JPH10321926A - Piezo actuator - Google Patents
Piezo actuatorInfo
- Publication number
- JPH10321926A JPH10321926A JP9125330A JP12533097A JPH10321926A JP H10321926 A JPH10321926 A JP H10321926A JP 9125330 A JP9125330 A JP 9125330A JP 12533097 A JP12533097 A JP 12533097A JP H10321926 A JPH10321926 A JP H10321926A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- piezoelectric
- shielding
- piezoelectric actuator
- bent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
(57)【要約】
【課題】 共振を利用した圧電アクチュエータの安定変
位を確保し、微細な調整や高精度の部品加工の必要性を
軽減し、遮蔽部の形状・応用の自由度の向上や、遮蔽部
位置の自重による姿勢差課題や経時的変化課題を解決す
る。
【解決手段】 変位拡大部13と遮蔽部21を有する貼
り合わせ型圧電素子で変位部材の自由端に金属等を材料
とする弾性部材と圧電体12の積層部から遠ざかる方向
に折り曲げ形成される遮蔽部21を90度以下の角度で
折り曲げ形成する。
(57) [Summary] [PROBLEMS] To secure the stable displacement of a piezoelectric actuator using resonance, reduce the necessity of fine adjustment and high-precision component processing, improve the shape of the shielding part and the degree of freedom of application. In addition, the problem of the posture difference and the problem of the change with time due to the weight of the shielding portion are solved. SOLUTION: A laminated piezoelectric element having a displacement enlarging portion 13 and a shielding portion 21 is formed at a free end of a displacement member by bending at a free end of a displacement member in a direction away from a laminated portion of an elastic member made of metal or the like and a piezoelectric body 12. The part 21 is bent at an angle of 90 degrees or less.
Description
【0001】[0001]
【発明の属する技術分野】本発明は光センサの入射光の
断続、入射光路制御等として用いられるアクチュエータ
の中で貼り合わせ型圧電素子の圧電アクチュエータに関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuator of a bonded type piezoelectric element among actuators used for intermittent incident light of an optical sensor, incident light path control, and the like.
【0002】[0002]
【従来の技術】近年、電子レンジにおける調理物の温度
測定や、耳孔式体温計、エアコンにおけるエリアの温度
分布検出等の幅広い分野で使用され、今後ますます需要
が大きくなると思われる焦電型赤外線センサのチョッパ
として用いられたアクチュエータを例に説明する。2. Description of the Related Art In recent years, pyroelectric infrared sensors have been used in a wide range of fields such as temperature measurement of foods in microwave ovens, ear-hole type thermometers, and detection of temperature distribution in areas of air conditioners. An actuator used as a chopper will be described as an example.
【0003】焦電型赤外線センサは、LiTaO3単結
晶等の焦電体による焦電効果を利用したものである。焦
電体は自発分極を有しており常に表面電荷が発生する
が、大気中における定常状態では大気中の電荷と結びつ
いて電気的に中性を保っている。この集電体に赤外線が
入射すると焦電体の温度が変化し、これにともない表面
の電荷状態も中性状態が壊れて変化する。この表面に発
生する電荷を検知し、赤外線入射量を測定するのが焦電
型赤外線センサである。A pyroelectric infrared sensor utilizes the pyroelectric effect of a pyroelectric body such as a LiTaO 3 single crystal. The pyroelectric body has spontaneous polarization and always generates a surface charge. However, in a steady state in the atmosphere, the pyroelectric body is electrically neutral with the charge in the atmosphere. When infrared rays are incident on the current collector, the temperature of the pyroelectric body changes, and accordingly, the charge state of the surface also changes because the neutral state is broken. A pyroelectric infrared sensor detects charges generated on the surface and measures the amount of incident infrared light.
【0004】物体はその温度に応じた赤外線を放射して
おり、このセンサを用いることにより物体の位置や温度
を検出できる。焦電効果は赤外線の入射量の変化に起因
するものであり、焦電型赤外線センサとして物体の温度
を検出する場合、赤外線入射量を断続あるいは開閉し
て、強制的に変化させる必要がある。この手段として用
いられる機構をチョッパといい、入射する赤外線を強制
的に断続し検出物体の温度を検知する。従来のチョッパ
としては、電磁モータ及び圧電アクチュエータ等が用い
られていた。[0004] An object emits infrared rays according to its temperature, and the position and temperature of the object can be detected by using this sensor. The pyroelectric effect is caused by a change in the amount of incident infrared light, and when detecting the temperature of an object as a pyroelectric infrared sensor, it is necessary to intermittently or open and close the amount of infrared light to forcibly change the amount. A mechanism used as this means is called a chopper, and forcibly interrupts the incident infrared rays to detect the temperature of the detection object. As a conventional chopper, an electromagnetic motor, a piezoelectric actuator, and the like have been used.
【0005】一般的に金属等の弾性体平板に圧電体を接
着して貼り合わせ素子を構成して片端を固定し、圧電体
による歪みを利用して全体の屈曲運動を発生させるアク
チュエータは、一般には弾性体平板の両面に圧電体を接
着したものはバイモルフ型、片面にのみ接着したもの
は、ユニモルフ型と呼ばれており、また弾性体平板はシ
ムと呼ばれており、以下各部材をそのように呼ぶ。In general, an actuator that forms a bonding element by bonding a piezoelectric body to an elastic flat plate made of metal or the like, fixes one end thereof, and generates an entire bending motion by using the distortion caused by the piezoelectric body is generally used. An elastic flat plate is called a bimorph type with a piezoelectric body bonded to both sides, a unimorph type is bonded to only one side, and an elastic flat plate is called a shim. Call it.
【0006】図8はバイモルフ型圧電アクチュエータを
焦電型赤外線センサ用チョッパとし用いたものであり、
101はシム、102a,102bは圧電体、103は
遮蔽板、104は台座、105は固定具、106はシム
用配線、107a,107bは圧電体用配線、108は
赤外線検出部、109は赤外線である。FIG. 8 shows a bimorph type piezoelectric actuator used as a chopper for a pyroelectric infrared sensor.
101 is a shim, 102a and 102b are piezoelectric bodies, 103 is a shield plate, 104 is a pedestal, 105 is a fixture, 106 is a shim wiring, 107a and 107b are piezoelectric wirings, 108 is an infrared detector, and 109 is infrared light. is there.
【0007】シム101の両端には圧電体102a,1
02bがそれぞれ接着され、三者が一体となりバイモル
フ型素子が構成されている。圧電体102a,102b
は表面に電極印刷され、また接着面に対し垂直方向に分
極処理が施されており、圧電体102a,102bそれ
ぞれの分極の方向は、シムから取り出された配線106
と圧電体から取り出された圧電体用配線107a,10
7bによりシム101と圧電体102a,102bのそ
れぞれの間に加えられる電界の向きにより異なるが、圧
電体102a,102bが常にお互いに逆の方向に歪み
を発生させるように決められる。At both ends of the shim 101, piezoelectric bodies 102a, 1
02b are bonded to each other, and the three are integrated to form a bimorph-type element. Piezoelectric bodies 102a, 102b
Are printed with electrodes on the surface, and are subjected to polarization processing in the direction perpendicular to the bonding surface. The direction of polarization of each of the piezoelectric bodies 102a and 102b is determined by the wiring 106 extracted from the shim.
And the piezoelectric wires 107a, 10 taken out of the piezoelectric body
7b, it depends on the direction of the electric field applied between the shim 101 and the piezoelectric bodies 102a and 102b, but is determined so that the piezoelectric bodies 102a and 102b always generate distortion in directions opposite to each other.
【0008】すなわち、圧電体102a,102bの片
方が分極方向に伸びる方向で歪むとき、もう一方は分極
方向に縮むように印加電界の極性方向は決められる。バ
イモルフ型素子は台座104と固定具105とによりシ
ム101の部分と圧電体102a,102bの部分が同
時に挟み込まれることにより保持されているシム101
の圧電体102a,102bが接着されていない部分に
シム用配線106が取り付けられ、また圧電体102
a,102bの表面には圧電体用配線107a,107
bが取り付けられている。That is, the polarity direction of the applied electric field is determined so that when one of the piezoelectric bodies 102a and 102b is distorted in the direction of extension in the polarization direction, the other is contracted in the polarization direction. The bimorph-type element is held by the shim 101 and the piezoelectric members 102a and 102b being sandwiched by the pedestal 104 and the fixture 105 at the same time.
A wire 106 for shim is attached to a portion of the piezoelectric body 102a, 102b to which the piezoelectric body 102a, 102b is not bonded.
a, 102b are provided on the surfaces of piezoelectric wirings 107a, 107b.
b is attached.
【0009】バイモルフ型素子の自由端の先端部分には
遮蔽板103が取り付けられ、遮蔽板103の近傍には
赤外線検出部108が遮蔽板103及びバイモルフ型素
子に接触しないように配置される。シム用配線106及
び圧電体用配線107a,107bによりシム101と
圧電体102a,102bの間にそれぞれ電界が印加さ
れると、バイモルフ型素子は片端固定の屈曲運動を発生
し、先端に取り付けられた遮蔽板103は電界の印加方
向の変化に応じて往復運動を行う。この遮蔽板103の
往復運動により赤外線検出部108に入射する赤外線1
09を断続する。A shield plate 103 is attached to the free end of the bimorph-type element, and an infrared detector 108 is arranged near the shield plate 103 so as not to contact the shield plate 103 and the bimorph-type element. When an electric field is applied between the shim 101 and the piezoelectric bodies 102a and 102b by the shim wiring 106 and the piezoelectric wirings 107a and 107b, the bimorph-type element generates a bending motion fixed at one end and is attached to the tip. The shielding plate 103 reciprocates according to a change in the direction of application of the electric field. Due to the reciprocating motion of the shielding plate 103, the infrared rays 1
09 is intermittent.
【0010】しかしながら、上記構成のバイモルフ型チ
ョッパは、赤外線を断続するのに十分な振幅距離を得る
ために、固定部から先端の振幅部までの寸法を大きくす
る必要があり、また非常に高い駆動電圧が必要である。However, the bimorph-type chopper having the above-described structure requires a large dimension from the fixed portion to the tip amplitude portion in order to obtain a sufficient amplitude distance for intermittently transmitting infrared rays. Voltage is required.
【0011】そこで、従来の改善方法として、バイモル
フ型素子あるいはユニモルフ型素子の先端振幅部分に荷
重負荷を設けて共振周波数を低下させ、固定をシム部分
のみで行うことにより圧電体が脆性破壊することを防止
し、さらに必要に応じて固定部近傍のシムに切り欠きを
設けるなどの手段により共振周波数をより低下させるこ
とで、低駆動電圧で大きな変位を確保している。また、
変位を拡大するための部材を固定端の反対側の自由端部
分に取り付け、さらに変位拡大のための部材は圧電体を
貼り合わせた部分の先端の取り付け部から固定部に向か
う方向に配置され、かつ両者の起因する共振周波数が互
いに近傍となるような構成として、両共振周波数の間の
周波数において駆動させることで安定で大きな変位を得
ることができる構成にする手段が取られている。Therefore, as a conventional improvement method, a piezoelectric body is brittlely broken by applying a load to the tip amplitude portion of a bimorph-type element or a unimorph-type element to lower the resonance frequency and fixing only the shim. By further reducing the resonance frequency by means such as providing a notch in the shim near the fixed portion as necessary, a large displacement is secured at a low driving voltage. Also,
A member for expanding the displacement is attached to the free end portion opposite to the fixed end, and the member for expanding the displacement is arranged in a direction from the mounting portion at the tip of the portion where the piezoelectric body is bonded to the fixed portion, In addition, as a configuration in which the resonance frequencies caused by the two are close to each other, a means is adopted in which a stable and large displacement can be obtained by driving at a frequency between the two resonance frequencies.
【0012】以下に、上記の特徴を持つチョッパの構成
の一例を示す。図9は従来の改善例における焦電型赤外
線センサ用チョッパとしてのユニモルフ型素子で固定端
の反対側の自由端部分に変位拡大部材を取り付けた場合
の一例を示す斜視図である。図9において、111はシ
ム、112は圧電体、113は変位拡大部、114はセ
ンサ台座、115は固定具、116a,116bは固定
用ネジ、117はシム用配線、118は圧電体用配線、
119は赤外線検出部、120は赤外線、121は遮蔽
部である。Hereinafter, an example of the configuration of a chopper having the above characteristics will be described. FIG. 9 is a perspective view showing an example in which a displacement enlarging member is attached to a free end portion opposite to a fixed end in a unimorph type element as a chopper for a pyroelectric infrared sensor in a conventional improved example. In FIG. 9, 111 is a shim, 112 is a piezoelectric body, 113 is a displacement magnifying portion, 114 is a sensor base, 115 is a fixture, 116a and 116b are fixing screws, 117 is a shim wiring, 118 is a piezoelectric wiring,
119 is an infrared detection unit, 120 is an infrared ray, and 121 is a shielding unit.
【0013】リン青銅やステンレス系合金等の弾性体平
板をコの字状に折曲げることによって、シム111と変
位拡大部113は一体的にかつ結合部よりシム111及
び変位拡大部113は互いに平行および同一方向に長手
寸法を有する構成となっている。さらに変位拡大部11
3において、結合部と反対の先端は直角にかつシム11
1とは反対側に遮蔽部121が形成されている。シム1
11の表面において圧電体112が接着されて圧電体接
着部(ユニモルフ型素子)を形成している。By bending an elastic plate made of phosphor bronze or a stainless steel alloy into a U-shape, the shim 111 and the displacement enlarging portion 113 are integrated and the shim 111 and the displacement enlarging portion 113 are parallel to each other from the joint. And has a longitudinal dimension in the same direction. Further, the displacement enlargement unit 11
3, the tip opposite the joint is at right angles and with shims 11
The shielding part 121 is formed on the side opposite to 1. Sim 1
The piezoelectric body 112 is bonded to the surface of the substrate 11 to form a piezoelectric bonded portion (unimorph element).
【0014】シム111は変位拡大部113との結合部
の反対側の端部近傍においてセンサ台座114と固定具
115によって挟まれ、さらにセンサ台座114にはめ
ネジ加工が、固定具115には孔加工が施され、固定用
ネジ116a,116bによって固定される。センサ台
座114上に赤外線検出部119が配され、前記の変位
拡大部113の先端の遮蔽部121の近傍に位置してい
る。また、シム111の固定部近傍にはシム用配線11
7が、さらに圧電体112の接着側と反対の表面のシム
111の固定部に近い位置においては圧電体用配線11
8がそれぞれ取り付けられている。The shim 111 is sandwiched between the sensor pedestal 114 and the fixing member 115 near the end opposite to the joint with the displacement enlarging portion 113. And fixed by fixing screws 116a and 116b. An infrared detecting section 119 is arranged on the sensor base 114 and is located near the shielding section 121 at the tip of the displacement enlarging section 113. The shim wiring 11 is located near the fixing portion of the shim 111.
7 further close to the fixing portion of the shim 111 on the surface opposite to the bonding side of the piezoelectric body 112, the piezoelectric wiring 11
8 are attached respectively.
【0015】ここでシム用配線117と圧電体用配線1
18より交流信号を印加するとシム111と圧電体11
2との間に電位差が生じ、圧電体接着部の変位拡大部1
13との結合部が変位し、これに応じて変位拡大部11
3の先端部の遮蔽部121も変位し、この運動によって
赤外線検出部119の入射する赤外線120を断続し、
チョッパとしての役割を果す。Here, the shim wiring 117 and the piezoelectric wiring 1
When an AC signal is applied from 18, the shim 111 and the piezoelectric body 11
2 and a potential difference is generated between the piezoelectric element 2 and the displacement expanding portion 1 of the piezoelectric body bonding portion.
13 is displaced, and accordingly, the displacement enlarging part 11 is displaced.
The shielding part 121 at the tip of the third part is also displaced, and this movement intermittently interrupts the infrared ray 120 incident on the infrared ray detecting part 119,
Serves as a chopper.
【0016】また、チョッパの共振周波数と駆動周波数
とを近接化させることで、大幅な変位拡大効果が得られ
る。Further, by making the resonance frequency of the chopper and the driving frequency close to each other, a significant displacement enlarging effect can be obtained.
【0017】[0017]
【発明が解決しようとする課題】しかしながら、上記従
来の改善例による切り欠き部と、先端に重りを持った構
成のバイモルフ型あるいはユニモルフ型チョッパは、共
振周波数近傍での駆動であるので、チョッパの共振周波
数が個体間でばらついた場合には大きな変位差が発生す
る。また、上記従来の改善例の変位拡大部113を設け
圧電体接着部と変位拡大部113の両共振周波数の間で
駆動することで、共振周波数の個体間のばらつきによる
影響を軽減させられるものの、遮蔽部121の重量的制
約による遮蔽部121の形状・応用等の自由度の制約
や、赤外線の断続を良好に行うための遮蔽部121の位
置の微細な調整や、高精度が要求される部品加工が必要
であった。また、片持ち支持のため自重による撓みが存
在し、遮蔽部121の位置は姿勢差を伴うことが逃れら
れない。また、経時的に遮蔽部121の位置が変化する
のも逃れられない。このような課題は従来のチョッパに
限らず、共振を利用した場合や片持ち支持した場合に等
しい課題である。However, the bimorph type or unimorph type chopper having the notch according to the above-described conventional improvement and the weight at the tip is driven near the resonance frequency. When the resonance frequency varies between individuals, a large displacement difference occurs. In addition, by providing the displacement enlargement unit 113 of the above-mentioned conventional improvement example and driving the piezoelectric adhesion unit and the displacement enlargement unit 113 between the two resonance frequencies, the influence of the individual variation of the resonance frequency can be reduced. Parts that require a degree of freedom such as the shape and application of the shielding part 121 due to the weight restriction of the shielding part 121, fine adjustment of the position of the shielding part 121 for good intermittent infrared radiation, and parts that require high precision Processing was required. In addition, since there is bending due to its own weight due to cantilever support, the position of the shielding portion 121 cannot be escaped with a posture difference. Further, the position of the shielding portion 121 changes with time cannot be escaped. Such a problem is not limited to the conventional chopper, and is a problem equivalent to a case where resonance is used or a case where the device is supported in a cantilever manner.
【0018】本発明は安定変位を確保し、微細な調整や
高精度の部品加工の必要性を軽減し、遮蔽部の任意な形
状・応用が可能となることや、遮蔽部の自重による姿勢
差課題や経時的な位置変化課題の克服が可能な共振を利
用した圧電アクチュエータを提供することを目的とす
る。The present invention secures a stable displacement, reduces the necessity of fine adjustments and high-precision parts processing, enables an arbitrary shape and application of the shielding part, and a difference in posture due to the weight of the shielding part. It is an object of the present invention to provide a piezoelectric actuator using resonance capable of overcoming the problem and the problem of changing the position over time.
【0019】[0019]
【課題を解決するための手段】この課題を解決するため
本発明は、貼り合わせ型圧電素子で変位を拡大するため
の部材を固定端の反対側の自由端部分に取り付け、さら
に変位拡大のための部材は圧電体を貼り合わせた部分の
先端の取り付け部から固定部に向かう方向に配置され、
かつ両者の起因する共振周波数が互いに近傍となるよう
な構成として、両共振周波数の間の周波数において駆動
させることで安定で大きな変位を得ることができる変位
拡大部先端を圧電体を貼り合わせた部分から遠ざける方
向に90度以下で折り曲げ加工された遮蔽部を設けたも
のである。In order to solve this problem, the present invention provides a bonding type piezoelectric element in which a member for increasing displacement is attached to a free end portion opposite to a fixed end, and further for increasing displacement. Is arranged in the direction from the mounting portion at the tip of the portion where the piezoelectric body is bonded to the fixing portion,
In addition, the configuration is such that the resonance frequencies caused by both are close to each other, and a piezoelectric body is bonded to the tip of the displacement enlarging portion where a stable and large displacement can be obtained by driving at a frequency between the two resonance frequencies. A shielding portion bent at 90 degrees or less in a direction away from the screen.
【0020】これにより、安定変位を確保し、遮蔽部の
形状・応用の自由度を高め、微細な調整や高精度の部品
加工の必要性を無くし、また、遮蔽部の自重による姿勢
差課題や経時的変化課題の克服が可能となる。As a result, a stable displacement can be ensured, the degree of freedom of the shape and application of the shielding portion can be increased, and the necessity of fine adjustment and high-precision component processing is eliminated. It is possible to overcome the problem over time.
【0021】[0021]
【発明の実施の形態】本発明の請求項1に記載の発明
は、金属等を材料とする弾性部材と圧電体の積層部と、
前記積層部と結合して前記積層部の振動に応答して振動
する変位部材を有し、前記積層部あるいは積層部近傍の
前記弾性部材を固定して、前記変位部材が自由端を有し
て振動できる構成を有する貼り合わせ型圧電素子を備
え、その前記変位部材の自由端に前記積層部から遠ざか
る方向に折り曲げ形成される遮蔽部が90度以下の角度
で折り曲げ形成することで、遮蔽部を大きくしたり、遮
蔽部に反射面を有する平板や平板レンズ等を貼り付ける
質量負荷に対し、弾性部材と圧電体の積層部の振動に主
に起因する共振周波数f1や変位部材の振動に主に起因
する共振周波数f2の大幅な低下を押さえる作用を有す
る。DETAILED DESCRIPTION OF THE INVENTION According to the first aspect of the present invention, a laminated portion of an elastic member made of metal or the like and a piezoelectric body is provided.
A displacement member coupled to the lamination portion and vibrating in response to vibration of the lamination portion, fixing the elastic member in the vicinity of the lamination portion or the lamination portion, wherein the displacement member has a free end; A shielding portion, which is provided with a bonded piezoelectric element having a configuration capable of vibrating, is formed by bending a shielding portion bent at a free end of the displacement member in a direction away from the stacked portion at an angle of 90 degrees or less, thereby forming a shielding portion. For a mass load that increases or attaches a flat plate or a flat lens having a reflective surface to the shielding part, the resonance frequency f1 mainly due to the vibration of the laminated part of the elastic member and the piezoelectric body and the vibration of the displacement member mainly. This has the effect of suppressing a large decrease in the resonance frequency f2 caused by the above.
【0022】請求項2に記載の発明は、両共振周波数が
200Hz以下である貼り合わせ型圧電素子の構成から
なる請求項1に記載の圧電アクチュエータであり、特
に、共振周波数が低い、すなわち剛性が小さく慣性力に
よる変形量が大きい貼り合わせ型圧電素子にすること
で、低駆動電圧で大きな変位を得るといった作用を有す
る。According to a second aspect of the present invention, there is provided the piezoelectric actuator according to the first aspect, wherein the piezoelectric actuator has a configuration in which both resonance frequencies are 200 Hz or less, and particularly, the resonance frequency is low, that is, the rigidity is low. The bonding type piezoelectric element having a small amount of deformation due to inertial force has an effect of obtaining a large displacement at a low driving voltage.
【0023】請求項3に記載の発明は、金属等を材料と
する弾性部材や、弾性部材と圧電体の積層部と結合する
変位部材や、少なくとも変位部材の自由端に折り曲げ形
成された遮蔽部の折り曲げの逆の面を、金メッキ等の反
射面に仕上げた圧電アクチュエータであり、遮蔽部を入
射光の開閉機能動作として利用とする場合には、閉時の
視野を制限でき、また、反射面となった遮蔽部が往復円
弧運動をすることで入射光路制御、入射光を断続する等
の作用を有する。According to a third aspect of the present invention, there is provided an elastic member made of metal or the like, a displacement member coupled to a laminated portion of the elastic member and the piezoelectric body, and a shielding portion bent at least at a free end of the displacement member. This is a piezoelectric actuator in which the surface opposite to the bent side is finished to a reflective surface such as gold plating.If the shielding part is used as an opening / closing function of incident light, the field of view when closed can be limited, and the reflective surface The shielding portion performs the reciprocating circular motion, and thus has an effect of controlling an incident light path, intermitting incident light, and the like.
【0024】請求項4に記載の発明は、変位部材の自由
端側に折り曲げ形成された遮蔽部の折り曲げの逆の面に
反射面を有するガラス等の平滑性に優れた平板、たとえ
ば鏡等を反射面が遮蔽部の折り曲げと逆の面になるよう
に取り付けられた圧電アクチュエータであり、平滑性の
優れた反射面が往復円弧運動をすることで精度の高い入
射光路制御、入射光を断続する等の作用を有する。According to a fourth aspect of the present invention, there is provided a flat plate having excellent smoothness, such as a glass having a reflecting surface on a surface opposite to the bent side of the shielding portion bent and formed on the free end side of the displacement member, such as a mirror. The piezoelectric actuator is mounted so that the reflective surface is opposite to the bent surface of the shielding part, and the reflective surface with excellent smoothness performs reciprocating circular motion to control the incident light path with high accuracy and to interrupt the incident light. And the like.
【0025】請求項5に記載の発明は、遮蔽部の折り曲
げの逆の面に反射面を有する平滑性に優れた平板の接着
において、遮蔽部の接着面に切り欠きが設けられた圧電
アクチュエータであり、異種材料の接着による残留応力
等による反射面のうねり等の発生を押さえ、より平滑性
の優れた反射面が往復円弧運動をすることでより精度の
高い入射光路制御、入射光を断続する作用や、軽量化に
よる性能向上の作用を有する。According to a fifth aspect of the present invention, there is provided a piezoelectric actuator in which a notch is provided on an adhesive surface of a shielding portion in bonding a flat plate having a reflective surface on a surface opposite to a bent portion of the shielding portion and having excellent smoothness. Yes, suppresses the undulation of the reflective surface due to residual stress etc. due to the adhesion of different materials, and the reflective surface with more excellent smoothness performs reciprocating circular motion, so that the incident light path control with higher accuracy, intermittent incident light It has an effect and an effect of improving performance by weight reduction.
【0026】請求項6に記載の発明は、変位部材の自由
端側を折り曲げ形成された遮蔽部の先端部をさらに変位
部材から遠ざかる側に折り曲げその面にレンズ等の光学
部材を取り付けた圧電アクチュエータであり、遮蔽部の
変位方向のリニアな光を一個のレンズで変位方向に並べ
た受光素子アレイに集光できる作用を有する。According to a sixth aspect of the present invention, there is provided a piezoelectric actuator in which a free end side of a displacement member is bent to form a distal end portion of the shield portion further bent away from the displacement member, and an optical member such as a lens is attached to the surface. This has the function of condensing linear light in the displacement direction of the shielding portion onto the light receiving element array arranged in the displacement direction with one lens.
【0027】以下、本発明の実施の形態について、図1
から図6を用いて説明する。 (実施の形態1)図1は、本発明の第1の実施の形態に
おける変位部材(変位拡大部と遮蔽部)を有する貼り合
わせ型圧電素子で変位部材の自由端に金属等を材料とす
る弾性部材と圧電体の積層部から遠ざかる方向に折り曲
げ形成される遮蔽部が90度以下の角度で折り曲げ形成
された圧電アクチュエータが焦電型赤外線センサ用の赤
外線の開閉用チョッパとして使用される場合の構成図で
あり、図1において、11はシム、12は圧電体、13
は変位拡大部、14はセンサ台座、15は固定具、16
a,16bは固定用ネジ、17はシム用配線、18は圧
電体用配線、19は赤外線検出部、20は赤外線、21
は遮蔽部、22はサーミスタ、23は遮蔽部閉時の視
野、24は折り曲げ角度である。Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. (Embodiment 1) FIG. 1 shows a bonded piezoelectric element having a displacement member (a displacement enlarging portion and a shielding portion) according to a first embodiment of the present invention, wherein the free end of the displacement member is made of metal or the like. When a piezoelectric actuator in which a shielding portion bent and formed in a direction away from a laminated portion of an elastic member and a piezoelectric body is bent at an angle of 90 degrees or less is used as a chopper for opening and closing infrared rays for a pyroelectric infrared sensor. FIG. 1 is a configuration diagram, in FIG. 1, 11 is a shim, 12 is a piezoelectric body, 13
Is a displacement enlargement part, 14 is a sensor base, 15 is a fixture, 16
a and 16b are fixing screws, 17 is a shim wiring, 18 is a piezoelectric wiring, 19 is an infrared detecting section, 20 is an infrared ray, 21
Is a shielding part, 22 is a thermistor, 23 is a visual field when the shielding part is closed, and 24 is a bending angle.
【0028】以下に、図1を用いて同実施の形態におけ
る動作を説明する。リン青銅やステンレス合金等の弾性
体平板をコの字状に折り曲げることによって、シム11
と変位拡大部13は一体的に、かつ結合部よりシム11
及び変位拡大部13は互いに平行及び同一方向に長手寸
法を有する構成となっている。さらに変位拡大部13に
おいて、結合部と反対の先端は、折り曲げ角度24は9
0度以下で、かつシム11とは反対側に折り曲げられた
遮蔽部21が形成されている。シム11の表面において
圧電体12が接着されて圧電体接着部(ユニモルフ型素
子)を形成している。The operation of this embodiment will be described below with reference to FIG. By bending an elastic flat plate such as phosphor bronze or stainless alloy into a U-shape,
And the displacement enlarging portion 13 are integrally and shim 11 from the joint portion.
And the displacement enlarging portion 13 are configured to have a longitudinal dimension parallel to each other and in the same direction. Further, in the displacement enlarging portion 13, the bending end 24 is 9
A shielding portion 21 is formed at an angle of 0 ° or less and bent to the side opposite to the shim 11. The piezoelectric body 12 is bonded on the surface of the shim 11 to form a piezoelectric bonded portion (unimorph element).
【0029】シム11は変位拡大部13との結合部の反
対側の端部近傍においてセンサ台座14と固定具15に
よって挟まれ、さらにセンサ台座14にはめネジ加工
が、固定具15には孔加工が施され、固定用ネジ16
a,16bによって固定される。センサ台座14は輻射
率の高い黒体処理され、その上に赤外線検出部19が配
置され、前記の変位拡大部13の先端の遮蔽部21の近
傍に位置している。また、折り曲げ形成された遮蔽部2
1の折り曲げと逆の面は金メッキ等の反射面に仕上げら
れている。また、センサ台座14上において、遮蔽部2
1が閉時に赤外線検出部19の遮蔽部21の反射面を介
した視野となる近傍にセンサ台座14と熱結合されたサ
ーミスタ22が配されている。The shim 11 is sandwiched between the sensor pedestal 14 and the fixture 15 near the end opposite to the joint with the displacement enlarging portion 13. And the fixing screws 16
a, 16b. The sensor pedestal 14 is subjected to black body processing with a high emissivity, on which an infrared detecting unit 19 is disposed, and is located near the shielding unit 21 at the tip of the displacement magnifying unit 13. In addition, the folded shielding part 2
The surface opposite to the bending of 1 is finished to a reflective surface such as gold plating. Further, on the sensor pedestal 14, the shielding portion 2
A thermistor 22 that is thermally coupled to the sensor pedestal 14 is disposed in the vicinity of a field of view through the reflection surface of the shielding unit 21 of the infrared detection unit 19 when 1 is closed.
【0030】また、シム11の固定部近傍には、シム用
配線17が、さらに圧電体12の接着側と反対の表面の
シム11の固定部に近い位置に圧電体用配線18がそれ
ぞれ取り付けられている。ここで、シム用配線17と圧
電体用配線18より交流信号を印加するとシム11と圧
電体12との間に電位差が生じ、圧電体接着部の変位拡
大部13との結合部が変位し、これに応じて変位拡大部
13の先端の遮蔽部21も変位し、この運動によって赤
外線検出部19の入射する赤外線20を開閉し、閉時に
は、赤外線検出部19は常にセンサ台座14に設けられ
た遮蔽部閉時の視野23を見ることとなり、チョッパと
しての役割を果す。A shim wiring 17 is attached near the fixing portion of the shim 11, and a piezoelectric wiring 18 is attached at a position near the fixing portion of the shim 11 on the surface opposite to the bonding side of the piezoelectric body 12. ing. Here, when an AC signal is applied from the shim wiring 17 and the piezoelectric wiring 18, a potential difference is generated between the shim 11 and the piezoelectric body 12, and the coupling portion between the shim 11 and the displacement expanding portion 13 of the piezoelectric bonding portion is displaced. In response to this, the shielding part 21 at the tip of the displacement expanding part 13 is also displaced, and by this movement, the infrared ray 20 incident on the infrared ray detecting part 19 is opened and closed. When closed, the infrared ray detecting part 19 is always provided on the sensor base 14. The user sees the field of view 23 when the shield is closed, and plays a role as a chopper.
【0031】ここで、前記構成の圧電アクチュエータ
(チョッパ)の共振特性を図2に示す。図2はコの字状
に折り曲げられたシム11と変位拡大部13からなる圧
電アクチュエータの共振特性の一例であり、縦軸はアド
ミッタンス、横軸は駆動周波数を示している。f1,f
2のそれぞれの周波数において共振現象を有しており、
これらはそれぞれ前記アクチュエータの主に圧電体接着
部の振動に起因する共振と、主に変位拡大部13の振動
に起因する共振のいずれかであり、圧電アクチュエータ
の構成によりいずれかに相当し、また構成によってf1
とf2の差も変化する。FIG. 2 shows the resonance characteristics of the piezoelectric actuator (chopper) having the above configuration. FIG. 2 shows an example of the resonance characteristics of a piezoelectric actuator composed of a shim 11 bent in a U-shape and a displacement enlarging portion 13, wherein the vertical axis represents admittance and the horizontal axis represents drive frequency. f1, f
2 has a resonance phenomenon at each frequency,
These are either resonance mainly due to the vibration of the piezoelectric body bonding portion of the actuator or resonance mainly due to the vibration of the displacement magnifying portion 13, and correspond to any one depending on the configuration of the piezoelectric actuator. F1 depending on the configuration
And f2 also changes.
【0032】前記のようにシム11と変位拡大部13と
を結合部から同一方向に長手寸法を有する構成の場合、
例えば変位拡大部13の長手寸法が一定で、圧電体接着
部の固定部から圧電体12までの長さのみを変化させた
場合、すなわち圧電体接着部の長手寸法のみを変化させ
た場合において、当初圧電体接着部の長手寸法が短い状
態で圧電体接着部に起因する共振周波数がf2に相当し
た場合、すなわち圧電体接着部に起因する共振周波数が
変位拡大部13に起因する共振周波数よりも高い場合、
圧電体接着部の長手寸法を段々と長くしていくと、両者
の共振周波数は相対的に近づき、ある長さにおいては両
者は1つの共振として重なった状態となり、さらに圧電
体接着部の長手寸法を長くした場合には、両者の相対位
置は逆転し、変位拡大部13に起因する共振周波数の方
が圧電体接着部に起因する共振周波数よりも高い値を有
するようになる。As described above, in the case where the shim 11 and the displacement enlarging portion 13 have a longitudinal dimension in the same direction from the joint portion,
For example, when the longitudinal dimension of the displacement enlarging portion 13 is constant and only the length from the fixed portion of the piezoelectric body bonding portion to the piezoelectric body 12 is changed, that is, when only the longitudinal size of the piezoelectric body bonding portion is changed, When the resonance frequency due to the piezoelectric bonding portion corresponds to f2 when the longitudinal dimension of the piezoelectric bonding portion is initially short, that is, the resonance frequency due to the piezoelectric bonding portion is higher than the resonance frequency due to the displacement expanding portion 13. If high,
As the longitudinal dimension of the piezoelectric bonding part is gradually increased, the resonance frequencies of the two become relatively close to each other, and at a certain length, the two are overlapped as one resonance, and the longitudinal dimension of the piezoelectric bonding part is further increased. When the distance is increased, the relative positions thereof are reversed, and the resonance frequency caused by the displacement enlarging portion 13 has a higher value than the resonance frequency caused by the piezoelectric body bonding portion.
【0033】この時、f1とf2の間を近接させる構成
とした場合の変位拡大部13の変位と駆動周波数の関係
を図3に示す。図3において、縦軸は変位拡大部先端部
変位、横軸は駆動周波数を示している。f1とf2の間
の駆動周波数において両方の共振の影響により変位が拡
大され、かつ比較的変位量が安定な周波数領域が存在す
る。よって、f1とf2を近接させ、両共振周波数の間
の周波数で駆動させることにより、共振による変位拡大
効果と、安定した変位とが得られる。また、f1を圧電
体接着部に主に起因する共振周波数、f2を変位拡大部
に主に起因する共振周波数とすること、すなわち圧電体
接着部に起因する共振周波数よりも変位拡大部に主に起
因する共振周波数の方が高い構成を有することにより、
変位は拡大されて安定でかつ印加した交流信号と変位拡
大部先端の時間差が一定の周波数をさらに広く確保でき
る。FIG. 3 shows the relationship between the displacement of the displacement enlarging portion 13 and the driving frequency when the distance between f1 and f2 is close to each other. In FIG. 3, the vertical axis represents the displacement of the distal end of the displacement magnifying portion, and the horizontal axis represents the drive frequency. At the drive frequency between f1 and f2, there is a frequency region in which the displacement is enlarged by the influence of both resonances and the displacement amount is relatively stable. Therefore, by bringing f1 and f2 close to each other and driving at a frequency between the two resonance frequencies, a displacement enlargement effect due to resonance and a stable displacement can be obtained. Further, f1 is a resonance frequency mainly attributable to the piezoelectric body bonding portion, and f2 is a resonance frequency mainly attributable to the displacement magnifying portion, that is, the resonance frequency mainly at the displacement magnifying portion is larger than the resonance frequency attributable to the piezoelectric body bonding portion. Due to having a higher resonant frequency,
The displacement is enlarged and stable, and the frequency at which the time difference between the applied AC signal and the tip of the displacement enlarging portion is constant can be further widened.
【0034】以上の特徴を有する前記構成の圧電エクチ
ュエータは、また、圧電体接着部及び変位拡大部13の
長手寸法が一定の場合に、遮蔽部21の折り曲げ角度が
90度以上の場合、変位拡大部13の共振周波数は低
下、90度以下の場合、変位拡大部13の共振周波数は
高くなる特性がある。The piezoelectric actuator having the above-described configuration has the above-described structure. In addition, when the longitudinal dimension of the piezoelectric body bonding portion and the displacement enlarging portion 13 is constant, when the bending angle of the shielding portion 21 is 90 degrees or more, the displacement is increased. When the resonance frequency of the enlargement unit 13 is lower than 90 degrees, the resonance frequency of the displacement enlargement unit 13 is higher.
【0035】そこで、遮蔽部21を長くしたり、鏡・レ
ンズ等を取り付けたり、すなわち、質量負荷を加えた場
合、変位拡大部13の共振周波数は大きく低下するが、
遮蔽部21を折り曲げ角度24を90度以下で折り曲げ
ることで共振周波数のそれぞれの変動をキャンセルさせ
ることができ、前記記載のf1とf2のシム11と圧電
体12より構成される圧電体接着部に主に起因する共振
周波数よりも変位拡大部13に主に起因する共振周波数
の方が高い構成のバランスを崩すこと無く、遮蔽部21
を長くしたり、遮蔽部21に鏡・レンズ等を取り付ける
ことが可能となる。When the shielding portion 21 is lengthened or a mirror or lens is attached, that is, when a mass load is applied, the resonance frequency of the displacement magnifying portion 13 is greatly reduced.
By bending the shielding portion 21 at a bending angle 24 of 90 degrees or less, each fluctuation of the resonance frequency can be canceled, and the above-described f1 and f2 shims 11 and the piezoelectric bonding portion composed of the piezoelectric body 12 can be used. Without breaking the balance of the configuration in which the resonance frequency mainly caused by the displacement magnifying portion 13 is higher than the resonance frequency mainly caused by the displacement, the shielding portion 21
Can be lengthened, and a mirror, a lens, and the like can be attached to the shielding portion 21.
【0036】また、シム11とは反対側に折り曲げられ
て形成される遮蔽部21を折り曲げ角度24を90度以
下で折り曲げることは、遮蔽部21の折り曲げと逆の面
を反射面として使用が可能となり、また、共振周波数の
変動を押さえるため遮蔽部21を長くすることで、遮蔽
部21の変位運動時の変位方向の有効反射面長さが広が
り、また、反射面からみた視野の開口角が大きくなり赤
外線検出部19から見た視野設計の自由度は大きく広が
る。ここでいう折り曲げ角度24の90度以下とは、遮
蔽部21の形状や遮蔽部に取り付ける部材の大きさにも
よるが、生産性からみても30度から80度までが望ま
しい。In addition, by bending the shielding portion 21 formed by bending the shim 11 to the opposite side at a bending angle 24 of 90 degrees or less, the surface opposite to the bending of the shielding portion 21 can be used as a reflection surface. Further, by increasing the length of the shielding portion 21 in order to suppress the fluctuation of the resonance frequency, the effective reflecting surface length in the displacement direction at the time of the displacement movement of the shielding portion 21 is widened, and the opening angle of the visual field viewed from the reflecting surface is increased. As a result, the degree of freedom in designing the visual field as viewed from the infrared detector 19 is greatly increased. The term “90 degrees or less of the bending angle 24” here depends on the shape of the shielding portion 21 and the size of the member attached to the shielding portion, but is desirably from 30 degrees to 80 degrees in view of productivity.
【0037】以上のように、前記構成にすることで圧電
アクチュエータが焦電型赤外線センサ用の赤外線の開閉
用チョッパとして使用される場合、閉時の視野を基準温
度のサーミスタ22と熱結合されたセンサ台座14の輻
射光とすることができ、より高精度な温度測定が可能と
なる。As described above, when the piezoelectric actuator is used as an infrared open / close chopper for a pyroelectric infrared sensor by adopting the above configuration, the field of view when closed is thermally coupled to the thermistor 22 at the reference temperature. Radiation light from the sensor pedestal 14 can be used, and more accurate temperature measurement can be performed.
【0038】なお本実施の形態では、焦電型赤外線セン
サ用の赤外線の開閉用チョッパとして、説明している
が、反射を利用する光センサ用圧電アクチュエータとし
て使用可能なのは、言うまでもない。Although this embodiment has been described as a chopper for opening and closing infrared rays for a pyroelectric infrared sensor, it goes without saying that it can be used as a piezoelectric actuator for an optical sensor utilizing reflection.
【0039】(実施の形態2)図4は、本発明の第2の
実施の形態における変位部材を有する貼り合わせ型圧電
素子で、変位部材の自由端に金属等を材料とする弾性部
材と圧電体の積層部から遠ざかる方向に折り曲げ形成さ
れる遮蔽部が90度以下の角度で折り曲げ形成された反
射を利用する光センサ用圧電アクチュエータの構成図で
あり、図4において、41はシム、42は圧電体、43
は変位拡大部、44は台座、45は固定具、46a,4
6bは固定用ネジ、47はシム用配線、48は圧電体用
配線、49は遮蔽部、50は反射面を有する平板(以
下、反射板)で構成されている。(Embodiment 2) FIG. 4 shows a bonded piezoelectric element having a displacement member according to a second embodiment of the present invention. FIG. 4 is a configuration diagram of a piezoelectric actuator for an optical sensor that uses reflection in which a shielding portion that is bent and formed in a direction away from the stacked portion of the body is bent at an angle of 90 degrees or less. In FIG. Piezoelectric, 43
Is a displacement enlargement part, 44 is a pedestal, 45 is a fixture, 46a, 4
6b is a fixing screw, 47 is a shim wiring, 48 is a piezoelectric wiring, 49 is a shield, and 50 is a flat plate having a reflective surface (hereinafter, a reflective plate).
【0040】図5は、同実施の形態における圧電アクチ
ュエータを焦電型赤外線センサ用の反射による赤外線の
切り替え用チョッパとして使用した場合の断面図であ
り、図5において51はセンサ台座、52は赤外線検出
部、53は赤外線、54は赤外線入射光口、55はサー
ミスタ、56は回折レンズアレイから構成されている。FIG. 5 is a sectional view when the piezoelectric actuator according to the embodiment is used as a chopper for switching infrared light by reflection for a pyroelectric infrared sensor. In FIG. 5, reference numeral 51 denotes a sensor base, and 52 denotes an infrared light. The detecting unit 53 is composed of an infrared ray, 54 is an infrared incident light port, 55 is a thermistor, and 56 is a diffraction lens array.
【0041】以下に、図4,図5を用いて同実施の形態
における動作を説明する。リン青銅やステンレス合金等
の弾性体平板をコの字状に折り曲げることによって、シ
ム41と変位拡大部43は一体的に、かつ結合部よりシ
ム41及び変位拡大部43は互いに平行及び同一方向に
長手寸法を有する構成となっている。さらに変位拡大部
43において、結合部と反対の先端は90度以下でかつ
シム41とは反対側に折り曲げられた遮蔽部49が形成
され、遮蔽部49の折り曲げと逆の面に反射板50が反
射面と逆の面で接着されている。The operation of this embodiment will be described below with reference to FIGS. By bending an elastic flat plate such as phosphor bronze or a stainless steel alloy into a U-shape, the shim 41 and the displacement enlarging portion 43 are integrally formed, and the shim 41 and the displacement enlarging portion 43 are parallel to each other and in the same direction from the joint portion. It has a configuration having a longitudinal dimension. Further, in the displacement enlarging portion 43, a shielding portion 49 is formed at the tip opposite to the joint portion at 90 degrees or less and bent to the side opposite to the shim 41, and the reflection plate 50 is provided on the surface opposite to the bent surface of the shielding portion 49. It is adhered on the surface opposite to the reflection surface.
【0042】シム41の表面において圧電体42が接着
されて圧電体接着部を形成している。シム41は変位拡
大部43との結合部の反対側の端部近傍において台座4
4と固定具45によって挟まれ、さらに台座44にはめ
ネジ加工が、固定具45には孔加工が施され、固定用ネ
ジ46a,46bによって固定される。The piezoelectric body 42 is bonded to the surface of the shim 41 to form a piezoelectric body bonded portion. The shim 41 is attached to the pedestal 4 near the end opposite to the joint with the displacement magnifying portion 43.
The pedestal 44 is provided with a female screw and the fixture 45 is provided with a hole, and is fixed by fixing screws 46a and 46b.
【0043】センサ台座51は輻射率の高い黒体処理さ
れその上において赤外線検出部52が配され、前記の変
位拡大部43先端の遮蔽部49に接着された反射板50
に対し任意の角度に向いた状態で近傍に位置している。
また、センサ台座51上において、反射板50が振幅変
位運動した時に赤外線検出部52の反射板50の反射面
を介した視野となる範囲に赤外線入射光口54が、口径
の2倍のピッチで3個以上配され、上記視野の範囲外で
かつ上記視野の近傍にセンサ台座51と熱結合されたサ
ーミスタ55が配されている。The sensor pedestal 51 is subjected to black body processing with a high emissivity, on which an infrared detecting section 52 is disposed, and a reflecting plate 50 adhered to the shielding section 49 at the tip of the displacement enlarging section 43.
Is located in the vicinity at a desired angle.
On the sensor pedestal 51, the infrared incident light port 54 is provided at a pitch twice as large as the aperture of the infrared detector 52 in a range that becomes a field of view through the reflecting surface of the reflecting plate 50 when the reflecting plate 50 performs amplitude displacement movement. Three or more thermistors 55 that are thermally coupled to the sensor pedestal 51 are provided outside the visual field and near the visual field.
【0044】また、シム41の固定部近傍にはシム用配
線47が、さらに圧電体42の接着側と反対の表面のシ
ム41の固定部に近い位置に圧電体用配線48がそれぞ
れ取り付けられている。ここで、シム用配線47と圧電
体用配線48より交流信号を印加するとシム41と圧電
体42との間に電位差が生じ、圧電体接着部の変位拡大
部43との結合部が変位し、これに応じて変位拡大部4
3の先端の遮蔽部49に接着された反射板50も振幅変
位し、この運動によって赤外線検出部52に反射板50
を介して回折レンズアレイ56で集光され赤外線入射光
口52を通った赤外線53とセンサ台座51から輻射さ
れる赤外線53が交互に入射し、チョッパとしての役割
を果す。A wire 47 for shim is attached near the fixing portion of the shim 41, and a wire 48 for piezoelectric material is attached at a position near the fixing portion of the shim 41 on the surface opposite to the bonding side of the piezoelectric member 42. I have. Here, when an AC signal is applied from the shim wiring 47 and the piezoelectric wiring 48, a potential difference is generated between the shim 41 and the piezoelectric body 42, and the coupling portion between the shim 41 and the displacement expanding portion 43 of the piezoelectric bonding portion is displaced. In response to this, the displacement enlarging unit 4
The reflector 50 adhered to the shielding part 49 at the tip of the third also undergoes amplitude displacement, and this movement causes the infrared detector 52 to reflect the reflector 50
The infrared rays 53 condensed by the diffractive lens array 56 via the infrared incident light port 52 and the infrared rays 53 radiated from the sensor pedestal 51 are alternately incident, and serve as a chopper.
【0045】以上のように、前記構成にすることで圧電
アクチュエータが焦電型赤外線センサ用の入射する異な
る赤外線の反射による切り替え用チョッパとして使用す
る場合、片方の赤外線を基準温度のサーミスタ55と熱
結合されたセンサ台座51の輻射光にすることがより高
精度な温度測定が可能となる。但し、振幅変位の場合、
両端の赤外線入射光口54からの赤外線53の量とセン
サ台座51から輻射する赤外線量のバランスが崩れるた
め、チョッパ駆動交流信号に同期させ、両端の赤外線入
射光口54を除いた赤外線検出部52からの出力を検出
して温度測定すればよい。As described above, when the piezoelectric actuator is used as a switching chopper for the pyroelectric infrared sensor by reflection of different incident infrared light by adopting the above-described configuration, one of the infrared light is used as the heat from the thermistor 55 at the reference temperature. The use of the radiation of the coupled sensor base 51 enables more accurate temperature measurement. However, in the case of amplitude displacement,
Since the balance between the amount of the infrared light 53 from the infrared incident light ports 54 at both ends and the amount of the infrared light radiated from the sensor pedestal 51 is lost, the infrared detecting section 52 is synchronized with the chopper drive AC signal and the infrared incident light ports 54 at both ends are removed. The temperature may be measured by detecting the output from the device.
【0046】また、赤外線の開閉方式のチョッパの場
合、遮蔽部49のスタート位置を赤外線検出部52の光
路センターに調整する必要を要したり、遮蔽部49のス
タート位置が経時的に変化したり、また、片持ち支持の
ため自重による撓みが存在し、遮蔽部49のスタート位
置は姿勢差を伴うことが逃れられず、これらが温度測定
誤差となっていたが、本圧電アクチュエータは、反射板
50を遮蔽部49に搭載して反射による赤外線切り替え
チョッパとしたため、開閉方式で存在していた遮蔽部4
9のスタート位置調整や、遮蔽部49のスタート位置の
経時的変化や、また、自重の撓みによる姿勢差課題を無
くすことができる。In the case of a chopper of the infrared opening / closing type, it is necessary to adjust the start position of the shield 49 to the center of the optical path of the infrared detector 52, or the start position of the shield 49 changes with time. In addition, since the cantilever support causes deflection due to its own weight, the starting position of the shielding portion 49 cannot be escaped with a difference in posture, and these have resulted in a temperature measurement error. Since the chopper 50 is mounted on the shielding part 49 and serves as an infrared switching chopper by reflection, the shielding part 4 which has existed in the open / close system
9, the change of the start position of the shielding portion 49 over time, and the problem of the posture difference due to the bending of its own weight can be eliminated.
【0047】なお、本実施の形態では、焦電型赤外線セ
ンサ用の赤外線の開閉用チョッパとして、説明している
が、反射を利用する光センサ用圧電アクチュエータとし
て使用可能なのは、言うまでもない。Although the present embodiment has been described as a chopper for opening and closing infrared rays for a pyroelectric infrared sensor, it is needless to say that it can be used as a piezoelectric actuator for an optical sensor utilizing reflection.
【0048】(実施の形態3)図6は本発明の第3の実
施の形態における変位部材を有する貼り合わせ型圧電素
子で変位部材の自由端に金属等を材料とする弾性部材と
圧電体の積層部から遠ざかる方向に折り曲げ形成される
遮蔽部が90度以下の角度で折り曲げ形成された、反射
を利用する光センサ用圧電アクチュエータの構成図であ
り、図6において、61はシム、62は圧電体、63は
変位拡大部、64は台座、65は固定具、66a,66
bは固定用ネジ、67はシム用配線、68は圧電体用配
線、69は遮蔽部、70は反射面を有する平板(以下、
反射板)で構成されている。(Embodiment 3) FIG. 6 shows a bonded piezoelectric element having a displacement member according to a third embodiment of the present invention. The free end of the displacement member has an elastic member made of metal or the like and a piezoelectric member. FIG. 6 is a configuration diagram of an optical sensor piezoelectric actuator using reflection, in which a shielding portion bent and formed in a direction away from the laminated portion is bent at an angle of 90 degrees or less. In FIG. 6, 61 is a shim, and 62 is a piezoelectric actuator. Body, 63 is a displacement enlargement part, 64 is a pedestal, 65 is a fixture, 66a, 66
b is a fixing screw, 67 is a shim wiring, 68 is a piezoelectric wiring, 69 is a shield, 70 is a flat plate having a reflective surface (hereinafter, referred to as a flat plate).
(Reflection plate).
【0049】以下に、図6を用いて同実の形態における
動作を説明する。同実施の形態における基本動作は、図
4,図5に示した実施の形態2と同様であり、その効果
も実施の形態2と同じであるが加えて、反射板70を接
着する遮蔽部69の接着面の少なくとも反射板70の反
射面として使用する領域の部分を切り欠いて反射板70
を接着している。The operation in the same embodiment will be described below with reference to FIG. The basic operation in this embodiment is the same as that of the second embodiment shown in FIGS. 4 and 5, and the effect is the same as that of the second embodiment. At least a portion of the bonding surface of the reflection plate 70 which is used as a reflection surface of the reflection plate 70 is cut out.
Is glued.
【0050】以上のように、前記構成にすることで圧電
アクチュエータが焦電型赤外線センサ用の入射する異な
る赤外線の反射による切り替え用チョッパとして使用さ
れる場合、反射面は異種材料の接着時に発生する残留応
力や、接着剤の収縮応力や、また、接着剤塗布ムラ、接
着材加圧ムラ等による発生する反射板70の反射面のう
ねり等の発生を押さえ、良好な反射面としての機能を発
する。このことは、高精度な温度測定を可能にするもの
である。また、同時に遮蔽部69の軽量化が図れ、圧電
アクチュエータの性能も向上する。As described above, when the piezoelectric actuator is used as a switching chopper for reflection of different incident infrared rays for a pyroelectric infrared sensor, the reflecting surface is generated when dissimilar materials are adhered. Residual stress, shrinkage stress of the adhesive, and unevenness in the application of the adhesive, unevenness in the pressure of the adhesive, and the like, which suppress the occurrence of undulation and the like of the reflecting surface of the reflecting plate 70, and serve as a good reflecting surface. . This enables highly accurate temperature measurement. At the same time, the weight of the shielding portion 69 can be reduced, and the performance of the piezoelectric actuator can be improved.
【0051】なお、本実施の形態での切り欠き形状は長
方形であるが、形状にこだわらないのは言うまでもな
い。Although the cutout shape in this embodiment is rectangular, it goes without saying that the shape is not limited.
【0052】(実施の形態4)図7は、本発明の第4の
実施の形態における変位部材を有する貼り合わせ型圧電
素子で圧電部材の自由端に金属等を材料とする弾性部材
と圧電体の積層部から遠ざかる方向に折り曲げ形成され
る遮蔽部が90度以下の角度で折り曲げ形成された圧電
アクチュエータの遮蔽部に一個のレンズが搭載された場
合の構成を示し、図7において、71はシム、72は圧
電体、73は変位拡大部、74は台座、75は固定具、
76a,76bは固定用ネジ、77はシム用配線、78
は圧電体用配線、79は遮蔽部、80は平板レンズ、8
1は赤外線、82は赤外線検知素子アレイで構成されて
いる。(Embodiment 4) FIG. 7 shows a bonded piezoelectric element having a displacement member according to a fourth embodiment of the present invention. 7 shows a configuration in which one lens is mounted on a shielding portion of a piezoelectric actuator in which a shielding portion bent and formed in a direction away from the stacked portion of the piezoelectric actuator is bent at an angle of 90 degrees or less. In FIG. , 72 is a piezoelectric body, 73 is a displacement enlarging portion, 74 is a pedestal, 75 is a fixture,
76a and 76b are fixing screws, 77 is shim wiring, 78
Is a wiring for a piezoelectric body, 79 is a shielding portion, 80 is a flat lens, 8
Reference numeral 1 denotes an infrared ray, and reference numeral 82 denotes an infrared detecting element array.
【0053】以下に、図7を用いて同実施の形態におけ
る動作を説明する。同実施の形態における基本動作は、
図1に示した実施の形態1と同様であり、その効果も実
施の形態1と同じであるが加えて、遮蔽部79の自由端
側の先端部をさらに変位部材から遠ざかる方向に折り曲
げ、その折り曲げ側の面に回折型の平板レンズ80が接
着されている。平板レンズ80を接着する遮蔽部79の
平板レンズ80の接着面の有効レンズエリアは事前に切
り欠きが設けられている。また、赤外線検知素子アレイ
82は、平板レンズ80の赤外線81の入射面と反対の
面に平板レンズ80と平行にかつ、赤外線検知素子アレ
イ82の並び方向が平板レンズ80の振幅変位方向と平
行に、かつ、光学的に位置調整された状態で配置されて
いる。The operation of this embodiment will be described below with reference to FIG. The basic operation in the embodiment is
1 is the same as that of the first embodiment shown in FIG. 1, and the effect is the same as that of the first embodiment. In addition, the distal end of the shielding portion 79 on the free end side is further bent in a direction away from the displacement member, and A diffraction type flat lens 80 is bonded to the surface on the bending side. A notch is provided in advance in the effective lens area on the bonding surface of the flat lens 80 of the shielding portion 79 for bonding the flat lens 80. Further, the infrared detecting element array 82 is parallel to the flat lens 80 on the surface of the flat lens 80 opposite to the incident surface of the infrared light 81, and the direction in which the infrared detecting element array 82 is arranged is parallel to the amplitude displacement direction of the flat lens 80. , And are arranged in an optically adjusted state.
【0054】ここで、シム用配線77と圧電体用配線7
8より交流信号を印加するとシム71と圧電体72との
間に電位差が生じ、圧電体接着部の変位拡大部73との
結合部が変位し、これに応じて変位拡大部先端の遮蔽部
79に接着された平板レンズ80も振幅変位し、この運
動によって赤外線検知素子アレイ82に平板レンズ79
で集光されたリニアな赤外線81が順次照射される。ま
た、赤外線検知素子アレイ82の個々の素子の赤外線8
1が照射されていない時の視野は、遮蔽部79となり、
チョッパとしての役割を果す。Here, the shim wiring 77 and the piezoelectric wiring 7
When an AC signal is applied from the position 8, a potential difference is generated between the shim 71 and the piezoelectric body 72, and the connection between the shim 71 and the displacement expanding portion 73 is displaced. The flat lens 80 adhered to the sensor also undergoes amplitude displacement, and this movement causes the flat lens 79 to be attached to the infrared detecting element array 82.
Are sequentially irradiated with the linear infrared light 81 condensed. Further, the infrared rays 8 of the individual elements of the infrared detection
The field of view when 1 is not illuminated is the shielding section 79,
Serves as a chopper.
【0055】以上のように、前記構成にすることで圧電
アクチュエータが1個のレンズを用いるだけで焦電型赤
外線リニアセンサ用のチョッパとして使用が可能とな
る。また、回折レンズを屈折レンズにしたり、レンズ接
着位置を遮蔽部折り曲げの逆の面にしても同様の効果が
得られる。As described above, with the above-described configuration, the piezoelectric actuator can be used as a chopper for a pyroelectric infrared linear sensor by using only one lens. The same effect can be obtained even if the diffractive lens is replaced by a refractive lens or the lens bonding position is set to a surface opposite to the bent portion of the shielding portion.
【0056】なお本実施の形態では、焦電型赤外線セン
サ用の赤外線の開閉用チョッパとして、説明している
が、光センサ用圧電アクチュエータとして使用可能なの
は、言うまでもない。In this embodiment, the chopper for opening and closing infrared rays for the pyroelectric infrared sensor is described. However, it is needless to say that the chopper can be used as a piezoelectric actuator for an optical sensor.
【0057】[0057]
【発明の効果】以上のように本発明は、貼り合わせ型圧
電素子で変位を拡大するための部材を固定端の反対側の
自由端部分に取り付け、さらに変位拡大のための部材は
圧電体を貼り合わせた部分の先端の取り付け部から固定
部に向かう方向に配置され、かつ両者の起因する共振周
波数が互いに近傍となるような構成として、両共振周波
数の間の周波数において駆動させることで安定で大きな
変位を得ることができる圧電アクチュエータ及びチョッ
パの変位拡大部先端で変位拡大部取り付け方向に折り曲
げ加工される遮蔽部が90度以下であることにより、安
定変位を確保し、遮蔽部の形状・応用の自由度を高め、
微細な調整や高精度の部品加工の必要を無くし、また、
遮蔽部位置の自重による姿勢差課題や経時的変化課題の
克服が可能となる。特に、遮蔽部を反射面として使用す
る場合、有効視野も広がり効果的である。As described above, according to the present invention, the member for expanding the displacement by the bonded piezoelectric element is attached to the free end portion opposite to the fixed end, and the member for expanding the displacement is a piezoelectric member. It is arranged in the direction from the mounting part at the tip of the bonded part toward the fixed part, and the configuration is such that the resonance frequencies caused by both are close to each other. The stable displacement is ensured because the shielding part bent at the tip of the displacement enlarging part of the piezoelectric actuator and chopper that can obtain large displacement in the direction of attaching the displacing part is 90 degrees or less. Increase the freedom of
Eliminates the need for fine adjustment and high-precision parts processing.
It is possible to overcome a posture difference problem and a temporal change problem due to the weight of the shielding portion. In particular, when the shielding portion is used as a reflection surface, the effective field of view is widened and effective.
【図1】本発明の圧電アクチュエータの第1の実施の形
態を示す斜視図FIG. 1 is a perspective view showing a first embodiment of a piezoelectric actuator according to the present invention.
【図2】同圧電アクチュエータの共振特性図FIG. 2 is a resonance characteristic diagram of the piezoelectric actuator.
【図3】同圧電アクチュエータの変位特性図FIG. 3 is a displacement characteristic diagram of the piezoelectric actuator.
【図4】本発明の第2の実施の形態における構成を示す
斜視図FIG. 4 is a perspective view showing a configuration according to a second embodiment of the present invention.
【図5】同構成を示す断面図FIG. 5 is a sectional view showing the same configuration.
【図6】本発明の第3の実施の形態における構成を示す
斜視図FIG. 6 is a perspective view showing a configuration according to a third embodiment of the present invention.
【図7】本発明の第4の実施の形態における構成を示す
斜視図FIG. 7 is a perspective view showing a configuration according to a fourth embodiment of the present invention.
【図8】従来の圧電アクチュエータを用いたチョッパの
構成を示す斜視図FIG. 8 is a perspective view showing a configuration of a chopper using a conventional piezoelectric actuator.
【図9】従来の変位拡大部を有する圧電アクチュエータ
を用いたチョッパの構成を示す斜視図FIG. 9 is a perspective view showing a configuration of a conventional chopper using a piezoelectric actuator having a displacement enlarging portion.
11,41,61,71 シム 12,42,62,72 圧電体 13,43,63,73 変位拡大部 14,51 センサ台座 15,45,65,75 固定具 16a,16b,46a,46b,66a,66b,7
6a,76b 固定用ネジ 17,47,67,77 シム用配線 18,48,68,78 圧電体用配線 19,52 赤外線検出部 20,53,81 赤外線 21,49,69,79 遮蔽部 22,55 サーミスタ 23 遮蔽部閉時の視野 24 折り曲げ角度 44,64,74 台座 50,70 反射板 54 赤外線入射光口 56 回折レンズアレイ 80 平板レンズ 82 赤外線検知素子アレイ11, 41, 61, 71 Shim 12, 42, 62, 72 Piezoelectric body 13, 43, 63, 73 Displacement enlargement section 14, 51 Sensor pedestal 15, 45, 65, 75 Fixtures 16a, 16b, 46a, 46b, 66a , 66b, 7
6a, 76b Fixing screw 17, 47, 67, 77 Shim wiring 18, 48, 68, 78 Piezoelectric wiring 19, 52 Infrared detector 20, 53, 81 Infrared 21, 49, 69, 79 Shield 22, 55 Thermistor 23 Field of view when shielding part is closed 24 Bending angle 44, 64, 74 Pedestal 50, 70 Reflector 54 Infrared incident light port 56 Diffractive lens array 80 Flat lens 82 Infrared detecting element array
Claims (6)
積層部と、前記積層部と結合して前記積層部の振動に応
答して振動する変位部材を有し、前記積層部あるいは積
層部近傍の前記弾性部材を固定して、前記変位部材が自
由端を有して振動できる構成を有する貼り合わせ型圧電
素子を備えて、弾性部材と圧電体の積層部の振動に起因
する共振周波数f1と、変位部材の振動に起因する共振
周波数f2の差が、高い側の40%以内に近接した構成
とし、両共振の間の周波数で交流信号を印加して振動を
発生させる圧電アクチュエータにおいて、前記変位部材
の自由端に前記積層部から遠ざかる方向に90度以下の
角度で折り曲げられた遮蔽部を有する圧電アクチュエー
タ。And a displacement member that is coupled to the laminated portion and vibrates in response to vibration of the laminated portion. A bonding type piezoelectric element having a configuration in which the elastic member in the vicinity of the elastic member is fixed and the displacement member has a free end and can vibrate, and a resonance frequency caused by vibration of a laminated portion of the elastic member and the piezoelectric body is provided. In a piezoelectric actuator in which the difference between f1 and the resonance frequency f2 caused by the vibration of the displacement member is close to within 40% of the higher side, and a vibration is generated by applying an AC signal at a frequency between the two resonances, A piezoelectric actuator having a shield portion bent at an angle of 90 degrees or less in a direction away from the lamination portion at a free end of the displacement member.
する共振周波数f1と、変位部材の振動に起因する共振
周波数f2が200Hz以下である請求項1に記載の圧
電アクチュエータ。2. The piezoelectric actuator according to claim 1, wherein a resonance frequency f1 caused by vibration of the elastic member, the piezoelectric body, and the laminated portion and a resonance frequency f2 caused by vibration of the displacement member are 200 Hz or less.
材と圧電体の積層部と結合する変位部材や、少なくとも
折り曲げられた遮蔽部の折り曲げの逆の面が金メッキ等
の反射面からなる請求項1または請求項2に記載の圧電
アクチュエータ。3. An elastic member made of a metal or the like, a displacement member coupled to a laminated portion of the elastic member and the piezoelectric body, and at least a surface opposite to the bent side of the bent shield portion is formed of a reflective surface such as gold plating. The piezoelectric actuator according to claim 1 or 2.
面に反射面を有する平板を貼り付けた請求項1または請
求項2に記載の圧電アクチュエータ。4. The piezoelectric actuator according to claim 1, wherein a flat plate having a reflection surface is attached to a surface of the bent shielding portion opposite to the bent surface.
の貼り付け面の切り欠きを設けた請求項1または請求項
2に記載の圧電アクチュエータ。5. The piezoelectric actuator according to claim 1, wherein a notch is provided in an attachment surface of a shielding plate to which a flat plate having a reflection surface is attached.
かる側に折り曲げ、その面にレンズ等の部材を貼り付け
た請求項1または請求項2に記載の圧電アクチュエー
タ。6. The piezoelectric actuator according to claim 1, wherein a part of the shielding portion is further bent toward a side away from the displacement member, and a member such as a lens is attached to the surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9125330A JPH10321926A (en) | 1997-05-15 | 1997-05-15 | Piezo actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9125330A JPH10321926A (en) | 1997-05-15 | 1997-05-15 | Piezo actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10321926A true JPH10321926A (en) | 1998-12-04 |
Family
ID=14907449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9125330A Pending JPH10321926A (en) | 1997-05-15 | 1997-05-15 | Piezo actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10321926A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017002346A1 (en) * | 2015-07-01 | 2017-01-05 | パナソニックIpマネジメント株式会社 | Air-conditioning control apparatus |
-
1997
- 1997-05-15 JP JP9125330A patent/JPH10321926A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017002346A1 (en) * | 2015-07-01 | 2017-01-05 | パナソニックIpマネジメント株式会社 | Air-conditioning control apparatus |
US20180304723A1 (en) * | 2015-07-01 | 2018-10-25 | Panasonic Intellectual Property Management Co., Ltd. | Air-conditioning control apparatus |
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