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JPH10312917A - Manufacture of chip resistor - Google Patents

Manufacture of chip resistor

Info

Publication number
JPH10312917A
JPH10312917A JP9120381A JP12038197A JPH10312917A JP H10312917 A JPH10312917 A JP H10312917A JP 9120381 A JP9120381 A JP 9120381A JP 12038197 A JP12038197 A JP 12038197A JP H10312917 A JPH10312917 A JP H10312917A
Authority
JP
Japan
Prior art keywords
resistor
paste
electrode
dried
firing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9120381A
Other languages
Japanese (ja)
Inventor
Toshihiro Teramae
敏宏 寺前
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP9120381A priority Critical patent/JPH10312917A/en
Publication of JPH10312917A publication Critical patent/JPH10312917A/en
Pending legal-status Critical Current

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  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PROBLEM TO BE SOLVED: To enable a resistor to be formed uniform in film thickness and furthermore resistors to be formed uniform in film thickness throughout a board by a method wherein resistor paste is applied onto an insulating board, electrode paste is applied around the ends of the applied resistor paste and dried out, and the resistor paste and the electrode paste are burned at the same time. SOLUTION: Resistor paste is applied onto the surface of a board 1 and dried up to serve as a resistor 2. Then, electrode paste is applied onto each end of the resistor 2 and dried up to serve as electrodes 3, and the resistor 2 and the electrodes 3 are burned at the same time. At this point, the resistor paste regulated in composition for application comprises ruthenium oxide, borosilicate lead glass, and organic vehicle as a main component, and the electrode paste contains silver oxide, lead oxide, borosilicate lead oxide, and organic vehicle. A burning process is carried out at temperatures of 800 to 900 deg.C for 30 to 60 minutes.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、チップ抵抗器の製
造方法の改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a method for manufacturing a chip resistor.

【0002】[0002]

【従来の技術】従来より、絶縁基体上に抵抗体及び電極
を形成したチップ抵抗器が製造されている。図1に、そ
のチップ抵抗器の構造の一例を縦断面図にて示す。同図
において、1はセラミック等より成る絶縁基体、2はそ
の表面に形成された抵抗体、3はその両端に設けられた
電極である。抵抗器製造の手順としては、従来例1とし
て、まず、図1の絶縁基体1の表面に、電極3のもとに
なる電極ペーストを塗布して乾燥した後に、抵抗体2の
もとになる抵抗ペーストを塗布して乾燥し、電極と抵抗
体を同時に焼成する(同時焼成)。
2. Description of the Related Art Conventionally, a chip resistor having a resistor and an electrode formed on an insulating substrate has been manufactured. FIG. 1 is a longitudinal sectional view showing an example of the structure of the chip resistor. In FIG. 1, reference numeral 1 denotes an insulating base made of ceramic or the like, 2 denotes a resistor formed on the surface thereof, and 3 denotes electrodes provided at both ends thereof. As a procedure for manufacturing a resistor, as a conventional example 1, first, an electrode paste serving as a base of the electrode 3 is applied to the surface of the insulating base 1 in FIG. The resistance paste is applied and dried, and the electrode and the resistor are fired simultaneously (simultaneous firing).

【0003】図2は、チップ抵抗器の構造の他の例を示
した縦断面図である。同図において、図1と同様に、1
はセラミック等より成る絶縁基体、2はその表面に形成
された抵抗体、3はその両端に設けられた電極である。
抵抗器製造の手順としては、従来例2として、まず、図
2の絶縁基体1の表面に、抵抗体2のもとになる抵抗ペ
ーストを塗布して乾燥し、焼成した後に、電極3のもと
になる電極ペーストを塗布して乾燥し、焼成する(個別
焼成)。
FIG. 2 is a longitudinal sectional view showing another example of the structure of the chip resistor. In the same figure, as in FIG.
Is an insulating base made of ceramic or the like, 2 is a resistor formed on the surface thereof, and 3 is electrodes provided on both ends thereof.
As a procedure for manufacturing the resistor, as a conventional example 2, first, a resistive paste that forms the basis of the resistor 2 is applied to the surface of the insulating base 1 shown in FIG. Is applied, dried and fired (individual firing).

【0004】さらに、従来例3として、図1において、
絶縁基体1の表面に、電極3のもとになる電極ペースト
を塗布して乾燥し、焼成した後に、抵抗体2のもとにな
る抵抗ペーストを塗布して乾燥し、焼成する方法もある
(個別焼成)。実際の製造工程においては、上記いずれ
の例においても、絶縁基体1のもとになる例えばセラミ
ック基板上に、上記いずれかの例の構成が多数配置さ
れ、ダイシングによりそれぞれのピースのチップ抵抗器
に切り離される。
Further, as a third conventional example, in FIG.
There is also a method in which an electrode paste that forms the basis of the electrode 3 is applied to the surface of the insulating base 1, dried and fired, and then a resistance paste that is the basis of the resistor 2 is applied, dried and fired ( Individual firing). In an actual manufacturing process, in each of the above examples, a large number of the configurations of any of the above examples are arranged on, for example, a ceramic substrate which is a base of the insulating base 1, and the chip resistor of each piece is diced by dicing. Be separated.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記従
来例1の場合、電極ペーストが乾燥した状態で膜厚が大
きいまま抵抗ペーストを塗布するので、乾燥した電極ペ
ーストの膜厚のばらつきの影響を受け、抵抗体2の膜厚
が、1ピース内さらには1セラミック基板内で均一にな
らない。
However, in the case of the above-mentioned prior art example 1, since the resistance paste is applied while the electrode paste is dried and the film thickness is large, the resistance paste is affected by the variation in the film thickness of the dried electrode paste. The thickness of the resistor 2 is not uniform within one piece or even within one ceramic substrate.

【0006】また、従来例2の場合、抵抗ペースト焼成
後の抵抗体2の抵抗値は、その時点で電極3が形成され
ていないので正確に測定できず、電極ペーストの焼成を
待って抵抗値の良否を判断しなければならないので、電
極ペースト焼成時の抵抗値変化を管理する事ができな
い。従って、継続して抵抗値を正確に判定する事が困難
となる。
In the case of Conventional Example 2, the resistance value of the resistor 2 after firing of the resistor paste cannot be measured accurately because the electrode 3 is not formed at that time. Therefore, it is not possible to manage the change in the resistance value during firing of the electrode paste. Therefore, it is difficult to continuously and accurately determine the resistance value.

【0007】また、従来例3の場合、従来例2の欠点は
見られず、抵抗値を判定する意味では最も都合がよい
が、従来例1と同様に、電極3の膜厚のばらつきの影響
を受け、抵抗体2の膜厚が、1ピース内さらには1セラ
ミック基板内で均一にならない。そして、抵抗体2の膜
厚を確定できないので、TCR(temperature coeffici
ent of resistance ,抵抗温度係数),STOL(shor
t time over load,短時間過負荷試験)の特性が不安定
となる。これは、従来例1も同様である。
In the case of the conventional example 3, the disadvantage of the conventional example 2 is not observed, and it is most convenient in the sense of determining the resistance value. As a result, the thickness of the resistor 2 does not become uniform within one piece and further within one ceramic substrate. Since the thickness of the resistor 2 cannot be determined, the TCR (temperature coeffici
ent of resistance, temperature coefficient of resistance, STOL (shor
t time over load, short time overload test) becomes unstable. This is the same in Conventional Example 1.

【0008】本発明は、抵抗体の膜厚を1ピース内さら
には1基板内で均一にし、且つ1回の焼成で抵抗値を確
定する事により、抵抗値のばらつき,不良が少なく、抵
抗値の管理がしやすいチップ抵抗器の製造方法を提供す
る事を目的とする。
According to the present invention, by making the thickness of the resistor uniform within one piece or even within one substrate, and by determining the resistance value by one firing, there is little variation in resistance value and defects, and the resistance value is reduced. It is an object of the present invention to provide a method of manufacturing a chip resistor which can easily manage the resistance.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本発明では、絶縁基体上に抵抗ペーストを塗布して
乾燥し、次いでその抵抗ペーストの両端周辺に電極ペー
ストを塗布して乾燥し、最後に前記抵抗ペースト及び前
記電極ペーストを同時に焼成する事により、前記絶縁基
体上に抵抗体と電極とを形成する事を特徴とするチップ
抵抗器の製造方法とする。
In order to achieve the above object, according to the present invention, a resistive paste is applied on an insulating substrate and dried, and then an electrode paste is applied around both ends of the resistive paste and dried. Finally, a method for manufacturing a chip resistor is characterized in that a resistor and an electrode are formed on the insulating base by simultaneously firing the resistor paste and the electrode paste.

【0010】また、前記抵抗ペースト及び前記電極ペー
ストは、以下の焼成条件により同時焼成される事を特徴
とするチップ抵抗器の製造方法とする。 焼成条件:800〜900℃,30〜60分
[0010] Further, a method of manufacturing a chip resistor is characterized in that the resistor paste and the electrode paste are simultaneously fired under the following firing conditions. Firing conditions: 800-900 ° C, 30-60 minutes

【0011】[0011]

【発明の実施の形態】以下、本発明の実施の形態につい
て説明する。本発明の製造方法に係るチップ抵抗器の構
造は、従来例2と同様に、図2に示すようなものとなっ
ている。抵抗器製造の手順としては、まず、同図の絶縁
基体1の表面に、抵抗体2のもとになる抵抗ペーストを
塗布して乾燥した後に、その両端に電極3のもとになる
電極ペーストを塗布して乾燥し、電極3と抵抗体2を同
時に焼成する(同時焼成)。
Embodiments of the present invention will be described below. The structure of the chip resistor according to the manufacturing method of the present invention is as shown in FIG. The procedure for manufacturing the resistor is as follows. First, a resistive paste for forming the resistor 2 is applied to the surface of the insulating substrate 1 shown in FIG. Is applied and dried, and the electrode 3 and the resistor 2 are simultaneously fired (simultaneous firing).

【0012】これにより、電極に関するものが一切ない
状態で、絶縁基体1の表面に抵抗ペーストを塗布するの
で、電極の膜厚の変動に左右されず、均一な抵抗体膜厚
が得られる。また、焼成が1回だけなので、電極焼成に
よる抵抗値変化を管理する必要がなく、焼成条件のブレ
が判断しやすくなり、抵抗ペーストの膜厚と1回の焼成
膜厚の管理だけで抵抗値を確定する事ができる。以下
に、本発明において塗布用に調製された抵抗ペースト及
び電極ペーストの主成分と焼成条件を示す。
Thus, the resistive paste is applied to the surface of the insulating substrate 1 in a state where there is nothing relating to the electrodes, so that a uniform resistor film thickness can be obtained without being affected by the change in the film thickness of the electrodes. In addition, since firing is performed only once, there is no need to control the change in resistance value due to electrode firing, and it is easy to judge fluctuations in firing conditions, and the resistance value can be controlled only by controlling the thickness of the resistor paste and the thickness of one firing. Can be determined. Hereinafter, the main components and firing conditions of the resistance paste and the electrode paste prepared for application in the present invention will be described.

【0013】 [0013]

【0014】 [0014]

【0015】上記主成分の内、有機質ビヒクルは、抵抗
体或いは電極の材料をペースト状にするための溶剤であ
り、ターピネオール等の溶剤に通常、樹脂成分も含まれ
たものが用いられる。焼成時にこれら有機質ビヒクルは
飛散し、残りがそれぞれ抵抗体或いは電極となる。ま
た、電極ペーストの主成分である酸化銀は、導電性を高
めるために、金や白金等が含有物として混入される事も
ある。
Among the above-mentioned main components, the organic vehicle is a solvent for converting the material of the resistor or the electrode into a paste, and a solvent such as terpineol which usually contains a resin component is used. At the time of firing, these organic vehicles scatter, and the remainder becomes a resistor or an electrode, respectively. In addition, silver oxide, which is a main component of the electrode paste, may be mixed with gold, platinum, or the like as a substance to increase conductivity.

【0016】図3は、焼成と抵抗値の関係をグラフに表
したものである。同図に示すように、抵抗ペーストが乾
燥した時点では、まだ抵抗体としての働きを持たず、抵
抗値は無限大である。1回目の焼成時で、従来例1及び
本発明においては抵抗値が確定するが、従来例1の場合
は抵抗値のばらつきが大きい。また、従来例2の場合は
この時点で電極が形成されていないので、抵抗値の測定
が困難であり、グラフには破線による推定値で表してい
る。
FIG. 3 is a graph showing the relationship between firing and resistance. As shown in the figure, when the resistance paste is dried, it does not function as a resistor yet, and the resistance value is infinite. At the time of the first firing, the resistance value is determined in Conventional Example 1 and the present invention, but in the case of Conventional Example 1, the resistance value has a large variation. Further, in the case of the conventional example 2, since no electrode is formed at this time, it is difficult to measure the resistance value, and the graph shows the estimated value by a broken line.

【0017】従来例2及び従来例3では、さらに2回目
の焼成が行われるが、それぞれ1回目の焼成時から抵抗
値が変化している。また、従来例3では、上述のように
電極の膜厚の影響を受けるので、従来例2と比較して抵
抗値のばらつきが大きくなる。結果として抵抗値のばら
つきは、大きい順に従来例1>従来例3>従来例2=本
発明となり、抵抗値のばらつきが小さく、1回の焼成で
抵抗値を確定できる本発明が最も優れた方法である事が
わかる。
In Conventional Examples 2 and 3, the second firing is further performed, and the resistance value has changed from the first firing, respectively. Further, in the third conventional example, since the influence of the film thickness of the electrode is exerted as described above, the variation in the resistance value is larger than in the second conventional example. As a result, the variation in the resistance value is as follows: Conventional example 1> Conventional example 3> Conventional example 2 = the present invention in the descending order, and the present invention is the most excellent method in which the resistance value is small and the resistance value can be determined by one firing. It turns out that it is.

【0018】さらに、従来例1や従来例3においては、
電極の影響により1ピース内の抵抗体の膜厚が均一にな
らないので、レーザートリミングによる抵抗値の調整を
行う場合、図4に示すようにトリミングの位置によって
抵抗値が左右されてしまう。つまり、同図(a)のよう
に抵抗体2の端部にトリミング溝4を形成すると、抵抗
体が厚く盛り上がっているのでトリミング不足となり、
同図(b)のように抵抗体2の中央付近にトリミング溝
4を形成すると、抵抗体が薄くなっているのでトリミン
グが充分となる。
Further, in Conventional Examples 1 and 3,
Since the thickness of the resistor in one piece is not uniform due to the influence of the electrodes, when adjusting the resistance value by laser trimming, the resistance value depends on the trimming position as shown in FIG. That is, when the trimming groove 4 is formed at the end of the resistor 2 as shown in FIG.
When the trimming groove 4 is formed near the center of the resistor 2 as shown in FIG. 3B, the resistor is thin, and the trimming is sufficient.

【0019】これに対して本発明においては、図5に示
すように、抵抗体2の膜厚が均一であるので、どの部分
にトリミングを行ってもトリミングが充分となり、結果
としてトリミングの位置に左右されずに均一なレーザー
トリミングができる事になる。
On the other hand, in the present invention, as shown in FIG. 5, since the film thickness of the resistor 2 is uniform, the trimming can be performed satisfactorily regardless of the trimmed portion. Uniform laser trimming can be performed without being affected.

【0020】[0020]

【発明の効果】以上説明したように、本発明によれば、
抵抗体の膜厚を1ピース内さらには1基板内で均一に
し、且つ1回の焼成で抵抗値を確定する事により、抵抗
値のばらつき,不良が少なく、抵抗値の管理がしやすい
チップ抵抗器の製造方法を提供する事ができる。さら
に、抵抗体の膜厚が均一である事により、どの部分にト
リミングを行ってもトリミングが充分となるので、トリ
ミングの位置に左右されずに均一なレーザートリミング
ができるチップ抵抗器の製造方法を提供する事ができ
る。
As described above, according to the present invention,
By making the thickness of the resistor uniform within one piece or even one substrate, and by determining the resistance value by one firing, there is little variation and failure of the resistance value, and it is easy to manage the resistance value. It can provide a method of manufacturing a vessel. Furthermore, since the thickness of the resistor is uniform, the trimming can be performed satisfactorily regardless of the trimming of any part. Therefore, a method of manufacturing a chip resistor capable of performing uniform laser trimming regardless of the trimming position is described. Can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】チップ抵抗器の構造の一例を示す縦断面図。FIG. 1 is a longitudinal sectional view showing an example of the structure of a chip resistor.

【図2】チップ抵抗器の構造の他の例を示す縦断面図。FIG. 2 is a longitudinal sectional view showing another example of the structure of the chip resistor.

【図3】焼成と抵抗値の関係を表すグラフ。FIG. 3 is a graph showing a relationship between baking and a resistance value.

【図4】従来例におけるレーザートリミングの様子を表
す縦断面図。
FIG. 4 is a longitudinal sectional view showing a state of laser trimming in a conventional example.

【図5】本発明におけるレーザートリミングの様子を表
す縦断面図。
FIG. 5 is a longitudinal sectional view illustrating a state of laser trimming in the present invention.

【符号の説明】[Explanation of symbols]

1 絶縁基体 2 抵抗体 3 電極 4 トリミング溝 DESCRIPTION OF SYMBOLS 1 Insulating base 2 Resistor 3 Electrode 4 Trimming groove

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 絶縁基体上に抵抗ペーストを塗布して乾
燥し、次いで該抵抗ペーストの両端周辺に電極ペースト
を塗布して乾燥し、最後に前記抵抗ペースト及び前記電
極ペーストを同時に焼成する事により、前記絶縁基体上
に抵抗体と電極とを形成する事を特徴とするチップ抵抗
器の製造方法。
1. A method of applying a resistive paste on an insulating substrate, drying the resistive paste, applying an electrode paste around both ends of the resistive paste, drying the resistive paste, and finally firing the resistive paste and the electrode paste simultaneously. Forming a resistor and an electrode on the insulating substrate.
【請求項2】 前記抵抗ペースト及び前記電極ペースト
は、以下の焼成条件により同時焼成される事を特徴とす
る請求項1に記載のチップ抵抗器の製造方法。 焼成条件:800〜900℃,30〜60分
2. The method according to claim 1, wherein the resistor paste and the electrode paste are simultaneously fired under the following firing conditions. Firing conditions: 800-900 ° C, 30-60 minutes
JP9120381A 1997-05-12 1997-05-12 Manufacture of chip resistor Pending JPH10312917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9120381A JPH10312917A (en) 1997-05-12 1997-05-12 Manufacture of chip resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9120381A JPH10312917A (en) 1997-05-12 1997-05-12 Manufacture of chip resistor

Publications (1)

Publication Number Publication Date
JPH10312917A true JPH10312917A (en) 1998-11-24

Family

ID=14784806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9120381A Pending JPH10312917A (en) 1997-05-12 1997-05-12 Manufacture of chip resistor

Country Status (1)

Country Link
JP (1) JPH10312917A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019225112A1 (en) 2018-05-23 2019-11-28 株式会社Sumco Group iii nitride semiconductor substrate and method of producing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019225112A1 (en) 2018-05-23 2019-11-28 株式会社Sumco Group iii nitride semiconductor substrate and method of producing same

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