JPH10302999A - Flat hybrid undulator with circular, elliptical or variable polarization - Google Patents
Flat hybrid undulator with circular, elliptical or variable polarizationInfo
- Publication number
- JPH10302999A JPH10302999A JP10932197A JP10932197A JPH10302999A JP H10302999 A JPH10302999 A JP H10302999A JP 10932197 A JP10932197 A JP 10932197A JP 10932197 A JP10932197 A JP 10932197A JP H10302999 A JPH10302999 A JP H10302999A
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- Prior art keywords
- permanent magnets
- undulator
- magnet
- magnetic pole
- magnetic poles
- Prior art date
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、円ないし楕円偏光
を発生するあるいは偏光が可変である平板型ハイブリッ
ドアンジュレータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat hybrid undulator which generates circular or elliptically polarized light or has variable polarization.
【0002】[0002]
【従来の技術】従来の平板型の円偏光アンジュレータ
は、S.Sasakiらの論文”Design of a new type of plan
ar undulator for generating variably polarized rad
iation”(1993年、NUCLEAR INSTRUMNETS & METHOD
S IN PHYSICS RESERCH)に示されるように永久磁石だけ
をくみあわせて作るものであった。2. Description of the Related Art A conventional plate-type circularly polarized undulator is described in a paper by S. Sasaki et al., "Design of a new type of plan."
ar undulator for generating variably polarized rad
iation ”(1993, NUCLEAR INSTRUMNETS & METHOD
As shown in S IN PHYSICS RESERCH), it was made by combining only permanent magnets.
【0003】なお、平板型の直線偏光アンジュレータで
あるが、永久磁石のみを磁極と永久磁石とを組み合わせ
たハイブリッド型にすると、より強い磁場を発生するこ
とが、K.Halbachの論文”PERMANET MAGNET UNDULATOR
S”(1983年2月、JOURNALDE PHYSIQUE)に述べら
れている。[0003] In the case of a flat plate type linearly polarized undulator, if a permanent magnet alone is a hybrid type combining a magnetic pole and a permanent magnet, a stronger magnetic field can be generated.
S "(February 1983, JOURNALDE PHYSIQUE).
【0004】従来の平板型円偏光アンジュレータはその
磁気回路の構造が複雑であった。具体的には、上記S.Sa
sakiらの論文に開示されているものは、永久磁石が並べ
られている磁石列の方向に沿ってこの磁石列を上側と下
側とのそれぞれの側に並列に配置された1対の磁石列を
設け、合計4つの磁石列を用いるものであった。また、
従来の他の形態のものでは、円偏光を生じるために永久
磁石が並べられている磁石列の方向に沿ってこの磁石列
を上下1対の外に左右に1対の磁石列を設け、即ち、4
つの磁石列を断面が矩形となるよう配置しなければなら
なかった。なお、楕円偏光の場合も同様の問題点があっ
た。A conventional plate-type circularly polarized undulator has a complicated magnetic circuit structure. Specifically, the above S.Sa
Disclosed in the paper of Saki et al. is a pair of magnet rows in which the magnet rows are arranged in parallel on the upper and lower sides along the direction of the magnet rows in which the permanent magnets are arranged. And a total of four magnet rows were used. Also,
In another conventional form, a pair of magnet rows are provided on the left and right outside a pair of upper and lower magnet rows along the direction of the magnet row in which the permanent magnets are arranged to generate circularly polarized light, , 4
The two magnet rows had to be arranged in a rectangular cross section. Note that there is a similar problem in the case of elliptically polarized light.
【0005】更に、より強い磁場を発生することができ
る利点を有するハイブリッド型では円偏光又は楕円偏光
を生じさせる、あるいは偏光を変えることができる平板
型アンジュレータはこれまでなかった。[0005] Furthermore, in the hybrid type having the advantage that a stronger magnetic field can be generated, there has not been a flat plate undulator capable of generating circularly or elliptically polarized light or changing the polarization.
【0006】[0006]
【発明が解決しようとする課題】本発明の目的の1つ
は、構造が簡単で製作が容易である平板型円ないし楕円
偏光ハイブリッドアンジュレータを提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to provide a flat circular or elliptically polarized light hybrid undulator which has a simple structure and is easy to manufacture.
【0007】本発明の別の目的は、偏光が可変の平板型
ハイブリッドアンジュレータを提供することにある。Another object of the present invention is to provide a plate-type hybrid undulator whose polarization is variable.
【0008】[0008]
【課題を解決するための手段】上記の1つの課題を解決
するため、本発明の平板型円ないし楕円偏光ハイブリッ
ドアンジュレータは、複数の磁極と永久磁石を周期的に
組み合わせた上側と下側の1対の磁石列が対向して設け
られており、前記の対向した1対の磁石列は、各磁石列
に含まれる磁極が互いに対向し且つ永久磁石も互いに対
向するよう配置され、各磁石列に含まれる前記磁極は、
凹型形状を有し且つ当該凹部が対向するよう配置され、
各磁石列に含まれる前記永久磁石は、周期的に組合わさ
れた方向に交互に磁化され、且つ上側と下側の対向する
永久磁石の磁化の方向は互いに逆向きに磁化されてお
り、前記磁極及び永久磁石が前記1対の磁石列の上側と
下側で反対向きに斜めにして並べられていることを特徴
とする。In order to solve the above-mentioned problem, a flat circular or elliptically polarized light hybrid undulator according to the present invention comprises an upper and lower one in which a plurality of magnetic poles and permanent magnets are periodically combined. A pair of magnet rows are provided facing each other, and the pair of magnet rows facing each other are arranged such that the magnetic poles included in each magnet row face each other and the permanent magnets also face each other. The included magnetic poles are:
It has a concave shape and is arranged so that the concave portions face each other,
The permanent magnets included in each magnet row are alternately magnetized in a periodically combined direction, and the magnetization directions of the upper and lower opposing permanent magnets are magnetized in opposite directions to each other. And permanent magnets are arranged obliquely in opposite directions on the upper and lower sides of the pair of magnet rows.
【0009】上記の別の課題を解決するため、本発明の
平板型可変偏光ハイブリッドアンジュレータは、複数の
磁極と永久磁石を周期的に組み合わせた上側と下側の1
対の磁石列が対向して設けられており、前記の対向した
1対の磁石列は、各磁石列に含まれる磁極が互いに対向
し且つ永久磁石も互いに対向するよう配置され、各磁石
列に含まれる前記永久磁石は、周期的に組合わされた方
向に交互に磁化され、且つ上側と下側の対向する永久磁
石の磁化の方向は互いに逆向きに磁化されており、前記
磁極及び永久磁石が前記1対の磁石列の上側と下側で反
対向きに斜めにして並べられており、前記磁極は、前記
1対の磁石列が対向する上下方向に沿って少なくとも3
つに分割されその各々が前記上下方向に移動可能な少な
くとも3つの磁極部材から成ることを特徴とする。In order to solve the above-mentioned another problem, a flat-type variable polarization hybrid undulator according to the present invention comprises an upper and lower one in which a plurality of magnetic poles and permanent magnets are periodically combined.
A pair of magnet rows are provided facing each other, and the pair of magnet rows facing each other are arranged such that the magnetic poles included in each magnet row face each other and the permanent magnets also face each other. The included permanent magnets are alternately magnetized in a periodically combined direction, and the magnetization directions of the upper and lower opposing permanent magnets are magnetized in opposite directions, and the magnetic poles and the permanent magnets are The magnetic poles are arranged obliquely in opposite directions on the upper side and the lower side of the pair of magnet rows, and the magnetic poles are arranged at least 3 along the vertical direction in which the pair of magnet rows face each other.
And at least three magnetic pole members each of which is vertically movable.
【0010】[0010]
【発明の実施の形態】図1は本発明による好適実施形態
の平板型円偏光ハイブリッドアンジュレータの構造を概
略的に示す。図1を参照すると、平板型円偏光ハイブリ
ッドアンジュレータは、1対の磁石列即ち上側磁石列1
0及び下側磁石列12から成る磁気回路を備える。各磁
石列10、12は、周期的に組み合わせて交互に並べら
れた磁極14及び永久磁石16を有する。上側及び下側
の磁石列10、12は、これらに含まれる磁極14が互
いに対向するように、また永久磁石16も互いに対向す
るように配置されている。上側及び下側の磁石列10及
び12に含まれる磁極14は凹型の断面形状を有し、且
つ上側の磁極14の凹部と下側の磁極14の凹部とが対
向するように配置されている。上側及び下側の磁石列1
0及び12に含まれる永久磁石16は、図1において矢
印で示されるように、並べられた方向に且つ交互に向き
が逆になるように磁化されている。また、上側磁石列1
0の永久磁石16とこれに対向する下側磁石列12の永
久磁石16とは磁化の方向が逆になるよう磁化されてい
る。更に、上側磁石列10の磁極14及び永久磁石16
と下側磁石列12の磁極14及び永久磁石16とは上側
と下側で反対向きに同じ角度で斜めにして並べられてい
る。FIG. 1 schematically shows the structure of a flat circularly polarized hybrid undulator according to a preferred embodiment of the present invention. Referring to FIG. 1, a plate-type circularly polarized hybrid undulator includes a pair of magnet rows, that is, an upper magnet row 1.
It has a magnetic circuit consisting of zeros and a lower magnet row 12. Each magnet row 10, 12 has a magnetic pole 14 and a permanent magnet 16 alternately arranged in a periodic combination. The upper and lower magnet rows 10, 12 are arranged such that the magnetic poles 14 included therein face each other, and the permanent magnets 16 also face each other. The magnetic poles 14 included in the upper and lower magnet rows 10 and 12 have a concave cross-sectional shape, and are arranged such that the concave portions of the upper magnetic pole 14 and the lower magnetic poles 14 face each other. Upper and lower magnet rows 1
As shown by arrows in FIG. 1, the permanent magnets 16 included in 0 and 12 are magnetized in the arranged direction and alternately in opposite directions. Also, upper magnet row 1
The permanent magnet 16 of 0 and the permanent magnet 16 of the lower magnet row 12 opposed thereto are magnetized so that the directions of magnetization are opposite. Further, the magnetic poles 14 and the permanent magnets 16 of the upper magnet row 10
The magnetic poles 14 and the permanent magnets 16 of the lower magnet row 12 are arranged obliquely at the same angle in the opposite directions on the upper and lower sides.
【0011】従来のように磁極及び永久磁石を並べる方
向に対して直交させて配置する場合には磁場は垂直方向
成分のみしか発生しないが、磁気回路を上記のような構
造にすると、磁場は90度位相がずれた形で水平方向成
分ができ、その結果、楕円偏光アンジュレータ磁場が生
成される。更に、磁極14の凹型形状の凹み方を加減し
て、水平方向成分と垂直方向成分を等しくすることによ
って円偏光アンジュレータ磁場が生成される。When the magnetic poles and the permanent magnets are arranged perpendicular to the direction in which the magnetic poles and the permanent magnets are arranged as in the prior art, the magnetic field generates only a vertical component. However, if the magnetic circuit is structured as described above, the magnetic field becomes 90%. A horizontal component is created with a degree of phase shift resulting in the generation of an elliptically polarized undulator magnetic field. Further, by adjusting the concave shape of the magnetic pole 14 so that the horizontal component and the vertical component are equal, a circularly polarized undulator magnetic field is generated.
【0012】図2及び図3は、図1に示される平面図円
偏光ハイブリッドアンジュレータの具体的寸法の一例を
示す。図2は、図1に示される平板型円偏光ハイブリッ
ドアンジュレータを図1においてA−A矢視から見た側
面図を示す。なお、図2は、図1に示される上側磁石列
10及び下側磁石列12の各々において左側から4つの
磁極14と3つの永久磁石16のみを示し、且つ残りの
磁極14及び永久磁石16がない形で示されている。図
3は、図1に示される平板型円偏光ハイブリッドアンジ
ュレータの下側磁石列12の平面図であり、下側磁石列
12の左側から4つの磁極14と3つの永久磁石16の
みを示し、且つ残りの磁極14及び永久磁石16がない
形で示されている。FIGS. 2 and 3 show an example of specific dimensions of the plan view circularly polarized light hybrid undulator shown in FIG. FIG. 2 is a side view of the plate-type circularly polarized hybrid undulator shown in FIG. 1 as viewed from the direction of arrows AA in FIG. FIG. 2 shows only the four magnetic poles 14 and three permanent magnets 16 from the left in each of the upper magnet row 10 and the lower magnet row 12 shown in FIG. 1, and the remaining magnetic poles 14 and permanent magnets 16 Not shown. FIG. 3 is a plan view of the lower magnet row 12 of the flat circularly polarized hybrid undulator shown in FIG. 1, showing only four magnetic poles 14 and three permanent magnets 16 from the left side of the lower magnet row 12, and It is shown without the remaining poles 14 and permanent magnets 16.
【0013】図4は、図1に示される構造で円偏光を生
成するようにされた平板型円偏光アンジュレータの中心
軸上の磁場分布を計算した結果を示す。なお、図4にお
ける磁場の値は図2及び図3に示される中心軸上のもの
である。また、計算諸元は、次のとおりである。FIG. 4 shows the result of calculating the magnetic field distribution on the central axis of the flat circularly polarized undulator adapted to generate circularly polarized light with the structure shown in FIG. The values of the magnetic field in FIG. 4 are on the central axis shown in FIGS. The calculation specifications are as follows.
【0014】機械的寸法及び配置等は図2及び図3に示
されるとおりである。主要な点を以下に記載する。図3
に示されるように、下側磁石列12の磁極14及び永久
磁石16は中心軸に対して直交する面より右方向に45
度斜めにして並べられており、一方図示されていない
が、上側磁石列10の磁極14及び永久磁石16は中心
軸に対して直交する面より左方向に45度斜めにして並
べられている。中心軸に沿った、磁極14の繰り返しピ
ッチ及び永久磁石16の繰り返しピッチは共に30mm
であり、即ち、磁場周期が60mmになるようになって
いて磁極14と永久磁石16の厚みは同じで10.6m
mである。図2に示されるように、上下の永久磁石16
の間隙は15mmである。磁極14の凹部の深さは5m
mである。磁極14の中心軸側の頂面は永久磁石16の
中心軸側の頂面より2.5mm中心軸側に突出してい
る。図3に示す磁極14の角aは中心軸から15mmず
れており、また図3に示す磁極14の凹部の角bも中心
軸から15mm離れた位置にある。磁極14は高さが3
0mm、幅が53.03mm、凹部の差し渡しが31.
82mmである。永久磁石16は高さが40mm、幅が
74.25mmである。The mechanical dimensions and arrangement are as shown in FIGS. The main points are described below. FIG.
As shown in FIG. 3, the magnetic poles 14 and the permanent magnets 16 of the lower magnet row 12 are positioned 45 ° to the right from a plane perpendicular to the central axis.
Although not shown, the magnetic poles 14 and the permanent magnets 16 of the upper magnet row 10 are arranged at an angle of 45 degrees to the left from a plane perpendicular to the central axis. The repetition pitch of the magnetic pole 14 and the repetition pitch of the permanent magnet 16 along the central axis are both 30 mm.
That is, the magnetic field period is set to be 60 mm, and the thickness of the magnetic pole 14 and the permanent magnet 16 is the same and 10.6 m
m. As shown in FIG. 2, the upper and lower permanent magnets 16
Is 15 mm. The depth of the concave portion of the magnetic pole 14 is 5 m.
m. The top surface of the magnetic pole 14 on the central axis side protrudes 2.5 mm from the top surface of the permanent magnet 16 on the central axis side. The angle a of the magnetic pole 14 shown in FIG. 3 is shifted from the central axis by 15 mm, and the angle b of the concave portion of the magnetic pole 14 shown in FIG. 3 is also at a position 15 mm away from the central axis. The magnetic pole 14 has a height of 3
0 mm, width: 53.03 mm, width of the recess is 31.
82 mm. The permanent magnet 16 has a height of 40 mm and a width of 74.25 mm.
【0015】また、永久磁石16の材質は信越化学工業
製のN36H”というNd−Fe−B系の永久磁石であ
り、磁極14の材質はパーメンダーと呼ばれる磁性体で
ある。The material of the permanent magnet 16 is an Nd-Fe-B permanent magnet called N36H "manufactured by Shin-Etsu Chemical Co., Ltd. The material of the magnetic pole 14 is a magnetic material called permender.
【0016】図4における水平方向(黒四角印)及び垂
直方向(丸印)の磁場強度の変化の関係から2つの磁場
強度はその振幅が同じで位相が90度ずれており確かに
円偏光が生じていることがわかる。なお、図4に示すグ
ラフの横軸の位置において0.05mの位置が図1に示
される一番左端の角(図1における点Pの位置)に対応
する。From the relationship between the changes in the magnetic field strength in the horizontal direction (black squares) and in the vertical direction (circles) in FIG. It can be seen that it has occurred. The position of 0.05 m in the position of the horizontal axis of the graph shown in FIG. 4 corresponds to the leftmost corner (the position of point P in FIG. 1) shown in FIG.
【0017】図5は、本発明による好適実施形態の平板
型可変偏光ハイブリッドアンジュレータの構造を概略的
に示す。図5において、図1と同一あるいは類似の要素
は同一の参照番号を付し、その説明を繰り返さない。図
5に示す実施形態が、図1に示す実施形態と相違する点
は、図5に示されるように、磁極14が1対の磁石列1
0及び12が対向する上下方向に沿って3つに分割され
た磁極部材140、142及び144から成り、且つそ
の各々が前記上下方向に移動可能なように構成されてい
ることにある。即ち、磁極14は外側の部分の磁極部材
142及び144と内側の部分の磁極部材140に分割
され、それぞれ上下方向に可動し、磁極部材142及び
144の上面と永久磁石16の上面との高さ(位置)の
差aと、磁極部材142及び144の上面と磁極部材1
40の上面との高さ(位置)の差bの大きさを変えるこ
とによって、円偏光から楕円偏光に又その逆に偏光度を
変えることができる。FIG. 5 schematically shows the structure of a flat type variable polarization hybrid undulator according to a preferred embodiment of the present invention. 5, the same or similar elements as those in FIG. 1 are denoted by the same reference numerals, and description thereof will not be repeated. The embodiment shown in FIG. 5 differs from the embodiment shown in FIG. 1 in that, as shown in FIG.
The magnetic pole members 140, 142 and 144 are divided into three parts along the vertical direction where 0 and 12 are opposed to each other, and each of them is configured to be movable in the vertical direction. That is, the magnetic pole 14 is divided into outer magnetic pole members 142 and 144 and an inner magnetic pole member 140, and is movable in the vertical direction, respectively, and the height between the upper surfaces of the magnetic pole members 142 and 144 and the upper surface of the permanent magnet 16 is set. (Position) difference a, the upper surfaces of the magnetic pole members 142 and 144 and the magnetic pole member 1
The degree of polarization b can be changed from circularly polarized light to elliptically polarized light, and vice versa, by changing the magnitude of the difference b in height (position) from the upper surface of 40.
【0018】図6は、上記の差a、bを変えることによ
り偏光度が変わることを示すため中心軸上の磁場分布を
計算した結果を示す。この計算例では、差aは2.5m
mに固定し、差bのみを変えている。なお、他の機械的
寸法及び配置の位置及び磁極14及び永久磁石16の材
質は図4の場合と同一である。図6の(A)は、b=0
の場合、即ち3つの磁極部材140、142及び144
の上面が同一高さにある場合を示し、また、図6の
(B)は、b=−9.0mmの場合、即ち磁極部材14
0の上面が磁極部材142及び144の上面より9mm
下がっている(従って磁極14の断面形状は凹型にな
る)場合を示す。図6の(A)に示される水平方向と垂
直方向の磁場強度の振幅と位相関係から円偏光が発生さ
れていることがわかる。また、図6の(B)に示される
水平方向と垂直方向の磁場強度の振幅と位相関係から楕
円偏光が発生されていることがわかる。なお、図6に示
す(A)及び(B)の双方のグラフの横軸の位置におい
て0.0mの位置が図5に示される一番左端の角(図5
における点Pの位置)に対応する。FIG. 6 shows the result of calculating the magnetic field distribution on the central axis in order to show that the degree of polarization changes by changing the differences a and b. In this calculation example, the difference a is 2.5 m
m, and only the difference b is changed. The other mechanical dimensions and positions of the arrangement and the materials of the magnetic poles 14 and the permanent magnets 16 are the same as those in FIG. FIG. 6A shows that b = 0
, Ie, the three pole members 140, 142 and 144
FIG. 6B shows the case where b = −9.0 mm, that is, the magnetic pole member 14.
0 is 9 mm from the upper surfaces of the magnetic pole members 142 and 144.
The case where the magnetic pole 14 is lowered (therefore, the sectional shape of the magnetic pole 14 becomes concave) is shown. It can be seen from the horizontal and vertical magnetic field strength amplitudes and phase relationships shown in FIG. 6A that circularly polarized light is generated. Further, it can be seen from the relationship between the amplitude and the phase of the magnetic field strength in the horizontal direction and the vertical direction shown in FIG. 6B that elliptically polarized light is generated. In addition, the position of 0.0 m at the position of the horizontal axis of both graphs (A) and (B) shown in FIG. 6 is the leftmost corner (FIG. 5) shown in FIG.
(The position of the point P in FIG. 3).
【0019】上記計算例では、差aを固定したが、これ
を変えても偏光度が変わることは当該技術の知見から当
業者には明らかである。また、磁極部材140、142
及び144を上下方向に移動させる手段は、アンジュレ
ータの使用目的に応じていずれの既知の移動機構を適宜
採用し得る。In the above calculation example, the difference a is fixed, but it is obvious to those skilled in the art from the knowledge of the art that the degree of polarization changes even if the difference a is changed. Also, the magnetic pole members 140, 142
As means for moving the undulator 144 in the vertical direction, any known moving mechanism can be appropriately used depending on the purpose of use of the undulator.
【0020】なお、本発明のハイブリッドアンジュレー
タの磁気回路の特徴の一つは、垂直方向成分のみではな
く90度位相がずれた形で水平方向成分を生じさせるた
め、磁極と永久磁石とを上側と下側で反対向きに斜めに
して並べることにある。従って、本発明は、前述した実
施形態に限定されず、上記斜めにする角度は45度に限
定されるものではなく、他の角度であっても良い。One of the features of the magnetic circuit of the hybrid undulator according to the present invention is that not only the vertical component but also the horizontal component is generated with a phase shift of 90 degrees. It may be arranged diagonally in the opposite direction on the lower side. Therefore, the present invention is not limited to the above-described embodiment, and the angle of the slant is not limited to 45 degrees, but may be another angle.
【0021】また、偏光を可変にするため図5に示され
る実施形態においては磁極14を3分割しているが、本
発明はこれに限定されず、それより多く分割してそれぞ
れを上下に可動させるようにしても良い。In the embodiment shown in FIG. 5 in order to make the polarization variable, the magnetic pole 14 is divided into three parts. However, the present invention is not limited to this. You may make it do.
【0022】[0022]
【発明の効果】本発明は以上説明したように構成されて
いるので、磁場の垂直方向成分の外に水平方向成分が発
生し、従って円偏光や楕円偏光の磁場を上下2列の磁石
列で発生でき、アンジュレータの磁気回路の構造が簡単
になり、製作も容易になる。Since the present invention is constructed as described above, a horizontal component is generated in addition to the vertical component of the magnetic field. Therefore, the magnetic field of the circularly polarized light or the elliptically polarized light is generated by the upper and lower two rows of magnets. Can be generated, the structure of the magnetic circuit of the undulator is simplified, and the manufacture is also facilitated.
【0023】また、磁極を分割してそれぞれを上下方向
に移動可能にすることにより、円偏光から楕円偏光の間
で偏光度を自由に変えられる平板型の可変偏光ハイブリ
ッドアンジュレータを簡単に実現することができる。Further, by dividing the magnetic poles so as to be movable in the vertical direction, it is possible to easily realize a plate-type variable polarization hybrid undulator capable of freely changing the degree of polarization between circularly polarized light and elliptically polarized light. Can be.
【図1】本発明による好適実施形態の平板型円偏光ハイ
ブリッドアンジュレータの構造を概略的に示す。FIG. 1 schematically shows the structure of a flat circularly polarized hybrid undulator according to a preferred embodiment of the present invention.
【図2】図1に示される平面図円偏光ハイブリッドアン
ジュレータの具体的寸法の一例を示すための部分的側面
図である。FIG. 2 is a partial side view showing one example of specific dimensions of the plan view circularly polarized light hybrid undulator shown in FIG. 1;
【図3】図1に示される平面図円偏光ハイブリッドアン
ジュレータの具体的寸法の一例を示すための下側磁石列
12の部分的平面図である。FIG. 3 is a partial plan view of the lower magnet row 12 showing an example of specific dimensions of the circularly polarized hybrid undulator shown in FIG. 1;
【図4】図1に示される構造で円偏光を生成するように
された平板型円偏光アンジュレータの中心軸上の磁場分
布を計算した結果を示す。FIG. 4 shows a result of calculating a magnetic field distribution on a central axis of a plate-type circularly polarized undulator adapted to generate circularly polarized light with the structure shown in FIG.
【図5】本発明による好適実施形態の平板型円可変偏光
ハイブリッドアンジュレータの構造を概略的に示す。FIG. 5 schematically illustrates the structure of a flat circularly polarized hybrid undulator according to a preferred embodiment of the present invention.
【図6】磁極を構成する3つの磁極部材をそれぞれ可動
にすることにより偏光度を変えられることを示すため中
心軸上の磁場分布を計算した結果を示す。FIG. 6 shows a calculation result of a magnetic field distribution on a central axis in order to show that the degree of polarization can be changed by making each of three magnetic pole members constituting a magnetic pole movable.
10:上側磁石列 12:下側磁石列 14:磁極 16:永久磁石 140、142、144:磁極部材 10: Upper magnet row 12: Lower magnet row 14: Magnetic pole 16: Permanent magnet 140, 142, 144: Magnetic pole member
Claims (2)
わせた上側と下側の1対の磁石列が対向して設けられて
いる平板型円ないし楕円偏光ハイブリッドアンジュレー
タにおいて、 前記の対向した1対の磁石列は、各磁石列に含まれる磁
極が互いに対向し且つ永久磁石も互いに対向するよう配
置され、 各磁石列に含まれる前記磁極は、凹型形状を有し且つ当
該凹部が対向するよう配置され、 各磁石列に含まれる前記永久磁石は、周期的に組合わさ
れた方向に交互に磁化され、且つ上側と下側の対向する
永久磁石の磁化の方向は互いに逆向きに磁化されてお
り、 前記磁極及び永久磁石が前記1対の磁石列の上側と下側
で反対向きに斜めにして並べられていることを特徴とす
る平板型円ないし楕円偏光ハイブリッドアンジュレー
タ。1. A flat circular or elliptically polarized light hybrid undulator provided with a pair of upper and lower magnet rows that periodically combine a plurality of magnetic poles and permanent magnets. The pair of magnet rows are arranged such that the magnetic poles included in each magnet row face each other and the permanent magnets also face each other, and the magnetic poles included in each magnet row have a concave shape and the concave portions face each other. The permanent magnets included in each magnet row are alternately magnetized in a periodically combined direction, and the magnetization directions of the upper and lower opposing permanent magnets are magnetized in opposite directions. A flat circular or elliptically polarized hybrid undulator, wherein the magnetic poles and the permanent magnets are arranged obliquely in opposite directions on the upper and lower sides of the pair of magnet rows.
わせた上側と下側の1対の磁石列が対向して設けられて
いる平板型可変偏光ハイブリッドアンジュレータにおい
て、 前記の対向した1対の磁石列は、各磁石列に含まれる磁
極が互いに対向し且つ永久磁石も互いに対向するよう配
置され、 各磁石列に含まれる前記永久磁石は、周期的に組合わさ
れた方向に交互に磁化され、且つ上側と下側の対向する
永久磁石の磁化の方向は互いに逆向きに磁化されてお
り、 前記磁極及び永久磁石が前記1対の磁石列の上側と下側
で反対向きに斜めにして並べられており、 前記磁極は、前記1対の磁石列が対向する上下方向に沿
って少なくとも3つに分割されその各々が前記上下方向
に移動可能な少なくとも3つの磁極部材から成ることを
特徴とする平板型可変偏光ハイブリッドアンジュレー
タ。2. A variable-polarization hybrid undulator according to claim 1, wherein a pair of upper and lower magnet rows, each of which periodically combines a plurality of magnetic poles and permanent magnets, are provided to face each other. The magnet rows are arranged such that the magnetic poles included in each magnet row face each other and the permanent magnets also face each other, and the permanent magnets included in each magnet row are alternately magnetized in a periodically combined direction, Further, the directions of magnetization of the upper and lower opposed permanent magnets are magnetized in opposite directions, and the magnetic poles and the permanent magnets are arranged obliquely in opposite directions on the upper and lower sides of the pair of magnet rows. The magnetic pole is formed of at least three magnetic pole members each of which is divided into at least three along the vertical direction in which the pair of magnet rows face each other, and each of the magnetic pole members comprises at least three magnetic pole members movable in the vertical direction. Type variable polarization hybrid undulator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10932197A JP3566830B2 (en) | 1997-04-25 | 1997-04-25 | Flat hybrid undulator with circular, elliptical or variable polarization |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10932197A JP3566830B2 (en) | 1997-04-25 | 1997-04-25 | Flat hybrid undulator with circular, elliptical or variable polarization |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10302999A true JPH10302999A (en) | 1998-11-13 |
JP3566830B2 JP3566830B2 (en) | 2004-09-15 |
Family
ID=14507273
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JP10932197A Expired - Fee Related JP3566830B2 (en) | 1997-04-25 | 1997-04-25 | Flat hybrid undulator with circular, elliptical or variable polarization |
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JP (1) | JP3566830B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005060322A3 (en) * | 2003-12-12 | 2006-02-23 | Karlsruhe Forschzent | Undulator and method for operation thereof |
US9823572B2 (en) | 2013-06-18 | 2017-11-21 | Asml Netherlands B.V. | Lithographic method |
-
1997
- 1997-04-25 JP JP10932197A patent/JP3566830B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005060322A3 (en) * | 2003-12-12 | 2006-02-23 | Karlsruhe Forschzent | Undulator and method for operation thereof |
US7129807B2 (en) | 2003-12-12 | 2006-10-31 | Forschungszentrum Karlsruhe Gmbh | Undulator and method of operation thereof |
US9823572B2 (en) | 2013-06-18 | 2017-11-21 | Asml Netherlands B.V. | Lithographic method |
US10437154B2 (en) | 2013-06-18 | 2019-10-08 | Asml Netherlands B.V. | Lithographic method |
US10884339B2 (en) | 2013-06-18 | 2021-01-05 | Asml Netherlands B.V. | Lithographic method |
Also Published As
Publication number | Publication date |
---|---|
JP3566830B2 (en) | 2004-09-15 |
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