JPH10267607A - Deflection measurement device - Google Patents

Abstract

(57) [Summary] To provide a bending amount measuring apparatus which is small and can measure the bending amount with high accuracy even in a high temperature environment. The present invention relates to a moving member (20) movable in the direction of an arrow (S) and a rod member (2) screwed into a through hole (20a) of the moving member (20) and driven to rotate by a motor (22).
1 and a movable member 2 having one end of a measuring terminal 13A made of a material having a low thermal expansion coefficient attached to one end of the through hole 20b of the moving member 20 so as to be slidable in the longitudinal direction.
4, a spring 25 inserted between the disk member 23 and the movable member 24, a core 26 inserted at a substantially central portion of the measuring terminal 13A, and a secondary output proportional to the mechanical displacement of the core 26. It has a differential transformer 27A that outputs a voltage, and a deflection amount calculation unit that determines the position of the tip of the measurement terminal 13A based on the secondary output voltage, and further calculates the deflection amount of the rotor 2 based on the position. I have.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexure measuring apparatus used for measuring a flexure at a high temperature portion such as a casing and a rotor of a gas turbine engine.

[0002]

2. Description of the Related Art During the operation of a gas turbine engine or the like, the temperature of a casing and a rotor constituting the gas turbine engine is increased by 400 ° C. due to a temperature rise due to axial flow compression or a high temperature gas.
It reaches ~ 600 ° C. Therefore, if a measure for gradually cooling the gas turbine engine is neglected after the operation of the gas turbine engine, a temperature difference occurs in the engine, and the casing, the rotor, and the like are bent. .

FIGS. 11 (a) to 11 (d) are schematic side sectional views showing a state of thermal deformation in the above-described gas turbine engine. FIG. 11A illustrates a state immediately after the operation of the gas turbine engine is stopped. In FIG. 11A, reference numeral 1 denotes a substantially cylindrical casing whose both end faces are closed. Reference numeral 2 denotes a substantially spindle-shaped rotor provided inside the casing 1, and both ends thereof are rotatably supported on both end plates of the casing 1 via bearings 3 and 4. A plurality of blades 2a, 2a,... Are attached to the outer peripheral surface of the rotor 2.

In the above configuration, when the operation of the gas turbine engine is stopped, the inside of the casing 1 shown in FIG. 11A is brought into a state in which the high-temperature gas is uniformly filled. Then, as time elapses, convection occurs in the high-temperature gas inside the casing 1 shown in FIG. Then, as shown in FIG. 11 (c), in the casing 1, the high-temperature gas stays in the upper part, and the low-temperature gas stays in the lower part.

As a result, the thermal expansion of the casing 1 and the upper half of the rotor 2 becomes larger than the thermal expansion of the casing 1 and the lower half of the rotor 2, and as shown in FIG. Thermal deformation occurs in the casing 1 and the rotor 2. That is, the axis of the rotor 2 is displaced from the normal axis J1 to the axis J2 which is considerably shifted from the axis J1.

Therefore, conventionally, a displacement measuring device for measuring the amount of deflection due to the thermal deformation of the gas turbine engine has been developed. As an example of this, there is a non-contact type displacement measuring device that irradiates a measured surface of the casing 1 and the rotor 2 with a laser beam and measures the amount of deflection from the amount of displacement of the optical distance.

[0007]

By the way, the displacement measuring device used in the above-described gas turbine engine and the like is required to satisfy the following characteristics due to restrictions on the use conditions. (1) Due to the characteristics of an ultra-precision machine such as a gas turbine engine, high-precision measurement can be performed even in a high temperature environment of 400 to 600 ° C. at a measurement point. (2) Since the gas turbine engine is an ultra-high-density machine, it must be small due to space constraints. However, in the conventional non-contact type displacement measuring device, since the surface to be measured (the casing 1 and the rotor 2) is discolored by being heated, the laser light applied to the surface to be measured is absorbed and scattered. This has the disadvantage that the measurement accuracy is low.

Further, the conventional non-contact type displacement measuring device has a drawback that the entire device is naturally large because the laser generating device for generating the laser beam is large.

The present invention has been made in view of such a background, and an object of the present invention is to provide a bending amount measuring apparatus which is small and can measure the bending amount with high accuracy even in a high temperature environment. Aim.

[0010]

According to a first aspect of the present invention, a substantially rod-shaped measuring terminal (13) made of a material having a low expansion coefficient is disposed so as to face a measurement object at a predetermined distance.
A), a driving device (12A) for driving the measurement terminal in the direction of the object to be measured or in the opposite direction, a core (26) attached to the measurement terminal (13A), and a core (26). Transformer that outputs a voltage according to the position (2
7A) and the measurement terminal (13
A) a deflection position calculating section (31) for determining a contact position at which the tip of the sample abuts on the object to be measured, and determining a distance between the previously determined contact position and the currently determined contact position as a deflection amount. It is characterized by having. According to a second aspect of the present invention, in the deflection amount measuring apparatus according to the first aspect, a storage unit (30) for storing a table representing a correspondence relationship between the voltage and a contact position of a tip of the measurement terminal. And the deflection amount calculating section (31) obtains the actual contact position by applying the voltage output from the transformer (27A) to the table. Further, according to a third aspect of the present invention, in the deflection amount measuring apparatus according to the first or second aspect, the measuring terminal (13A)
And a spring (25) interposed between the rear end portion and the driving device (12A).

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a side sectional view showing a configuration of a deflection amount measuring device according to an embodiment of the present invention. In FIG. 1, portions corresponding to the respective portions in FIG. 11A are denoted by the same reference numerals, and description thereof will be omitted. In the casing 1 shown in FIG. 1, insertion holes 1a and 1b are formed on the outer peripheral surface at positions facing each other (see FIG. 2A). 2A to 2C are cross-sectional views taken along line XX shown in FIG.

1A is a bushing,
The casing 1 is attached to the periphery of the insertion hole 1a. Reference numeral 11A denotes a substantially cylindrical member provided at a right angle to the casing 1, and one edge of the cylindrical member is attached to the bushing 10A. 12A is
This is a driving device attached to the other end of the cylindrical member 11A, and drives the measuring terminal 13A in the radial direction of the casing 1. The measurement terminal 13A is a contact used for measuring the amount of deflection of the rotor 2, and is movably accommodated inside the cylindrical member 11A. The measurement terminal 13A is formed of a super-invar having a small coefficient of thermal expansion (1 × 10 ⁻⁷ / deg), and has a diameter of, for example, 3 mm. .

Here, the structure of the driving device 12A will be described in detail with reference to FIG. In this figure, 20
Is a moving member having a substantially rectangular parallelepiped shape, and is indicated by an arrow S shown in FIG.
It is movable in the direction or the opposite direction. Also,
In the lower part of the moving member 20, there is formed a through hole 20a which is a female screw and penetrates from one end surface to the other end surface. On the other hand, a through hole 20b penetrating from one end surface to the other end surface and a through hole 20c serving as a female screw are formed in an upper portion of the moving member 20 so as to communicate with each other.

Reference numeral 21 denotes a substantially bar-shaped male screw rod member which is screwed into the through hole 20a of the moving member 20. 2
Reference numeral 2 denotes a motor that rotationally drives the rod member 21 via a gear mechanism (not shown). Reference numeral 23 denotes a substantially disk-shaped disk member having a thread formed on the outer peripheral surface, and is screwed into the through hole 20 c of the moving member 20. Reference numeral 24 denotes a substantially cylindrical movable member, which is slidably provided in the through hole 20b of the movable member 20 in the longitudinal direction. In addition, one end of the measurement terminal 13A is attached to one end of the movable member 24. That is, the movable member 24 is movable along with the measuring terminal 13A in the direction of the arrow S shown in FIG.

Reference numeral 25 denotes a spring inserted between the disk member 23 and the movable member 24. Reference numeral 26 denotes a core inserted approximately in the center of the measurement terminal 13A. Reference numeral 27A denotes a differential transformer disposed on the right side of the moving member 20;
And outputs a secondary output voltage VA proportional to the mechanical displacement (see FIG. 4). In the center of the differential transformer 27A,
A through hole 27a is formed.
a, the primary coil 281 and two
Next coils 282, 282 are provided, respectively. The core 26 (measurement terminal 13A) penetrates inside the primary coil 281 and the secondary coils 282, 282.

That is, the above-mentioned secondary output voltage VA is:
The output voltages of the secondary coils 282 and 282 are output from the secondary coils 282 and 282, as shown in FIG.
(D) output secondary output voltages VA1 to VA3 proportional to the positions P1 to P3 of the core 26, respectively.

In FIG. 1, 10B is a bushing 10
This is a bushing having the same configuration as that of A, and is attached to the periphery of the insertion hole 1b of the casing 1. 11B is a substantially cylindrical member provided at a right angle to the casing 1 and one end edge thereof is a bushing 10B.
Attached to. A driving device 12B is attached to the other end of the cylindrical member 11B and has the same configuration as the driving device 12A shown in FIG. 3, and is disposed to face the driving device 12A (see FIG. 2A). ). The driving device 12B drives the measuring terminal 13B in the radial direction of the casing 1.

The measuring terminal 13B is a contact used for measuring the amount of deflection of the rotor 2, and is movably accommodated inside the cylindrical member 11B. Also, the measuring terminal 13
B is formed by super amber.

Reference numeral 14 denotes a cylindrical duct coaxially arranged with respect to the casing 1, and both ends of which are fixed members 15
-18. That is, the position of the duct 14 is constant regardless of the displacement of the casing 1 and the rotor 2, and is a reference position for measuring the amount of deflection. Also,
In this duct 14, insertion holes 14a and 14b are formed at positions facing each other (see FIG. 2A) on the outer peripheral surface.

Reference numeral 10C denotes a bushing having the same configuration as the bushing 10A, which is attached to the periphery of the insertion hole 14a of the duct 14. 11C is a substantially cylindrical member provided at a right angle to the duct 14, and one end edge thereof is attached to the bushing 10C. Reference numeral 12C denotes a driving device which is attached to the other end of the cylindrical member 11C and has the same configuration as the driving device 12A shown in FIG. This driving device 12C drives the measuring terminal 13C in the radial direction of the casing 1.

The measuring terminal 13C is a contact used for measuring the amount of deflection of the casing 1, and the cylindrical member 11
It is movably accommodated inside C. The measurement terminal 13C is formed of a super-amber.

In FIG. 1, 10D is a bushing 10
A bushing having the same configuration as A, and is attached to the periphery of the insertion hole 14b of the duct 14. 11D is a substantially cylindrical cylindrical member provided at right angles to the duct 14, and one end edge thereof is attached to the bushing 10D. A driving device 12D is attached to the other end of the cylindrical member 11D and has the same configuration as the driving device 12A shown in FIG. 3, and is arranged to face the driving device 12C (see FIG. 2A). ). This drive 1
2D drives the measuring terminal 13D in the radial direction of the casing 1.

The measuring terminal 13D is a contact used for measuring the amount of deflection of the casing 1, and is a cylindrical member 11D.
D is movably accommodated inside. The measurement terminal 13D is formed of a super-amber.

FIG. 6A is a block diagram showing the electrical configuration of the deflection measuring apparatus according to the above-described embodiment. In this figure, the differential transformer 27A outputs the secondary output voltage VA corresponding to the position of the core 26 as described above. The position of the core 26 shown in FIG.
Since it is regarded as the position of the tip of 3A, in the following description, it is assumed that the secondary output voltage VA corresponds to the position of the tip of the measurement terminal 13A.

Reference numeral 27B shown in FIG. 6A is a differential transformer having the same configuration as the differential transformer 27A (see FIG. 3).
It is provided inside the driving device 12B (see FIG. 1).
The differential transformer 27B outputs a secondary output voltage VB according to the position of the tip of the measurement terminal 13B (see FIG. 1). 27C is a differential transformer having the same configuration as the differential transformer 27A, and is provided inside the driving device 12C (see FIG. 1). The differential transformer 27C outputs a secondary output voltage VC corresponding to the position of the tip of the measurement terminal 13C (see FIG. 1).

Reference numeral 27D denotes a differential transformer having the same configuration as the differential transformer 27A, and is provided inside the driving device 12D (see FIG. 1). Also, this differential transformer 27D
Outputs a secondary output voltage VD corresponding to the position of the tip of the measuring terminal 13D.

Reference numeral 30 denotes a storage unit for storing various data necessary for calculating the amount of deflection. Here, a memory map of the storage unit 30 is shown in FIG. A voltage / position conversion table is stored in a storage area a shown in FIG. This voltage / position conversion table corresponds to the secondary output voltage VA shown in FIG.
Is a table showing a relationship between the secondary output voltage VA and the position PA of the tip of the measurement terminal 13A. The voltage / position conversion table converts the secondary output voltages VB, VC, and VD into measurement terminals 13B, 13B.
It is also used when converting to the position of each tip of C, measurement and 13D.

In the storage areas be, the measuring terminals 13 are provided.
Each data of the reference positions PA0 to PD0 of the tips of A to 13D is stored. Here, the reference positions PA0 to PD0 are:
As shown in FIG. 2 (b), when the casing 1 and the rotor 2 are not bent, the measuring terminals 13A to 13A are used.
13D refers to the position of each end when the casing 13 and the rotor 2 are in contact with each other. The data of the reference positions PA0 to PD0 are obtained in advance by calibration before measuring the amount of deflection.

Reference numeral 31 denotes a flexure amount calculation unit which calculates the flexure amounts of the casing 1 and the rotor 2 based on the secondary output voltages VA to VD and various data stored in the storage unit 30. The details of the operation of the deflection amount calculation unit 31 will be described later.

Next, the operation of the deflection amount measuring apparatus according to the above-described embodiment will be described. In FIG. 1, when the operation of the gas turbine engine is stopped, the casing 1
The inside is in a state where the hot gas is uniformly filled.
At this time, it is assumed that the casing 1 and the rotor 2 have not been thermally deformed due to the above-mentioned temperature difference. Also,
At this time, the tips of the measurement terminals 13A and 13B shown in FIG. 2A are at positions where they do not enter the inside of the casing 1, while the tips of the measurement terminals 13C and 13D are
In a position where it does not enter the interior of the Hereinafter, each position of the tips of the measurement terminals 13A to 13D shown in FIG. 2A is referred to as an initial position.

When power is supplied to each part of the apparatus,
The motor 22 shown in FIG.
1 is rotationally driven in conjunction with this. Thereby, the moving member 20, the core 26, and the measuring terminal 13A are respectively moved in the direction of the arrow S shown in the figure (see FIG. 2B). In addition, as the cores 26 move, the differential transformer 2
The secondary output voltage VA output from 7A increases (see FIG. 4). Then, after a certain period of time, FIG.
As shown in (c), the tip of the measurement terminal 13 </ b> A contacts the rotor 2. At this time, the core 26 is located at the position P3, and the secondary output voltage VA3 is output from the differential transformer 27A.
(See FIG. 4) is output to the deflection amount calculation unit 31.

Further, the tip of the measuring terminal 13A is
After the contact with the moving member 20 as shown in FIG.
Is moved, but the measuring terminal 13A and the movable member 24 do not move. This is because the spring 25 contracts as the moving member 20 moves. Therefore, in this case, the load to be applied to the measurement terminal 13A is absorbed by the spring 25. Further, at this time, since the movable member 24 is still located at the position P3, the secondary output voltage VA3 output from the differential transformer 27A has a constant value as shown in FIG.

As a result, the deflection amount calculator 3 shown in FIG.
No. 1 determines that the tip of the measuring terminal 13A has come into contact with the rotor 2 since the secondary output voltage VA3 is a constant value, and stores the voltage / position conversion table (FIG. Read)). Next, the deflection amount calculation unit 31
Is the secondary output voltage V using the voltage / position conversion table.
After obtaining the position P3 corresponding to A3, this is referred to as the reference position PA0.
Is written in the storage area b of the storage unit 30 shown in FIG.

In the present state, that is, in a state where the measuring terminals 13B, 13C and 13D shown in FIG. 2B are in contact with the casing 1 and the rotor 2, FIG.
(A) Differential transformers 27B, 27C and 27D
, The secondary output voltages VB, VC, and VD are respectively output to the deflection amount calculation unit 31. Deflection amount calculator 31
Calculates the reference positions PB0, PC0, and PD0 at the tips of the measurement terminals 13B, 13C, and 13D from the voltage / position conversion table in the same manner as in the case of the secondary output voltage VA described above, and then stores them in the storage unit 30. Storage areas c, d and e
Write to each. This completes the calibration of the reference positions PA0 to PD0 before the measurement of the deflection amount.

When the moving member 20 shown in FIG. 5D moves by the moving distance d from the position shown in FIG. 5A, the motor 22 is driven to rotate in the reverse direction, and the moving member 20 and the measuring terminal 13 are moved.
A shows an arrow S shown in FIG.
2 (c), the tips of the measuring terminals 13A to 13D are located at the initial positions.

Then, as time passes, convection occurs in the high-temperature gas inside the casing 1 shown in FIG. In the casing 1, the high-temperature gas stays in the upper part, while the low-temperature gas stays in the lower part. As a result, the thermal expansion of the upper half of the casing 1 and the rotor 2 becomes larger than the thermal expansion of the lower half of the casing 1 and the rotor 2, so that the casing 1 and the rotor 2 undergo thermal deformation. That is,
The axis of the rotor 2 is displaced from the normal axis J1 to an axis J2 which is considerably displaced from the axis J1.

In this state, when the driving devices 12A, 12B, 12C and 12D shown in FIG. 8A are driven, the measuring terminals 13A and 13D are operated in the same manner as the operation described above.
B, 13C and 13D are each moved toward the center of the casing 1. Then, as shown in FIG. 8B, when the tips of the measuring terminals 13A, 13B, 13C and 13D abut on the casing 1 and the rotor 2, respectively, FIG.
The secondary output voltages VA and V output from the differential transformers 27A, 27B, 27C and 27D shown in FIG.
B, VC and VD become constant values.

In this manner, the deflection amount calculation section 31 outputs the secondary output voltage VA, which is a constant value, in the same manner as the above-described operation.
From VB, VC and VD and the voltage / position conversion table,
The measurement terminals 13A and 13 in the state shown in FIG.
The measurement positions of the tips of B, 13C, and 13D are determined. Now, it is assumed that the positions of the respective tips are obtained as follows. PA1: Measurement position of the tip of the measurement terminal 13A PB1: Measurement position of the tip of the measurement terminal 13B PC1: Measurement position of the tip of the measurement terminal 13C PD1: Measurement position of the tip of the measurement terminal 13D

Next, the deflection amount calculating section 31 stores in the storage section 30
After reading the reference positions PA0, PB0, PC0 and PD0 from the reference positions PA0, PB0, PC0 and PD0 and the position P
The respective distances between A1, PB1, PC1 and PD1 are obtained as deflection amounts BA, BB, BC and BD. Above deflection B
A and BB are the deflection amounts of the rotor 2 facing the measurement terminals 13A and 13B shown in FIG. 8A, while the deflection amounts BC and BD are the deflection amounts of the casing 1 facing the measurement terminals 13C and 13D. It is. Then, the deflection amount calculation unit 31 outputs the deflection amounts B1, B2, B3, and B4 as measurement data D to a display (not shown). As a result, the display shows the deflection amounts B1, B2, B
3 and B4 are displayed.

Then, after a certain period of time, the driving devices 12A, 12B, 12C and 12D are driven to rotate in reverse,
As shown in FIG. 8C, the respective tips of the measurement terminals 13A to 13D are located at the initial positions.

Then, for example, at certain time intervals,
The procedure shown in FIGS. 8A to 8C is repeated, and a plurality of deflection amounts B1, B2, B3, and B4 are measured.

When the temperature inside the casing 1 returns to room temperature as shown in FIG. 9, the final measurement of the amount of deflection is performed. That is, in the same manner as the operation described above, FIG.
Through the procedures shown in (a) to (c), the deflection amounts B1, B2,
B3 and B4 are measured.

As described above, according to the bending amount measuring apparatus according to the embodiment of the present invention, the measuring terminals 13A, 13A,
Since a material having a low coefficient of thermal expansion is used as 3B, 13C, and 13C, the amount of deflection can be measured with high accuracy even in a high temperature environment. In addition, according to the deflection amount measuring apparatus according to the embodiment, since the contact type configuration is used instead of the conventional non-contact type, the casing 1
And the discoloration of the rotor 2 does not affect the measurement result. In addition, according to the bending amount measuring apparatus according to the embodiment, since the bending amount measuring apparatus is configured by mechanical parts instead of the laser generator as in the conventional apparatus, the apparatus can be downsized.

Furthermore, according to the deflection amount measuring apparatus according to one embodiment, the measuring terminals 13A, 13B, 13C and 1
Since the 3D diameter is small, the amount of deflection can be measured easily even in a narrow place. In addition, according to the bending amount measuring apparatus according to one embodiment, the spring 25 shown in FIG.
Even after contact, no extra load is applied to the measurement terminal 13A, so that the life of the measurement terminal 13A can be extended.

As described above, one embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and a design change within a range not departing from the gist of the present invention. The present invention is also included in the present invention. For example, in the deflection amount measuring apparatus according to the above-described embodiment, the example of the gas turbine engine has been described as an application example. However, the present invention is not limited thereto, and the deflection amount can be measured at any part. is there. For example, the bending amount measuring apparatus according to one embodiment can be applied to measuring the bending amount of a thermal power plant, a steam turbine of a nuclear power plant, or the like.

[0046]

According to the first and second aspects of the invention, since the measurement terminal is made of a material having a low coefficient of thermal expansion, the amount of deflection can be measured with high accuracy even in a high temperature environment. can do. According to the first and second aspects of the present invention, since the contact-type configuration is used instead of the conventional non-contact type, discoloration of the measurement target affects the measurement result as in the conventional case. Nothing. Further, claim 1,
According to the invention described in 2, since the laser generator is constituted by mechanical parts instead of the conventional laser generator,
The device can be miniaturized.

In addition, according to the third aspect of the present invention,
Since the spring is provided, even if the tip of the measurement terminal comes into contact with the object to be measured, no extra load is applied to the measurement terminal, so that the life of the measurement terminal can be extended.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing a configuration of a deflection amount measuring device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line XX shown in FIG.

FIG. 3 is a side sectional view showing a configuration of a driving device 12A shown in FIG.

FIG. 4 is a diagram showing a voltage / position conversion table according to an embodiment of the present invention.

FIG. 5 is a diagram illustrating the operation of the driving device 12A shown in FIG.

FIG. 6 is a diagram showing an electrical configuration of a deflection amount measuring device according to an embodiment of the present invention.

FIG. 7 is a side sectional view for explaining the operation of the deflection amount measuring device according to the same embodiment.

FIG. 8 is a sectional view taken along line YY shown in FIG. 7;

FIG. 9 is a side sectional view for explaining the operation of the deflection amount measuring device according to one embodiment of the present invention.

FIG. 10 is a sectional view taken along line ZZ shown in FIG. 9;

FIG. 11 is a schematic side sectional view showing a state of thermal deformation in the gas turbine engine.

[Explanation of symbols]

 Reference Signs List 1 casing (measurement target) 2 rotor (measurement target) 12A drive device 13A measurement terminal 25 spring 26 core 27A differential transformer (transformer) 30 storage unit 31 deflection amount calculation unit

 ──────────────────────────────────────────────────の Continuing on the front page (72) Kenichi Nakasu 229, Togaya, Mizuho-cho, Nishitama-gun, Tokyo Ishikawashima-Harima Heavy Industries Co., Ltd. 229 Ishikawashima Harima Heavy Industries, Ltd. Mizuho Plant (72) Inventor Kimihiro Terazaki 229 Ishikawashima Harima Heavy Industries, Ltd.

Claims (3)

[Claims] 1. A substantially rod-shaped measurement terminal (13A) made of a material having a low expansion coefficient and disposed opposite to a measurement object at a predetermined distance, and the measurement terminal is connected to a direction of the measurement object or vice versa. A driving device (12A) for driving in a direction, and a core (26) attached to the measuring terminal (13A).
A transformer (27A) that outputs a voltage corresponding to the position of the core (26); and a contact position where the tip of the measurement terminal (13A) contacts the measurement object based on the voltage. A deflection amount calculating unit (31) for obtaining, as a deflection amount, a distance between a contact position obtained last time and a contact position obtained this time. 2. A storage unit (3) for storing a table representing a correspondence relationship between the voltage and a contact position of a tip of the measurement terminal.
0), and the deflection amount calculation unit (31) includes the transformer (27).
The deflection amount measuring device according to claim 1, wherein the actual contact position is obtained by applying the voltage output from (A) to the table. 3. A spring (25) interposed between a rear end of the measuring terminal (13A) and the driving device (12A). Deflection measuring device.