JPH10335469A - Pattern data display device and its method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pattern data display device for speedily displaying layout data also for pattern data where a number of complex patterns are laid out and for efficiently performing visual verification. SOLUTION: The layout data of a semiconductor chip being inputted into a layout data display device are read by a reading part and data for each pattern being included in the pattern data are successively outputted to a rectangular part. With a pattern 61 that is inputted to the rectangular part, a center line is cut for each of straight line parts 63a-63e, vertical two sides are determined for two sides and straight line part being in parallel to the straight line part for each straight line part, and squares 64a-64e are extracted. The data of the detected squares 64a-64e are successively outputted to a display- processing part and are successively arranged on a window for display. Further, the inside is painted. Based on a control signal from a processing control part, the desired region of a window for display appears on the screen of the display part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a pattern data display device and a method for displaying pattern layout data at the time of manufacturing a semiconductor device on a display device so as to be visually recognizable.

[0002]

2. Description of the Related Art A semiconductor device lays out a circuit generated by circuit design or logic synthesis on a chip in a predetermined area, and finely processes and manufactures a wafer based on the layout data. In recent years, the automation of each process has been advanced, and in addition to the layout such as the arrangement and wiring of elements based on the designed circuit, the circuit design is often automatically generated by a method such as logic synthesis. However, at the present time, there still remains work to be performed manually, such as a wiring layout and a detailed layout that could not be laid out properly.
Also, no matter how the automation is advanced, it is necessary to visually confirm the final layout before starting actual processing such as mask manufacturing. Such manual work and confirmation work by the operator are performed by visually observing the pattern layout displayed on the display device.

[0003]

However, in recent years,
Since LSI patterns have become finer and more complex, the pattern density has increased, and the number of patterns has increased, the number of patterns to be processed in a display device for displaying a pattern layout has increased, and the display speed has slowed down.

In order to display such a layout pattern on a display device, for example, pattern data as shown in FIG. 7A as shown by the center line of the pattern is read out, and FIG. Is converted into a multi-vertex polygon pattern having a width as shown in Fig. 2 and having a two-dimensional spread, the outline of the pattern is obtained, and the obtained polygon pattern is arranged on a display window, and its line figure is displayed. Is performed to fill the inside of the.

However, when a polygon having multiple vertices is generated by giving a width to a line figure, an area corresponding to the width is secured in both directions of the center line to determine the sides of the pattern. Since it is necessary to find the intersection c of each side as shown in FIG. In particular, in the case of a path graphic or the like laid out so as to sew between elements, the shape becomes very complicated, and the processing for obtaining the outer shape takes time. Also, in the process of filling the inside of the pattern arranged in the display window, it takes a very long time for a polygon pattern having such a complicated shape.

In order to display such pattern data in which a large number of patterns are laid out, an enormous amount of processing is required to generate the display data, and the display speed is reduced. In other words, the response for display is slow. Has become a problem. If the response of the display device is slow, there is a problem in that the efficiency of work such as visual confirmation of a pattern by display is reduced, and thus improvement is demanded.

Accordingly, it is an object of the present invention to display layout data at high speed even for pattern data in which a large number of complicated patterns are laid out, and to efficiently perform operations such as visual confirmation of the pattern. It is an object of the present invention to provide a pattern data display device capable of performing such operations. Further, another object of the present invention is to display layout data at high speed even for pattern data in which a large number of complicated patterns are laid out, so that operations such as visual confirmation of the pattern can be efficiently performed. Another object of the present invention is to provide a simple pattern data display method.

[0008]

In order to solve the above-mentioned problem, the speed of the display is increased by approximating a path figure with a rectangle instead of a conventional polygon.

Therefore, the pattern data display device of the present invention is a pattern data display device for displaying the pattern data of the semiconductor device in a visually recognizable manner, wherein each pattern of the pattern data is rectangularized based on the input pattern data. And a display processing unit for displaying the pattern substantially by displaying the decomposed rectangles sequentially while filling the inside thereof.

Preferably, the rectangular dividing means decomposes each of the patterns into a set of rectangles while allowing the rectangles to overlap with each other. Also preferably, the apparatus further includes outer shape data obtaining means for obtaining data indicating the outer shape of each pattern included in the pattern data from the input pattern data, and wherein the rectangle dividing means indicates the obtained outer shape. Each pattern is decomposed into a set of rectangles based on the data. Specifically, the outer shape data obtaining means has a predetermined width in a width direction of data indicated by a line figure at a predetermined reference position such as a center line of each pattern of the input pattern data. By doing so, data indicating the outer shape is obtained.

[0011] More specifically, the rectangle dividing means detects a set of rectangles such that, when each pattern is represented by a set of rectangles, the indicated pattern becomes substantially equal to the outer shape of the pattern. By doing so, each pattern is decomposed into a set of rectangles. That is, in the case of a pattern that cannot be easily shown by a set of rectangles, such as a pattern bent at an angle other than 90 degrees, for example, it is approximated to a rectangle almost equal to the outer shape of the pattern and displayed by this rectangle. .

Further, the pattern data display method of the present invention comprises:
This is a method of displaying pattern data when the input pattern data is visually displayed on a desired display device, and acquires data indicating the outer shape of each pattern included in the pattern data from the input pattern data. Each pattern is decomposed into a set of rectangles based on the obtained data indicating the outer shape, and the decomposed rectangles are sequentially displayed by filling the inside thereof.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a block diagram illustrating a configuration of a layout data display device according to the present embodiment. The layout data display device 1 includes a reading unit 10, a rectangularization unit 20, a display processing unit 30, a display unit 40, and a processing control unit 50. First, the configuration of each unit will be described.

The reading unit 10 reads pattern data laid out for each semiconductor chip to be displayed on the display unit 40 based on a control signal from the processing control unit 50, and reads each pattern included in the pattern data. Are sequentially output to the rectangularization unit 20. The reading unit 1
The data of each pattern output from 0 is data of the position and shape of the center line of the pattern, and data of the width of the pattern with respect to the center line.

The rectifying unit 20 detects a set of rectangles indicating the outline of the pattern based on the data of each pattern sequentially input from the reading unit 10. In the rectification unit 20, first, based on the data of the center line of the pattern input from the reading unit 10, the center line is divided for each straight line portion. Then, based on the pattern width data input from the reading unit 10, two sides parallel to the straight line portion are determined, and two sides perpendicular to the straight line at a predetermined distance from both ends of the straight line portion. By determining the two sides, a rectangle defined by two sides parallel to the straight line portion and two sides perpendicular to the straight line portion is extracted. By extracting such a rectangle for each straight line portion obtained by dividing the center line of the pattern, a set of rectangles indicating the entire pattern can be detected. The rectifying unit 20 outputs the sequentially detected rectangular data to the display processing unit 30.

The display processing unit 30 sequentially arranges the rectangles on a window to be displayed on the display unit 40 based on the rectangular data input from the rectangularization unit 20, and fills the inside of the rectangle. Then, the display processing unit 30 outputs a predetermined area designated on the window based on the control signal from the processing control unit 50 so as to be displayed on the screen of the display unit 40. The display processing unit 30
Is composed of an arbitrary window system that controls the display unit 40, and a unit that instructs the window system to arrange a pattern or fill a desired area. In the present embodiment, the window system is X Window System version 11.

The display unit 40 is a display device for displaying data input from the display processing unit 30 on a screen.
This is a normal bitmap display.

The processing control unit 50 sequentially and appropriately processes each pattern of the read layout data, generates display data in which the layout data is visibly arranged, and displays a desired area on the display unit 40. The reading unit 10, the rectangularizing unit 20, and the display processing unit 30 are controlled so as to perform the operations described above. An input unit such as a keyboard (not shown) is connected to the processing control unit 50, and the operator specifies an area to be actually displayed on the display unit 40 in the layout data via the input unit. .

Next, the operation of the layout data display device 1 will be described. The layout data 60 of the semiconductor chip input to the layout data display device 1, for example, as shown in FIG. 2 as an overall view, is read by the reading unit 10 and is included in the pattern data, for example, as shown in FIG. Data for each pattern is sequentially output to the rectangularization unit 20. The pattern 61 shown in FIG. 3 is a path pattern, and in FIG.
2 is also shown, but the data of the center line 63 is actually input as the data of the pattern 61.

The data of each pattern input to the rectifying unit 20 divides the center line of each pattern into straight lines, and for each straight line, two sides parallel to the straight line and two sides perpendicular to the straight line. Determine and extract the rectangle. In the pattern 61 shown in FIG. 3, as shown in FIG.
Is divided into the five straight line portions 63a to 63e, and for each straight line portion, a line parallel to the straight line and a line perpendicular to the straight line at a predetermined distance based on the width of the pattern from the straight line are obtained. The rectangles 64a to 64e corresponding to the center lines 63a to 63e are obtained. As a result, pattern 6
1, rectangles 64a to 64e are detected. The data of the detected rectangles 64a to 64e are sequentially output to the display processing unit 30.

The display processing unit 30 uses the X window system as an interface substantially.
The sequentially input rectangle data is sequentially arranged on the display window, and the inside of the rectangle is filled. Then, based on a control signal from the processing control unit 50, a desired area of the display window is displayed on the screen of the display unit 40, for example, as shown in FIG.

As described above, in the layout data display device 1 according to the present embodiment, a pattern is decomposed into rectangles to be regarded as a set of rectangles. Therefore, when the bitmap data for display is actually generated, Can display a pattern with a complicated shape using only the arrangement and filling of a rectangle. Therefore, it is not necessary to perform complicated calculations such as outer shape calculation, and the processing time for obtaining a display pattern can be shortened. Further, since the filling is a simple rectangular filling process, this can be performed at a very high speed as compared with the conventional method in which a complicated multi-vertex polygon is directly filled. As a result, high-speed display can be performed even for layout data of a semiconductor device in which a large number of patterns are arranged at high density. That is,
The response of the display device can be improved, and the efficiency of visual confirmation of the pattern layout by display can be improved.

As shown in FIG. 6, the pattern input to the rectangularizing section 20 is a pattern 65 that includes a portion that is bent at an angle other than a right angle, that is, a portion that bends obliquely. In this case, as described above, the center line is divided into straight line portions 66a to 66d, and rectangles 67a to 67d are obtained for each straight line portion.
The bent portions 68a to 68c have extra portions 69a to 69f which do not exist in the original pattern. However, this extra part is very small compared to the other pattern body parts, and when displaying an outline of the pattern, if this pattern is displayed small on the display device,
There is no particular problem. By displaying such an approximate figure, it is possible to consistently apply the process of displaying and displaying a pattern in a set of rectangles even for a complicated pattern having such an oblique pattern. Can,
The display can be performed at high speed.

The present invention is not limited to the embodiment, and various modifications are possible. For example, in the processing in the layout data display device 1 of the present embodiment, when the pattern input to the rectangularization unit 20 is a pattern 65 that includes a portion that is bent obliquely as shown in FIG. In the pattern shown as a set of rectangles 67a to 67d, extra portions 69a to 69f which do not exist in the original pattern are generated. This is not a problem if a pattern displayed for normal use as described above is used. However, there may be a case where it is desired to display details of the pattern with high accuracy. In such a case, for such an oblique pattern, the outer shape may be obtained in the same manner as in the related art, and it may be displayed faithfully. Even in such a case, most of the patterns can accurately indicate the pattern as a set of rectangles as shown in the present embodiment, so that the display speed is significantly reduced as compared with the related art. no change. Therefore, the processing in such a case may be switched according to the required accuracy of the display image.

In this embodiment, the pattern data input to the layout data display device 1 has the data of the center line and the data of the width. However, this may be indicated by data of a position serving as an arbitrary reference of the pattern, that is, one of the sides of the outer shape, and is not limited to the center line. Further, data of the outer shape may be used as the input pattern data. Even in such a case, by disassembling the display into a set of rectangles and displaying the set, the time for the filling process is greatly reduced, and the display time is reduced.

[0026]

As described above, according to the present invention,
Since the pattern is decomposed into rectangles, it is regarded as a set of rectangles, so there is no need to perform complicated calculations such as outline calculation, and the pattern can be filled by simple rectangle filling processing, so the display pattern is obtained. Process can be shortened. As a result, high-speed display can be performed even for layout data of a semiconductor device in which a large number of patterns are arranged at high density. That is, the response of the display device can be improved, and the efficiency of visually checking the pattern layout by display can be improved.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a configuration of a layout data display device according to an embodiment of the present invention.

FIG. 2 is a diagram for explaining the entire pattern layout data input to the layout data display device shown in FIG. 1;

FIG. 3 is a diagram showing an example of a pattern included in pattern layout data input to the layout data display device shown in FIG.

FIG. 4 is a diagram showing a state in which the pattern shown in FIG. 3 is represented by a set of rectangles.

FIG. 5 is a diagram showing an example of layout data displayed by the layout data display device.

FIG. 6 is a diagram showing a state in which a pattern bent diagonally is represented by a set of rectangles in the layout data display device shown in FIG. 1;

FIG. 7 is a diagram for explaining a method of displaying pattern layout data.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Layout data display apparatus, 10 ... Reading part, 2
0: rectangular section, 30: display processing section, 40: display section, 50
… Process control unit

Claims (6)

[Claims] 1. A pattern data display device for displaying pattern data of a semiconductor device in a visually recognizable manner, wherein each pattern included in the pattern data is decomposed into a set of rectangles based on input pattern data. A pattern data display device comprising: a decomposing means; and a display processing means for displaying the decomposed rectangles sequentially while filling the inside thereof. 2. The pattern data display device according to claim 1, wherein said rectangular division means decomposes each of said patterns into a set of said rectangles while allowing mutual overlapping of the rectangles. 3. An external form data acquiring means for acquiring data indicating an external form of each pattern included in the pattern data from the input pattern data, wherein the rectangular dividing means indicates the acquired external form. 3. The pattern data display device according to claim 2, wherein each pattern is decomposed into a set of rectangles based on data. 4. The outline data acquiring means secures a predetermined width in a width direction of data indicated by a line figure at a predetermined reference position of each pattern of the input pattern data, thereby obtaining the outline data. 4. The pattern data display device according to claim 3, wherein data indicating the following is acquired. 5. The rectangle dividing means detects, when each pattern is represented by a set of rectangles, a set of rectangles such that the indicated pattern is substantially equal to the outer shape of the pattern, 2. The pattern data display device according to claim 1, wherein each of the patterns is decomposed into a set of rectangles. 6. A method for displaying pattern data when the input pattern data is visually displayed on a desired display device, the method comprising: displaying an outline of each pattern included in the pattern data based on the input pattern data; Acquiring the data indicating the shape, decomposing each pattern into a set of rectangles based on the acquired data indicating the outer shape, and displaying the decomposed rectangles by sequentially filling the inside thereof. Pattern data display method.