JPH10340695A - X-ray generator - Google Patents
X-ray generatorInfo
- Publication number
- JPH10340695A JPH10340695A JP16503597A JP16503597A JPH10340695A JP H10340695 A JPH10340695 A JP H10340695A JP 16503597 A JP16503597 A JP 16503597A JP 16503597 A JP16503597 A JP 16503597A JP H10340695 A JPH10340695 A JP H10340695A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- shutter
- ray generator
- acid
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- X-Ray Techniques (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、内部で発生したＸ
線をＸ線窓を通して外部へ取り出すようにしたＸ線発生
装置に関する。特に望ましくは、Ｘ線窓の周辺が冷却水
等によって冷却される形式のＸ線発生装置に関する。The present invention relates to an internally generated X.
The present invention relates to an X-ray generator configured to take out rays through an X-ray window to the outside. More preferably, the present invention relates to an X-ray generator in which the periphery of the X-ray window is cooled by cooling water or the like.
【０００２】[0002]
【従来の技術】Ｘ線を用いて試料の分析を行うＸ線装置
は、従来より、種々のものが知られている。このＸ線装
置には、一般に、Ｘ線を発生するためのＸ線発生装置が
含まれる。このＸ線発生装置は、通常、ケーシングの内
部で発生したＸ線をケーシング壁の適所に設けたＸ線窓
を通して外部へ取り出している。そして、このＸ線窓の
近傍には、開閉動作を行うＸ線シャッタが設けられるこ
とが多く、このＸ線シャッタを開けばＸ線を外部へ取り
出すことができ、Ｘ線シャッタを閉じればＸ線が外部へ
発散することを阻止できる。2. Description of the Related Art Various X-ray apparatuses for analyzing a sample using X-rays have been known. The X-ray apparatus generally includes an X-ray generator for generating X-rays. This X-ray generator usually takes out X-rays generated inside the casing through an X-ray window provided at an appropriate position on the casing wall. In the vicinity of the X-ray window, there is often provided an X-ray shutter for performing an opening and closing operation. Opening the X-ray shutter allows X-rays to be extracted to the outside. Can be prevented from escaping to the outside.
【０００３】Ｘ線を確実に遮断できるようにするためＸ
線シャッタは、通常、鉛、タングステン等といった重金
属の材料を用いて形成される。また、そのＸ線シャッタ
を摺動可能に支持するシャッタベースは、黄銅、黄銅に
ＣｒやＮｉをメッキした材料、あるいはステンレス等に
よって形成されることが多い。[0003] In order to reliably block X-rays, X
The line shutter is usually formed using a heavy metal material such as lead or tungsten. A shutter base that slidably supports the X-ray shutter is often made of brass, a material in which brass is plated with Cr or Ni, or stainless steel.
【０００４】ところで、Ｘ線を取り出すためのＸ線窓の
周辺部分は、Ｘ線ターゲットで反射した電子が当たるこ
とにより温度が上昇する傾向にあり、その温度上昇を防
ぐため、冷却水等といった冷媒によって該部を冷却する
ことが一般的である。また、Ｘ線シャッタの摺動を滑ら
かにするため、そのＸ線シャッタの表面に潤滑材、例え
ば（Ｍｏ）モリブデンコート等を設けることもある。[0004] Incidentally, the temperature of the peripheral portion of the X-ray window for extracting X-rays tends to increase due to the impact of electrons reflected by the X-ray target. To prevent the temperature increase, a coolant such as cooling water is used. It is common to cool the part by means of Further, in order to smoothly slide the X-ray shutter, a lubricant, for example, a (Mo) molybdenum coat may be provided on the surface of the X-ray shutter.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記従
来のＸ線発生装置においては、Ｘ線窓の周辺が冷却され
るときにそのＸ線窓の周辺に設けたＸ線シャッタも冷却
されて低温となり、そのＸ線シャッタの周辺の雰囲気は
結露を生じやすい又は湿度の高い状態になる。このよう
な状態下でＸ線を発生させると、空気中の酸素、窒素、
水分等に放射線が作用して硝酸（ＨＮＯ3）が生成す
る。生成したこの硝酸はＸ線シャッタ及び／又はシャッ
タベースと化学的に反応して硝酸化合物を生成すること
が多い。つまり、Ｘ線シャッタ及びシャッタベースが腐
食することが多い。本発明者の分析結果によれば、 Ｎｉ（ＮＯ3）2６Ｈ2Ｏ、Ｎｉ（ＮＯ3）2２Ｈ2Ｏ、Ｃｕ
2（ＯＨ）3ＮＯ3 等の各種生成物がＸ線シャッタ及び／又はシャッタベー
スに付着することが分かった。このようにＸ線シャッタ
等に生成物が付着すると、シャッタベースに対するＸ線
シャッタの摺動動作が正常にできなくなり、その結果、
Ｘ線を十分に遮断できなくなるおそれがあった。However, in the above conventional X-ray generator, when the periphery of the X-ray window is cooled, the X-ray shutter provided around the X-ray window is also cooled to a low temperature. The atmosphere around the X-ray shutter is likely to cause dew condensation or high humidity. When X-rays are generated under such conditions, oxygen, nitrogen,
Radiation acts on moisture and the like to generate nitric acid (HNO 3 ). The produced nitric acid often reacts chemically with the X-ray shutter and / or shutter base to produce a nitric acid compound. That is, the X-ray shutter and the shutter base often corrode. According to the inventor's analysis, Ni (NO 3) 2 6H 2 O, Ni (NO 3) 2 2H 2 O, Cu
It was found that various products such as 2 (OH) 3 NO 3 adhere to the X-ray shutter and / or shutter base. When the product adheres to the X-ray shutter or the like, the sliding operation of the X-ray shutter with respect to the shutter base cannot be performed normally. As a result,
There is a possibility that X-rays cannot be sufficiently blocked.
【０００６】本発明は、上記の問題点に鑑みて成された
ものであって、Ｘ線シャッタの開閉動作を長期間にわた
って正常に行うことができるＸ線発生装置を提供するこ
とを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide an X-ray generator capable of normally opening and closing an X-ray shutter for a long period of time. .
【０００７】[0007]
【課題を解決するための手段】上記の目的を達成するた
め、本発明に係るＸ線発生装置は、内部で発生したＸ線
をＸ線窓を通して外部へ取り出すようにしたＸ線発生装
置であって、上記Ｘ線窓の周辺部分に一対の摺動部材を
有し、そして、それらの摺動部材の少なくとも一方は酸
に侵され難い材料を含むことを特徴とする。Ｘ線窓の周
辺部分は自然に冷却されたり、あるいは、冷却水等によ
って強制的に冷却される。In order to achieve the above-mentioned object, an X-ray generator according to the present invention is an X-ray generator for extracting X-rays generated inside to the outside through an X-ray window. The X-ray window has a pair of sliding members in a peripheral portion thereof, and at least one of the sliding members contains a material which is hardly attacked by an acid. The peripheral portion of the X-ray window is cooled naturally, or is forcibly cooled by cooling water or the like.
【０００８】Ｘ線窓の周辺が冷却されると該部の雰囲気
は湿度が高い状態となる。この湿度の高い空気がＸ線す
なわち放射線に曝されると、例えば硝酸が生成され、そ
の結果、一対の摺動部材が化学的に反応して酸化物、例
えば硝酸化合物が生成し易く、すなわち一対の摺動部材
が腐食し易くなる。しかしながら本発明のように、一対
の摺動部材のうちの少なくともいずれか一方を酸に侵さ
れ難い材料によって形成しておけば、それらの摺動部材
が腐食することがなくなり、それ故、摺動部材の摺動動
作を長期間にわたって円滑に行うことができるようにな
る。[0008] When the periphery of the X-ray window is cooled, the atmosphere in the portion becomes in a state of high humidity. When this humid air is exposed to X-rays or radiation, for example, nitric acid is generated, and as a result, a pair of sliding members chemically react to generate an oxide, for example, a nitric acid compound. Of the sliding member is easily corroded. However, as in the present invention, if at least one of the pair of sliding members is formed of a material that is not easily attacked by acid, the sliding members are not corroded, and therefore, the sliding member is not slid. The sliding operation of the member can be performed smoothly over a long period of time.
【０００９】上記構成において「一対の摺動部材」とし
ては、必要に応じてＸ線発生装置の中に設けられる種々
の部材が考えられるが、例えば、Ｘ線が外部へ発散する
のを阻止するＸ線シャッタと、そのＸ線シャッタを摺動
可能に支持するシャッタベースとがその「一対の摺動部
材」を構成することがある。この場合には、それらのＸ
線シャッタ及びシャッタベースの少なくとも一方が酸に
侵され難い材料を含んで形成される。望ましくは、それ
らの両方を酸に侵され難い材料を含んで形成する。In the above configuration, various members provided in the X-ray generator as necessary may be considered as the "pair of sliding members". For example, X-rays are prevented from diverging to the outside. An X-ray shutter and a shutter base that slidably supports the X-ray shutter may constitute the “pair of sliding members”. In this case, those X
At least one of the linear shutter and the shutter base is formed including a material that is hardly attacked by acid. Desirably, both of them are formed including a material which is hardly attacked by an acid.
【００１０】一対の摺動部材を酸に侵され難い材料によ
って形成するという場合の「酸」としては任意の酸が考
えられるが、本発明者の実験によれば、「硝酸」に侵さ
れ難い材料によってそれらの摺動部材を形成することが
最も実用的であることが見い出された。[0010] When the pair of sliding members is formed of a material which is hardly attacked by acid, any acid can be considered as the "acid". However, according to an experiment conducted by the present inventors, it is hard to be attacked by "nitric acid". It has been found that forming the sliding members by material is most practical.
【００１１】上記構成において「酸に侵され難い材料」
としては、例えば、Ｔａ（タンタル）、Ｒｈ（ロジウ
ム）、Ｉｒ（イリジウム）、Ｐｔ（白金）、Ａｕ（金）
のいずれか１つ又はそれらのうちの少なくともいずれか
１つを含む合金等が考えられる。発明者の実験によれ
ば、Ｔａを用いるのが実用的であった。In the above structure, "a material which is hardly attacked by acid"
For example, Ta (tantalum), Rh (rhodium), Ir (iridium), Pt (platinum), Au (gold)
Or an alloy containing at least one of them. According to the experiment of the inventor, it was practical to use Ta.
【００１２】摺動部材を酸に侵され難い材料を含んで形
成するための具体的な方法としては、例えば、摺動部材
の全体をそのような酸に侵され難い材料によって形成す
る方法や、ベース材料を重金属によって形成しそのベー
ス材料の上に酸に侵され難い材料を表面コーティングす
るという方法等が考えられる。「重金属」としては、例
えば、鉛、タングステン、タングステン合金等が該当す
る。「表面コーティング」の方法としては、蒸着、イオ
ンプレーティング、ＣＶＤ、ＰＤＶ、メッキ等といった
各種の膜形成方法が考えられる。酸に侵され難い材料を
表面コーティングする方法を採用すれば、摺動部材の全
体を酸に侵され難い材料、例えばＴａ単体で形成する場
合に比べて、材料コストを低減できる。As a specific method for forming the sliding member including a material which is hardly attacked by an acid, for example, a method of forming the entire sliding member by such a material which is hardly attacked by an acid, A method is conceivable in which a base material is formed of a heavy metal, and a material that is hardly attacked by an acid is coated on the base material. As the “heavy metal”, for example, lead, tungsten, a tungsten alloy and the like correspond. As the method of “surface coating”, various film forming methods such as vapor deposition, ion plating, CVD, PDV, and plating can be considered. By adopting a method of surface-coating a material which is hardly attacked by acid, the material cost can be reduced as compared with a case where the entire sliding member is formed of a material which is hardly attacked by acid, for example, Ta alone.
【００１３】[0013]
【発明の実施の形態】図１は、本発明に係るＸ線発生装
置の一実施形態を示している。このＸ線発生装置は、通
電によって熱電子を発生するフィラメント１と、そのフ
ィラメント一に対向して配置されたターゲット２と、そ
れらを気密に包囲するケーシング３とを有する。ケーシ
ング３の適所にはＸ線が透過できる材料、例えばＢｅ
（ベリリウム）によってＸ線窓４が形成されている。ま
た、そのＸ線窓４の近傍には冷却水を通すための冷却水
通路６が設けられる。FIG. 1 shows an embodiment of an X-ray generator according to the present invention. This X-ray generator includes a filament 1 that generates thermoelectrons by energization, a target 2 disposed opposite to the filament 1, and a casing 3 that hermetically surrounds the target. A material which can transmit X-rays, for example, Be,
(Beryllium) forms the X-ray window 4. A cooling water passage 6 for passing cooling water is provided near the X-ray window 4.
【００１４】ケーシング３の内部は気密に密閉され、そ
の適所には、排気ポンプを含む真空排気系（図示せず）
が接続される。そして、その真空排気系の作用により、
ケーシング３の内部が真空状態に排気される。このよう
に、ケーシング３の内部を真空に設定する理由は、ケー
シング３内での放電の発生を防止すること、フィラメン
ト１の酸化を防止すること、そして、できるだけ低いフ
ィラメント温度で十分量の電子をフィラメント１から放
出させること等のためである。The inside of the casing 3 is hermetically sealed, and a vacuum evacuation system (not shown) including an evacuation pump is provided at an appropriate position.
Is connected. And, by the action of the evacuation system,
The inside of the casing 3 is evacuated to a vacuum. As described above, the reason why the inside of the casing 3 is set to a vacuum is to prevent the occurrence of discharge in the casing 3, to prevent the filament 1 from being oxidized, and to generate a sufficient amount of electrons at the lowest possible filament temperature. This is for releasing from the filament 1 or the like.
【００１５】真空雰囲気下でフィラメント１に通電がな
されると、そのフィラメント１から熱電子が放出され、
その熱電子が高速でターゲット２に衝突する。衝突した
熱電子の一部はＸ線に変化してターゲット２から発散
し、そのＸ線の一部がＸ線窓４を通して外部へ取り出さ
れる。こうして取り出されるＸ線がＸ線回折装置等とい
ったＸ線装置に利用される。When electricity is supplied to the filament 1 in a vacuum atmosphere, thermoelectrons are emitted from the filament 1,
The thermoelectrons collide with the target 2 at high speed. Some of the colliding thermoelectrons are converted into X-rays and diverge from the target 2, and some of the X-rays are extracted to the outside through the X-ray window 4. The X-rays thus extracted are used for an X-ray device such as an X-ray diffraction device.
【００１６】ターゲット２に衝突した熱電子の多くの部
分は熱に変化してケーシング３を加熱する。ケーシング
３が異常に高温になると各種機器に支障が生じるので、
ケーシング３の過熱は防止すべきである。ケーシング３
の壁内に設けた冷却水通路を流れる冷却水はケーシング
３を冷却してそれが過熱されることを防止する。Most of the thermoelectrons that have collided with the target 2 are converted to heat and heat the casing 3. If the casing 3 becomes unusually high temperature, various devices will be affected.
Overheating of the casing 3 should be prevented. Casing 3
The cooling water flowing through the cooling water passage provided in the wall cools the casing 3 to prevent it from being overheated.
【００１７】図１において、Ｘ線窓４の外側にはＸ線シ
ャッタ７が設けられる。このＸ線シャッタ７は、シャッ
タベース８によって矢印Ａ−Ａ’のように摺動可能に支
持される。このＸ線シャッタ７は、エアシリンダ、電磁
ソレノイド等といった動力源を含んだ駆動装置（図示せ
ず）に接続される。この駆動装置の働きによりＸ線シャ
ッタ７は、シャッタベース８との間で摺動しながら矢印
Ａの方向へ開き移動でき、さらに矢印Ａ’の方向へ閉ま
り移動できる。Ｘ線を取り出したいときにはＸ線シャッ
タ７を矢印Ａ’方向へ開いてＸ線の通過を許容し、それ
以外のときにはＸ線シャッタ７を矢印Ａ方向へ閉じてＸ
線の通過を阻止する。In FIG. 1, an X-ray shutter 7 is provided outside the X-ray window 4. The X-ray shutter 7 is slidably supported by a shutter base 8 as indicated by an arrow AA ′. The X-ray shutter 7 is connected to a driving device (not shown) including a power source such as an air cylinder and an electromagnetic solenoid. By the operation of the driving device, the X-ray shutter 7 can open and move in the direction of arrow A while sliding between the shutter base 8 and can close and move in the direction of arrow A '. When X-rays are to be taken out, the X-ray shutter 7 is opened in the direction of arrow A 'to allow the passage of X-rays.
Block the passage of the line.
【００１８】Ｘ線シャッタ７及びシャッタベース８は、
硝酸化合物を作り難い金属、すなわち、硝酸に対して腐
食し難い金属であるＴａ単体によって形成できる。ま
た、鉛やＷ（タングステン）等といったＸ線遮蔽能力の
高いベース材料の表面にＴａ板を貼り付けることによっ
ても形成できる。Ｔａは原子番号が７３であって、比較
的重元素であるからＸ線遮蔽能力が大きい。従って、Ｘ
線シャッタ７をＴａ単体で形成した場合にもかなり大き
なＸ線遮蔽能力を得ることができる。The X-ray shutter 7 and the shutter base 8 are
It can be formed of a metal which is hard to form a nitric acid compound, that is, Ta alone which is a metal which is hardly corroded by nitric acid. Further, it can also be formed by attaching a Ta plate to the surface of a base material having a high X-ray shielding ability such as lead or W (tungsten). Since Ta has an atomic number of 73 and is a relatively heavy element, it has a high X-ray shielding ability. Therefore, X
Even when the line shutter 7 is made of Ta alone, a considerably large X-ray shielding ability can be obtained.
【００１９】Ｔａの厚さを厚くすれば、さらに大きなＸ
線遮蔽能力を得ることができる。また、鉛等のベース材
料の表面にＴａ板を貼り付けるようにすれば、鉛を使用
する分だけＸ線遮蔽能力が向上する。また、その場合に
は、高価なＴａの使用量を減らすことができるので、材
料コストを低減できる。なお、シャッタベース８に関し
ては、Ｘ線が当たる中心部分のみをＴａによって形成す
るようにしても良い。By increasing the thickness of Ta, a larger X
Line shielding ability can be obtained. Further, if a Ta plate is attached to the surface of a base material such as lead, the X-ray shielding ability is improved by the amount of lead used. Also, in that case, the amount of expensive Ta used can be reduced, so that the material cost can be reduced. In addition, regarding the shutter base 8, only the central portion where the X-rays strike may be formed of Ta.
【００２０】一般に、Ｔａは放射線及び水分を含む雰囲
気下で最も硝酸化合物を作り難い金属であるので、本実
施形態のようにＴａを用いてＸ線シャッタ７及びシャッ
タベース８を形成すれば、Ｘ線シャッタ７のまわりに硝
酸化合物が生成すること、換言すればＸ線シャッタ７等
が腐食することを長期間にわたって防止でき、従って、
Ｘ線シャッタ７の開閉を長期間にわたって円滑に維持で
きる。In general, Ta is a metal which is most difficult to form a nitric acid compound in an atmosphere containing radiation and moisture. Therefore, if the X-ray shutter 7 and the shutter base 8 are formed using Ta as in this embodiment, X The generation of nitric acid compounds around the X-ray shutter 7, in other words, the corrosion of the X-ray shutter 7 and the like can be prevented for a long period of time.
The opening and closing of the X-ray shutter 7 can be maintained smoothly for a long period of time.
【００２１】以上、好ましい実施形態を挙げて本発明を
説明したが、本発明はその実施形態に限定されるもので
はなく、請求の範囲に記載した発明の範囲内で種々に改
変できる。例えば、上記の実施形態ではＸ線窓４の周辺
に配設される一対の摺動部材としてＸ線シャッタ７及び
シャッタベース８を考えたが、必要に応じて他の摺動機
構がＸ線窓４の周辺に配設される場合には、その摺動機
構に対しても本発明を適用できる。As described above, the present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the embodiments, and can be variously modified within the scope of the invention described in the claims. For example, in the above embodiment, the X-ray shutter 7 and the shutter base 8 are considered as a pair of sliding members disposed around the X-ray window 4. In the case where the present invention is arranged in the vicinity of the sliding member 4, the present invention can be applied to the sliding mechanism.
【００２２】また、上記の実施形態では、Ｘ線シャッタ
７及びシャッタベース８の間に硝酸化合物が生成される
場合にそれらの各部材を硝酸に強い材料、例えばＴａを
含んで形成することにした。しかしながら硝酸に強い材
料として、Ｔａに代えて、Ｒｈ、Ｉｒ、Ｐｔ、Ａｕのい
ずれか１つ又はそれらのうちの少なくともいずれか１つ
を含む合金を用いることもできる。Further, in the above embodiment, when a nitric acid compound is generated between the X-ray shutter 7 and the shutter base 8, each of those members is formed to contain a material resistant to nitric acid, for example, Ta. . However, instead of Ta, an alloy containing any one of Rh, Ir, Pt, and Au or an alloy containing at least one of them can be used as the material resistant to nitric acid.
【００２３】また、上記の実施形態では、Ｘ線シャッタ
７等が硝酸化合物を生成し易い状況下に置かれる場合を
考えたが、このような状況に代えて、Ｘ線シャッタ７等
が硝酸以外の酸化合物を生成し易い環境下に置かれる場
合には、Ｘ線シャッタ７等をそのような硝酸以外の酸に
強い材料によって形成することができる。Further, in the above-described embodiment, the case where the X-ray shutter 7 and the like are placed in a state where a nitric acid compound is easily generated is considered. When the X-ray shutter 7 and the like are formed in an environment where the acid compound is easily generated, the X-ray shutter 7 and the like can be formed of such a material resistant to acids other than nitric acid.
【００２４】[0024]
【発明の効果】請求項１記載のＸ線発生装置によれば、
一対の摺動部材を酸に侵され難い材料によって形成した
ので、それらの摺動部材が酸によって腐食することがな
くなり、それ故、摺動部材の摺動動作を長期間にわたっ
て円滑に行うことができるようになる。According to the X-ray generator of the first aspect,
Since the pair of sliding members is formed of a material which is hardly attacked by acid, the sliding members are not corroded by acid, and therefore, the sliding operation of the sliding members can be performed smoothly for a long period of time. become able to.
【００２５】請求項２記載のＸ線発生装置は、Ｘ線窓の
周辺部分が冷却水等といった冷却媒体によって強制的に
冷却される場合を想定している。この場合には、一対の
摺動部材に関する冷却の程度が大きくなるので、それら
の腐食はより一層ひどくなるおそれがある。従って、こ
のようなＸ線発生装置に対して請求項１の構成を採用す
ればより一層効果的である。The X-ray generator according to the second aspect is based on the assumption that the periphery of the X-ray window is forcibly cooled by a cooling medium such as cooling water. In this case, the degree of cooling of the pair of sliding members is increased, so that their corrosion may be further increased. Therefore, it is more effective to adopt the structure of claim 1 for such an X-ray generator.
【００２６】請求項３記載のＸ線発生装置によれば、従
来より腐食によって動作に支障が起き易かったＸ線シャ
ッタに関して、それが腐食することを確実に防止でき、
よって、Ｘ線シャッタの信頼性を大きく向上できるよう
になった。According to the X-ray generating device of the third aspect, it is possible to reliably prevent the X-ray shutter from being corroded with respect to the X-ray shutter which has conventionally been liable to be affected by the operation due to corrosion.
Therefore, the reliability of the X-ray shutter can be greatly improved.
【００２７】請求項４記載のＸ線発生装置によれば、放
射線及び水分の両方を含む雰囲気を作り易い性質を有す
るＸ線発生装置に関して、Ｘ線シャッタ等といった摺動
部材が硝酸化合物を生成することを確実に防止できる。According to the X-ray generator of the fourth aspect, with respect to the X-ray generator having a property of easily creating an atmosphere containing both radiation and moisture, a sliding member such as an X-ray shutter generates a nitrate compound. Can be reliably prevented.
【００２８】請求項５記載のＸ線発生装置によれば、Ｘ
線シャッタ等といった摺動部材が硝酸化合物を生成する
ことを確実に防止できる。According to the X-ray generator of the fifth aspect, X
It is possible to reliably prevent a sliding member such as a line shutter from generating a nitric acid compound.
【００２９】請求項６記載のＸ線発生装置によれば、摺
動部材のベース材料を重金属によって形成したのでその
摺動部材によってＸ線を確実に遮蔽できる。しかも、ベ
ース材料の表面にコーティングした耐酸性の材料によ
り、摺動部材の表面に酸化合物が生成することを確実に
防止でき、従って、摺動部材の円滑な摺動動作を長期間
にわたって確保できる。また、重金属は一般に耐酸性の
金属に比べて安価であるので、摺動部材を重金属と耐酸
性の金属の両方を用いて形成した本Ｘ線発生装置は、摺
動部材の全体を耐酸性の金属のみによって形成したＸ線
発生装置に比べて安価である。According to the X-ray generator of the present invention, since the base material of the sliding member is made of heavy metal, the sliding member can surely shield X-rays. Moreover, the acid-resistant material coated on the surface of the base material can reliably prevent the generation of an acid compound on the surface of the sliding member, and therefore, can ensure a smooth sliding operation of the sliding member for a long period of time. . In addition, since heavy metals are generally less expensive than acid-resistant metals, the present X-ray generator, in which the sliding member is formed using both heavy metals and acid-resistant metals, uses a sliding member that is entirely acid-resistant. It is cheaper than an X-ray generator made only of metal.
【００３０】[0030]
【図１】本発明に係るＸ線発生装置の一実施形態を示す
断面図である。FIG. 1 is a cross-sectional view showing one embodiment of an X-ray generator according to the present invention.
１ フィラメント ２ ターゲット ３ ケーシング ４ Ｘ線窓 ６ 冷却水通路 ７ Ｘ線シャッタ（摺動部材） ８ シャッタベース（摺動部材） Reference Signs List 1 filament 2 target 3 casing 4 X-ray window 6 cooling water passage 7 X-ray shutter (sliding member) 8 shutter base (sliding member)
───────────────────────────────────────────────────── フロントページの続き (72)発明者 塚本 勝美 東京都昭島市松原町３丁目９番12号 理学 電機株式会社拝島工場内 (72)発明者 渡辺 好章 東京都昭島市松原町３丁目９番12号 理学 電機株式会社拝島工場内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Katsumi Tsukamoto, Inventor 3-9-12 Matsubara-cho, Akishima-shi, Tokyo Inside Rikajima Plant, Rigaku Electric Co., Ltd. (72) Yoshiaki Watanabe 3-9-1, Matsubara-cho, Akishima-shi, Tokyo No. Rigaku Denki Co., Ltd.
Claims (6)
部へ取り出すようにしたＸ線発生装置において、 上記Ｘ線窓の周辺部分に位置する一対の摺動部材を有
し、そして、それらの摺動部材の少なくとも一方は酸に
侵され難い材料を含むことを特徴とするＸ線発生装置。1. An X-ray generator for taking out X-rays generated inside through an X-ray window, comprising: a pair of sliding members located at a peripheral portion of the X-ray window; An X-ray generator, wherein at least one of the sliding members contains a material which is hardly attacked by acid.
上記Ｘ線窓の周辺を冷却する冷却手段を有することを特
徴とするＸ線発生装置。2. The X-ray generator according to claim 1, wherein
An X-ray generator comprising cooling means for cooling the periphery of the X-ray window.
置において、 上記一対の摺動部材は、Ｘ線が外部へ発散するのを阻止
するＸ線シャッタと、そのＸ線シャッタを摺動可能に支
持するシャッタベースであり、 上記Ｘ線シャッタ及びシャッタベースの少なくとも一方
は酸に侵され難い材料を含むことを特徴とするＸ線発生
装置。3. The X-ray generator according to claim 1, wherein said pair of sliding members comprises: an X-ray shutter for preventing X-rays from diverging to the outside; An X-ray generator, which is a shutter base movably supported, wherein at least one of the X-ray shutter and the shutter base includes a material that is hardly attacked by acid.
もいずれか１つに記載のＸ線発生装置において、上記酸
は硝酸であることを特徴とするＸ線発生装置。4. The X-ray generator according to claim 1, wherein the acid is nitric acid.
もいずれか１つに記載のＸ線発生装置において、酸に侵
され難い上記材料は、Ｔａ、Ｒｈ、Ｉｒ、Ｐｔ、Ａｕの
いずれか１つ又はそれらのうちの少なくともいずれか１
つを含む合金であることを特徴とするＸ線発生装置。5. The X-ray generator according to claim 1, wherein the material hardly attacked by an acid is any one of Ta, Rh, Ir, Pt, and Au. One or at least one of them
An X-ray generator, comprising:
もいずれか１つに記載のＸ線発生装置において、上記一
対の摺動部材の少なくとも一方は、重金属によって形成
されたベース材料の上に、酸に侵され難い材料を表面コ
ーティングすることによって形成されることを特徴とす
るＸ線発生装置。6. The X-ray generator according to claim 1, wherein at least one of the pair of sliding members is provided on a base material formed of heavy metal. An X-ray generator formed by surface-coating a material hardly attacked by an acid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16503597A JP3685431B2 (en) | 1997-06-06 | 1997-06-06 | X-ray generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16503597A JP3685431B2 (en) | 1997-06-06 | 1997-06-06 | X-ray generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10340695A true JPH10340695A (en) | 1998-12-22 |
| JP3685431B2 JP3685431B2 (en) | 2005-08-17 |
Family
ID=15804603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16503597A Expired - Fee Related JP3685431B2 (en) | 1997-06-06 | 1997-06-06 | X-ray generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3685431B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1213743A2 (en) * | 1999-03-26 | 2002-06-12 | Bede Scientific Instruments Limited | Method and apparatus for prolonging the life of an x-ray target |
| WO2002045122A3 (en) * | 2000-12-01 | 2002-10-03 | Koninkl Philips Electronics Nv | Cold-plate window in a metal-frame x-ray insert |
| JP2009087940A (en) * | 2007-09-28 | 2009-04-23 | Varian Medical Systems Technologies Inc | X-ray tube liquid-cooled window assembly |
| JP2009187947A (en) * | 2008-02-08 | 2009-08-20 | Varian Medical Systems Inc | X-ray tube, and x-ray tube cooling system |
| CN102610290A (en) * | 2011-01-12 | 2012-07-25 | 帕纳科有限公司 | X-Ray Shutter Arrangement |
| US9748070B1 (en) | 2014-09-17 | 2017-08-29 | Bruker Jv Israel Ltd. | X-ray tube anode |
| US11302508B2 (en) | 2018-11-08 | 2022-04-12 | Bruker Technologies Ltd. | X-ray tube |
-
1997
- 1997-06-06 JP JP16503597A patent/JP3685431B2/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1213743A2 (en) * | 1999-03-26 | 2002-06-12 | Bede Scientific Instruments Limited | Method and apparatus for prolonging the life of an x-ray target |
| EP1166317B1 (en) * | 1999-03-26 | 2004-01-21 | Bede Scientific Instruments Limited | Method and apparatus for prolonging the life of an x-ray target |
| US6778633B1 (en) | 1999-03-26 | 2004-08-17 | Bede Scientific Instruments Limited | Method and apparatus for prolonging the life of an X-ray target |
| EP1213743A3 (en) * | 1999-03-26 | 2007-02-21 | Bede Scientific Instruments Limited | Method and apparatus for prolonging the life of an x-ray target |
| WO2002045122A3 (en) * | 2000-12-01 | 2002-10-03 | Koninkl Philips Electronics Nv | Cold-plate window in a metal-frame x-ray insert |
| JP2009087940A (en) * | 2007-09-28 | 2009-04-23 | Varian Medical Systems Technologies Inc | X-ray tube liquid-cooled window assembly |
| JP2012114099A (en) * | 2007-09-28 | 2012-06-14 | Varian Medical Systems Inc | X-ray tube device and x-ray tube |
| JP2009187947A (en) * | 2008-02-08 | 2009-08-20 | Varian Medical Systems Inc | X-ray tube, and x-ray tube cooling system |
| CN102610290A (en) * | 2011-01-12 | 2012-07-25 | 帕纳科有限公司 | X-Ray Shutter Arrangement |
| EP2477191A3 (en) * | 2011-01-12 | 2014-07-02 | PANalytical B.V. | X-ray shutter arrangement |
| US9748070B1 (en) | 2014-09-17 | 2017-08-29 | Bruker Jv Israel Ltd. | X-ray tube anode |
| US11302508B2 (en) | 2018-11-08 | 2022-04-12 | Bruker Technologies Ltd. | X-ray tube |
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| Publication number | Publication date |
|---|---|
| JP3685431B2 (en) | 2005-08-17 |
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