JPH10242132A - Vacuum treating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum treating device which can simplify a structure for rotationally driving an object to be treated and can reduce the power consumption of a driving source. SOLUTION: Vacuum treating chambers 2A,... are arranged on the outer periphery of a vacuum transportation chamber and an opening 2a is formed through the wall of each vacuum treating chamber facing the vacuum transportation chamber. In the vacuum transportation chamber, mobile lids 26 which can close the openings 2a are provided and a holding means 28 which holds an object W to be treated is rotatably installed to each lid 26. In addition, a driving source which rotationally drives the holding means and a mobile lid-side electrical contact are installed to each lid 26 and a treating chamber-side electrical contact connected to a power source 32 is installed to the vacuum transportation chamber-side wall of each vacuum treating chamber. When the lid 26 closes the opening 2a of the vacuum treating chamber, the mobile lid-side electrical contact comes into contact with the treating chamber-side electrical contact and electric power is supplied to the driving source from the power source 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a vacuum processing apparatus having a plurality of vacuum processing chambers for performing vacuum processing of an object to be processed.

[0002]

2. Description of the Related Art In various processes such as a semiconductor manufacturing process, a liquid crystal display panel manufacturing process, and an optical disc manufacturing process, a vacuum processing apparatus is used to perform a surface treatment of an object to be processed such as a silicon wafer. This vacuum processing apparatus performs a process such as sputtering, etching, baking, or ashing on a processing target placed in a vacuum space to form a thin film on the surface of the processing target,
This is an apparatus for performing fine processing on a thin film formed on the surface of an object to be processed.

[0003] Further, in a vacuum processing apparatus, in order to improve the in-plane uniformity of the surface treatment of the object to be processed, a type of performing the process while rotating the object to be processed is adopted. In the case of this type of vacuum processing apparatus, a driving source for rotating the object to be processed is installed on the atmosphere side, and the driving source is driven through a rotation introducing shaft vacuum-sealed with an elastomer gasket, a magnetic fluid, or the like. Force from atmosphere side to vacuum chamber (vacuum side)
To be communicated to. Then, the rotation holding table holding the object to be processed is rotated by the driving force transmitted to the vacuum side, and the object to be processed is rotated together with the rotation holding table, thereby improving the in-plane uniformity of the processing.

FIG. 12 shows an example of a mechanism for transmitting the driving force of the driving source from the atmosphere side to the vacuum side. As shown in FIG. 12, a magnetic field is applied to the surface of the vacuum vessel wall 70 on the atmosphere side. A seal 71 is provided, and the driving force of the motor 72 is transmitted to the rotation introduction shaft 73 on the vacuum side via the magnetic seal 71.

FIG. 13 shows another example of a mechanism for transmitting the driving force of the driving source from the atmosphere side to the vacuum side.
As shown in FIG. 3, a rotation introduction shaft 74 is provided so as to penetrate the wall 70 of the vacuum vessel, and the penetration of the rotation introduction shaft 74 is hermetically sealed by an O-ring 75. The end of the rotation introduction shaft 74 on the atmosphere side is connected to a motor (not shown), and the driving force of the atmosphere side motor is transmitted to the vacuum side via the rotation introduction shaft 74.

As a vacuum processing apparatus, there has been proposed a vacuum processing apparatus having a plurality of processing chambers in a vacuum chamber, and sequentially transferring the processing objects to the plurality of processing chambers to perform surface processing of the processing objects. I have. As described above, in the case of a vacuum processing apparatus of a type in which an object to be processed is automatically conveyed in a vacuum chamber, FIG.
The transmission mechanism shown in FIG. 3 is arranged for each processing chamber, and one of the transmission joints 77 shown in FIG. 14 is connected to the end of the rotation introducing shaft 74 on the vacuum side. The other joint 76 is connected to the rotation holding table of the workpiece. Then, after transferring the workpiece to the position of each processing chamber, the transmission joints 76 and 77 shown in FIG. 14 are connected, and the driving force of the driving source (motor) on the atmosphere side is transmitted to the vacuum side.

[0007]

However, as described above, in the conventional vacuum processing apparatus, a driving source is installed on the atmosphere side, and the driving force of this driving source is transmitted to the vacuum side via a vacuum seal. Therefore, the driving force is attenuated by the frictional force or the like at the vacuum seal portion.
For this reason, in order to obtain a predetermined driving force on the vacuum side, it is necessary to generate a large driving force in the driving source in consideration of attenuation due to a frictional force or the like.
Inconveniences such as an increase in power consumption have been caused.

Further, in the conventional vacuum processing apparatus, it is necessary to vacuum seal the rotation introduction shaft, which is a rotating member, so that the sealing mechanism is complicated and vacuum leakage is apt to occur in the sealing portion. In addition, there is a problem that gas is released from the sealing elastomer to lower the degree of vacuum.

Further, in the case of a vacuum processing apparatus having a plurality of processing chambers, not only a complicated mechanism such as a conductive joint is required, but also it is not always easy to smoothly connect the conductive joint. Was.

The present invention has been made in view of the various problems described above, and can simplify a structure for rotationally driving an object to be processed, and reduce power consumption of a driving source. It is an object of the present invention to provide a vacuum processing apparatus capable of achieving the following.

[0011]

According to a first aspect of the present invention, there is provided a vacuum processing apparatus comprising: a vacuum transfer chamber capable of evacuating the inside; and a plurality of vacuum processing chambers disposed adjacent to the outer periphery of the vacuum transfer chamber. And each opening formed on the side of the vacuum processing chamber facing the vacuum transfer chamber, a movable lid provided inside the vacuum transfer chamber and capable of closing the opening, Holding means for rotatably provided, for holding the object to be processed, a drive source provided for the movable lid, for driving the holding means for rotation, provided for the movable lid, connected to the drive source A movable lid side electrical contact, and a processing chamber side electrical contact provided on a side of the vacuum processing chamber facing the vacuum transfer chamber and connected to a power supply, wherein the movable lid closes the opening. The movable lid side electrical contact and the processing chamber side electrical contact There contacts, characterized in that the power can be supplied from the power source to the drive source.

A vacuum processing apparatus according to a second aspect of the present invention is provided on the movable lid, a rotation detector for detecting a rotation state of the workpiece, and provided on the movable lid.
A movable lid-side electrical contact connected to the rotation detector, a processing chamber-side electrical contact provided on a side of the vacuum processing chamber facing the vacuum transfer chamber, and connected to a control unit of the vacuum processing apparatus; Further comprising: when the movable lid closes the opening, the movable lid-side electrical contact and the processing chamber-side electrical contact are in contact with each other, and a detection signal can be transmitted from the rotation detector to the control unit. Features.

According to a third aspect of the present invention, in the vacuum processing apparatus, the rotation detector has a photo-interrupter arranged to emit light to the holding means, and a light-receiving portion of the holding means has A plurality of portions having different reflection states are alternately formed.

According to a fourth aspect of the present invention, in the vacuum processing apparatus, the plurality of portions having different light reflection states are flat portions and concave portions alternately formed on a light receiving portion of the holding means. .

According to a fifth aspect of the present invention, in the vacuum processing apparatus, when the movable lid side electrical contact is pressed against the processing chamber side electrical contact, the movable lid side electrical contact can be displaced in a direction opposite to the pressing direction. And

A vacuum processing apparatus according to a sixth aspect of the present invention is characterized in that the movable lid side electrical contact is formed by a leaf spring member.

According to a seventh aspect of the present invention, in the vacuum processing apparatus, the movable lid side electrical contact is formed by a pin member which is urged in an axial direction by a spring.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A vacuum processing apparatus according to one embodiment of the present invention will be described below with reference to FIGS.

FIG. 1 is a plan view of a vacuum processing apparatus according to the present embodiment, and shows a housing 10 having a substantially octagonal planar shape.
Inside, a vacuum transfer chamber 3 capable of evacuating the inside is formed. On one side of the vacuum transfer chamber 3, a load lock chamber 1 for loading or unloading the workpiece W into or from the vacuum transfer chamber 3 is formed, and on the remaining seven sides, seven vacuum processing chambers 2A are provided. , 2B... 2G are arranged and formed at equal angular intervals. Then, a vacuum process such as sputtering, etching, baking, or ashing is performed on the workpiece W inside the vacuum processing chambers 2A, 2B,... 2G.

Load lock chamber 1 and vacuum processing chamber 2A, 2
B. On the side facing the vacuum transfer chamber 3 of 2G, openings 1a, 2a having the same shape and the same size for taking in and out the workpiece W are formed, respectively. In each vacuum processing chamber 2, a turbo molecular pump 12 (see FIG. 2) is connected, and the inside can be evacuated, and processing devices 14A, 14B... 14G for performing a predetermined vacuum processing are installed. .

An annular rotary table 15 is rotatably arranged at the bottom of the vacuum transfer chamber 3.
A gear 18 is formed on the outer periphery of the gear. This large gear 1
A driving small gear 19 meshes with 8.

Eight valve mechanisms 25 are arranged on the upper surface of the rotary table 15 along the circumferential direction of the rotary table 15, and these valve mechanisms 25 are mounted in the load lock chamber 1.
And 7 vacuum processing chambers 2A, 2B... 2G. Each valve mechanism 25 includes a valve disk (movable lid) 26 capable of closing the respective openings 1a, 2a of the load lock chamber 1 and the vacuum processing chambers 2A, 2B,.
A valve opening / closing mechanism 27 for opening / closing the valve disk 26
And

Each of the valve discs 26 closes the opening 1a, 2a of the load lock chamber 1 and the vacuum processing chambers 2A, 2B,.
2G. An inner surface 26a facing the inside of 2B... 2G is provided on the inner surface 26a so as to be rotatable (rotated) with four disk holders 28 as holding means for holding the workpiece W. .

On the loading side of the load lock chamber 1, a transfer device 29 for transferring the workpiece W into the load lock chamber 1 is provided.
The workpiece W is loaded or unloaded into the load lock chamber 1 in groups of four.

FIGS. 2 and 3 are a side view and a front view showing a state where the vacuum processing chamber 2A is closed by the valve disk 26. As shown in FIGS. 2 and 3, the valve disc 2
A movable lid-side electric connection portion 30 is attached to a lower portion of the inner surface 26a of the sixth member 6. On the side of the vacuum processing chamber 2 </ b> A facing the vacuum transfer chamber 3, a processing chamber side electric connection part 31 is attached at a position facing the movable lid side electric connection part 30.

The movable lid side and the processing chamber side electrical connection portions 30 and 31 are protected by a reflector 36 so as not to be contaminated such as film adhesion during the processing of the workpiece W. Further, the processing chamber side electric connection unit 31 is electrically connected to a power supply 32 and a control unit 33 of the vacuum processing apparatus.

As can be seen from FIGS. 2 and 3,
When the valve disk 26 closes the opening 2 a of the vacuum processing chamber 2 </ b> A, the movable lid side electrical connection 30 and the processing chamber side electrical connection 31 are in contact and are electrically connected.

FIGS. 2 and 3 show the vacuum processing chamber 2A and one valve disk 26 by way of example.
Other vacuum processing chambers 2B, 2C... 2G and other valve discs 2
Similarly, the movable lid side electrical connection part 30 and the processing chamber side electrical connection part 31 are attached to 6, 26... 26, respectively.

FIGS. 4 and 5 show a side view and a front view of the valve disk 26. As can be seen from FIGS. 4 and 5, the disk holder 28 has an inner mask 40 and an outer mask 41. I have. Also, the valve disk 26
Is provided with a vacuum motor 34 which is a driving source for rotationally driving the disk holder 28, and the disk holder 28 is attached to a rotating shaft 35 of the vacuum motor 34. Then, the disk holder 28 can be rotated together with the workpiece W by driving the vacuum motor 34 to rotate the rotation shaft 35.

Further, as shown in FIG.
On the inner surface 26a of the motor 6, a rotation detector 60 is provided which is formed by mounting a reflection type photo interrupter on an extremely small printed board beside the rotation shaft 35 of the vacuum motor 34. FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 4, and as can be seen from FIG.
3 are formed at predetermined intervals in the circumferential direction. That is, the concave portions 53 and the flat portions 54 are alternately formed in the light receiving portion of the rotating shaft 35.

FIG. 7 shows a specific configuration of the rotation detector 60. As shown in FIG. 7, the rotation detector 60 is configured by mounting a reflection type photo interrupter 62 on a printed board 61. I have. FIG. 8 shows the photo interrupter 6.
2 shows a circuit diagram of FIG. As can be seen from FIG. 8, the photo-interrupter 62 includes a light-emitting diode 65 and a light-receiving element (phototransistor) 66, reflects light from the light-emitting diode 65 to an object (the rotation axis 35), and transmits the reflected light. The light is received by the light receiving element 66.

As shown in FIG. 5, the movable lid side electric connection portion 3
0 has three movable lid side electrical contacts 30a, 30b, 30c, and these movable lid side electrical contacts 30a, 30c.
b and 30c are connected to the vacuum motor 34 and the rotation detector 60 via electric wires. In addition, the crimp terminal is screwed and connected between the connection electric wire and the movable lid-side electric contact 30a, 30b, 30c. In addition, it can also connect with a connector instead of a crimp terminal.

FIG. 9 shows the movable lid side electric connection portion 30 and the processing chamber side electric connection portion 31 in a contact state.
As can be seen from the figure, the movable lid-side electrical contacts 30a (30b, 30c) of the movable lid-side electrical connection portion 30 are formed of leaf spring members. The leaf spring member may be entirely formed of a metal material, or may be formed of an elastic material having a surface coated with a conductive material.

Each movable lid side electric contact 30a (30b, 30
c) is connected to each of the electric wires 38a (38b, 38c), and these electric wires 38a (38b, 38c) are connected.
Is connected to the vacuum motor 34 and the rotation detector 60 (see FIG. 4).

FIG. 10 is a front view of the processing chamber side electrical connection section 31. As shown in FIG.
The three processing chamber-side electrical contacts (plate electrodes) 31a, 31
b, 31c. In the contact state shown in FIG. 9, the three movable lid-side electrical contacts 30a, 30b,
30c and the three processing chamber side electrical contacts 31a, 31b, 31c of the processing chamber side electrical connection part 31 are in contact with each other.

As shown in FIG. 9, each electric wire 39a (39b, 39b) is connected to each processing chamber side electric contact 31a (31b, 31c).
39c) are connected to each other.
a (39b, 39c) are a power supply 32 and a control unit 33 (FIG. 2).
See).

Next, the operation of the vacuum processing apparatus according to the present embodiment will be described.

First, four workpieces W are loaded into the load lock chamber 1 by the transfer device 29 and the inside of the load lock chamber 1 is evacuated, and then the opening 1a of the load lock chamber 1 is closed. Each workpiece W is delivered to each disk holder 28 of the valve disc 26 that is being processed.

Next, the valve disk 26 is connected to the valve opening / closing mechanism 2.
7 to drive in the opening direction, after which the drive pinion 19
To rotate the rotary table 15 by a predetermined amount,
The valve disk 26 holding the workpieces W is transferred to, for example, the position of the vacuum processing chamber 2A.

Next, the valve disk 26 is connected to the valve opening / closing mechanism 2.
7 to the opening direction of the vacuum processing chamber 2A.
a is closed by the valve disk 26. Then, as shown in FIGS. 9 and 10, the movable lid-side electrical contacts 30a, 3a
0b, 30c and processing chamber side electrical contacts 31a, 31b, 31
c and is electrically connected. At this time, since the movable lid-side electrical contacts 30a, 30b, and 30c are formed of a spring member, when the movable lid-side electrical contacts 30a, 30b, and 30c are pressed against the processing chamber-side electrical connection portion 31, they can be displaced in a direction opposite to the pressing direction. This ensures that a good contact is achieved without any difficulty.

As described above, the workpiece W is placed in the vacuum processing chamber 2A.
At the same time, the movable lid side electrical connection portion 30 and the processing chamber side electrical connection portion 31 are connected to each other, and both electrical contacts 30,
A vacuum motor 34 from a power source 32 (see FIG. 2)
Is supplied with power. Then, the vacuum motor 34 is driven to rotate the rotating shaft 35, and the workpiece W is rotated together with the disk holder 28.

Here, the supply of electric power from the power supply 32 to the processing chamber side electric connection portion 31 is performed by the movable lid side electric connection portion 30.
After the connection with the processing chamber side electric connection unit 31 is performed, a signal can be output from the control unit 33 to start power supply, or the power supply to the processing room side electric connection unit 31 is always performed. The electric power can be supplied to the vacuum motor 34 at the same time when the two electric contacts 30 and 31 are connected.

The rotation state of the workpiece W is determined by a rotation detector 60.
(See FIG. 4), and the detection signal is transmitted to the control unit 33 (see FIG. 2) via both the electric contacts 30 and 31. After confirming that the rotation state of the workpiece W is stabilized at a desired value, the control unit 33 sends a start signal to the processing apparatus 14A to start a predetermined vacuum processing.

Here, the detection of the rotation state by the rotation detector 60 is performed as follows. That is, as shown in FIG. 6, since the plurality of concave portions 53 are formed at predetermined intervals in the circumferential direction on the rotating shaft 35 of the vacuum motor 34, the reflection type photo interrupter 62 of the rotation detector 60 (see FIG. 8).
Is changed in accordance with the rotation of the rotating shaft 35. Specifically, when the relative positional relationship between the concave portion 53 and the rotation detector 60 is at the position (a) and the position (b) shown in FIG. The signal changes. Therefore, by continuously extracting the electric signal by the rotation detector 60, the rotation state of the workpiece W can be detected from a change in the detection signal of the rotation detector 60.

If the signal from the rotation detector 60 indicates abnormal rotation during the processing of the workpiece W, the control unit 33 specifies and stores the workpiece W having the abnormal rotation. Then, the defective workpiece W having the rotation abnormality has occurred.
Is removed from the load lock chamber 1 after the processing in the vacuum processing apparatus is completed. By doing so, it is not necessary to perform a series of processes performed after the process in the vacuum processing apparatus on the defective workpiece W, so that not only the yield in the final product can be improved, but also the yield can be improved. In addition, unnecessary processing can be omitted, and the overall processing efficiency can be improved.

As described above, after performing a predetermined vacuum processing in the first vacuum processing chamber 2A, the valve opening / closing mechanism 27 is driven to open the valve disk 26. This valve disk 2
Simultaneously with the opening of 6, the contact state between the movable lid side electrical connection portion 30 and the processing chamber side electrical connection portion 31 is released.

Here, the supply of power from the power supply 32 to the processing chamber side electric connection portion 31 can be performed by outputting a signal from the control portion 33 before the valve disk 26 is opened, and the power supply can be stopped. Alternatively, the power supply to the vacuum chamber 34 may be cut off simultaneously with the opening of the electric contacts 30 and 31 by always supplying power to the processing chamber side electric connection unit 31.

After the valve disk 26 is opened, the rotary table 15 is rotated to transfer the workpiece W to the next vacuum processing chamber 2B, and a predetermined process is performed in the same procedure as described above. And other vacuum processing chambers 2C, 2D ... 2G
, Predetermined processes are sequentially performed. In addition, the workpiece W
It is not always necessary to sequentially carry the processing from the vacuum processing chambers 2A to 2G to perform the processing, and it is not necessary to necessarily perform the processing in all of the plurality of vacuum processing chambers 2A, 2B... 2G. In short, it is only necessary to select a processing sequence that can execute a desired process and execute the predetermined process.

As described above, the plurality of vacuum processing chambers 2A,
The transfer of the workpiece W between 2B... 2G can be performed by rotating the rotary table 15 in a state where the workpiece W is held on the valve disk 26, and thus the vacuum processing chambers 2A, 2B. There is no need to perform the transfer operation of the workpiece W in the 2G or the vacuum transfer chamber 3. Therefore, the failure of the delivery of the workpiece W is eliminated, and the time required for transferring the workpiece W is greatly reduced.

After a series of vacuum processes are performed on the workpiece W according to the above procedure, the rotary table 15 is driven to move the valve disk 26 holding the processed workpiece W in front of the load lock chamber 1. Move up to Next, the valve opening / closing mechanism 2
7, the valve disk 26 is driven in the closing direction, the workpiece W is carried into the load lock chamber 1, and the transport device 29 is driven to carry the workpiece W out of the load lock chamber 1.

As described above, according to the vacuum processing apparatus of the present embodiment, the vacuum motor (drive source) 34 is provided on the valve disc (movable lid) 26 also serving as a transfer mechanism of the workpiece W, Lid side electrical connection 30 and processing chamber side electrical connection 3
1 in a vacuum region to connect the vacuum motor 3
4, a complicated mechanism for transmitting the driving force, unlike a conventional vacuum processing apparatus, is not required, and the structure can be simplified. ) Can be reduced in size and power consumption can be reduced. Further, since there is no seal portion for transmitting the driving force, vacuum leakage does not occur.

Since the amount of heat generated from the driving source is reduced by reducing the power consumption of the driving source as described above, even when the driving source is disposed in a vacuum as in the present embodiment, The problem of overheating does not occur. Also, since the power consumption is small, the movable lid side electrical contacts 30a, 30b, 3
As 0c and the processing chamber side electrical contacts 31a, 31b, 31c, those having a small capacity and a small size can be used.

Further, according to the vacuum processing apparatus of the present embodiment, the rotation detector 60 is provided on the valve disk 26 to detect the rotation state of the workpiece W being processed, and the detection signal is transmitted to the movable lid side electric device. Since the processing object W is transmitted to the control unit 33 via the connection unit 30 and the processing chamber side electric connection unit 31, a defective workpiece W due to abnormal rotation can be specified and removed, thereby reducing the yield and the processing efficiency. Can be improved.

Also, the movable lid side electrical contacts 30a, 30b,
Since 30c is formed of a leaf spring member, when the movable lid side electrical connection portion 30 and the processing chamber side electrical connection portion 31 are connected, a good contact state is achieved without difficulty.

In the present embodiment, each of the movable lid-side electrical connection portion 30 and the processing chamber-side electrical connection portion 31 is provided with three electrical contacts, but the number of these electrical contacts should be four or more. Or less than three.

Modification Next, a modification of this embodiment will be described with reference to FIG. In this modification, the structure of the three movable lid-side electrical contacts 30a, 30b, and 30c of the movable lid-side electrical connection unit 30 is changed.

As shown in FIG. 11, in the present modification, the movable lid-side electrical contact 30a of the movable lid-side electrical connection portion 30 is provided.
(30b, 30c) is constituted by a pin member 41 urged in the axial direction by a spring 42 instead of the leaf spring member. The entirety of the pin member 41 can be formed of a metal material, or can be formed of various members having a surface coated with a conductive material.

As described above, the movable lid-side electrical contacts 30a, 3
If the pins 0b and 30c are formed by the pin members 41 urged by the springs 42, when the movable lid side electric connection portion 30 and the processing chamber side electric connection portion 31 are connected, a good contact state is ensured without difficulty. Not only is achieved, but the area occupied by the movable lid-side electrical contacts 30a, 30b, and 30c is reduced, so that the movable lid-side electrical connection portion 30 can be reduced. 30
The number of installations of b and 30c can be easily increased.

[0059]

As described above, according to the vacuum processing apparatus of the present invention, the holding means for holding the object to be processed and the drive source for rotating the holding means are provided on the movable lid, and the movable lid side electric contact and the processing chamber are provided. Since the power source can be supplied with power by connecting to the side electrical contacts, there is no need to provide a complicated mechanism for transmitting the driving force as in a conventional vacuum processing device, and the structure can be simplified. In addition, the size of the driving source can be reduced and the power consumption can be reduced. Further, since there is no seal for transmitting the driving force, the problem of vacuum leakage can be solved.

[Brief description of the drawings]

FIG. 1 is a plan view showing a schematic configuration of a vacuum processing apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing a state where the vacuum processing chamber is closed by a valve disk.

FIG. 3 is a front view showing a state in which the vacuum processing chamber is closed by a valve disk;

FIG. 4 is a side view of a valve disk.

FIG. 5 is a front view of a valve disk.

FIG. 6 is a sectional view taken along the line 6-6 in FIG. 4;

FIG. 7 is a plan view of a rotation detector.

FIG. 8 is a circuit diagram of a photo interrupter.

FIG. 9 is a side view showing the movable lid side electrical connection portion and the processing chamber side electrical connection portion in a contact state.

FIG. 10 is a front view of a processing chamber side electric connection unit 31;

FIG. 11 is a side view showing a main part of a modification of the embodiment of the present invention.

FIG. 12 is a diagram showing an example of a driving force transmission mechanism in a conventional vacuum processing apparatus.

FIG. 13 is a diagram showing another example of a driving force transmission mechanism in a conventional vacuum processing apparatus.

FIG. 14 is a view showing an example of a transmission joint of a driving force transmission mechanism in a conventional vacuum processing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Load lock chamber 1a Load lock chamber opening 2A, 2B ... 2G Vacuum processing chamber 2a Vacuum processing chamber opening 3 Vacuum transfer chamber 14 Processing device 26 Valve disk (movable lid) 27 Valve opening / closing mechanism 28 Disk holder (holding) Means) 30 Movable lid side electrical connection section 30a, 30b, 30c Movable lid side electrical contact 31 Processing chamber side electrical connection section 31a, 31b, 31c Processing chamber side electrical contact 32 Power supply 33 Control section 34 Vacuum motor (drive source) 60 rotation Detector 62 Reflection type photo interrupter W Workpiece

Continued on the front page (51) Int.Cl. ⁶ Identification code FI // H01L 21/205 H01L 21/205 21/3065 21/302 B

Claims (7)

[Claims] A vacuum transfer chamber capable of evacuating the inside, a plurality of vacuum processing chambers disposed adjacent to an outer periphery of the vacuum transfer chamber, and a side of each of the vacuum processing chambers facing the vacuum transfer chamber. Openings provided in the vacuum transfer chamber, a movable lid capable of closing the openings, and a holding means rotatably provided in the movable lid for holding an object to be processed. A drive source provided on the movable lid to rotationally drive the holding unit; a movable lid-side electrical contact provided on the movable lid and connected to the drive source; and the vacuum of the vacuum processing chamber. A processing chamber side electrical contact provided on a side facing the transfer chamber and connected to a power supply, wherein when the movable lid closes the opening, the movable lid side electrical contact and the processing chamber side electrical contact are provided. The power supply can supply power to the drive source from the power supply by contact with a contact The vacuum processing apparatus according to claim. 2. A rotation detector provided on the movable lid for detecting a rotation state of the workpiece, a movable lid-side electrical contact provided on the movable lid and connected to the rotation detector. A processing chamber-side electrical contact provided on a side of the vacuum processing chamber facing the vacuum transfer chamber and connected to a control unit of the vacuum processing apparatus, wherein the movable lid closes the opening. 2. The vacuum processing apparatus according to claim 1, wherein the movable lid-side electrical contact and the processing chamber-side electrical contact come into contact with each other, and a detection signal can be transmitted from the rotation detector to the control unit. 3. The rotation detector has a photo-interrupter arranged to emit light to the holding means, and a plurality of locations having different light reflection states are alternately arranged on a light receiving portion of the holding means. 3. The vacuum processing apparatus according to claim 2, wherein the vacuum processing apparatus is formed. 4. The method according to claim 1, wherein the plurality of portions having different light reflection states include:
4. The vacuum processing apparatus according to claim 3, wherein the holding unit includes a flat portion and a concave portion formed alternately on a light receiving portion. 5. The movable cover-side electrical contact can be displaced in a direction opposite to the pressing direction when pressed against the processing chamber-side electrical contact. The vacuum processing apparatus according to claim 1. 6. The vacuum processing apparatus according to claim 5, wherein said movable lid side electrical contact is formed by a leaf spring member. 7. The vacuum processing apparatus according to claim 5, wherein said movable lid side electrical contact is formed by a pin member which is urged in an axial direction by a spring.