JPH10268172A - Optical component holder, confocal optical device using it, hologram exposing device and exposing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To position and hold an optical component with good reproducibility by mounting a holder plate holding the optical component on a base plate to be positioned in the vertical direction, lateral direction, and rotating direction. SOLUTION: A base plate 1 is fixed to an optical device. The vertical direction positioning pins 5a-5c of a holder plate 3 are kept in contact with the horizontal reference faces 9a-9c of the base plate 1. The holder plate 3 is moved in the horizontal direction, horizontal direction positioning pins 6a, 6b are kept in contact with the horizontal direction positioning reference faces 10a, 10b of the base plate 1, and the holder plate 3 is positioned at the holder center O. The holder plate 3 is rotated, a rotating direction positioning pin 7 is kept in contact with the rotating direction positioning reference face 11 of the base plate 1, and the holder plate 3 is positioned in the rotating direction. The fitting faces 8a-8c of the holder plate 3 and the brackets 12a-12c of the base plate 1 are fixed by an adhesive 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical component holder for attaching and holding optical components detachably and with good reproducibility, and an optical device related thereto.

[0002]

2. Description of the Related Art As shown in FIG. 1, a conventional optical component holder of this type is a holder b for holding an optical component a such as a pinhole, and a rod e to which a collar c is fixed with a set screw d. f, and fixed with a set screw g. A magnet base h is fixed to the rod holder f, and the magnet base h is fixed to an optical surface plate (not shown) by suction.

At this time, when the optical component is a mirror,
There is often a need to remove this mirror or install it in its original position with good reproducibility for reasons such as cleaning and replacement. However, in the case of the conventional optical component holder as shown in FIG. Reproducibility was very poor. In this optical component holder, since the collar c is fixed to the rod e, the height can be roughly reproduced. However, the accuracy of the reproducibility in the Z direction is several tens to several hundreds μ at best.
m, which is sufficient compared to the size of a mirror of several cm. However, if this is a pinhole having a diameter of several μm, for example, it cannot be said that reproducibility is very satisfactory.

The accuracy of reproducibility in the X and Y directions is several tens to several hundreds μm between the rod e and the rod holder f.
Cannot be made more precise than the above clearance, and there is no means for positioning at all in the rotational direction θ of the rod e.

For this reason, as shown in FIG. 2, a θ stage i and an XY stage j are arranged under a rod holder f, and these are adjusted and positioned each time the optical component a is re-installed. That is the current situation. However, this requires the fine adjustment every time an optical component such as a mirror is removed, which is very inconvenient.

[0006] In view of such a problem, a base with a positioning mechanism for holding an optical component whose position reproducibility is maintained even when the optical component is removed is commercially available (for example, manufactured by Kino Melles Griot Company). Kinematic base). FIGS. 3 to 7 show the configuration, in which steel balls n ₁ , n ₂ , and n ₃ are fitted into three places on the upper surface of the lower plate m among k and m on the upper and lower plates. In the state corresponding to the position, the upper plate k is provided with recesses o ₁ , o ₂ , o ₃ into which the steel balls n ₁ , n ₂ , n ₃ are fitted, and the upper plate k is provided on the lower plate m. The plate k is overlapped, and the steel balls n ₁ , n ₂ , n ₃ are respectively indented o ₁ , o ₂ ,
by engaging the o _3, so that the plate k of the upper is placed reproducibly be positioned against the underside of the plate m. As shown in FIG. 5, a screw hole r for supporting the rod is provided in the upper central portion thereof, and three screw holes s for fixing the base are provided around the hole r. As shown in FIG. The rod e of the holder b holding the optical component a shown in FIG. 1 is screwed and fixed to the screw hole r for supporting the rod, or as shown in FIG. 9, the XY stage j shown in FIG. The holder b is fixed to the fixing screw hole s by screwing, so that the holder b is placed on the lower plate m with good reproducibility.

However, in this conventional commercially available holder, as shown in FIG. 5, of the three recesses provided in the upper plate k, two of the recesses o ₁ and o ₃ correspond to the steel balls n ₁ and n ₁ . n
₃ does not have a hemispherical shape that fits perfectly, but instead has grooves that are oriented in directions perpendicular to each other to create relief. This is because it is very difficult to process the three steel balls n ₁ , n ₂ , and n _{3 so} that the hemispherical dents accurately correspond to each other. However, there is a problem that the accuracy of the method is reduced.

Further, even if each of the recesses can be made hemispherical and each of them can correspond to each steel ball accurately,
As shown in FIG. 10, since the radii of the depressions o ₁ , o ₂ and o ₃ are larger than the radii of the steel balls n ₁ , n ₂ and n ₃ , the depressions o ₁ , o ₂ and o ₃ and the steel ball n ₁ , N ₂ , and n ₃ are linear as indicated by the contact line q, and it is not possible to specify which of the contact lines q will be the reference point for positioning. Has a problem with accuracy. Further, in this structure, when the set screw is tightened for fixing, a force is applied to the upper plate k to move the plate, so that the error is also accumulated, and a total of 20 to 3
An error of about 0 μm occurs.

The present invention has been made in view of the above, and an object of the present invention is to provide an optical component holder capable of positioning and holding an optical component with good reproducibility.

[0010]

An optical component holder according to the present invention for achieving the above object comprises a holder plate for holding an optical component such as a mirror or a hologram on a base plate. In the optical component holder, a positioning member for each direction of the holder plate with respect to the base plate is one of: A reference surface provided on the plate side, and a pin provided on the other plate side and in point contact with the reference surface, furthermore, in this optical component holder, opposing the holder plate and the base plate in the holder central axis direction. A horizontal reference plane is placed on the opposite surface of one plate, and a plurality of points are placed on the horizontal reference surface on the opposite surface of the other plate. A plurality of horizontal positioning pins to be touched are provided respectively, and at both sides of the holder plate and the base plate at an angle θ of 180 °>θ> 0 with respect to the center of the holder, and in the horizontal direction in the radial direction with respect to the center of the holder. A positioning pin is provided on one of the plates, a horizontal positioning reference surface that comes into contact with the horizontal positioning pin in the radial direction is provided on the other plate, and further, one of the holder plate and the base plate is provided on the center of the holder. On the other hand, a rotation direction positioning pin is provided in the rotation direction, and the other plate has a rotation direction positioning reference surface on which the rotation direction positioning pin contacts in the rotation direction. In the optical component holder, the opposing surface of one plate opposing the holder plate and the base plate in the direction of the center axis of the holder. The horizontal reference plane,
A plurality of horizontal positioning pins, each of which is in point contact with the horizontal reference plane at a plurality of locations, are provided on the opposite surface of the other plate, and the radiating pins are provided at one location in the radial direction with respect to the holder center of the holder plate and the base plate. One horizontal positioning pin is provided on one of the plates in the direction, and the horizontal positioning pin is brought into contact with the horizontal positioning pin in the above direction.
The two horizontal positioning reference planes are provided in a V-shape,
One of the holder plate and the base plate is provided with a rotation direction positioning pin provided in the rotation direction with respect to the center of the holder, and the other plate is provided with the rotation direction positioning pin in the rotation direction. The configuration has a reference plane.

In the optical component holder having such a configuration, a holder plate for holding an optical component such as a mirror or a hologram is mounted on the base plate side while being positioned in both vertical and horizontal directions and a rotational direction. Positioning in each direction at this time is performed by a point contact of a pin provided on the other plate side with a reference surface provided on one plate side.

According to the optical component holder having this configuration, precise positioning can be performed at the time of re-installation after the removal of the optical component, and a complicated alignment work which is normally required can be omitted. Moreover, a movable stage or the like for that purpose is not required, and the apparatus can be reduced in size and simplified.

In the confocal optical device using the optical component holder, the reference light is incident, the object light is incident through a pinhole, and the reference light is incident on the hologram that has been exposed. Each optical component of the confocal optical device that condenses the object light reproduced in step 2 on the object to be measured and makes the reflected light pass through the hologram and is incident on the photodetector array via the pinhole Of these, at least the hologram is held by the above-mentioned optical component holder, so that the optical component such as the hologram can be repositioned with an accuracy of 1 μm or less, and the alignment between the hologram and the light receiving pinhole array is unnecessary. This eliminates complicated procedures, and eliminates the need for a movable stage for alignment (since positioning is not required when the hologram is first installed). It is possible to simplify the apparatus Te.

The hologram exposing device using the optical component holder is preferably a hologram exposing device that exposes the hologram by irradiating the hologram with reference light and object light through a pinhole. The hologram is configured to be held by the optical component holder, and the hologram exposure method using the optical component holder is configured such that reference light is incident on the hologram and object light is incident via a pinhole. When a hologram is created by the method described above, at least the hologram among the optical components is held by the above-mentioned optical component holder, so that the hologram can be mounted during the exposure operation of the hologram used in the confocal optical device. , Can be removed with good reproducibility.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. 11 and 12, reference numeral 1 denotes an optical device 2
The base plate 3 is fixed to the holder center 0 of the base plate 1, and the holder plate is positioned and placed in the vertical (Z) direction, the horizontal (X, Y) direction, and the rotation (θ) direction. It is. This holder plate 3
Optical components such as mirrors and pinholes can be directly fixed to
Rod 3 for mounting a commercially available optical component holder
a is fixed. 4 is a screw hole for that, and 4a is a mounting hole.

On the lower surface of the holder plate 3, three vertical positioning pins 5a, 5b, 5c are protruded from the upper surface of the holder plate 3 with the same length. Also,
Two horizontal positioning pins 6a and 6b project radially from the outer periphery of the holder plate 3 toward the direction of a certain angle θ (180>θ> 0) with respect to the center 0 of the holder. A rotation direction positioning pin 7 protrudes from the outer periphery of the holder plate 3 toward the rotation direction with respect to the holder center 0. Further, on the outer periphery of the holder plate 3, mounting surfaces 8a, 8b, 8 perpendicular to the holder center 0 are provided at positions not overlapping with the positioning pins 6a, 6b, 7.
c is detachably attached by a screw.

On the other hand, on the upper surface of the base plate 1, the vertical positioning pins 5a, 5b, 5c of the holder plate 3 are provided.
The horizontal reference planes 9a, 9b, 9h, 9b,
9c is provided. The number of the horizontal reference plane may be one as long as the area is such that the pins 5a, 5b, and 5c are in contact with each other. Also, two horizontal positioning pins 6a and 6b of the holder plate 3 are in contact with each other, and horizontal positioning reference surfaces 10a and 10b of the holder plate 3 are provided so that the holder center 0 coincides with a predetermined position. It is. In addition, a rotation direction positioning reference surface 11 that comes into contact with the rotation direction positioning pin 7 of the holder plate 3 is protruded. Further, the holder plate 3 is brought into contact with each of the pins and the reference surface, so that the holder plate 3 has a slight gap between the mounting reference surfaces 8a, 8b, and 8c of the holder plate 3 in a state where the holder plate 3 is positioned at the center of the holder. And opposite brackets 12a, 12b, 12c protrude therefrom.

In this configuration, the holder plate 3
By contacting the vertical positioning pins 5a, 5b, 5c with the horizontal reference surfaces 9a, 9b, 9c of the base plate 1, the vertical positioning (Z direction), the pitching p direction,
While being positioned in the yawing y direction, it is supported on the base plate 1 with a degree of freedom in the horizontal direction and the rotation (rolling r) direction. Next, the holder plate 3 is moved in the horizontal direction, and the two horizontal positioning pins 6a and 6b thereof are brought into contact with the horizontal positioning reference surfaces 10a and 10b of the base plate 1, whereby the holder plate 3 is horizontally moved. It is positioned at the holder center 0 in the state of being engaged in the direction. Then rotate the holder plate 3 slightly,
The holder plate 3 is engaged in the rotation (rolling r) direction by bringing the rotation direction positioning pins 7 into contact with the rotation direction positioning reference surface 11 of the base plate 1.

In this state, the holder plate 3 is positioned on the base plate 1 such that the center 0 of the holder is at a predetermined position. The fixing of the holder plate 3 to the base plate 1 is performed by using the mounting surface 8 of the holder plate 3.
a, 8b, 8c and the bracket 12a of the base plate 1,
This is done by putting an adhesive 13 into the gap between 12b and 12c and fixing them together. The adhesive has a low volume change rate, for example, an ultraviolet curable adhesive, or an adhesive having a reduced shrinkage rate by mixing particles inside the adhesive,
In addition, one that can easily release the adhesive force by physical or chemical means is used.

In the above operation, an optical device such as a mirror or a pinhole fixed to the holder plate 3 via the rod 3a is attached to a predetermined position of the optical device 2. To remove it, the brackets 12a, 12b, 1
The holder plate 3 is removed from the base plate 1 for every 2c, and then the adhesive force of the adhesive on the mounting surfaces 8a, 8b, 8c is released by, for example, a chemical means to remove the brackets 12a, 1c.
2b and 12c are removed from the holder plate 3, and the brackets 12a, 12b and 12c are fixed to the base plate 1 side again, so that the holder plate 3 is again mounted on the base plate 1 side with reproducibility. be able to.

In the above embodiment, each pin 5a, 5
The tip shape of b, 5c, 6a, 6b, 7 may be spherical as shown in FIGS. 11 and 12 as long as the tip is point-like, but this may be the case of pins 5a, 5b, 5c, 6a, 6b, 7
May have a conical shape with a sharpened tip.

FIG. 13 shows a modification of the embodiment of the present invention. In the embodiment shown in FIGS. 11 and 12, one horizontal positioning reference plane 10a, 10b is provided. The reference surface member 10c was provided in a V-shape. One horizontal positioning reference pin 6 is brought into abutment engagement with this. According to this configuration, only one horizontal positioning reference pin 6 is required. In this case, the tip of the pin 6 has a spherical shape.

In each of the above embodiments, the base plate 1 may be omitted, and instead, the constituent members provided on the base plate may be provided on the optical device 2 side. In the case where it is necessary to replace or adjust the optical device 2 or when the optical device 2 is large and it is difficult to process the optical device 2, it is more advantageous to use the base plate.

In each of the above embodiments, each pin is provided on the holder plate side, and each reference surface abutting on the holder plate is provided on the base plate side. May be provided on the base plate side, and each reference surface abutting on the base plate side may be provided on the holder plate side.

FIG. 14 shows an example of use of the optical component holder H having the above configuration. X for positioning on the base of the optical device 2
A Y stage j and a θ stage i are mounted on which the base plate 1 of the optical unit holder H according to the present invention is fixed. In this figure, the beam splitter 14 is mounted as an optical component on the holder plate 3, but this may be such that a lens or a pinhole is put in, for example, the holder b shown in FIG. 1 and fixed to the holder plate 3. . After the positioning of the optical components is adjusted by the XY stage j and the θ stage i, these stages i and j are fixed by means such as bonding. Accordingly, at the time of cleaning or the like, the optical component can be removed together with the holder plate 3 in the above-described procedure, and the positioning can be performed with accurate accuracy and high reproducibility.

FIGS. 15 and 16 show Japanese Patent Application Laid-Open No. 8-152308.
An example in which the above-described optical component holder is used in a confocal optical device using a hologram 15 disclosed in Japanese Patent Application Laid-Open Publication No. H10-115,878 will be described. FIG.
Denotes a state in which the hologram 15 is exposed, and the light source 1
The light emitted from 6 is split by the beam splitter 17, and one of the lights is converted into an expanded parallel light by a first expanding lens device 18 and is incident on the hologram 15 as a reference light 19 from obliquely below. The other light is magnified parallel light by the second magnifying lens device 20 and is projected on a pinhole 21. A point light source is projected from each pinhole array of the pinhole onto the first lens group 22. As a result, the hologram 15 is exposed and recorded.

After the object light has been recorded on the hologram 15, as shown in FIG. 16, light from a light source 16 'is irradiated on the hologram 15 with reference light 16' via a magnifying lens device 18 '. The object light is reproduced on the hologram 15, and the reproduced object light 23 is emitted from the hologram 1 as if the light equivalent to the pinhole array of the pinhole 21 shown in FIG.
5 is emitted. The light is condensed by the second lens group 24 and radiated to the measured object 25 as a point light source. The reproduced object light 23 is reflected by the object 25 to be measured, and the reflected light 23 ′ is reflected by the second lens group 24 and the hologram 1.
5. The pinhole 2 that transmits through the first lens group 22 and is on the light receiving side
The components projected to 1 'and passing therethrough are received by the photodetector array 26. At this time, the output of the photodetector array 26 becomes maximum from the principle of the confocal optical system only when the reproduction object light 23 is focused on the surface of the object 25 to be measured. Therefore, at this time, the surface shape of the measured object 25 is measured by moving the measured object 25 or the second lens group 24 along the X, Y, and Z axes.

At this time, the exposure of the hologram 15 in the hologram 15 exposure apparatus shown in FIG. 5 must be performed in a dark room by blocking all the light other than the light from the light source 16. Further, the exposed hologram 15 is exposed to normal light as it is, and loses the recorded image of the point light source array, so that post-processing is required. For example, if the material is a silver salt, it must be developed,
If the material is a photopolymer, it must be polymerized by exposure to ultraviolet light (UV radiation) and heat (baking). Such a process is very difficult when the hologram 15 is mounted on the apparatus, and it is necessary to remove the hologram 15 from the apparatus and reinstall it.

Referring to FIG. 16, in order for the confocal optical device to operate with a predetermined accuracy, the array of light that has exited from the hologram 15 and has been reflected to an object must be accurately returned to the light receiving pinhole array 21 '. . Conventionally, the hologram 15 or the light receiving pinhole array 2
1 'was aligned and each position was adjusted.

However, the pinhole array 2
Both the size and pitch of the small holes of 1, 21 'are several μm.
And several tens of μm, for example, an alignment for matching all these points of several hundreds × several hundreds required a very complicated procedure.

On the other hand, by using the optical component holder according to the present invention, this complicated procedure can be omitted. 17 and 18 show a state where the hologram component A is held by the optical component holder H '. The hologram component A has a configuration in which the hologram 15 is fixed to the base glass 27 and is covered by a cover glass 28 via a shim 29. Such a hologram component A is fixed to the holder plate 3 'of the optical component holder H' via the machine frame 30 by means such as adhesion. The holder plate 3 'is provided with a hole 31 through which light passes. The optical component holder H 'for holding the hologram component A also has a hole 32 through which the light passes, on the base plate 1'.

The hologram 15 of the hologram component A held in the optical component holder H 'as described above is exposed by the hologram exposure device shown in FIG. 15, and the state at this time is as shown in FIG. become. After being exposed in this manner, the hologram component A is
20 is removed and the hologram 15 is baked by the heater 33 as shown in FIG. 20, and then the hologram 15 is irradiated with ultraviolet rays by the ultraviolet irradiation device 34 as shown in FIG. Perform polymerization.

When the exposure and the polymerization of the hologram 15 are completed in this way, the holder plate 3 'and the hologram 15 shown in FIG.
By returning to the base plate 1 'as shown in FIG.
To obtain a confocal optical device as shown in FIG.

At this time, the positioning of the hologram 15 in the hologram component A is determined by the optical component holder H '.
Performed accurately with accuracy within m. Therefore, hologram 1
The reproduction light 23 ′ of No. 5 corresponds to the pinhole array 2 in FIG.
Now correctly returns to one place. As a result, the positioning between the hologram 15 and the light receiving pinhole array becomes unnecessary, and the mounting and dismounting of the hologram component A can be performed accurately without requiring a complicated procedure. Also, no movable stage is required for alignment (since positioning is unnecessary when the hologram is first installed)
Thus, the device is simplified.

[Brief description of the drawings]

FIG. 1 is a front view showing a conventional optical component holder.

FIG. 2 is a front view showing a conventional optical component holder.

FIG. 3 is a partially cutaway front view showing a conventional base with a positioning mechanism.

FIG. 4 is an arrow view along the line AA in FIG. 3;

FIG. 5 is an arrow view along the line BB in FIG. 3;

6 is a sectional view taken along the line CC in FIG. 5;

FIG. 7 is a sectional view taken along the line DD in FIG. 5;

FIG. 8 is a partially cutaway front view showing an optical component holder using the conventional base with a positioning mechanism shown in FIG. 3;

FIG. 9 is a partially cutaway front view showing an optical component holder using the conventional positioning mechanism shown in FIG. 3 and another stage.

FIG. 10 is an operation explanatory view showing an engagement state between a hemispherical recess and a spherical steel ball.

FIG. 11 is a plan view showing an optical component holder according to the present invention.

FIG. 12 is a front view showing an optical component holder according to the present invention.

FIG. 13 is a plan view showing another embodiment of the optical component holder according to the present invention.

FIG. 14 is a front view showing an example of use of the optical component holder according to the present invention.

FIG. 15 is a configuration explanatory view showing a confocal optical device using a hologram.

FIG. 16 is a configuration explanatory view showing a hologram exposure device of a confocal optical device using a hologram.

FIG. 17 is a cross-sectional view showing a state where a hologram component is held.

FIG. 18 is a plan view showing a state where a hologram component is held.

FIG. 19 is an explanatory diagram showing a state in which a hologram component is held on an optical component and exposed.

FIG. 20 is an explanatory diagram showing a state in which the hologram is heated.

FIG. 21 is an explanatory diagram showing a state in which a hologram is irradiated with ultraviolet rays.

FIG. 22 is an explanatory diagram showing a state in which the hologram component is held in an optical component holder and incorporated into a confocal optical device.

[Explanation of symbols]

a ... optical component b ... holder d, g ... Screw e ... Rod f ... Rod holder i ... theta stage j ... X · Y stage k, m ... plate _{n 1, n 2, n 3} ... steel balls o _1, o ₂ , O ₃ ... dent q ... contact line 1, 1 '... base plate 2 ... optical device 3, 3' ... holder plate 3a ... rod 5a, 5b, 5c ... vertical positioning pins 6, 6a, 6b ... horizontal positioning pins 7 ... Rotation direction positioning pins 9a, 9b, 9c ... Horizontal reference plane 10a, 10b ... Horizontal direction reference plane 11 ... Rotation direction positioning reference plane 15 ... Hologram 16, 16 '... Light source 19, 19' ... Reference light 21, 21 '... Pinhole 23 ... Reproduced object light 25 ... Measured object 26 ... Photodetector array 33 ... Heater 34 ... Ultraviolet irradiation device A ... Optical component holder H, H' ... Optical component holder

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Manabu Ando 1200 Manda, Hiratsuka-shi, Kanagawa Prefecture, Komatsu Ltd.

Claims (7)

[Claims] A holder plate for holding an optical component such as a mirror or a hologram is mounted on a base plate so as to be positionable in both vertical and horizontal directions with respect to the upper surface of the base plate and in a rotational direction. Optical component holder. 2. The optical component holder according to claim 1, wherein positioning members for each direction of the holder plate with respect to the base plate are provided on a reference surface provided on one plate side and on the other plate side, and the reference member is provided. An optical component holder comprising: a pin that makes point contact with a surface. 3. The optical component holder according to claim 1, wherein a horizontal reference surface is provided on an opposite surface of one plate facing the holder center axis direction of the holder plate and the base plate, and the horizontal reference surface is provided on an opposite surface of the other plate. A plurality of horizontal positioning pins are provided, each of which is in point contact with the reference plane at a plurality of locations, and at both sides of an angle θ of 180 °>θ> 0 with respect to the holder center of the holder plate and the base plate,
A horizontal positioning pin is provided on one plate in a radial direction with respect to the center of the holder, and a horizontal positioning reference surface is provided on the other plate for contacting the horizontal positioning pin in the radial direction. One plate is provided with a rotation direction positioning pin provided in the rotation direction with respect to the center of the holder, and the other plate is provided with a rotation direction positioning reference surface on which the rotation direction positioning pin contacts in the rotation direction. An optical component holder characterized in that: 4. The optical component holder according to claim 1, wherein a horizontal reference plane is provided on an opposite surface of one of the holder plates and the base plate which faces the holder center axis direction, and the horizontal reference surface is provided on an opposite surface of the other plate. A plurality of horizontal positioning pins, each of which is in point contact with the reference surface at a plurality of locations, are respectively provided, and one horizontal positioning pin is provided in a radial direction with respect to the holder center of the holder plate and the base plate in the radial direction. A pin is provided on one of the plates, and contacts the horizontal positioning pin in the above direction.
The two horizontal positioning reference planes are provided in a V-shape,
One of the holder plate and the base plate is provided with a rotation direction positioning pin provided in the rotation direction with respect to the center of the holder, and the other plate is provided with the rotation direction positioning pin in the rotation direction. An optical component holder having a reference surface. 5. A reference light is made incident, object light is made incident through a pinhole, object light is made incident on the hologram exposed, and the object light reproduced by the reference light is collected on the object to be measured. The hologram of at least one of the optical components of the confocal optical device, which emits light and makes the reflected light pass through the hologram and is incident on the photodetector array via the pinhole, is used. 5. A confocal optical device, wherein the device is held by the optical component holder described in 3, 4 or 5. 6. A hologram exposing apparatus for exposing a hologram by irradiating an object beam through a pinhole together with a reference beam together with a reference beam, at least a hologram of the optical component. A hologram exposure apparatus, wherein the hologram exposure apparatus is held by the optical component holder described in the above. 7. A hologram in which a reference beam is incident,
A hologram is created by injecting object light through a pinhole, wherein at least the hologram among the optical components is held by the optical component holder according to claim 1, 2, 3, or 4. Confocal optical method.