JPH10270249A - Laminated type coil part - Google Patents
Laminated type coil partInfo
- Publication number
- JPH10270249A JPH10270249A JP6964597A JP6964597A JPH10270249A JP H10270249 A JPH10270249 A JP H10270249A JP 6964597 A JP6964597 A JP 6964597A JP 6964597 A JP6964597 A JP 6964597A JP H10270249 A JPH10270249 A JP H10270249A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- conductors
- thickness
- green sheet
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims abstract description 50
- 238000010030 laminating Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 abstract description 3
- 238000000605 extraction Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、積層型コイル部
品、特に、高周波の電子回路等に使用される積層型コイ
ル部品に関する。The present invention relates to a laminated coil component, and more particularly to a laminated coil component used for high-frequency electronic circuits and the like.
【0002】[0002]
【従来の技術】この種の積層型コイル部品の一例を図3
及び図4に示す。この積層型コイル部品1はチップ形状
を有するもので、コイル用導体21〜2nをそれぞれ表面
に設けた絶縁性グリーンシート3を、上側及び下側にそ
れぞれ保護用グリーンシート3を配置して積層し、焼成
してなるものである。各コイル用導体21〜2nは、絶縁
性グリーンシート3に設けられたビアホール61,62,
63,…を介して直列に電気的に接続され、一つのスパ
イラル状のコイルを形成している。2. Description of the Related Art An example of this type of laminated coil component is shown in FIG.
And FIG. The laminated coil component 1 as it has a chip shape, the insulating green sheet 3 provided on the surface of the conductor 2 1 to 2 n coil respectively, by disposing the respective protective green sheet 3 at the upper side and the lower side They are laminated and fired. Conductor 2 1 to 2 n for each coil, a via hole 61 provided in the insulating green sheet 3, 6 2,
6 3, series are electrically connected via a ... to form a single spiral coils.
【0003】コイル用導体21は、グリーンシート3の
左辺に露出して設けられている引出し電極4aに電気的
に接続されている。この引出し電極4aは、積層型コイ
ル部品1の左側端部に設けられている端子電極7に接続
されている。また、コイル用導体2nは、グリーンシー
ト3の右辺に露出して設けられている引出し電極4bに
電気的に接続されている。この引出し電極4bは、積層
型コイル部品1の右側端部に設けられている端子電極8
に接続されている。[0003] conductor 2 1 coil is electrically connected to the lead electrode 4a provided exposed on the left side of the green sheet 3. The extraction electrode 4a is connected to a terminal electrode 7 provided at the left end of the multilayer coil component 1. The coil conductor 2 n is electrically connected to an extraction electrode 4 b exposed on the right side of the green sheet 3. The extraction electrode 4b is connected to a terminal electrode 8 provided at the right end of the multilayer coil component 1.
It is connected to the.
【0004】ところで、このような構成を有する積層型
コイル部品1において、外形寸法を変えることなく、異
なるインダクタンス値を得ようとすると、絶縁性グリー
ンシート3の材料組成を変えて透磁率を変化させたり、
コイル用導体21〜2nにより形成されるコイルの巻き数
を変えたり、あるいは、コイル用導体21〜2nにより形
成されるコイルの径を変えることにより、必要なインダ
クタンス値を得ていた。In order to obtain a different inductance value without changing the external dimensions of the laminated coil component 1 having such a configuration, the material composition of the insulating green sheet 3 is changed to change the magnetic permeability. Or
Changing the number of turns of the coil formed by the conductors 2 1 to 2 n coil, or by changing the diameter of the coil formed by the coil conductor 2 1 to 2 n, it had gained the necessary inductance value .
【0005】さらに、インダクタンス値の偏差が、例え
ば±2パーセントないし±5パーセント等のいわゆる狭
偏差を有する製品を製造する場合には、前述の方策に加
え、次の(1)ないし(3)のような手法により、イン
ダクタンス値が所望の偏差内に収まるようにしていた。 (1)コイル用導体21〜2nのうち所定のコイル用導体
のサイズを変え、コイルの径を一部分変更する。 (2)コイル用導体21〜2nのうち所定のコイル用導体
のパターン幅を変化させる。 (3)コイル用導体21〜2nのうち所定のコイル用導体
の位置をずらし、コイル部品1内を通る磁束の一部をこ
の所定のコイル用導体で遮る。Further, in the case of manufacturing a product having a so-called narrow deviation in inductance value deviation, for example, ± 2% to ± 5%, in addition to the above-mentioned measures, the following (1) to (3) By such a method, the inductance value is made to fall within a desired deviation. (1) changing the size of a given coil conductors of the coil conductors 2 1 to 2 n, to change a portion of the diameter of the coil. (2) changing the pattern width of the predetermined coil conductors of the coil conductors 2 1 to 2 n. (3) shifting the position of a given conductive coil of the coil conductors 2 1 to 2 n, block the part of the magnetic flux passing through the coil component 1 in the predetermined coil conductors.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、従来の
積層型コイル部品1において、前記(1)のように所定
のコイル用導体のサイズを変えたり、前記(2)のよう
に所定のコイル用導体のパターン幅を変化させると、コ
イル用導体21〜2nの種類が増加し、製造コストが高く
なるという問題があった。また、前記(3)のように所
定のコイル用導体の位置をずらせてコイル部品1内を通
る磁束の一部をこの所定のコイル用導体で遮るようにす
ると、コイル部品1の周波数特性、特に、Q特性が低下
するという問題があった。However, in the conventional laminated coil component 1, the size of the predetermined coil conductor is changed as described in (1), or the predetermined coil conductor is changed as described in (2). changing the pattern width, the conductor 2 1 to 2 n kinds of increases coils, there is a problem that manufacturing cost becomes high. Further, when the position of the predetermined coil conductor is shifted and a part of the magnetic flux passing through the coil component 1 is blocked by the predetermined coil conductor as in the above (3), the frequency characteristics of the coil component 1, especially And the Q characteristic is degraded.
【0007】そこで、本発明の目的は、狭偏差のインダ
クタンス値を低コストで実現することができ、しかも特
性の優れた積層型コイル部品を提供することにある。An object of the present invention is to provide a laminated coil component which can realize an inductance value with a narrow deviation at low cost and has excellent characteristics.
【0008】[0008]
【課題を解決するための手段】以上の目的を達成するた
め、本発明に係る積層型コイル部品は、コイル用導体の
間に配設された絶縁性層の少なくとも一つが、コイル用
導体の間に配設された残りの絶縁性層の厚みと異なる厚
みを有していることを特徴とする。In order to achieve the above object, a laminated coil component according to the present invention is characterized in that at least one of the insulating layers disposed between the coil conductors is provided between the coil conductors. Has a thickness different from the thickness of the remaining insulating layer disposed on the substrate.
【0009】[0009]
【作用】コイル用導体の間に配設された絶縁性層のうち
所定の絶縁性層の厚みを変えることにより、コイル用導
体の間隔が部分的に異なり、それに応じて積層型コイル
部品のインダクタンス値が変化する。By changing the thickness of a predetermined insulating layer among the insulating layers disposed between the coil conductors, the interval between the coil conductors is partially different, and the inductance of the laminated coil component is accordingly changed. The value changes.
【0010】[0010]
【発明の実施の形態】以下、本発明に係る積層型コイル
部品の実施形態について添付図面を参照して説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a laminated coil component according to the present invention will be described below with reference to the accompanying drawings.
【0011】図1及び図2に示すように、積層型コイル
部品11は、コイル用導体12a〜12iをそれぞれ表
面に設けた矩形状の絶縁性グリーンシート13を、上側
及び下側にそれぞれ保護用絶縁性グリーンシート13を
配置して積層し、焼成してなるものである。各コイル用
導体12a〜12iは、グリーンシート13にそれぞれ
設けられたビアホール16a〜16hを介して直列に電
気的に接続され、スパイラル状のコイルを形成してい
る。絶縁性グリーンシート13は、フェライト等の磁性
体材料又はセラミック等の誘電体材料等からなる。コイ
ル用導体12a〜12iは例えば導電性ペーストを印刷
等の方法により、絶縁性グリーンシート13の表面に塗
布、乾燥して形成される。導電性ペーストとしては、A
g,Pd,Ni,Cuあるいはこれらの合金の金属粉末
をバインダ及び溶剤にて混練したものを用いる。As shown in FIGS. 1 and 2, the laminated coil component 11 has a rectangular insulated green sheet 13 having coil conductors 12a to 12i provided on the surface, respectively. The insulating green sheets 13 are arranged, laminated, and fired. The coil conductors 12a to 12i are electrically connected in series via via holes 16a to 16h provided in the green sheet 13, respectively, to form a spiral coil. The insulating green sheet 13 is made of a magnetic material such as ferrite or a dielectric material such as ceramic. The coil conductors 12a to 12i are formed by, for example, applying a conductive paste to the surface of the insulating green sheet 13 by a method such as printing and drying. As the conductive paste, A
A mixture of metal powders of g, Pd, Ni, Cu or their alloys kneaded with a binder and a solvent is used.
【0012】コイル用導体12aは、グリーンシート1
3の左辺に露出して設けられている引出し電極14aに
電気的に接続されている。この引出し電極14aは、積
層型コイル部品11の左側端部に設けられている端子電
極17に接続されている。また、コイル用導体12i
は、グリーンシート13の右辺に露出して設けられてい
る引出し電極14bに電気的に接続されている。この引
出し電極14bは、積層型コイル部品11の右側端部に
設けられている端子電極18に接続されている。The conductor 12a for the coil is formed of the green sheet 1
3 is electrically connected to the extraction electrode 14a exposed on the left side. The extraction electrode 14a is connected to a terminal electrode 17 provided at the left end of the multilayer coil component 11. The coil conductor 12i
Are electrically connected to an extraction electrode 14b exposed on the right side of the green sheet 13. The extraction electrode 14b is connected to a terminal electrode 18 provided at the right end of the multilayer coil component 11.
【0013】そして、本実施形態では、コイル用導体1
2d,12eを表面に設けたグリーンシート13の厚み
tを、コイル用導体12a〜12c,12f〜12iが
設けられたグリーンシート13の厚みTよりも薄くして
いる。この薄いグリーンシート13により、コイル用導
体12d〜12fの積層方向の間隔が狭くなる。従っ
て、スパイラル状のコイルを構成するコイル用導体12
a〜12iの積層方向の間隔が部分的に異なり、それに
応じて、積層型コイル部品11のインダクタンス値もわ
ずかに変化する。こうして、コイル用導体12a〜12
iの間に配設された絶縁性グリーンシート13の厚みを
異ならせることにより、インダクタンス値が必要な偏差
の範囲内に収まるようにすることができる。In the present embodiment, the coil conductor 1 is used.
The thickness t of the green sheet 13 provided with 2d and 12e on the surface is smaller than the thickness T of the green sheet 13 provided with the coil conductors 12a to 12c and 12f to 12i. Due to the thin green sheet 13, the interval between the coil conductors 12d to 12f in the laminating direction is reduced. Therefore, the coil conductors 12 forming the spiral coil
The intervals in the stacking direction of a to 12i are partially different, and the inductance value of the multilayer coil component 11 slightly changes accordingly. Thus, the coil conductors 12a to 12
By varying the thickness of the insulating green sheet 13 disposed between i, the inductance value can be made to fall within a necessary deviation range.
【0014】また、コイル用導体12d,12eを表面
に設けたグリーンシート13の厚さを単に薄くしただけ
では、コイル部品11の外形寸法が変わるので、場合に
よっては、保護用グリーンシート13の厚みをその分厚
くしてコイル部品11の外形寸法が変わらないようにし
てもよい。Further, simply reducing the thickness of the green sheet 13 provided with the coil conductors 12d and 12e on the surface changes the outer dimensions of the coil component 11, and in some cases, the thickness of the protective green sheet 13 may be changed. May be increased by that amount so that the external dimensions of the coil component 11 do not change.
【0015】本発明は、前記実施形態に限定されるもの
ではなく、その要旨の範囲内で種々に変更することがで
きる。コイル用導体の間に配設された絶縁性層の厚み
は、少なくとも一つの所定の絶縁性層が他の絶縁性層の
厚みと異なっていればよく、また、この所定の絶縁性層
を他の絶縁性層の厚みよりも厚くしてもよい。さらに、
他の絶縁性層の厚みと異なる厚みを有する絶縁性層の配
置位置は、前記実施形態のようにコイル部品の積層方向
の中央部に必ずしも配置する必要はなく、任意であり、
例えば、積層方向の上側部又は下側部に配置するように
してもよい。The present invention is not limited to the above embodiment, but can be variously modified within the scope of the invention. The thickness of the insulating layer disposed between the coil conductors is sufficient if at least one predetermined insulating layer is different from the thickness of the other insulating layers. May be thicker than the thickness of the insulating layer. further,
The arrangement position of the insulating layer having a thickness different from the thickness of the other insulating layers does not necessarily need to be arranged at the center of the coil component in the laminating direction as in the embodiment, and is arbitrary.
For example, it may be arranged at the upper part or the lower part in the laminating direction.
【0016】また、前記実施形態は、コイル用導体が形
成された絶縁性グリーンシートを積み重ねた後、一体的
に焼成するものであるが、必ずしもこれに限定されな
い。絶縁性シートは予め焼結されたものを用いてもよ
い。また、以下に説明する製法によってコイル部品を製
作してもよい。印刷等の手段によりペースト状の絶縁性
材料を塗布して絶縁性層を形成した後、その絶縁性層の
表面にペースト状の導電体材料を塗布してコイル用導体
を形成する。次に、ペースト状の絶縁性材料を前記コイ
ル用導体の上から塗布して絶縁性層を形成する。こうし
て順に重ね塗りすることによって積層構造を有するコイ
ル部品が得られる。このとき、他の絶縁性層と異なる厚
みを有する絶縁性層を形成する際には、例えば印刷の場
合であれば絶縁性材料の粘度を変えたり、スクリーン版
のメッシュの厚みや大きさを変えたり等して塗布厚みを
変更する。In the above embodiment, the insulating green sheets on which the coil conductors are formed are stacked and then integrally fired, but the invention is not necessarily limited to this. As the insulating sheet, a sheet sintered in advance may be used. Further, the coil component may be manufactured by a manufacturing method described below. After a paste-like insulating material is applied by printing or the like to form an insulating layer, a paste-like conductor material is applied to the surface of the insulating layer to form a coil conductor. Next, a paste-like insulating material is applied from above the coil conductor to form an insulating layer. In this way, a coil component having a laminated structure can be obtained by successively coating. At this time, when forming an insulating layer having a thickness different from other insulating layers, for example, in the case of printing, change the viscosity of the insulating material, or change the thickness and size of the screen plate mesh. Change the coating thickness by slipping.
【0017】[0017]
【実施例】表1に本発明者が行なった試験結果を示す。
この試験の試料として、コイル部品の外形寸法が1.6
mm×0.8mm×0.8mm、スパイラル状コイルの
内径が0.239mm、巻き数が4.5ターンで、コイ
ル用導体の間に配設されるグリーンシートとして、厚み
が50μmのグリーンシートのみを用いたもの(実施例
1)、厚みが30μmのグリーンシートを1枚と、他は
50μmのグリーンシートを使用したもの(実施例
2)、厚みが30μmのグリーンシートを2枚と、他は
50μmのグリーンシートを使用したもの(実施例3)
を製作した。比較のため、他の条件は同様で、厚みが3
0μmのグリーンシートのみを使用したもの(比較例
1)、厚みが50μmのグリーンシートのみを用い、か
つ一つのコイル用導体のサイズを大きくしてスパイラル
状コイルの内径を一部分だけ0.257mmと大きくし
たもの(比較例2)を製作した。グリーンシートの材料
は、低誘電率のセラミック系の材料を採用した。これら
の試料を用いて周波数800MHzにおけるインダクタ
ンスL及びQ値を測定した。表1から、所定のグリーン
シートの厚みを変えることにより、Q値を低下させるこ
となく、インダクタンスLを微調整できることがわか
る。EXAMPLES Table 1 shows the results of tests performed by the present inventors.
As a sample for this test, the outer dimensions of the coil component were 1.6.
mm × 0.8 mm × 0.8 mm, spiral coil inner diameter is 0.239 mm, number of turns is 4.5 turns, and only green sheet having a thickness of 50 μm is provided between the coil conductors. (Example 1), one green sheet having a thickness of 30 μm, and others using a 50 μm green sheet (Example 2), two green sheets having a thickness of 30 μm, and others Using a 50 μm green sheet (Example 3)
Was made. For comparison, the other conditions were the same and the thickness was 3
Only the green sheet of 0 μm was used (Comparative Example 1), only the green sheet having a thickness of 50 μm was used, the size of one coil conductor was increased, and the inner diameter of the spiral coil was increased to 0.257 mm only in part. (Comparative Example 2) was produced. As the material of the green sheet, a low dielectric constant ceramic material was used. Using these samples, the inductance L and Q value at a frequency of 800 MHz were measured. Table 1 shows that the inductance L can be finely adjusted by changing the thickness of the predetermined green sheet without reducing the Q value.
【0018】[0018]
【表1】 [Table 1]
【0019】[0019]
【発明の効果】以上の説明から明らかなように、本発明
によれば、コイル用導体の間に配設された絶縁性層のう
ち所定の絶縁性層の厚みを変えることにより、コイル用
導体の間隔を部分的に異ならせ、それに応じてインダク
タンス値を変化させるようにしたので、特性を低下させ
ることなく、インダクタンス値の微調整を行うことがで
き、狭偏差のインダクタンス値を有する、特性の優れた
積層型コイル部品を得ることができる。さらに、本発明
によれば、コイル用導体のパターン形状の種類を増やす
必要がないので、積層型コイル部品の製造コストも引き
下げることができる。As is apparent from the above description, according to the present invention, by changing the thickness of a predetermined insulating layer among the insulating layers disposed between the coil conductors, The distance between the points is partially changed, and the inductance value is changed accordingly.Thus, the inductance value can be finely adjusted without deteriorating the characteristic, and the characteristic value having a narrow deviation inductance value can be obtained. An excellent laminated coil component can be obtained. Further, according to the present invention, it is not necessary to increase the types of pattern shapes of the coil conductor, so that the manufacturing cost of the laminated coil component can be reduced.
【図1】本発明に係る積層型コイル部品の一実施形態を
示す分解斜視図。FIG. 1 is an exploded perspective view showing one embodiment of a laminated coil component according to the present invention.
【図2】図1に示されている積層型コイル部品の外観斜
視図。FIG. 2 is an external perspective view of the multilayer coil component shown in FIG.
【図3】従来の積層型コイル部品の分解斜視図。FIG. 3 is an exploded perspective view of a conventional laminated coil component.
【図4】図3に示されている積層型コイル部品の外観斜
視図。FIG. 4 is an external perspective view of the multilayer coil component shown in FIG. 3;
11…積層型コイル部品 12a〜12i…コイル用導体 13…絶縁性グリーンシート T,t…厚み 11: laminated coil parts 12a to 12i: coil conductors 13: insulating green sheets T, t: thickness
Claims (1)
し、前記コイル用導体を直列に接続して形成したコイル
を内蔵した積層型コイル部品において、 前記コイル用導体の間に配設された絶縁性層の少なくと
も一つが、前記コイル用導体の間に配設された残りの絶
縁性層の厚みと異なる厚みを有していることを特徴とす
る積層型コイル部品。1. A laminated coil component having a built-in coil formed by laminating a plurality of coil conductors and an insulating layer and connecting the coil conductors in series, wherein the laminated coil component is disposed between the coil conductors. Wherein at least one of the insulating layers has a thickness different from the thickness of the remaining insulating layers disposed between the coil conductors.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP06964597A JP3554775B2 (en) | 1997-03-24 | 1997-03-24 | Laminated coil parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP06964597A JP3554775B2 (en) | 1997-03-24 | 1997-03-24 | Laminated coil parts |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10270249A true JPH10270249A (en) | 1998-10-09 |
JP3554775B2 JP3554775B2 (en) | 2004-08-18 |
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JP06964597A Expired - Lifetime JP3554775B2 (en) | 1997-03-24 | 1997-03-24 | Laminated coil parts |
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JP2001217126A (en) * | 1999-11-22 | 2001-08-10 | Fdk Corp | Multilayer inductor |
WO2005004177A1 (en) * | 2003-07-04 | 2005-01-13 | Murata Manufacturing Co. Ltd. | Multilayer ceramic electronic component, multilayer coil component and process for producing multilayer ceramic electronic component |
JP2005072169A (en) * | 2003-08-22 | 2005-03-17 | Toko Inc | Multilayer electronic components |
WO2009081865A1 (en) * | 2007-12-26 | 2009-07-02 | Murata Manufacturing Co., Ltd. | Laminated electronic component and electronic component module provided with the same |
CN102099876A (en) * | 2008-07-15 | 2011-06-15 | 株式会社村田制作所 | Electronic part |
CN105609267A (en) * | 2014-11-14 | 2016-05-25 | 乾坤科技股份有限公司 | Substrate-less electronic component and method for manufacturing the same |
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1997
- 1997-03-24 JP JP06964597A patent/JP3554775B2/en not_active Expired - Lifetime
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EP1542245A4 (en) * | 2003-07-04 | 2010-01-06 | Murata Manufacturing Co | Multilayer ceramic electronic component, multilayer coil component and process for producing multilayer ceramic electronic component |
WO2005004177A1 (en) * | 2003-07-04 | 2005-01-13 | Murata Manufacturing Co. Ltd. | Multilayer ceramic electronic component, multilayer coil component and process for producing multilayer ceramic electronic component |
JP2005026560A (en) * | 2003-07-04 | 2005-01-27 | Murata Mfg Co Ltd | Laminated ceramic electronic component, laminated coil component, and method for manufacturing laminated ceramic electronic component |
US7034646B2 (en) | 2003-07-04 | 2006-04-25 | Murata Manufacturing Co., Ltd. | Multilayer ceramic electronic component, multilayer coil component and process for producing multilayer ceramic electronic component |
JP2005072169A (en) * | 2003-08-22 | 2005-03-17 | Toko Inc | Multilayer electronic components |
WO2009081865A1 (en) * | 2007-12-26 | 2009-07-02 | Murata Manufacturing Co., Ltd. | Laminated electronic component and electronic component module provided with the same |
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JP2019050468A (en) * | 2017-09-08 | 2019-03-28 | 株式会社村田製作所 | Multilayer resonance circuit component, packaged multilayer resonance circuit component, and method of manufacturing multilayer resonance circuit component |
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