JPH10256624A - Moisture absorber in laser oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress lowering of excitation efficiency and laser output immediately after replacement and to prolong the lifetime of a replaced absorbent by supplying only a trace of atmosphere into an enclosure at the time of replacing the absorbent. SOLUTION: A supporting tube 41 is provided on one side wall of an enclosure 3 and a tubular case 33 is fitted therein. The tubular container 33 is provided with a plurality of hole 35 through which laser gas in the enclosure flows and O rings 37, 39 are arranged at on the forward and rearward end sides of the hole 35. Subsequently, a ventilating absorbent container 27 containing a moisture absorbent 23 is set removably in the tubular container 33 and a hermetically sealing cover 53 is applied to the outer end of the tubular container 33. According to the structure, only a trace of atmospheric enters into the enclosure 3 at the time of replacing the moisture absorbent 23 and lowering of excitation efficiency and laser output is retarded immediately after replacement while prolonging the lifetime of the moisture absorbent.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a moisture absorbing device for a laser oscillator.

[0002]

2. Description of the Related Art Conventionally, for example, a configuration shown in FIG. 11 is generally used as a laser oscillator. That is, in the laser oscillator 201, a blower 205 is provided in an enclosure 203 constituting the laser oscillator 201, and the laser gas is driven by the blower 205 and cooled by a heat exchanger (not shown) while being orthogonal to the drawing in FIG. It is circulating in the direction you want. A reflecting mirror 207 and an output mirror 209 are provided to face each other in a direction substantially orthogonal to the circulation path of the laser gas. A region where light rays reciprocate between the reflecting mirror 207 and the output mirror 209 is a discharge region 211, and an output mirror is provided. The laser beam LB is emitted from the laser oscillator 209 to the outside of the laser oscillator 201.
It is.

Further, electrodes 213 and 215 are provided in the vertical direction of the discharge area 211 so as to face each other. Further, an adsorbent 217 is mounted inside the enclosure 203 to adsorb the moisture of the enclosed gas in the enclosure 203.

In the laser oscillator 201 as described above, the excitation efficiency and the laser output when the laser beam LB is generated by the discharge excitation are large in the case of the moisture of the sealed gas in the gas sealed container 203, for example, in the case of a CO ₂ laser. When the atmospheric pressure dew point becomes a humidity state of -40 ° C or more, a phenomenon of remarkably lowering occurs.

The moisture flows into the enclosure 203 when the door having a large area is opened for inspection or repair of the laser oscillator 201, and the moisture contained in the atmosphere is removed from the wall of the enclosure 203. Adhere to and remain on the surface. At the time of exchanging the laser gas cylinder or the like, the air flows into the gas pipe, and enters the enclosure 203 together with the laser gas.

The moisture contained in the sealed container 20 after gas filling is used.
3, the adsorbent 217 having a particle size of φ1 to φ10 such as silica gel or zeolite usually acts to adsorb moisture.

[0007]

The above-mentioned conventional laser oscillator 201 is provided with the adsorbent 217, but the amount of adsorption is limited. For example, the silica gel A type has a weight ratio of 12% (relative humidity 20%, relative humidity 20%, 25 ° C). After adsorption to this limit, the adsorbent 217 is useless even if the water content in the sealed container 203 increases, so it is necessary to replace the adsorbent 217 with a new one. However, the adsorbent 217
It is necessary to open a door provided in the enclosing container 203 in order to replace the container, and the amount of atmospheric moisture flowing into the inside of the container adheres to a wall surface or the like and remains very much.

For this reason, immediately after the adsorbent 217 is replaced, water is mixed into the laser gas, so that the excitation efficiency and the laser output are reduced, and the large amount of residual water is adsorbed, so that the life of the new adsorbent 217 is shortened. There was a problem. Also, when replacing the adsorbent 217, the sealed container 2
The operation cannot be performed unless the inside of the chamber 03 is returned to the atmospheric pressure. Returning to the atmospheric pressure increases the cost when the replacement gas is sealed, and also causes unnecessary moisture to infiltrate and takes time. there were.

SUMMARY OF THE INVENTION It is an object of the present invention to reduce the amount of air flowing into an enclosure when an adsorbent is exchanged, thereby suppressing a decrease in excitation efficiency and laser output immediately after the exchange, and further shortening the life of a newly exchanged adsorbent. It is an object of the present invention to provide a moisture absorbing device in a laser oscillator which aims to extend the above.

[0010]

According to a first aspect of the present invention, there is provided a moisture absorption device for a laser oscillator according to the first aspect of the present invention, wherein a laser optical axis is disposed in a sealed container in a direction substantially orthogonal to a laser gas flow path. In the laser oscillator described above, a support cylinder is provided on one side wall of the sealed container, and a cylindrical container movable in the longitudinal direction of the support cylinder is mounted in the support cylinder, and a suitable outer periphery in the longitudinal direction of the cylindrical container is provided. A plurality of holes into which the laser gas in the sealed container flows are formed in the range, sealing members are provided at the front end side and the rear end side of the holes, respectively, and a gas adsorbent is stored in the cylindrical container so that ventilation is possible. An adsorbent container is provided so as to be able to be taken out, and a sealing lid is provided at an outer end of the cylindrical container.

Therefore, when the moisture absorbing device is mounted on the sealed container, the laser gas containing water in the sealed container is replaced on the surface of the adsorbent contained in the adsorbent container through a plurality of holes formed in the cylindrical container. Flowing. The sealing member provided on the rear end side of the plurality of holes keeps the vacuum pressure in the sealed container and is sealed from the atmosphere. That is, since the lid of the cylindrical container is covered, the inside is at a vacuum pressure.

When exchanging the adsorbent, the tubular container is pulled out to a predetermined position, and the vacuum pressure in the sealed container is sealed by a sealing member provided at the tip side of a plurality of holes formed. Then, the lid is removed, the adsorbent container housed in the cylindrical container is taken out and replaced, the lid is attached again, and the cylindrical container is inserted into the sealed container.

[0013] For this reason, since the volume in the cylindrical container is very small, the moisture in the air flowing into the sealed container becomes very small. Therefore, the pumping efficiency and the laser output immediately after the replacement are not reduced, and the newly replaced one is used. The life of the adsorbent can be extended.

According to a second aspect of the present invention, there is provided the moisture absorbing device in the laser oscillator according to the first aspect, wherein one end of a pipe communicating with the inside of the cylindrical container is inserted into a through hole passing through the lid. In this connection, a valve that can be opened and closed is provided in the middle of the pipeline, and a vacuum source is connected to the other end of the pipeline.

Therefore, the structure of the moisture absorbing device is exactly the same as that of the above-mentioned claim 1, and the pipe is provided in the lid and connected to the vacuum generating source. After the fixation, the vacuum source is activated to make the inside of the cylindrical container vacuum. For this reason, the atmosphere in the sealed container accompanying the replacement of the adsorbent is lost and a vacuum state is created.
The pump efficiency and laser output are not reduced and the life of the new adsorbent is extended.

According to a third aspect of the present invention, there is provided a laser oscillator in which a laser optical axis is disposed in a sealed container in a direction substantially orthogonal to a flow path of a laser gas. A suction nozzle and an exhaust nozzle extending to the front side of a blower provided in the enclosure are mounted, and a plurality of notches are provided in an appropriate range on the tip side of the suction nozzle, and a flow direction of the laser gas in the enclosure. Along with being provided on both sides in a direction substantially orthogonal to, a plurality of notch holes in an appropriate range on the tip side of the exhaust nozzle are provided on both sides substantially in the same direction as the flow direction of the laser gas in the enclosure. The suction nozzle communicates with the inlet side of the container containing the moisture adsorbent via a valve, and the outlet side of the container communicates with the exhaust nozzle via a valve. Be Te is characterized in.

Therefore, since the suction nozzle is provided with a plurality of notches on both sides with respect to the flow direction of the laser gas in the enclosure, the laser gas flows through the notches.
Further, since the exhaust nozzle is provided with a plurality of notches on both sides in the same direction as the laser gas flow direction in the enclosure, the laser gas in the exhaust nozzle is sucked and discharged by the flow of the laser gas, A laser gas flows in from the suction nozzle and flows out from the exhaust nozzle. A container was provided between the suction nozzle and the discharge nozzle, containing the moisture adsorbent via a valve.

Therefore, the laser gas containing moisture in the sealed container is absorbed by passing through the moisture adsorbent contained in the container, and when replacing the moisture adsorbent, the laser gas is provided in a pipe communicating with the container. Close the valve, remove the container and replace the moisture adsorbent contained in the container with a new one. At the time of replacement, only the inside of the container is at atmospheric pressure, so the moisture in the atmosphere flowing into the sealed container is extremely small, so there is no reduction in excitation efficiency and laser output immediately after replacement, and the life of the newly replaced adsorbent is extended. Can be achieved. Claim 4
According to the moisture absorbing device in the laser oscillator of the present invention, in the moisture absorbing device in the laser oscillator of claims 1 and 2,
The sealing member is formed of an O-ring.

Therefore, a simple member such as an O-ring can provide a reliable prevention effect.

According to a fifth aspect of the present invention, there is provided a laser oscillator having a laser oscillator having a laser optical axis disposed in a direction substantially orthogonal to a flow path of a laser gas in a sealed container. A tube is mounted in the enclosing container, and a cylindrical container rotatable in the longitudinal direction of the support tube is mounted in the support tube. A first notch for inflow and cutoff of the laser gas is provided, an adsorbent container containing a moisture adsorbent is mounted in the cylindrical container, and a first notch is provided in an appropriate range of the outer periphery in the longitudinal direction of the adsorbent container. Two notches are provided, and a lid detachable from the cylindrical container is detachably provided on a flange portion of the support cylinder.

Therefore, when the moisture of the laser gas is adsorbed in the sealed container, the first notch formed on the outer periphery of the support cylinder and the second notch formed on the outer periphery of the cylindrical container are relatively opposed to each other. By the orientation, the moisture of the laser gas is adsorbed by the adsorbent contained in the adsorbent container mounted in the cylindrical container.

When the adsorbent is replaced, the lid is removed from the flange of the support cylinder, and then the lid is rotated so that the first notch formed on the outer periphery of the support cylinder is inserted into the cylindrical container. The laser gas is shifted from the second notch formed on the outer periphery of the cylindrical container so as to block the laser gas in the sealed container from entering the cylindrical container. Next, when the lid is removed from the cylindrical container, the tip of the cylindrical container is opened, the adsorbent container mounted in the cylindrical container is taken out from the outside, and the adsorbent is replaced with a new one.

When the adsorbent is replaced, the vacuum state of the sealed container is kept shut off from the atmosphere by shifting the first notch portion and the second notch portion, so that the excitation efficiency and the excitation efficiency immediately after the replacement are maintained. The laser output can be prevented from lowering, and the life of the newly replaced adsorbent can be extended.

[0024]

Embodiments of the present invention will be described below in detail with reference to the drawings. First, the overall configuration of the laser oscillator will be schematically described for easy understanding.

Referring to FIG. 3 and FIG. 4, the laser oscillator 1 is provided with a blower 5 in an enclosure 3 constituting the laser oscillator 1, while the laser gas is driven by the blower 5 and cooled by the heat exchanger 7. It is circulated in the direction of arrow 9 (see FIG. 4).

A reflecting mirror 11 and an output mirror 13 are provided so as to face each other in a direction substantially perpendicular to the circulation path of the laser gas, and a region where light beams reciprocate between the reflecting mirror 11 and the output mirror 13 is a discharge region 15. The laser beam LB is emitted from the output mirror 13 to the outside of the laser oscillator 1.

Further, electrodes 17 and 19 are provided opposite to each other in the vertical direction of the discharge region 15, and a plurality of arc-shaped rectifying plates 21 are provided on the left and right in FIG. 4, as shown in FIG. As described above, on one side (left side in FIG. 3) of the sealed container 3, a moisture absorbing device 25 containing a moisture adsorbent 23 therein is provided with a moisture adsorbent 23 for adsorbing the moisture of the sealed gas in the sealed container 3. It is mounted with a part protruding inside.

Next, the moisture absorbing device 25, which is a main part of the embodiment of the present invention, will be described in more detail.

Referring to FIG. 1, FIG.
Of the first embodiment of the present invention is shown.

That is, the moisture absorbing device 25 mounted in the enclosure 3 is made of, for example, silica gel, zeolite, or the like as the moisture adsorbent 23 in a tubular adsorbent container 27 made of a wire mesh or the like and closed on one side. Is stored.
On the opening side of the adsorbent container 27, a lid 29 for replacing the moisture adsorbent 23 is detachably provided by a fastening member, and a screw portion 31 is formed at the center of the lid 29. Although not shown in FIG.
And a jig for assembling is screwed.

The sealing container 3 constituting the laser oscillator 1 is disposed in an appropriate range on the longitudinal end side (right side in FIG. 1) of the cylindrical tubular container 33 closed on one side for storing the adsorbent container 27. Holes 35 into which laser gas flows
Is provided on the outer periphery of the cylindrical container 33. Also, the tip side of the plurality of holes 35 (right side in FIG. 1)
For example, an O-ring 37 is mounted as a sealing member on the
An O-ring 39, for example, is mounted as a sealing member on the rear end side of FIG. Furthermore, the cylindrical container 3
3 is provided with a flange portion 33A on one side.

A flange 41A is formed at one end (right side in FIG. 1) of the support cylinder 41 for supporting the cylindrical container 33. The flange 41A is fixed to a side wall of the enclosure 3 by a fastening member. O-ring 43 for sealing
Is mounted on the flange portion 41A. Furthermore, the support cylinder 4
A spline groove 45 is formed on the outer periphery of the spline groove 1, and a reference groove 47 for confirming the drawing position of the cylindrical container 33 is provided at a predetermined position of the spline groove 45.

A sleeve 49 which engages with a spline groove 45 formed on the outer periphery of the support cylinder 41 and is movable in the longitudinal direction.
The sleeve 49 is integrally connected to a flange portion 33A formed on the cylindrical container 33 by a suitable connecting member (not shown).

The flange portion 3 formed on the cylindrical container 33
A sealing lid 53 is fixed to 3A with a fastening member. A plug 55 is provided at the center of the lid 53, and a sealing member is provided at an appropriate position.

In the above configuration, the operation is shown in FIG. 2 together with FIG. 1. FIG. 1 shows a state in which the moisture absorbing device 25 is mounted on the enclosure 3 of the laser oscillator 1, and FIG. 23 shows a state in which 23 is replaced.

When there is no need to replace the moisture adsorbent 23,
That is, when the suction operation is performed, as shown in FIG. 1, the flange portion 41 </ b> A of the support cylinder 41 is attached to the enclosure 3 by being sealed with the O-ring 43. The adsorbent container 27 is accommodated in the cylindrical container 33 supported by the support cylinder 41, and the moisture adsorbent 23 is accommodated in the adsorbent container 27. Moisture contained in the laser gas can be removed by flowing through the plurality of holes 35 formed in the container 33 and passing through the moisture adsorbent 23. Incidentally, it is vacuum pressure to the chamber of H ₂ chambers H ₁ and enclosure 3 of adsorber vessels 27 are sealed by O-ring 39 with the atmosphere.

When replacing the moisture adsorbent 23, as shown in FIG. 2, the cylindrical container 33 is slid and the cylindrical container 33 is placed at the reference groove 47 formed in the spline groove 45. Stop pulling out. Then, the chamber H ₁ of the cylindrical container 33 by removing the lid 53 as the atmospheric pressure, screwed the jig to the threaded portion 31 formed in the lid 29 provided to the adsorbent container 27, pull the adsorber vessel 27 Then, the stored moisture adsorbent 23 is replaced with a new one. Incidentally, in the chamber of H ₂ enclosure this case is sealed by O-ring 37 at vacuum pressure.

After replacing the moisture adsorbent 23 with a new one, the lid 53 is attached again, and the stopper 55 provided on the lid 53 is removed.
A jig is inserted through this hole, the adsorbent container 27 is pushed, and the jig is inserted all the way into the cylindrical container 33. In this state, the cylindrical container 33
Chamber of H ₂ atmosphere in the chamber H1 is through the holes 35 of the enclosure 3
It enters the pressure chamber H ₁ and the chamber H ₂ is equal.

In this case, since the volume of the adsorbent container 27 is much smaller than that of the sealed container 3, the amount of water remaining in the sealed container 3 is significantly reduced as compared with the conventional replacement. The efficiency and the laser output are not reduced, and the life of the newly replaced moisture adsorbent 23 can be extended.

FIG. 5 shows an example of the second embodiment of the present invention. The second embodiment is almost the same as the above-described first embodiment. The same members are denoted by the same reference numerals, and description thereof will be omitted. Only different portions will be described in detail.

That is, the pipe 5 is provided at an appropriate position on the lid 57 attached to the flange portion 33A formed on the cylindrical container 33.
9, a valve 61 is provided in the middle of the pipe 59, and the pipe 59 is connected and connected to a vacuum pump 63 which is a vacuum source provided outside the apparatus.

With the above structure, the state of FIG. 2 described in the example of the first embodiment, that is, the lid 57 is
Once attached to the flange portion 33A provided in, by evacuating the operation of the vacuum pump 63 to chamber H ₁ of the adsorber vessel 27, a vacuum pressure inside the chamber H _1. For this reason, it is possible to prevent minute air from entering the enclosure 3.

Thus, the excitation efficiency and the laser output immediately after the replacement are not further reduced, and the life of the newly replaced moisture adsorbent 23 can be further extended.

FIGS. 6 and 7 show a third embodiment. The third embodiment has a structure in which the sealed container 3 and the adsorbent container 27 can be separated by a valve.

More specifically, a suction nozzle 65 and an exhaust nozzle 67 directly below and directly below the suction nozzle 65 are fixed to the flange 69 at the front of the blower 5 and are fastened to one side of the enclosure 3 by a fastening member. Is provided. Notch holes 71 and 73 are formed on the tip side of the suction nozzle 65 and the exhaust nozzle 67 in the flow direction of the laser gas circulated by the blower 5.

The details of the cutout holes 71 and 73 are shown in FIG. That is, the notch hole 71 formed in the suction nozzle 65 is formed in the flow direction of the laser gas in the enclosure 3 (indicated by an arrow in FIG. 7). Therefore, the laser gas flows into the notch 71 as shown by the arrow in FIG. The notch 7 formed in the exhaust nozzle 67
3 is a flow direction of the laser gas in the enclosure 3 (FIG. 7).
(Shown by arrows in FIG. 2). Therefore, the laser gas from the exhaust nozzle 67 is sucked out through the notch 73 as shown by the arrow in FIG.

By the flow of the laser gas described above, a laser gas flows from the suction nozzle 65 as indicated by an arrow in the drawing of FIG. 6, and a circulation path is formed in which the laser gas is exhausted from the exhaust nozzle 67 into the enclosure 3.

The suction nozzle 65 communicates via a first valve 75 with the inlet side of a container 77 containing the moisture adsorbent 23, and a second valve 79 is provided at the outlet side of the container 77. Flexible hose 81 from 2 valve 79,
It is connected to the exhaust nozzle 67 via a third valve 83. The container 77 includes a container body 85 for storing the moisture adsorbent 23 and a lid 87.
A laser gas inflow port 89 is provided at the bottom portion, and a gas body discharge port 91 is provided at the lid 87.

With the above configuration, during normal times, that is, when the suction operation is performed, the suction nozzle 65 and the exhaust nozzle 6
In 7, the directions of the notch holes 71 and 73 are different and a pressure difference is generated, so that the laser gas flows from the suction nozzle 65 and passes through the moisture adsorbent 23 stored in the container 77 to remove the water contained in the laser gas. The gas is discharged from the exhaust nozzle 67 into the enclosure 3.

When replacing the moisture adsorbent 23 with a new one, the first, second and third valves 75, 79 and 83 are closed,
The lid 87 provided on the container body 85 is removed, and the moisture adsorbent 23 is replaced. After the replacement, close the lid 87 and close each valve 75, 79,
Open 83 to return to normal state.

For this reason, only a small amount of the pipeline and the atmosphere in the container 77 enter the sealed container 3, there is no decrease in the excitation efficiency and the laser output immediately after the replacement, and the life of the newly replaced moisture adsorbent 23 is reduced. Can be extended.

FIGS. 8 and 9 show a fourth embodiment. 8 and 9, the same components as those in FIG. 1 are denoted by the same reference numerals, and redundant description will be omitted.

Referring to FIGS. 8 and 9, the enclosure 3
The support tube 41 is mounted in the inside, and the flange portion 41A of the support tube 41 has a plurality of bolts 93 outside the enclosure 3.
It is attached by. The lid 53 is attached to the flange portion 41A of the support cylinder 41 with a plurality of bolts 95.

The front end of the cylindrical container 33 and the rear end of the lid 53 are connected by a plurality of pins 97. When the lid 53 is moved to the left in FIG. . An O-ring 99 is provided on a part of the outer periphery of the lid 53 to seal the lid 53 with the support cylinder 41. A plug 101 is provided at the tip of the adsorbent container 27 projecting into the space of the lid 53.

The lid 53 is, as shown in FIG.
For example, a notch 103 of 90 degrees is formed, and both ends 103A and 103B of the notch 103 are positioned by abutting on a pin 105 attached to a flange 41A of the support cylinder 41. As shown in FIGS. 10A and 10B, opposed first and second notches 107A and 107B; 109A and 109B are provided on the outer periphery of the support cylinder 41 and the cylindrical container 33, respectively. Is formed.

A leak screw 111 is provided substantially at the center of the front end of the lid 53, and a leak screw press 113 is pressed on the leak screw 111 by a bolt 115. The bolt 115 is attached to the lid 53 through a long hole 117 formed in the leak screw retainer 113.

With the above configuration, the adsorbent container 27 containing the adsorbent 23 is set in the state shown in FIG.
As shown in (A), the first notch portions 107A and 107B formed in the support cylinder 41 and the second notch portions 109A and 109B formed in the cylindrical container 33 correspond to the same position, respectively. In FIG. 10, the laser gas is
It flows as indicated by the arrow in (A) and is circulated in the enclosure 3.

When the adsorption effect of the adsorbent 23 is lost and the adsorbent 23 is replaced, the bolt 95 is first removed. Then, when the lid 53 is rotated 90 degrees clockwise as indicated by the arrow in FIG.
03B collides with the pin 105, and the state shown in FIG. A bolt is inserted into the leak screw 111, and the bolt 115 is loosened so that the leak screw retainer 113 is shifted upward in FIG. 9. The leak screw 111 is pulled out, and the lid 53 is pulled out from the pin 97 to be removed from the cylindrical container 33. In this state, the adsorbent container 27 is pulled out of the cylindrical container 33, the plug 101 is manually turned off, and the adsorbent 23 is replaced with a new one. At this time, since the inside of the enclosure 3 is in the state shown in FIG. 10B, the state is shut off from the atmosphere. After the replacement, when the operation is performed in a procedure reverse to the above-described movement, the state shown in FIGS. 9 and 10 is set.

Therefore, when replacing the adsorbent, the first notches 107A, 107B and the second notches 109A, 109A
09B, and the vacuum state of the sealed container 3 is kept shut off from the atmosphere, so that the excitation efficiency and the laser output immediately after replacement can be prevented from lowering, and the life of the newly replaced adsorbent is extended. be able to.

The present invention is not limited to the above-described embodiments, but can be embodied in other forms by making appropriate changes.

[0061]

As will be understood from the above description of the embodiments, the present invention according to claim 1
In a state where the moisture absorbing device is attached to the enclosure, the laser gas containing moisture in the enclosure is flowing through a plurality of holes formed in the cylindrical container on the surface of the adsorbent contained in the adsorbent container. The sealing member provided on the rear end side of the plurality of holes keeps the vacuum pressure in the sealed container and is sealed from the atmosphere. That is, since the lid of the cylindrical container is covered, the inside is at a vacuum pressure.

When exchanging the adsorbent, the tubular container is pulled out to a predetermined position, and the vacuum pressure in the sealed container is sealed by a sealing member provided on the tip side of a plurality of holes formed. Then, the lid is removed, the adsorbent container housed in the cylindrical container is taken out and replaced, the lid is attached again, and the cylindrical container is inserted into the sealed container.

For this reason, since the volume in the cylindrical container is very small, the moisture in the air flowing into the sealed container becomes very small, so that the pumping efficiency and the laser output immediately after the replacement do not decrease, and the replacement is made newly. The life of the adsorbent can be extended.

According to the second aspect of the present invention, the configuration of the moisture absorbing device is exactly the same as that of the first aspect described above. By providing a pipe in the lid and connecting to the vacuum source, the adsorbent is removed. After the replacement, the lid is fixed to the cylindrical container, and then the vacuum generating source is operated to bring the inside of the cylindrical container into a vacuum state. For this reason, the atmosphere inside the sealed container accompanying the replacement of the adsorbent is lost, and a vacuum state is created, so that the excitation efficiency and the laser output are not reduced and the life of the new adsorbent is extended.

According to the third aspect of the present invention, since the suction nozzle is provided with the notch on the inlet side with respect to the flow direction of the laser gas in the enclosure, the laser gas flows through the notch. In addition, since the exhaust nozzle is provided with a notch at the exit in the direction of flow of the laser gas in the enclosure, the laser gas in the exhaust nozzle is sucked and discharged by the flow of the laser gas. The flow of the laser gas discharged from the inlet / outlet nozzle is generated. A container was provided between the suction nozzle and the discharge nozzle, containing the moisture adsorbent via a valve.

For this reason, the laser gas containing moisture in the sealed container is absorbed by passing through the moisture adsorbent contained in the container, and when replacing the moisture adsorbent, the laser gas is provided in a conduit communicating with the container. Close the valve, remove the container and replace the moisture adsorbent contained in the container with a new one. At the time of replacement, the atmospheric pressure inside the container is reached, so the moisture in the air flowing into the sealed container is extremely small, so there is no reduction in excitation efficiency and laser output immediately after replacement, and the life of the newly replaced adsorbent is extended. Can be achieved.

According to the fourth aspect of the present invention, since the O-ring is used as the sealing member, a reliable sealing effect can be exhibited with a simple member.

According to the fifth aspect of the present invention, when the moisture of the laser gas is adsorbed in the sealed container, the first cutout formed on the outer periphery of the support cylinder and the outer periphery of the cylindrical container are formed. By opposing the second notch,
The moisture of the laser gas is adsorbed by the adsorbent contained in the adsorbent container mounted in the cylindrical container.

When replacing the adsorbent, after removing the lid from the flange of the support cylinder, the lid is rotated and the first notch formed on the outer periphery of the support cylinder is inserted into the cylindrical container. The laser gas is shifted from the second notch formed on the outer periphery of the cylindrical container so as to block the laser gas in the sealed container from entering the cylindrical container. Next, when the lid is removed from the cylindrical container, the tip of the cylindrical container is opened, the adsorbent container mounted in the cylindrical container is taken out from the outside, and the adsorbent is replaced with a new one.

When the adsorbent is replaced, the vacuum state of the sealed container is kept shut off from the atmosphere by shifting the first notch portion and the second notch portion. The laser output can be prevented from lowering, and the life of the newly replaced adsorbent can be extended.

[Brief description of the drawings]

FIG. 1 shows an example of a first embodiment of the present invention and is a cross-sectional view of a moisture absorbing device.

FIG. 2 is an operation explanatory view.

FIG. 3 is an explanatory sectional view showing a laser oscillator according to an embodiment of the present invention;

FIG. 4 is an explanatory sectional view taken along line IV-IV in FIG. 3;

FIG. 5 shows a second embodiment of the present invention and is a cross-sectional view of a moisture absorbing device.

FIG. 6 is a sectional view of a moisture absorbing device according to a third embodiment of the present invention.

FIG. 7 is a sectional view taken along line VII-VII in FIG.

FIG. 8 shows a fourth embodiment of the present invention, and is a cross-sectional view of a moisture absorbing device.

FIG. 9 is a side view of FIG.

FIGS. 10A and 10B are diagrams showing a state of a first notch portion of a support cylinder and a second notch portion of a cylindrical container.

FIG. 11 shows a conventional example and is a cross-sectional explanatory view of a laser oscillator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laser oscillator 3 Enclosure container 5 Blower 23 Moisture adsorbent 25 Moisture absorbing device 27 Adsorbent container 33 Cylindrical container 35 Hole 37, 39 O-ring (sealing member) 41 Support cylinder 53, 57 Cover 59 Pipeline 61 Valve 63 Vacuum pump (Vacuum generation source) 65 Suction nozzle 67 Exhaust nozzle 71, 73 Notch hole 75 First valve 77 Container 79 Second valve 83 Third valve

Claims (5)

[Claims] 1. A laser oscillator having a laser optical axis arranged in a direction substantially orthogonal to a flow path of a laser gas in an enclosure, a support cylinder is provided on one side wall of the enclosure, and the support cylinder is provided in the support cylinder. A cylindrical container movable in the longitudinal direction is mounted, and a plurality of holes into which the laser gas in the sealed container flows are formed in an appropriate range on the outer periphery in the longitudinal direction of the cylindrical container. A sealing member is provided on each end side, a breathable adsorbent container containing a moisture adsorbent is provided in the cylindrical container so as to be taken out, and a sealing lid is provided at an outer end of the cylindrical container. A moisture absorbing device in a laser oscillator, characterized in that: 2. One end of a pipe communicating with the inside of the cylindrical container is connected to a through hole passing through the lid, and a valve that can be opened and closed is provided in the middle of the pipe, and the other end of the pipe is provided at the other end of the pipe. 2. A moisture absorbing device in a laser oscillator according to claim 1, wherein a vacuum generating source is connected. 3. A laser oscillator having a laser optical axis arranged in a direction substantially orthogonal to a flow path of a laser gas in an enclosure, wherein a front side of a blower provided in the enclosure from one side wall of the enclosure. The suction nozzle and the exhaust nozzle extended to the above are mounted, and a plurality of notch holes are provided on both sides in a direction substantially perpendicular to the flow direction of the laser gas in the sealed container in an appropriate range on the tip side of the suction nozzle. A plurality of cutout holes are provided in an appropriate range on the tip side of the exhaust nozzle on both sides substantially in the same direction as the flow direction of the laser gas in the enclosure, and a moisture adsorbent is supplied from the suction nozzle via a valve. A moisture absorbing device in a laser oscillator, wherein the moisture absorbing device is provided so as to communicate with an inlet side of a stored container and communicate with the exhaust nozzle from an outlet side of the container via a valve. 4. The moisture absorbing device for a laser oscillator according to claim 1, wherein said sealing member is formed of an O-ring. 5. A laser oscillator having a laser optical axis disposed in a direction substantially orthogonal to a flow path of a laser gas in an enclosure, wherein a support cylinder is mounted in the enclosure from one side wall of the enclosure. A first notch for mounting a cylindrical container rotatable in the longitudinal direction of the support cylinder in the cylinder and for inflow and cutoff of the laser gas in the sealed container to an appropriate range of the outer periphery in the longitudinal direction of the cylindrical container. A part is provided, and an adsorbent container containing a moisture adsorbent is mounted in the cylindrical container, and a second notch is provided in an appropriate range on an outer periphery in a longitudinal direction of the adsorbent container, and the cylindrical container is provided with A moisture absorbing device for a laser oscillator, wherein a detachable lid is detachably provided on a flange portion of the support cylinder.