JPH10202457A - Chuck device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chuck device capable of easily positioning and mounting a tool on the end of a main spindle, and having the capability of being detached. SOLUTION: A sloping groove 46 is formed on the inner surface of the recess 45 of a disc type tool 43, while the tool holder 42 of a main spindle is provided with a taper pin 56 as well as an antirotation pin 64. In this case, a ball 59 is made to become engaged with the sloping groove 46 via the taper pin 56 on the elastic restoring force of a spring 65. Also, the antirotation pin 64 is engaged with an antirotation countersunk hole 47 of the tool 43.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chuck device and, more particularly, to a chuck device for mounting and fixing a tool on a spindle.

[0002]

2. Description of the Related Art For example, the attachment of a conventional tool to a grinding machine has a structure shown in FIGS. The tool body 1 has a disk shape, and a grindstone 2 is attached to the lower surface thereof in a ring shape. A tapered portion 3 is integrally formed on the upper portion of the tool body 1 having a disk shape.
A pull stud bolt 4 is implanted and fixed at the tip of the.

A tool body 1 as shown in FIG. 7 is mounted on a main shaft 5 as shown in FIG. A tapered housing 6 is mounted on the main shaft 5 side. A tapered hole 7 is provided at the center of the tapered housing 6.
Are formed to penetrate. The tapered portion 3 of the tool body 1 is inserted into the tapered hole 7 and is pulled upward by the chucking finger 8.
Thus, the tool main body 1 is mounted and fixed to the main shaft 5.

[0004]

As described above, the conventional tool body 1 has the tapered portion 3 and the pull stud bolt 4 is implanted at the tip thereof. Such a tool body 1 is positioned and fixed by inserting the tapered portion 3 into the tapered hole 7 of the tapered housing 6 and chucking the pull stud bolt 4 by pulling it upward with the chucking finger 8. ing.

According to such a structure, since the positioning is performed by the tapered hole 7 and the tapered surface of the tapered portion 3, the mounting can be performed with high rigidity and high alignment accuracy. However, since the JIS Morse taper standard is used for the tapered portion 3, the ratio of the taper angle is large, and it is difficult to reduce the size in the axial direction. There is also a disadvantage that a chucking system for chucking the pull stud bolt 4 on the main shaft 5 side is required.

Further, in such a conventional chuck device, since the pull stud bolt 4 is attached to the tip end portion of the tool body 1, a through hole cannot be formed and a hollow system cannot be used. Therefore, it is impossible to supply a grinding fluid or the like through the center of the tool. Also, the tool body 1 is weak against the downward load in FIG. 8 in the axial direction, and when the load in such a direction is applied, the fixing of the tool body 1 is released.

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem, and it is possible to reduce the size in the axial direction, does not require a stud bolt chucking system, and employs a hollow structure. It is an object of the present invention to provide a chuck device which is possible and can sufficiently withstand a negative load in the axial direction.

[0008]

According to the present invention, there is provided a chuck device for mounting and fixing a tool on a main shaft, the chuck device being provided on the main shaft side, a taper pin for pressing a ball, and being provided on the tool side. The present invention relates to a chuck device including an inclined groove that engages with a ball, and a spring that biases the taper pin so that the ball engages with the inclined groove.

[0009] A rotation prevention pin may be provided on the main shaft side and engages with an engaged portion of the tool attached to the main shaft. Further, the rotation preventing pin may be urged by a spring for urging the tapered pin in a direction of engaging with the engaged portion. Furthermore, a support ring is provided, and the taper pins are supported at a predetermined pitch along the circumferential direction by the support rings, and a spring for urging the taper pins between the taper pins arranged adjacent to each other is provided in the circumferential direction. May be arranged along.

[0010] A ring-shaped cylinder actuated by fluid pressure may be provided on the main shaft side, and the tapered pin may be pressed by a ring-shaped piston of the ring-shaped cylinder in a direction to release the chuck. The ring-shaped piston of the ring-shaped cylinder may move to a non-pressing position when the main shaft rotates.

[0011] The tool may be a tool rotated by a main shaft. Further, the tool may be a disk-shaped grinding wheel for grinding.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an entire configuration of a grinding machine using a chuck device according to an embodiment of the present invention. This grinding machine has a column 12 which forms a fixed frame. It has. An elevating base 13 is attached to the front side of the column 12 so as to be able to move up and down.
An elevating frame 14 is attached to the elevating base 13, and the main shaft 15 is rotatably supported by the elevating frame 14.

Wires 16 are connected to both sides of the lifting frame 14, respectively. The wires 16 on both sides are guided by a pair of guide rollers 17 and 18, respectively, and a counterbalance weight 19 is attached to the distal end of the wire 16, and the counterbalance weight 19 allows the load when the lifting frame 14 moves up and down. To offset each other.

A grinding base 23 is provided at the lower end side of the main shaft 15 of the grinding machine. The surface of the semiconductor wafer 24 supplied on the grinding base 23 is ground.
A robot 27 is provided in front of the spindle 15 for transporting the semiconductor wafer supplied to the grinding base 23. The robot 27 has an X-axis direction moving rail 28, and a mover 29 is mounted on the rail 28 so as to be movable in the X-axis direction. On the mover 29, a pair of left and right Z-axis actuators 30 is mounted. Pickup heads 31 are attached to the tip portions of these actuators 30, respectively, and the semiconductor wafer 24 is picked up by these pickup heads 31.

On both sides of the robot 27 and in front of the robot 27, a supply table 35 and a discharge station 36 are arranged substantially symmetrically. A discharge roller 37 is provided in front of the discharge station 36, and a semiconductor wafer stocker 38 for storing the semiconductor wafer 24 discharged by the discharge roller 37 is provided.

Next, the grinding of the semiconductor wafer 24 by such a grinding machine will be described. The pickup head 31 of the Z-axis direction actuator 30 on the left side of the robot 27 will be described.
Thus, the semiconductor wafer 24 on the supply table 35 is picked up. When the movable element 29 of the robot 27 is moved rightward along the X-axis direction moving rail 28 in such a state, the grinding base 23 The semiconductor wafer 24 is supplied to a standby position in front. At the same time, the pickup head 31 of the Z-axis direction actuator 30 on the right side of the robot 27 picks up the ground semiconductor wafer 24 and moves it to the discharge station 36.

The semiconductor wafer 24 moved to the standby position by the left Z-axis direction actuator 30 is further moved onto the grinding base 23, and the surface of the semiconductor wafer 24 is mounted on the grinding base 23 by a grindstone attached to the tip of the spindle 15. Grinding is performed. After the grinding, the semiconductor wafer 24 is moved to the standby position again, and is discharged from the standby position to the discharge station 36 by the pickup head 31 of the right Z-axis direction actuator 30. The semiconductor wafer 24 discharged to the discharge station 36 is stored in the semiconductor wafer stocker 38 by the discharge roller 37.

The grinding machine for grinding the semiconductor wafer 24 in this manner has a great feature in a chuck mechanism for attaching a tool to the tip of the main shaft. This feature will be described with reference to FIGS.

As shown in FIGS. 2 and 3, a tool holder 42 is mounted on the tip of the main shaft 15, and a tool 43 is mounted via the tool holder 42. Here, a grinding tool is attached as the tool 43. In addition, a ring-shaped grindstone 44 is attached to the lower surface of the tool 43.

First, the tool 43 constituting the grinding tool will be described. The tool 43 has a substantially disk shape, and has a circular concave portion 45 on the upper surface as shown in FIGS. An inclined groove 46 is formed on the inner peripheral surface of the concave portion 45. A counterbore 47 for preventing rotation is provided at the bottom of the recess 45 by 30 ° along the circumferential direction.
It is formed at intervals. Further, a central hole 48 is formed at the center of the concave portion 45. A seal ring 49 is mounted on the inner peripheral surface of the center hole 48.

Next, the tool holder 42 for mounting such a tool 43 on the spindle 15 will be described. The tool holder 42 is fixed to the tip of the main shaft 15 via a connecting bolt 53. In the tool holder 42, twelve through holes 54 are formed along the circumferential direction at intervals of 30 ° as shown in FIG. The lower portion of each of these through holes 54 is formed as a large diameter portion 55 as shown in FIG. 2, and a tapered pin 56 having a thin tip is inserted into such a through hole 55. ing. The ball 59 held in the lateral hole 58 communicating with the through hole 54 of the tool holder 42 is pressed radially outward by the tapered portion 57 of the tapered pin 56 (see FIG. 5).

In order to be alternately arranged with the through holes 54,
12 through holes 6 at 30 ° intervals on the tool holder 42
3 are formed. Rotation prevention pins 64 are supported in these through holes 63. The rotation preventing pin 64 is pressed downward by a spring 65 as shown in FIG. The spring 65 is engaged with a support pin 66. The support pin 66 is supported by a support ring 67. The support ring 67 also supports the upper end of the taper pin 56.

An outer sleeve 71 is arranged on the outer peripheral side of the main shaft 15 as shown in FIGS. The outer sleeve 71 has a predetermined clearance between itself and the outer peripheral surface of the main shaft 15 and is fixed to the stationary side. A ring-shaped cylinder 72 is fixed to the lower end of the outer sleeve 71. On the lower surface side of the ring-shaped cylinder 72, a U-shaped open groove is formed, and a ring-shaped piston 73 is mounted in the groove. The ring-shaped piston 73
Seal rings 74 and 7 are provided on the inner and outer peripheral surfaces of
5 can be attached.

A through hole 79 is formed in the center of the main shaft 15. A central hole 80 is formed in the tool holder 42 so as to communicate with the through hole 79, and a boss 81 is continuously provided at the tip end of the central hole 80. A working fluid nozzle 82 is arranged to penetrate through hole 79 and center hole 80.

As described above, in the chuck device of the grinding machine according to the present embodiment, the ball 59 is fixed by being pressed into the inclined groove 46 provided on the inner peripheral surface of the concave portion 45 of the tool body 43. I have. In addition, the positioning in the circumferential direction is gradually centered by inserting the calling portion 86 formed of a tapered portion on the outer peripheral side of the tool holder 42 and the lower end side into the inner peripheral surface of the concave portion 45 of the tool 43, Finally, the positioning is performed by the positioning portion 85 on the outer peripheral side of the tool holder 42. Therefore, the amount of the gap between the positioning portion 85 of the tool holder 42 and the inner peripheral surface of the concave portion 45 of the tool 43 becomes a variation in the axis.

The rotation preventing pin 64 held in the through hole 63 of the tool holder 42 with the upper end connected to the support ring 67 is constantly pressed toward the tool 43 by a spring 65, and the tool holder is rotated by the rotating torque. When idling occurs between the tool 42 and the tool 43, the rotation preventing pin 64 falls into a rotation preventing counterbore 47 formed on the bottom surface of the concave portion 45 of the tool 43, thereby locking the rotation direction. Tool 4 for the spindle 15
3 is prevented from spinning.

In the tool holder 42, tapered pins 56 and springs 65 are alternately arranged as shown in FIG.
They are arranged at 0 ° intervals. The upper portion of the taper pin 56 and the upper end of the support pin 66 are fixed to a support ring 67, respectively. At this time, the support ring 67
The taper pin 56 and the taper pin 56 are always pressed by the spring 65 toward the main shaft 15, and the anti-rotation pin 64 is pressed toward the tool 43 by the reaction force of the spring 65.

Next, the attachment of the tool 43 to the main shaft 15 will be described. An axial force is applied to the taper pin 56 toward the main shaft 15 by a spring 65, so that the ball 59 is pressed against the inclined groove 46 of the tool 43 by the taper portion 57 of the taper pin 56, whereby the tool 43 Fixation becomes possible.

At this time, a negative pressure is applied to the inside of the ring-shaped cylinder 72 so that the ring-shaped piston 73 is rotated
5 side. Accordingly, the ring-shaped piston 73 of the stationary ring-shaped cylinder 72 and the tapered pin 56 and the support pin 66 on the rotating support ring 67 are prevented from contacting each other. The gap between the ring-shaped cylinder 72 and the tool holder 42 is air-purged with compressed air, so that the intrusion of the working fluid or the like into this gap is prevented.

When the tool 43 is mounted, the rotation of the main shaft 15 is stopped and the operating pressure is applied to the ring-shaped cylinder 72, so that the ring-shaped piston 73 moves toward the tool 43. Then, the ring-shaped piston 73 presses the upper ends of the tapered pin 56 and the support pin 66 projecting from the upper surface of the support ring 67. As a result, the support ring 67 comes into close contact with the upper surface of the tool holder 42, and at the same time, the taper pin 56
Also moves to the tool 43 side.

The taper pin 5 together with the support ring 67
When the tool 6 moves to the tool 43 side, the pressing by the taper portion 57 of the taper pin 56 is released, so that the ball 59 becomes free and the tool 43 can be removed.
In the process of removing the tool 43, the ball 59 is prevented from dropping out of the lateral hole 58 of the tool holder 42 by the positioning portion on the inner peripheral surface of the concave portion 45 of the tool 43 and above the inclined surface 46. At this time, the tool holder 42 on the distal end side of the main shaft 15 is pressed and fixed by the ring-shaped piston 73 of the ring-shaped cylinder 72 and is stationary, so that the ball 59 falls due to the centrifugal force accompanying the rotation of the main shaft 15. Nothing.

The salient feature of the grinding machine chuck device according to the present embodiment is that the inclined groove 4 provided in the tool 43 is provided.
6 by using a taper pin 56 to press a ball 59, so that the tool 43 is moved through the tool holder 42 through the main spindle 1.
5 to be fixed. In addition, anti-rotation pin 64
Is provided in the tool holder 42, and the rotation preventing pin 64 prevents the tool 43 from idling with respect to the main shaft 15. Further, the urging force for urging the taper pin 56 toward the main shaft 15 and the urging force for urging the rotation preventing pin 64 toward the tool 43 are simultaneously pressed using the spring 65.

Further, a ring-shaped cylinder 72 is used to release the chuck, and the tapered pin 56 is moved toward the tool 43 by the ring-shaped piston 73 by operating the ring-shaped cylinder 72 so that the ball 59 is pressed by the tapered portion 57. The tool 43 is released to release the chuck of the tool 43.

According to the structure having such features, it is possible to provide a compact, thin, and lightweight chuck device. Such a chuck device has a drip-proof property and a dust-proof property. In addition, such a chuck device enables highly accurate positioning in the circumferential direction and the axial direction.

Further, such a chuck device can have a hollow structure as shown in FIGS. 2 and 3, in which a working liquid nozzle 82 is disposed.
, It is possible to supply a working fluid such as a grinding fluid. In addition, since the rotation preventing pin 64 and the anti-rotation counterbore 47 engage with each other to prevent idling, it is possible to cope with a high load. Further, by supplying and discharging the operating pressure such as compressed air to and from the ring-shaped cylinder 72, the tool 43 can be attached and detached by one operation of the operating pressure.

Although the present invention has been described with reference to one embodiment, the present invention is not limited to this embodiment, but can be applied to various devices to which the technical idea of the present invention is applied. The present invention can be widely applied to attachment of a tool to a spindle in a machining center, a drilling machine, and other various machine tools other than the grinding machine.

[0037]

According to the present invention, a taper pin provided on the main shaft side for pressing the ball, an inclined groove provided on the tool side for engaging the ball, and a ball engaged with the inclined groove are provided. And a spring for biasing the taper pin to the chuck device.

Therefore, according to the present invention, the tool can be mounted and fixed to the main shaft by pressing the ball with the taper pin on the main shaft side by using the biasing force of the spring and engaging the ball with the inclined groove on the tool side. become.

According to the structure provided with the rotation preventing pin provided on the main shaft side and engaged with the engaged portion of the tool attached to the main shaft, the rotation preventing pin is connected to the engaged portion of the tool. The idle rotation of the tool is prevented by the engagement with the tool.

According to the configuration in which the anti-rotation pin is urged by the spring that urges the tapered pin in the direction of engagement with the engaged portion, even if the anti-rotation pin is not aligned with the engaged portion. When the main shaft is slightly rotated, the rotation preventing pin is automatically dropped into the engaged portion and engaged.

A support ring is provided, the taper pins are supported at a predetermined pitch along the circumferential direction by the support ring, and a spring for urging the taper pin between the adjacent taper pins is provided along the circumferential direction. According to this configuration, the taper pin can be urged in the direction of pressing the ball by the spring, and the rotation preventing pin engages with the engaged portion of the tool by the spring. Can be energized.

According to a configuration in which a ring-shaped cylinder operated by fluid pressure is provided on the main shaft side and the tapered pin is pressed in a direction to release the chuck by the ring-shaped piston of the ring-shaped cylinder, the operation of the ring-shaped cylinder is performed. This makes it possible to release the chuck.

According to the configuration in which the ring-shaped piston of the ring-shaped cylinder moves to the non-pressing position when the main shaft rotates, interference between the piston of the ring-shaped cylinder and the tapered pin during rotation of the main shaft is prevented.

According to the configuration in which the tool is a tool rotated by the main shaft, the tool can be fixed to the main shaft and rotated.

According to the configuration in which the tool is a disk-shaped grinding wheel for grinding, the disk-shaped grinding wheel is driven to rotate by the main shaft.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the overall configuration of a grinding machine.

FIG. 2 is a longitudinal sectional view showing a chuck device.

FIG. 3 is a vertical sectional view of a chuck device to which a tool is attached.

FIG. 4 is an exploded perspective view of a main part of the chuck device.

FIG. 5 is an exploded perspective view showing a tapered pin.

FIG. 6 is an enlarged perspective view of a main part showing attachment of a spring and a rotation preventing pin.

FIG. 7 is a front view of a tool attached by a conventional chuck.

FIG. 8 is a longitudinal sectional view showing attachment of the tool.

[Explanation of symbols]

1 ‥‥ Tool body, 2 ‥‥ Whetstone, 3 ‥‥ Taper part, 4 ‥‥
Pull stud bolt, 5mm spindle, 6mm tapered housing, 7mm tapered hole, 8mm chucking finger,
12 ‥‥ column, 13 ‥‥ lifting base, 14 ‥‥ lifting frame, 15 ‥‥ spindle, 16 ‥‥ wire, 17, 18 ‥
‥ Guide roller, 19 ‥‥ Counter balance weight,
23 ‥‥ grinding base, 24 ‥‥ semiconductor wafer, 27 ‥‥
Robot, 28 ‥‥ X-axis moving rail, 29 ‥‥ mover, 30 ‥‥ Z-axis actuator, 31 ‥‥ pickup head, 35 ‥‥ supply table, 36 ‥‥ discharge station, 37 ‥‥ discharge roller, 38 {Semiconductor wafer stocker, 42} Tool holder, 43} Tool (grinding tool), 44} Grinding stone, 45 ° recess, 46 ° inclined groove, 47 ° Counterbore hole for rotation prevention, 48 ‥‥ Center hole, 4
9 ‥‥ seal ring, 53 ‥‥ connection bolt, 54 ‥‥ through hole, 55 ‥‥ large diameter section, 56 ‥‥ taper pin, 57 ‥‥
Tapered part, 58 ‥‥ side hole, 59 ‥‥ ball, 63 ‥‥ through hole, 64 ‥‥ rotation prevention pin, 65 ‥‥ spring, 66 ‥‥
Support pin, 67 ‥‥ support ring, 71 ‥‥ outer sleeve, 72 ‥‥ ring-shaped cylinder, 73 ‥‥ ring-shaped piston, 74 ‥‥ seal ring (inner circumference), 75
‥‥ Seal ring (outer peripheral side), 79 ‥‥ Through hole, 80 ‥
{Center hole, 81} Boss, 82} Processing fluid nozzle, 85
{Positioning unit, 86} Call-in unit

Claims (8)

[Claims] 1. A chuck device for mounting and fixing a tool on a spindle, wherein a taper pin provided on the spindle and pressing a ball, and an inclined groove provided on the tool and engaged with the ball. And a spring for urging the tapered pin so that the ball engages with the inclined groove. 2. The chuck device according to claim 1, further comprising an anti-rotation pin provided on the main shaft side and engaging with an engaged portion of the tool attached to the main shaft. . 3. The chuck device according to claim 2, wherein the rotation preventing pin is urged by a spring that urges the tapered pin in a direction of engaging with the engaged portion. 4. A spring having a support ring, wherein the taper pins are supported at a predetermined pitch in a circumferential direction by the support ring, and a spring for urging the taper pins between the adjacent taper pins is provided. The chuck device according to claim 1, wherein the chuck devices are arranged along a circumferential direction. 5. The apparatus according to claim 5, wherein a ring-shaped cylinder which is actuated by fluid pressure is provided on the main shaft side, and the tapered pin is pressed in a direction for releasing the chuck by a ring-shaped piston of the ring-shaped cylinder. Item 2. A chuck device according to Item 1. 6. The chuck device according to claim 5, wherein the ring-shaped piston of the ring-shaped cylinder moves to a non-pressing position when the main shaft rotates. 7. The chuck device according to claim 1, wherein the tool is a tool rotated by a main shaft. 8. The chuck device according to claim 1, wherein said tool is a disk-shaped grinding wheel for grinding.