoelectric element 4, the nozzle holes are increased in density, and the printing speed is increased (the maximum driving frequency of the piezoelectric element (Higher frequency), and the image quality is improved.

The liquid chamber partition 49 formed integrally with the nozzle plate 50 and the electroformed metal is almost all of the liquid chamber partition required between the nozzle plate 50 and the vibrating plate 47. The rigidity of the room partition is further increased,
It is possible to increase the density of the nozzle holes and increase the printing speed.

Next, a method for manufacturing the ink jet head will be described with reference to FIGS. First, the manufacturing process of the nozzle plate 50 will be described with reference to FIG. An electroformed substrate 61 for depositing an electroformed metal is prepared as shown in FIG. Also here, the electroformed substrate 61 is made of a material capable of selectively dissolving and removing only the electroformed substrate 61 without dissolving the electroformed metal (electroformed deposited metal), that is, an effect on the electroformed metal. Use a material that can select a solvent (chemical solution) that can be dissolved without giving it. For example, when the electroformed metal is Ni, the solvent can be removed only from the electroformed substrate by using Al as the electroformed substrate and using an alkaline aqueous solution such as NaoH as a chemical solution. By using such an electroformed substrate, it becomes possible to omit the process for adjusting the adhesion between the unstable electroformed substrate and the electroformed deposited metal, and to achieve excellent adhesion with the electroformed metal. It becomes an electroformed substrate.

Then, a DFR is laminated on the electroformed substrate 61 (the lower side in the figure), exposed using a predetermined mask pattern, and developed to form a circular resist pattern at a position corresponding to the nozzle hole 56. 62 are formed at a predetermined pitch, and electroforming is performed to form a nozzle metal layer 63 to be the nozzle plate 50 as shown in FIG.
At this time, by controlling the protrusion amount on the resist pattern 62, the nozzle hole diameter can be controlled to a predetermined diameter.

Next, the surface of the nozzle metal layer 63 is cleaned and dried to be cleaned. Then, as shown in FIG. 4C, the DFR is laminated on the nozzle metal layer 63, exposed using a predetermined mask pattern, and developed to form an opening 64a in a portion corresponding to the liquid chamber partition 49. A DFR pattern 64 is formed, and as shown in FIG. 4D, electroforming is performed to deposit an electroformed metal in an opening 64 a of the DFR pattern 64, thereby forming a partition metal layer 65 serving as a liquid chamber partition 49. Form.

Then, the electroformed substrate 61 is dissolved and removed, and the DF is removed.
By removing the R patterns 62 and 64, the nozzle plate 50 having the nozzle holes 56 in which the liquid chamber partition walls 49 are integrally formed by electroforming as shown in FIG.

Next, the manufacturing process of the diaphragm 47 will be described with reference to FIG. First, as shown in FIG.
To form a diaphragm metal layer 72 having a thickness of, and DFR is laminated on the diaphragm metal layer 72,
Exposure is performed using a predetermined mask pattern and development is performed to form a DFR pattern 73 having openings 73a and 73b at portions of the vibration plate 47 corresponding to the joint protrusions 53 and the joint beams 54.

Then, as shown in FIG. 4B, electroforming is performed to form a bonding metal layer 74 that becomes the bonding projection 53 and the bonding beam 54 of the diaphragm 47, and melts the electroformed substrate 71. By removing the DFR pattern 73, a diaphragm 47 in which the diaphragm portion 52, the joint protrusion 53, and the joint beam portion 54 are integrally formed by electroforming is obtained as shown in FIG.

Thereafter, as shown in FIG.
By laminating a DFR 75 on the surface side (liquid chamber side) of 7 and exposing using a predetermined mask pattern, a cured portion 76 corresponding to the DFR layer 48 is formed and developed.
As shown in FIG. 3E, a diaphragm 47 having a DFR layer 48 is obtained. At this time, the ink inlet 55 is also connected to the DFR layer 4.
8 to form a mask pattern.

The nozzle plate 5 thus obtained
DF which also serves as the liquid chamber partition 49 of the zero and the liquid chamber partition of the diaphragm 47
The DFR layer 48 is joined to the end surface of the liquid chamber partition 49 by aligning the end surface of the R layer 48 and applying heat and pressure to complete the liquid chamber portion 42. Further, an adhesive is applied by patterning to the piezoelectric element 44 and the support part 45 of the driving part 41 by silk screen printing or the like, and each of the joint protrusions 5 of the vibration plate 47 of the liquid chamber part 42 is formed.
3 and the joining beam 54 are aligned, and the adhesive layer is cured in a state of light pressure bonding to complete the head.

As described above, the nozzle metal layer for forming the nozzle forming member is formed by electroforming using the electroformed substrate having excellent adhesion to the electroformed metal, and the surface of the nozzle metal layer is cleaned. By forming the partition metal layer forming the liquid chamber partition on the nozzle metal layer by electroforming, the nozzle forming member having the liquid chamber partition can be stably manufactured.

Next, a modification of the second embodiment will be described with reference to FIG. In this example, after the step of FIG. 6D, an adhesive organic film having an adhesive function and not being dissolved and removed is formed on the end surface of the partition wall metal layer 65 by an electrolytic method. An adhesive layer 77 for bonding and an ink inlet (not shown) are formed. In this case, the DFR layer 48 on the diaphragm 47 side becomes unnecessary.

As described above, the adhesive pattern layer and the ink inlet are formed with high accuracy and high efficiency by forming the adhesive organic film having the adhesive function and the property of not being dissolved and removed on the partition metal layer. can do.

In each of the above embodiments, the liquid chamber partition is formed of electroformed metal integrally with the diaphragm or the nozzle forming member. However, the liquid chamber partition is formed of the electroformed metal integrally with the diaphragm and the nozzle forming member. It can also be formed of metal.

[0053]

As described above, according to the ink-jet head of the first aspect, since the liquid chamber partition is formed integrally with the diaphragm and the electroformed metal, the rigidity of the liquid chamber partition is increased, and Resonance between the liquid chambers and the vibration of the nozzle plate due to the pressure change and impact force of the ink liquid chamber due to the mechanical conversion element are reduced, the nozzle holes are increased in density, the printing speed is increased (the maximum driving frequency of the piezoelectric element is increased ), And the image quality is improved.

According to the ink jet head of the second aspect, in the ink jet head of the first aspect, since most of the liquid chamber partition walls are formed of electroformed metal, the rigidity of the liquid chamber partition walls becomes higher, and It is possible to further increase the density of holes and the printing speed.

According to a third aspect of the present invention, there is provided a method for manufacturing an ink jet head according to the first or second aspect, wherein the liquid chamber is formed by using an electroformed substrate having excellent adhesion to an electroformed metal. A partition metal layer forming a partition is formed by electroforming, and after cleaning the surface of the partition metal layer, a diaphragm metal layer forming a diaphragm portion of a diaphragm is formed on the partition metal layer by electroforming, and further the diaphragm is formed. Since the joining metal layer that forms the joining portion with the electromechanical transducer and the joining portion with the support portion is formed on the metal layer by electroforming, the diaphragm integrally formed with the liquid chamber partition can be easily and stably manufactured. It becomes possible to do.

According to the method of manufacturing an ink jet head of claim 4, in the method of manufacturing an ink jet head of claim 3, an adhesive organic film having an adhesive function and having a property of not being dissolved and removed is formed on the partition metal layer. Since the film is formed, the bonding layer with the nozzle forming member, the ink inlet, and the like can be easily formed.

According to the ink jet head of the fifth aspect, since the liquid chamber partition is formed integrally with the nozzle forming member by the electroformed metal, the rigidity of the liquid chamber partition is increased, and the ink chamber formed by the electromechanical conversion element is formed. Resonance between liquid chambers due to pressure change and impact force and vibration of the nozzle plate are reduced, and it is possible to respond to higher density of nozzle holes and higher printing speed (highest driving frequency of piezoelectric element). Thus, the image quality is improved.

According to the ink jet head of the sixth aspect, in the ink jet head of the fifth aspect, since most of the liquid chamber partition wall is formed of electroformed metal, the rigidity of the liquid chamber partition wall is increased, and It is possible to further increase the density of holes and the printing speed.

According to a method of manufacturing an ink jet head according to claim 7, in the method of manufacturing an ink jet head according to claim 5 or 6, a nozzle is formed by using an electroformed substrate having excellent adhesion to an electroformed metal. Since the nozzle metal layer forming the member is formed by electroforming and the surface of the nozzle metal layer is cleaned, the partition metal layer forming the liquid chamber partition is formed by electroforming on the nozzle metal layer. It is possible to easily and stably manufacture a nozzle forming member integrally formed with a chamber partition. .

According to the method of manufacturing an ink jet head of claim 8, in the method of manufacturing an ink jet head of claim 7, after the partition wall metal layer is formed by electroforming, the partition wall metal layer has an adhesive function, Since the adhesive organic film having the property of not being dissolved and removed is formed, the bonding layer with the vibration plate, the ink inlet, and the like can be easily formed.

According to a ninth aspect of the present invention, in the method of manufacturing an ink jet head according to any one of the third to fourth aspects, an electroformed substrate for depositing an electroformed metal is provided. Is made of a material that can selectively dissolve and remove only the electroformed substrate without dissolving the electroformed metal, so that the adhesion between the unstable electroformed substrate and the electroformed deposited metal The adjustment process can be omitted.

According to the ink jet head of the tenth aspect, since a part of the liquid chamber partition wall is formed integrally with the diaphragm and the nozzle forming member by electroforming metal, the rigidity of the liquid chamber partition wall increases, and Resonance between the liquid chambers and the vibration of the nozzle plate due to the pressure change and impact force of the ink liquid chamber due to the mechanical conversion element are reduced, the nozzle holes are increased in density, the printing speed is increased (the maximum driving frequency of the piezoelectric element is increased) ), And the image quality is improved. The configuration was adopted.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of an essential part of an ink jet head according to a first embodiment of the present invention.

FIG. 2 is a schematic cross-sectional explanatory view illustrating a manufacturing process of a diaphragm of the inkjet head.

FIG. 3 is a schematic sectional explanatory view for explaining a manufacturing process of a nozzle forming member of the inkjet head.

FIG. 4 is a schematic cross-sectional explanatory view for explaining a modified example on the diaphragm side of the inkjet head.

FIG. 5 is a schematic sectional view of an essential part of an ink jet head according to a second embodiment of the present invention.

FIG. 6 is a schematic sectional explanatory view for explaining a manufacturing process of a nozzle forming member of the inkjet head.

FIG. 7 is a schematic cross-sectional explanatory view for explaining a manufacturing process of the diaphragm of the inkjet head.

FIG. 8 is a schematic cross-sectional explanatory view illustrating a modified example of the nozzle plate side of the inkjet head.

[Explanation of symbols]

1, 41: drive section, 2, 42: liquid chamber section, 3, 43: substrate, 4, 44: piezoelectric element, 5, 45: support section, 7, 47
... diaphragm, 8, 49 ... liquid chamber partition, 9, 48 ... DFR layer,
10, 50: nozzle plate, 11, 51: ink chamber, 16, 56: nozzle hole.

Claims (10)

[Claims] A diaphragm having a diaphragm deformed by displacement of an electromechanical transducer, a liquid chamber partition forming an ink liquid chamber corresponding to the diaphragm, and a nozzle hole communicating with the ink liquid chamber. Wherein the liquid chamber partition is formed integrally with the vibration plate by electroforming metal. 2. The ink-jet head according to claim 1, wherein most of the liquid chamber partition wall is formed of the electroformed metal. 3. The method of manufacturing an ink jet head according to claim 1, wherein the partition wall metal layer for forming the liquid chamber partition wall is formed by using an electroformed substrate having excellent adhesion to an electroformed metal. After the surface of the partition metal layer is cleaned, a diaphragm metal layer for forming a diaphragm portion of the diaphragm is electroformed on the partition metal layer, and further, an electromechanical conversion element is formed on the diaphragm metal layer. A method for manufacturing an ink jet head, wherein a joining metal layer forming a joining portion and a joining portion with a pillar portion is formed by electroforming. 4. A method for manufacturing an ink jet head according to claim 3, wherein an adhesive organic film having an adhesive function and having a property of not being dissolved and removed is formed on the partition metal layer. Head manufacturing method. 5. A diaphragm having a diaphragm deformed by a displacement of an electromechanical transducer, a liquid chamber partition forming an ink liquid chamber corresponding to the diaphragm, and a nozzle hole communicating with the ink liquid chamber. In the ink jet head, the liquid chamber partition is formed integrally with the nozzle forming member by electroforming metal. 6. The ink jet head according to claim 5, wherein most of the liquid chamber partition wall is formed of the electroformed metal. 7. The method for manufacturing an ink jet head according to claim 5, wherein the nozzle metal layer for forming the nozzle forming member is formed by using an electroformed substrate having excellent adhesion to the electroformed metal. Forming a nozzle metal layer, cleaning the surface of the nozzle metal layer, and electroforming a partition wall metal layer for forming a liquid chamber partition wall on the nozzle metal layer. 8. The method for manufacturing an ink jet head according to claim 7, wherein after forming the partition metal layer by electroforming, an adhesive organic film having an adhesive function on the partition metal layer and having a property of not being dissolved and removed. A method for manufacturing an ink jet head, characterized by forming a film. 9. The method of manufacturing an ink jet head according to claim 3, wherein the electroformed metal is dissolved in an electroformed substrate for depositing the electroformed metal. A method for manufacturing an ink jet head, which uses a material which can selectively dissolve and remove only an electroformed substrate without using an electroformed substrate. 10. A diaphragm having a diaphragm deformed by the displacement of an electromechanical transducer, a liquid chamber partition forming an ink liquid chamber corresponding to the diaphragm, and a nozzle hole communicating with the ink liquid chamber. A part of the liquid chamber partition wall is formed integrally with the vibration plate and the nozzle forming member from electroformed metal, respectively.